WO2008087961A1 - 欠陥検出装置および欠陥検出方法 - Google Patents

欠陥検出装置および欠陥検出方法 Download PDF

Info

Publication number
WO2008087961A1
WO2008087961A1 PCT/JP2008/050408 JP2008050408W WO2008087961A1 WO 2008087961 A1 WO2008087961 A1 WO 2008087961A1 JP 2008050408 W JP2008050408 W JP 2008050408W WO 2008087961 A1 WO2008087961 A1 WO 2008087961A1
Authority
WO
WIPO (PCT)
Prior art keywords
defect detecting
added value
calculating
value
index
Prior art date
Application number
PCT/JP2008/050408
Other languages
English (en)
French (fr)
Inventor
Ryuichi Yamazaki
Original Assignee
Olympus Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corporation filed Critical Olympus Corporation
Priority to CN2008800021585A priority Critical patent/CN101600957B/zh
Publication of WO2008087961A1 publication Critical patent/WO2008087961A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G06T7/0008—Industrial image inspection checking presence/absence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30121—CRT, LCD or plasma display

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

 　検査対象物を撮像した画像の所定方向に並んだ各画素の画素値の加算値を算出する加算値算出手段と、前記画像の前記所定方向に並んだ各画素の画素値の一様性を示す指標値を算出する指標値算出手段と、前記指標値に基づいて前記加算値を補正する加算値補正手段と、補正後の前記加算値と閾値を比較した結果に基づいて、前記検査対象物上の線状欠陥の有無を判定する判定手段と、を備える欠陥検出装置。
PCT/JP2008/050408 2007-01-16 2008-01-16 欠陥検出装置および欠陥検出方法 WO2008087961A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2008800021585A CN101600957B (zh) 2007-01-16 2008-01-16 缺陷检测装置及缺陷检测方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-006766 2007-01-16
JP2007006766A JP2008175549A (ja) 2007-01-16 2007-01-16 欠陥検出装置および欠陥検出方法

Publications (1)

Publication Number Publication Date
WO2008087961A1 true WO2008087961A1 (ja) 2008-07-24

Family

ID=39635965

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050408 WO2008087961A1 (ja) 2007-01-16 2008-01-16 欠陥検出装置および欠陥検出方法

Country Status (5)

Country Link
JP (1) JP2008175549A (ja)
KR (1) KR20090101356A (ja)
CN (1) CN101600957B (ja)
TW (1) TW200834062A (ja)
WO (1) WO2008087961A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101727696B (zh) * 2008-10-23 2012-04-11 光荣株式会社 真伪判别装置和真伪判别方法
CN111175227A (zh) * 2018-11-12 2020-05-19 三星显示有限公司 用于检查玻璃基板的装置
CN112598659A (zh) * 2020-12-29 2021-04-02 凌云光技术股份有限公司 一种印制品线状缺陷检测方法
CN112669268A (zh) * 2020-12-21 2021-04-16 昆明理工大学 一种多相混合浓度场分布均匀性评价方法、系统和终端
CN113532801A (zh) * 2021-06-24 2021-10-22 四川九洲电器集团有限责任公司 基于分布分位数的高/多光谱相机坏点检测方法及系统

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8270701B2 (en) * 2010-01-08 2012-09-18 3M Innovative Properties Company Optical web-based defect detection using intrasensor uniformity correction
JP2011149756A (ja) * 2010-01-20 2011-08-04 Hitachi High-Technologies Corp 処理作業装置またはａｃｆ貼付け状態検査方法あるいは表示基板モジュール組立ライン
CN102854193A (zh) * 2012-08-30 2013-01-02 苏州天准精密技术有限公司 一种用于图像瑕疵检测的检测方法和检测系统
JP6508939B2 (ja) * 2014-12-25 2019-05-08 西日本高速道路エンジニアリング四国株式会社 トンネル覆工面画像のひび割れ領域抽出のための画像処理方法
US20170102288A1 (en) * 2015-10-13 2017-04-13 Fluke Corporation Three-dimensional inspection of optical communication links
JP7185388B2 (ja) * 2016-11-21 2022-12-07 日東電工株式会社 検査装置及び検査方法
JP2019174410A (ja) * 2018-03-29 2019-10-10 住友化学株式会社 画像処理装置、異物検査装置及び画像処理方法
JP6997038B2 (ja) 2018-05-16 2022-01-17 富士フイルム株式会社 マイクロニードルアレイの製造方法
CN110726724A (zh) * 2019-10-22 2020-01-24 北京百度网讯科技有限公司 缺陷检测方法、系统和装置
KR20220014547A (ko) * 2020-07-29 2022-02-07 주식회사 엘지화학 라인성 결함 검사장치
CN114661947A (zh) * 2022-03-15 2022-06-24 北京达佳互联信息技术有限公司 偏好差异检测方法、装置、电子设备及计算机存储介质

