JP2006247762A - Workpiece manufacturing method and workpiece manufacturing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a workpiece manufacturing method and a workpiece manufacturing apparatus, placing all of workpieces on a workpiece placing part of a carry-in table within the polishing time even if the workpieces are increased in number of simultaneously polished workpieces, continuously performing polishing without suspending polishing, and fully automated to attain high production efficiency. <P>SOLUTION: The workpieces 3 placed on a cassette 2 are carried to the workpiece placing part 5 of a workpiece supply conveyer 4 for the number corresponding to the number of workpieces placed on a carrier 9 used for polishing, the workpieces placed on the workpiece placing part 5 are collectively carried to a workpiece placing part 7 of the carry-in table 6, and all of the workpieces 3 placed on the carry-in table 6 are collectively carried to the carrier 9 of a polishing device 8, whereby all of the workpieces 3 carried to the carrier 9 are collectively polished. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a workpiece manufacturing method and workpiece manufacturing apparatus for polishing, cleaning, and drying a surface of a workpiece such as a magnetic disk substrate.

  Conventionally, as a polishing method and a polishing apparatus for simultaneously polishing a large number of workpieces such as a magnetic disk substrate, there is one described in Japanese Patent No. 2535089 (Patent Document 1). In this polishing method and polishing apparatus, as shown in FIG. 2, all the workpieces 3 to be simultaneously polished are placed on the carry-in table 6, and all the workpieces 3 are collectively transported to the polishing device 8. Is mounted on the carrier 9 of the polishing apparatus 8 and then all the workpieces 3 are polished at once. The workpieces 3 for which the polishing process has been completed are transported to the workpiece placement unit 13 of the carry-out table 12 in a lump.

  In this polishing method and polishing apparatus, when the workpiece 3 is placed on the workpiece placement portion 7 of the carry-in table 6, the workpiece 3 is manually placed or the workpiece 3 placed on the cassette is robotized. Or carry it in.

  In the polishing method and the polishing apparatus, it is necessary to place the workpieces 3 on all the workpiece mounting portions 7 of the carry-in table 6 within the time during which the polishing processing is performed. The workpieces 3 are collectively conveyed to the carry-out table 12 and immediately all the workpieces 3 placed on the workpiece placement unit 7 of the carry-in table 6 are collectively conveyed to the carrier 9 of the polishing apparatus 8 for immediate polishing. Like to do. As a result, the polishing process can be performed continuously with almost no interruption, and the production efficiency of the polishing process is increased.

However, the polishing of the workpiece 3 tends to increase the number of workpieces 3 to be simultaneously polished in order to further increase the production efficiency. In this case, when the number of workpieces 3 simultaneously processed is up to about 50, as described above, all the workpieces 3 are placed on the workpiece placing portion 7 of the carry-in table 6 within the polishing time. Can do. However, when the number of workpieces 3 simultaneously polished is greater than about 50, it becomes impossible to place all the workpieces 3 on the workpiece mounting portion 7 of the carry-in table 6 within the polishing time. Therefore, the polishing process cannot be performed continuously, and the polishing process is interrupted, and the production efficiency of the polishing process is deteriorated.
Japanese Patent No. 2535089

  The problem to be solved is that even if the number of workpieces simultaneously polished increases, all the workpieces can be placed on the workpiece mounting portion of the carry-in table within the time during which the polishing process is performed. It is to provide a fully automated workpiece manufacturing method and workpiece manufacturing apparatus capable of continuously performing a polishing process without interruption.

  In order to solve the above-mentioned problems, the present invention provides a workpiece mounting portion of a workpiece supply conveyor that has a number of workpieces placed on a cassette corresponding to the number of workpieces placed on a carrier used for polishing. A plurality of workpieces that are transported, collectively transported to the workpiece placement portion of the carry-in table, and all the workpieces placed on the carry-in table are collectively disposed in the polishing apparatus. In this case, all the workpieces conveyed to the carrier are collectively polished.

  Also, the workpieces placed on the cassette are transported to the workpiece placement unit of the workpiece supply conveyor by the number corresponding to the number of workpieces placed on the carrier used for polishing, and placed on the workpiece placement unit. All the workpieces placed on the carry-in table are collectively conveyed to a plurality of carriers arranged in the polishing apparatus and conveyed to the carrier. All the workpieces that have been polished are collectively polished, all the workpieces that have been subjected to the polishing processing are collectively transferred to the workpiece mounting portion of the carry-out table, and the workpiece mounting portion of the carry-out table corresponding to the carrier The workpieces placed on the substrate are collectively transported to the workpiece placement unit of the workpiece unloading unit, the workpieces are conveyed to a cleaning device for cleaning, and the workpieces that have been cleaned are conveyed to a drying device for drying. line , It is characterized in that for accommodating the workpieces exit the drying cassette.

