TW200644142A - A method of inspecting semiconductor wafers taking the SAW design into account - Google Patents
A method of inspecting semiconductor wafers taking the SAW design into accountInfo
- Publication number
- TW200644142A TW200644142A TW095115538A TW95115538A TW200644142A TW 200644142 A TW200644142 A TW 200644142A TW 095115538 A TW095115538 A TW 095115538A TW 95115538 A TW95115538 A TW 95115538A TW 200644142 A TW200644142 A TW 200644142A
- Authority
- TW
- Taiwan
- Prior art keywords
- wafer
- area
- account
- semiconductor wafers
- inspecting semiconductor
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title 1
- 235000012431 wafers Nutrition 0.000 title 1
- 238000003384 imaging method Methods 0.000 abstract 5
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005027120A DE102005027120A1 (de) | 2005-06-10 | 2005-06-10 | Verfahren zur Inspektion von Halbleiterwafern unter Berücksichtigung des Saw-Designs |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200644142A true TW200644142A (en) | 2006-12-16 |
Family
ID=37440050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095115538A TW200644142A (en) | 2005-06-10 | 2006-05-02 | A method of inspecting semiconductor wafers taking the SAW design into account |
Country Status (4)
Country | Link |
---|---|
US (1) | US20060279729A1 (zh) |
JP (1) | JP2006344975A (zh) |
DE (1) | DE102005027120A1 (zh) |
TW (1) | TW200644142A (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080243292A1 (en) * | 2007-03-30 | 2008-10-02 | Tzu-Yin Chiu | Method of defect detection based on wafer rotation |
US7924420B2 (en) * | 2007-06-18 | 2011-04-12 | Applied Materials South East Asia Pte. Ltd. | Optical inspection including partial scanning of wafers |
DE102007060355A1 (de) | 2007-12-12 | 2009-06-25 | Vistec Semiconductor Systems Gmbh | Verfahren und Vorrichtung zur Verarbeitung der von mindestens einer Kamera aufgenommenen Bilddaten der Oberfläche eines Wafers |
DE102011051355A1 (de) * | 2011-06-27 | 2012-12-27 | Hseb Dresden Gmbh | Inspektionsvorrichtung |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6020957A (en) * | 1998-04-30 | 2000-02-01 | Kla-Tencor Corporation | System and method for inspecting semiconductor wafers |
JP2001005970A (ja) * | 1999-06-24 | 2001-01-12 | Canon Inc | 欠陥情報処理装置及び方法 |
US6763130B1 (en) * | 1999-07-21 | 2004-07-13 | Applied Materials, Inc. | Real time defect source identification |
JP2003149169A (ja) * | 2001-11-16 | 2003-05-21 | Tokyo Seimitsu Co Ltd | ウエハ欠陥検査装置 |
US7042564B2 (en) * | 2002-08-08 | 2006-05-09 | Applied Materials, Israel, Ltd. | Wafer inspection methods and an optical inspection tool |
US7525659B2 (en) * | 2003-01-15 | 2009-04-28 | Negevtech Ltd. | System for detection of water defects |
DE10307358B3 (de) * | 2003-02-21 | 2004-10-07 | Leica Microsystems Semiconductor Gmbh | Verfahren und Vorrichtung zum Scannen eines Halbleiter-Wafers |
JP4185789B2 (ja) * | 2003-03-12 | 2008-11-26 | 株式会社日立ハイテクノロジーズ | パターン検査方法及びその装置 |
US20050112474A1 (en) * | 2003-11-20 | 2005-05-26 | Micronic Laser Systems Ab | Method involving a mask or a reticle |
US7212017B2 (en) * | 2003-12-25 | 2007-05-01 | Ebara Corporation | Electron beam apparatus with detailed observation function and sample inspecting and observing method using electron beam apparatus |
DE102005011237B3 (de) * | 2005-03-11 | 2006-08-03 | Leica Microsystems Semiconductor Gmbh | Verfahren zur Bestimmung von Defekten in Bildern |
US8041103B2 (en) * | 2005-11-18 | 2011-10-18 | Kla-Tencor Technologies Corp. | Methods and systems for determining a position of inspection data in design data space |
US7659973B2 (en) * | 2006-05-26 | 2010-02-09 | Applied Materials Southeast Asia, Pte Ltd. | Wafer inspection using short-pulsed continuous broadband illumination |
US7486391B2 (en) * | 2006-09-13 | 2009-02-03 | Samsung Austin Semiconductor, L.P. | System and method for haze control in semiconductor processes |
-
2005
- 2005-06-10 DE DE102005027120A patent/DE102005027120A1/de not_active Withdrawn
-
2006
- 2006-04-24 US US11/409,941 patent/US20060279729A1/en not_active Abandoned
- 2006-05-02 TW TW095115538A patent/TW200644142A/zh unknown
- 2006-06-08 JP JP2006159279A patent/JP2006344975A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2006344975A (ja) | 2006-12-21 |
US20060279729A1 (en) | 2006-12-14 |
DE102005027120A1 (de) | 2006-12-14 |
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