TW200629269A - Nonvolatile semiconductor memory device and phase change memory - Google Patents

Nonvolatile semiconductor memory device and phase change memory

Info

Publication number
TW200629269A
TW200629269A TW094137291A TW94137291A TW200629269A TW 200629269 A TW200629269 A TW 200629269A TW 094137291 A TW094137291 A TW 094137291A TW 94137291 A TW94137291 A TW 94137291A TW 200629269 A TW200629269 A TW 200629269A
Authority
TW
Taiwan
Prior art keywords
memory device
lines
select
select transistor
nonvolatile semiconductor
Prior art date
Application number
TW094137291A
Other languages
English (en)
Other versions
TWI286751B (en
Inventor
Yukio Fuji
Isamu Asano
Tsuyoshi Kawagoe
Kiyoshi Nakai
Original Assignee
Elpida Memory Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elpida Memory Inc filed Critical Elpida Memory Inc
Publication of TW200629269A publication Critical patent/TW200629269A/zh
Application granted granted Critical
Publication of TWI286751B publication Critical patent/TWI286751B/zh

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0021—Auxiliary circuits
    • G11C13/003—Cell access
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
    • G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
    • G11C13/0004—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements comprising amorphous/crystalline phase transition cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
    • H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
    • G11C2213/70—Resistive array aspects
    • G11C2213/78—Array wherein the memory cells of a group share an access device, all the memory cells of the group having a common electrode and the access device being not part of a word line or a bit line driver
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/20—Multistable switching devices, e.g. memristors
    • H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/821—Device geometry
    • H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N70/00—Solid-state devices without a potential-jump barrier or surface barrier, and specially adapted for rectifying, amplifying, oscillating or switching
    • H10N70/801—Constructional details of multistable switching devices
    • H10N70/881—Switching materials
    • H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
    • H10N70/8828—Tellurides, e.g. GeSbTe
TW094137291A 2004-10-26 2005-10-25 Nonvolatile semiconductor memory device and phase change memory TWI286751B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004311610A JP2006127583A (ja) 2004-10-26 2004-10-26 不揮発性半導体記憶装置及び相変化メモリ

Publications (2)

Publication Number Publication Date
TW200629269A true TW200629269A (en) 2006-08-16
TWI286751B TWI286751B (en) 2007-09-11

Family

ID=36227820

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094137291A TWI286751B (en) 2004-10-26 2005-10-25 Nonvolatile semiconductor memory device and phase change memory

Country Status (4)

Country Link
US (1) US7502252B2 (zh)
JP (1) JP2006127583A (zh)
TW (1) TWI286751B (zh)
WO (1) WO2006046579A1 (zh)