  In addition, a cassette supply unit that supplies a cassette containing workpieces, a workpiece placement unit of a workpiece supply conveyor that places a number of workpieces corresponding to the number of workpieces placed on a carrier used for polishing, Deployed to a work placement part of a carry-in table for placing the work placed on the work placement part at once and a polishing apparatus for placing all the work placed on the carry-in table at once. It is characterized by comprising a plurality of carriers and a polishing apparatus that collectively polishes all the workpieces conveyed to the carrier.

  In addition, a cassette supply unit that supplies a cassette containing workpieces, a workpiece placement unit of a workpiece supply conveyor that places a number of workpieces corresponding to the number of workpieces placed on a carrier used for polishing, Deployed to a work placement part of a carry-in table for placing the work placed on the work placement part at once and a polishing apparatus for placing all the work placed on the carry-in table at once. A plurality of carriers, a polishing apparatus that collectively polishes all the workpieces transported to the carrier, and a workpiece mounting portion of a carry-out table that collectively mounts all the workpieces that have finished the polishing processing, A workpiece loading unit for loading workpieces placed on the workpiece loading unit of the carry-out table corresponding to the carrier at a time, a cleaning device for cleaning the workpiece, and the cleaning A drying device for drying the completion Work, is characterized in that a cassette accommodating portion for accommodating a workpiece which has been finished the drying cassette.

  In the workpiece manufacturing method and workpiece manufacturing apparatus according to the present invention, workpieces placed on the cassette are placed on the workpiece supply conveyor by the number corresponding to the number of workpieces placed on the carrier used for polishing. The workpieces placed on the workpiece placement unit are collectively conveyed to the workpiece placement unit of the carry-in table, and all the workpieces placed on the carry-in table are collectively conveyed to the carrier of the polishing apparatus. In addition, since all the workpieces transferred to the carrier are polished together, even if the number of workpieces simultaneously polished increases, the workpiece placement on the carry-in table can be carried out within the polishing time. All workpieces can be placed on the part, and polishing process can be performed continuously without interrupting the polishing process. It is possible to provide a location.

  In the workpiece manufacturing method and workpiece manufacturing apparatus according to the present invention, workpieces placed on the cassette are placed on the workpiece supply conveyor by the number corresponding to the number of workpieces placed on the carrier used for polishing. The workpieces placed on the workpiece placement unit are collectively conveyed to the workpiece placement unit of the carry-in table, and all the workpieces placed on the carry-in table are collectively conveyed to the carrier of the polishing apparatus. Then, all the workpieces transported to the carrier are polished at once, and all the workpieces that have been polished are collectively transported to the workpiece mounting part of the unloading table, and the workpiece mounting on the unloading table corresponding to the carrier is performed. The workpieces placed on the placement unit are collectively transported to the workpiece placement unit of the workpiece unloading unit, then the workpiece is transported to the cleaning device for cleaning, and the cleaned workpiece is transported to the drying device. Dry There, the finished dried workpiece is intended to be stored in the cassette. With this configuration, even if the number of workpieces simultaneously polished increases, all the workpieces can be placed on the workpiece placement portion of the carry-in table within the time during which the polishing process is being performed. It is possible to provide a fully automated workpiece manufacturing method and workpiece manufacturing apparatus capable of continuously performing polishing without interrupting processing.

  FIG. 1 is an explanatory view showing a workpiece manufacturing method and manufacturing apparatus according to an embodiment of the present invention.

  In the workpiece manufacturing method and workpiece manufacturing apparatus of the present invention, a predetermined number of workpieces 3 are stored in a cassette 2 that stores workpieces 3 such as magnetic disk substrates, and a predetermined number of cassettes 2 are stored in a cassette supply unit 1. Place it.

  A workpiece supply conveyor 4 is provided for loading the workpiece 3 stored in the cassette 2 and unloading the workpiece 3 onto the loading table 6 in the next process. The workpiece supply conveyor 4 is mounted on a carrier 9 used for polishing. A plurality of workpiece mounting portions 5 for mounting the number of workpieces 3 corresponding to the number of workpieces 3 to be mounted are provided, and the workpieces 3 housed in the cassette 2 are transferred to the workpiece mounting portions 5 by, for example, a robot. . In the conveyance by the robot, four workpieces 3 are simultaneously conveyed by one robot, and two workpieces are placed on each of the two workpiece placement units. In FIG. 1, five workpieces 3 are placed on one carrier 9, but actually ten workpieces 3 are placed on one carrier 9.

  When a predetermined number of workpieces 3 are placed on the workpiece placement unit 5 of the workpiece supply conveyor 4, the workpiece placement unit 5 on which the workpieces 3 are placed moves from the cassette supply unit 1 side to the loading table 6 side by the conveyor. To do.

  A predetermined number of workpieces 3 placed on the workpiece placement unit 5 of the workpiece supply conveyor 4 are collectively conveyed to the workpiece placement unit 7 of the carry-in table 6 by a robot. The workpiece placement unit 5 of the workpiece supply conveyor 4 that has unloaded the workpiece 3 moves from the loading table 6 side to the cassette supply unit 1 side by the conveyor.