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142241A (ja) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd 筋状欠陥弁別処理回路
JPH0634563A (ja) * 1992-07-14 1994-02-08 Matsushita Electric Ind Co Ltd 線分検出方法
JPH0749314A (ja) * 1993-08-05 1995-02-21 Sumitomo Metal Ind Ltd 表面欠陥検査装置
JPH0968502A (ja) * 1995-08-30 1997-03-11 Dainippon Screen Mfg Co Ltd 透孔板の検査方法および検査装置
JPH09145638A (ja) * 1995-11-24 1997-06-06 Kawasaki Steel Corp 表面欠陥検査方法及び装置
JP2965370B2 (ja) * 1991-03-15 1999-10-18 積水化学工業株式会社 欠陥検出装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09311109A (ja) * 1996-05-22 1997-12-02 Matsushita Electric Ind Co Ltd 光を使用した欠陥検査方法、およびその装置
JP4560969B2 (ja) * 2001-02-27 2010-10-13 パナソニック株式会社 欠陥検査方法
JP2004212221A (ja) * 2002-12-27 2004-07-29 Toshiba Corp パターン検査方法及びパターン検査装置
JP2005172559A (ja) * 2003-12-10 2005-06-30 Seiko Epson Corp パネルの線欠陥検出方法及び装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63142241A (ja) * 1986-12-05 1988-06-14 Fuji Photo Film Co Ltd 筋状欠陥弁別処理回路
JP2965370B2 (ja) * 1991-03-15 1999-10-18 積水化学工業株式会社 欠陥検出装置
JPH0634563A (ja) * 1992-07-14 1994-02-08 Matsushita Electric Ind Co Ltd 線分検出方法
JPH0749314A (ja) * 1993-08-05 1995-02-21 Sumitomo Metal Ind Ltd 表面欠陥検査装置
JPH0968502A (ja) * 1995-08-30 1997-03-11 Dainippon Screen Mfg Co Ltd 透孔板の検査方法および検査装置
JPH09145638A (ja) * 1995-11-24 1997-06-06 Kawasaki Steel Corp 表面欠陥検査方法及び装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101727696B (zh) * 2008-10-23 2012-04-11 光荣株式会社 真伪判别装置和真伪判别方法
CN111175227A (zh) * 2018-11-12 2020-05-19 三星显示有限公司 用于检查玻璃基板的装置
CN112669268A (zh) * 2020-12-21 2021-04-16 昆明理工大学 一种多相混合浓度场分布均匀性评价方法、系统和终端
CN112669268B (zh) * 2020-12-21 2023-06-06 昆明理工大学 一种多相混合浓度场分布均匀性评价方法、系统和终端
CN112598659A (zh) * 2020-12-29 2021-04-02 凌云光技术股份有限公司 一种印制品线状缺陷检测方法
CN112598659B (zh) * 2020-12-29 2024-02-27 凌云光技术股份有限公司 一种印制品线状缺陷检测方法
CN113532801A (zh) * 2021-06-24 2021-10-22 四川九洲电器集团有限责任公司 基于分布分位数的高/多光谱相机坏点检测方法及系统

Also Published As

Publication number Publication date
CN101600957A (zh) 2009-12-09
TW200834062A (en) 2008-08-16
KR20090101356A (ko) 2009-09-25
CN101600957B (zh) 2012-05-16
JP2008175549A (ja) 2008-07-31

Similar Documents

Publication Publication Date Title
WO2008087961A1 (ja) 欠陥検出装置および欠陥検出方法
WO2011015928A3 (fr) Procede de traitement d'image pour corriger une image cible en fonction d'une image de reference et dispositif de traitement d'image correspondant
WO2009037558A3 (en) Method and system for capturing an image from video
WO2006110842A3 (en) Systems and methods for measuring a like-color region of an object
WO2008136067A1 (ja) 木材の検査方法及び装置及びプログラム
JP2011217323A5 (ja) 原稿読取装置
WO2010082902A3 (en) System and method for inspecting a wafer
JP2011010270A5 (ja)
EP2574034A3 (en) Image processing apparatus and method
ATE552700T1 (de) Vorrichtung, verfahren und bildaufnahmegerät zur auswahl eines haupt-gesichts
WO2009129105A3 (en) Methods and systems for determining a defect criticality index for defects on wafers
EP2849444A3 (en) Video encoding method using merge information to code offset parameters and apparatus therefor, video decoding method and apparatus therefor
WO2008119480A3 (en) Noise reduction method and unit for an image frame
WO2010085679A3 (en) Systems and methods for detecting defects on a wafer
WO2013028824A3 (en) Storing and reading multiplexed content
EP2383698A3 (en) Image processing apparatus, method and program for detecting an abnormal part from an intraluminal image
EP2568639A4 (en) METHOD, APPARATUS AND SYSTEM FOR TREATMENT OF FIRMWARE BASED ON RADIO LINK FIRMWARE UPDATE TECHNOLOGY
SG153741A1 (en) Image distortion correction
WO2012005520A3 (en) Method and apparatus for encoding video by using block merging, and method and apparatus for decoding video by using block merging
EP2056589A3 (en) Imaging apparatus, method for controlling the same, and program
WO2010093733A3 (en) Detecting defects on a wafer
WO2008078736A1 (ja) 同一性判定装置、同一性判定方法および同一性判定用プログラム
EP2228984A3 (en) Moving image output method and moving image output apparatus
EP2290996A4 (en) VIDEO SIGNAL PROCESSING DEVICE
WO2009044759A1 (ja) 画像処理装置およびプログラム

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880002158.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08703269

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 1020097014934

Country of ref document: KR

122 Ep: pct application non-entry in european phase

Ref document number: 08703269

Country of ref document: EP

Kind code of ref document: A1