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US20080079047A1 (en) * 2006-09-29 2008-04-03 Joerg Dietrich Schmid Memory device and method of reading/writing data from/into a memory device
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US7564710B2 (en) * 2007-04-30 2009-07-21 Qimonda North America Corp. Circuit for programming a memory element
US7684227B2 (en) 2007-05-31 2010-03-23 Micron Technology, Inc. Resistive memory architectures with multiple memory cells per access device
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US7663134B2 (en) * 2007-07-10 2010-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Memory array with a selector connected to multiple resistive cells
US7729161B2 (en) 2007-08-02 2010-06-01 Macronix International Co., Ltd. Phase change memory with dual word lines and source lines and method of operating same
US7742332B2 (en) * 2007-08-21 2010-06-22 Elpida Memory, Inc. Phase-change random access memory device and semiconductor memory device
KR101291222B1 (ko) * 2007-11-29 2013-07-31 삼성전자주식회사 상변화 메모리 소자의 동작 방법
US7646631B2 (en) * 2007-12-07 2010-01-12 Macronix International Co., Ltd. Phase change memory cell having interface structures with essentially equal thermal impedances and manufacturing methods
US8077505B2 (en) * 2008-05-07 2011-12-13 Macronix International Co., Ltd. Bipolar switching of phase change device
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US8134857B2 (en) * 2008-06-27 2012-03-13 Macronix International Co., Ltd. Methods for high speed reading operation of phase change memory and device employing same
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KR20100041470A (ko) * 2008-10-14 2010-04-22 삼성전자주식회사 저항체를 이용한 비휘발성 메모리 장치
KR101543434B1 (ko) * 2008-12-15 2015-08-10 삼성전자주식회사 반도체 메모리 시스템의 제조 방법
US8107283B2 (en) * 2009-01-12 2012-01-31 Macronix International Co., Ltd. Method for setting PCRAM devices
US8030635B2 (en) * 2009-01-13 2011-10-04 Macronix International Co., Ltd. Polysilicon plug bipolar transistor for phase change memory
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US8933536B2 (en) 2009-01-22 2015-01-13 Macronix International Co., Ltd. Polysilicon pillar bipolar transistor with self-aligned memory element
US8139391B2 (en) * 2009-04-03 2012-03-20 Sandisk 3D Llc Multi-bit resistance-switching memory cell
US8084760B2 (en) 2009-04-20 2011-12-27 Macronix International Co., Ltd. Ring-shaped electrode and manufacturing method for same
US8173987B2 (en) * 2009-04-27 2012-05-08 Macronix International Co., Ltd. Integrated circuit 3D phase change memory array and manufacturing method
US8097871B2 (en) * 2009-04-30 2012-01-17 Macronix International Co., Ltd. Low operational current phase change memory structures
US7933139B2 (en) * 2009-05-15 2011-04-26 Macronix International Co., Ltd. One-transistor, one-resistor, one-capacitor phase change memory
US7968876B2 (en) 2009-05-22 2011-06-28 Macronix International Co., Ltd. Phase change memory cell having vertical channel access transistor
US8350316B2 (en) 2009-05-22 2013-01-08 Macronix International Co., Ltd. Phase change memory cells having vertical channel access transistor and memory plane
US8809829B2 (en) * 2009-06-15 2014-08-19 Macronix International Co., Ltd. Phase change memory having stabilized microstructure and manufacturing method
US8406033B2 (en) 2009-06-22 2013-03-26 Macronix International Co., Ltd. Memory device and method for sensing and fixing margin cells
US8363463B2 (en) 2009-06-25 2013-01-29 Macronix International Co., Ltd. Phase change memory having one or more non-constant doping profiles
US8238149B2 (en) * 2009-06-25 2012-08-07 Macronix International Co., Ltd. Methods and apparatus for reducing defect bits in phase change memory
US7894254B2 (en) 2009-07-15 2011-02-22 Macronix International Co., Ltd. Refresh circuitry for phase change memory
US8110822B2 (en) 2009-07-15 2012-02-07 Macronix International Co., Ltd. Thermal protect PCRAM structure and methods for making
US8198619B2 (en) 2009-07-15 2012-06-12 Macronix International Co., Ltd. Phase change memory cell structure
US8064248B2 (en) 2009-09-17 2011-11-22 Macronix International Co., Ltd. 2T2R-1T1R mix mode phase change memory array
US8178387B2 (en) 2009-10-23 2012-05-15 Macronix International Co., Ltd. Methods for reducing recrystallization time for a phase change material
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CN102931206A (zh) * 2012-11-16 2013-02-13 中国科学院上海微系统与信息技术研究所 一种高密度相变存储器电路结构及其制备方法
US8953387B2 (en) 2013-06-10 2015-02-10 Micron Technology, Inc. Apparatuses and methods for efficient write in a cross-point array
US9312306B2 (en) * 2013-09-03 2016-04-12 Kabushiki Kaisha Toshiba Nonvolatile memory device and method of manufacturing the same
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US9559113B2 (en) 2014-05-01 2017-01-31 Macronix International Co., Ltd. SSL/GSL gate oxide in 3D vertical channel NAND
US9324423B2 (en) 2014-05-07 2016-04-26 Micron Technology, Inc. Apparatuses and methods for bi-directional access of cross-point arrays
US10157962B2 (en) 2015-06-01 2018-12-18 Winbond Electronics Corp. Resistive random access memory
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US9601193B1 (en) 2015-09-14 2017-03-21 Intel Corporation Cross point memory control
DE102017127276A1 (de) * 2017-08-30 2019-02-28 Taiwan Semiconductor Manufacturing Co., Ltd. Standardzellen und abwandlungen davon innerhalb einer standardzellenbibliothek
US10635357B2 (en) 2018-07-03 2020-04-28 Nvidia Corporation Method for overlapping memory accesses
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Also Published As

Publication number Publication date
TWI286751B (en) 2007-09-11
JP2006127583A (ja) 2006-05-18
WO2006046579A1 (ja) 2006-05-04
US20080043522A1 (en) 2008-02-21
US7502252B2 (en) 2009-03-10

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