TW200616876A - Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates - Google Patents

Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates

Info

Publication number
TW200616876A
TW200616876A TW093135984A TW93135984A TW200616876A TW 200616876 A TW200616876 A TW 200616876A TW 093135984 A TW093135984 A TW 093135984A TW 93135984 A TW93135984 A TW 93135984A TW 200616876 A TW200616876 A TW 200616876A
Authority
TW
Taiwan
Prior art keywords
substrates
department
treating
substrate
treating substrates
Prior art date
Application number
TW093135984A
Other languages
Chinese (zh)
Other versions
TWI271374B (en
Inventor
Harumichi Hirose
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200616876A publication Critical patent/TW200616876A/en
Application granted granted Critical
Publication of TWI271374B publication Critical patent/TWI271374B/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Intermediate Stations On Conveyors (AREA)

Abstract

This invention of an apparatus for treating substrates consists of a conveying mechanism capable of conveying substrates in a vertical manner, a process department to exert designated process to the substrate conveyed in the vertical manner, a loading department to embark the substrate onto the process department, and an unloading department to receive the processed substrate. And at least one of the loading department and the unloading department has a conveyer capable of rotating, a supporting plane to carry the substrate, and a motor to drive the conveyer and to position the supporting plane at a preset tilt angle.
TW93135984A 2003-05-22 2004-11-23 Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates TWI271374B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2003144889A JP4452033B2 (en) 2003-05-22 2003-05-22 Substrate transfer apparatus and transfer method

Publications (2)

Publication Number Publication Date
TW200616876A true TW200616876A (en) 2006-06-01
TWI271374B TWI271374B (en) 2007-01-21

Family

ID=33532226

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93135984A TWI271374B (en) 2003-05-22 2004-11-23 Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates

Country Status (2)

Country Link
JP (1) JP4452033B2 (en)
TW (1) TWI271374B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006054354A1 (en) * 2004-11-19 2006-05-26 Shibaura Mechatronics Corporation Substrate processing equipment, substrate carrying equipment and substrate processing method
JP4643384B2 (en) * 2005-07-25 2011-03-02 芝浦メカトロニクス株式会社 Substrate processing apparatus and processing method
JP4685618B2 (en) * 2005-12-13 2011-05-18 芝浦メカトロニクス株式会社 Substrate processing equipment
JP4652991B2 (en) * 2006-02-23 2011-03-16 芝浦メカトロニクス株式会社 Substrate processing equipment
KR101215588B1 (en) * 2008-06-06 2012-12-26 가부시키가이샤 아루박 Apparatus for manufacturing thin film solar cell
KR101210533B1 (en) * 2008-06-06 2012-12-10 가부시키가이샤 아루박 thin film solar cell manufacturing equipment
JP4892543B2 (en) * 2008-12-22 2012-03-07 芝浦メカトロニクス株式会社 Substrate processing equipment
JP6148900B2 (en) * 2013-05-23 2017-06-14 東京応化工業株式会社 Coating device
KR102458914B1 (en) * 2022-05-17 2022-10-26 주식회사 아라(Ara) Glass substrate transfer system to perform tag dispersion

Also Published As

Publication number Publication date
TWI271374B (en) 2007-01-21
JP2004349475A (en) 2004-12-09
JP4452033B2 (en) 2010-04-21

Similar Documents

Publication Publication Date Title
JP5334443B2 (en) Plate work reversing device
KR101449487B1 (en) Panel cutting device and method of transferring panel in the same
ATE301606T1 (en) CONVEYING DEVICE FOR CONVEYING WORKPIECES THROUGH A TREATMENT AREA FOR SURFACE TREATMENT OF THE WORKPIECES
TW200507979A (en) Substrate processing apparatus, substrate processing method, and substrate holding apparatus
WO2008122381A3 (en) Conveying apparatus
EP1256530A3 (en) Method and system for high speed tray unloading and mail transporting
TW200616876A (en) Apparatus for treating substrates, apparatus for carrying substrates, and method of treating substrates
TW200603328A (en) Apparatus for carrying substrates and method of carrying substrates
CN104919581A (en) Apparatus for and method of handling workpieces
TW200811073A (en) Glass conveying apparatus
TW201209202A (en) Vacuum coating system
CA2501141A1 (en) Apparatus for controlling the deposition of feed material on a deposition build-up surface
TWI436858B (en) Substrate grinding apparatus and method using the same
TW200739791A (en) Apparatus for treating substrates and method of treating substrates
TW200738538A (en) Apparatus for receiving workpiece and method of receiving thereof
DE202004018763U1 (en) Apparatus for refining in line or off line treatment of curved substrates from a stack whereby those substrates which have become less stable due to the treatment are transported away
KR101535136B1 (en) Panel cutting device and method of transferring panel in the same
TW201309574A (en) Auto-feeding and discharging system
SG135970A1 (en) Apparatus and method for reducing substrate warpage
JP2005026554A (en) Substrate processing method and apparatus
JP2006247762A (en) Workpiece manufacturing method and workpiece manufacturing apparatus
CN207209154U (en) Steel plate Moving parameter device
KR101479974B1 (en) Panel cutting device and method of transferring panel in the same
JP3855119B2 (en) Transport device
WO2005102843A8 (en) Apparatus and method for supplying wrappers

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees