TW200624788A - Vacuum gage - Google Patents

Vacuum gage

Info

Publication number
TW200624788A
TW200624788A TW094139856A TW94139856A TW200624788A TW 200624788 A TW200624788 A TW 200624788A TW 094139856 A TW094139856 A TW 094139856A TW 94139856 A TW94139856 A TW 94139856A TW 200624788 A TW200624788 A TW 200624788A
Authority
TW
Taiwan
Prior art keywords
filament
envelope
cylinder
interior
vacuum gage
Prior art date
Application number
TW094139856A
Other languages
English (en)
Other versions
TWI388814B (zh
Inventor
Takeshi Miyashita
Naoki Takahashi
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200624788A publication Critical patent/TW200624788A/zh
Application granted granted Critical
Publication of TWI388814B publication Critical patent/TWI388814B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
TW094139856A 2004-11-24 2005-11-14 皮喇尼真空計 TWI388814B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004339239 2004-11-24

Publications (2)

Publication Number Publication Date
TW200624788A true TW200624788A (en) 2006-07-16
TWI388814B TWI388814B (zh) 2013-03-11

Family

ID=36497888

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094139856A TWI388814B (zh) 2004-11-24 2005-11-14 皮喇尼真空計

Country Status (7)

Country Link
US (1) US7607356B2 (zh)
JP (1) JP4878289B2 (zh)
KR (1) KR101255564B1 (zh)
CN (1) CN100549648C (zh)
DE (1) DE112005002501B4 (zh)
TW (1) TWI388814B (zh)
WO (1) WO2006057148A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI381156B (zh) * 2006-08-29 2013-01-01 Global Oled Technology Llc 用於有機材料之壓力計

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2120031B1 (en) 2007-09-13 2018-11-07 Canon Anelva Corporation Pirani gauge
JP5248218B2 (ja) * 2008-06-17 2013-07-31 株式会社アルバック 圧力測定装置、圧力測定方法
WO2011099238A1 (ja) * 2010-02-12 2011-08-18 株式会社アルバック トランスデューサ型真空計
JP5349366B2 (ja) * 2010-02-26 2013-11-20 キヤノンアネルバ株式会社 複合型圧力計、及び複合型圧力計の製造方法
US9335231B2 (en) * 2014-03-25 2016-05-10 Mks Instruments, Inc. Micro-Pirani vacuum gauges
CN106153246B (zh) * 2015-05-15 2019-08-30 株式会社爱发科 皮拉尼真空计
JP6595945B2 (ja) * 2015-05-15 2019-10-23 株式会社アルバック ピラニ真空計
KR101799531B1 (ko) 2017-04-20 2017-11-20 재단법인 한국탄소융합기술원 금속코팅 탄소섬유 진공게이지
CN109425463A (zh) * 2017-08-31 2019-03-05 苏州润桐专利运营有限公司 一种高精度抗震皮拉尼真空传感器
CN107894300A (zh) * 2017-12-29 2018-04-10 李涛 一种真空度测量装置
US10845263B2 (en) * 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
CN110186613A (zh) * 2019-06-04 2019-08-30 上海集迦电子科技有限公司 一种基于荧光法的热传导真空计
JP7290545B2 (ja) * 2019-10-25 2023-06-13 株式会社アルバック ピラニ真空計

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1993063A (en) * 1930-03-28 1935-03-05 Paul E Klopsteg Gauge
US3411362A (en) * 1965-12-20 1968-11-19 Sparton Corp Direct drive pressure transducer
JPS4841093Y1 (zh) * 1968-09-16 1973-12-01
JPS61240135A (ja) * 1985-04-17 1986-10-25 Yamatake Honeywell Co Ltd 真空計
EP0379841B2 (de) * 1989-01-23 1998-11-04 Balzers Aktiengesellschaft Gasdruck-Messgerät
JP3045559B2 (ja) * 1991-04-05 2000-05-29 日本真空技術株式会社 ピラニ真空計
JP3188752B2 (ja) * 1992-04-27 2001-07-16 日本真空技術株式会社 ピラニ真空計
JPH07120339A (ja) * 1993-10-25 1995-05-12 Ulvac Japan Ltd ピラニ真空計
JP4264156B2 (ja) * 1999-03-02 2009-05-13 株式会社アルバック ピラニ真空計
US6185351B1 (en) * 1999-10-15 2001-02-06 Lucent Technologies, Inc. All-dielectric, self-supporting, loose-tube cable with optical fiber ribbons

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI381156B (zh) * 2006-08-29 2013-01-01 Global Oled Technology Llc 用於有機材料之壓力計

Also Published As

Publication number Publication date
JPWO2006057148A1 (ja) 2008-06-05
KR101255564B1 (ko) 2013-04-17
US20080115585A1 (en) 2008-05-22
CN1969175A (zh) 2007-05-23
KR20070085117A (ko) 2007-08-27
DE112005002501B4 (de) 2014-10-09
US7607356B2 (en) 2009-10-27
TWI388814B (zh) 2013-03-11
JP4878289B2 (ja) 2012-02-15
WO2006057148A1 (ja) 2006-06-01
DE112005002501T5 (de) 2007-10-11
CN100549648C (zh) 2009-10-14

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