  The workpieces 3 placed on the workpiece placement unit 5 of the workpiece supply conveyor 4 are collectively transported to the plurality of workpiece placement units 7 provided on the carry-in table 6. At this time, the loading table 6 rotates so that the workpiece placement unit 7 that receives the supply of the workpiece 3 is positioned on the workpiece supply conveyor 4 side. And the workpiece | work 3 is supplied to all the workpiece mounting parts 7 of the carrying-in table 6. FIG. All the workpieces 3 placed on all the workpiece placement units 7 of the carry-in table 6 are collectively conveyed and placed on the carrier 9 of the polishing apparatus 8.

  In the polishing apparatus 8, the work 3 placed on the carrier 9 is polished by the upper polishing tool and the lower polishing tool while the carrier 9 rotates and revolves by the sun gear 10 and the internal gear 11. In FIG. 1, five workpieces 3 are placed on one carrier 9, but actually ten workpieces 3 are placed on one carrier 9. In addition, five carriers 9 are mounted on the polishing apparatus 8, but in reality, ten carriers 9 are mounted on the polishing apparatus 8, and 100 workpieces 3 can be simultaneously polished. I am doing so.

  When the polishing process is completed, all the workpieces 3 for which the polishing process has been completed are collectively transferred to the workpiece placement unit 13 of the carry-out table 12.

  The workpieces 3 are placed on all the workpiece placement portions 7 of the carry-in table 6 within the time during which the polishing process is performed. When the polishing process is completed, all the workpieces 3 that have completed the polishing process are immediately transferred to the work placement unit 13 of the carry-out table 12. Subsequently, all the workpieces 3 placed on all the workpiece placement units 7 of the carry-in table 6 are immediately transported and placed on the carrier 9 of the polishing apparatus 8. Then, the polishing process is started immediately. Therefore, even if the number of workpieces simultaneously polished increases, all the workpieces 3 can be placed on the workpiece placing portion 7 of the carry-in table 6 within the time during which the polishing is performed, and the polishing is interrupted. Therefore, it is possible to provide a fully automated workpiece manufacturing method and workpiece manufacturing apparatus capable of continuously performing polishing without performing the polishing process.

  The workpieces 3 placed on the workpiece placement unit 13 of the carry-out table 12 corresponding to the carrier 9 are collectively conveyed and placed on the workpiece placement unit 15 of the workpiece carry-out unit 14 by the robot. All the workpieces 3 placed on all the workpiece placement units 13 of the carry-out table 12 are conveyed and placed on the workpiece placement unit 15 of the workpiece carry-out unit 14 within the time during which the polishing process is performed.

  The workpieces 3 placed on the workpiece placement unit 15 of the workpiece carry-out unit 14 are sequentially conveyed to the cleaning device 16 and cleaned. Conveying the workpiece 3 to the cleaning device 16 conveys four workpieces 3 simultaneously with one robot.

  The workpieces 3 that have been cleaned by the cleaning device 16 are sequentially transferred to the drying device 17 and dried. Conveying the workpiece 3 to the drying device 17 conveys four workpieces 3 simultaneously with one robot. The workpieces 3 that have been dried are sequentially stored in the cassette 2.

  As described above, the workpiece manufacturing method and workpiece manufacturing apparatus according to the present invention have the number of workpieces 3 placed on the cassette 2 corresponding to the number of workpieces 3 placed on the carrier 9 used for polishing. Then, the workpieces 3 are transported to the workpiece placement unit 5 of the workpiece supply conveyor 4, and the workpieces 3 placed on the workpiece placement unit 5 are collectively transported to the workpiece placement unit 7 of the carry-in table 6 and placed on the carry-in table 6. All the workpieces 3 are collectively transported to the carrier 9 of the polishing apparatus 8, and all the workpieces 3 transported to the carrier 9 are collectively polished, and all the workpieces 3 that have been polished are collectively processed Then, the workpieces 3 conveyed to the workpiece placement portion 13 of the carry-out table 12 and placed on the workpiece placement portion 13 of the carry-out table 12 corresponding to the carrier 9 are collectively put into the workpiece placement portion 15 of the workpiece carry-out portion 14. Transport and then work 3 It was washed and conveyed to the purification unit 16, the workpiece 3 which has finished the washing performed conveyed to drying in the drying apparatus 17, the workpiece 3 which has finished the drying is for accommodating the cassette 2. With this configuration, even if the number of workpieces 3 simultaneously polished increases, all the workpieces 3 are placed on the workpiece placing portion 7 of the carry-in table 6 within the time during which the polishing is performed. Moreover, all the workpiece | work 3 mounted in all the workpiece mounting parts 13 of the unloading table 12 is conveyed by the workpiece mounting part 15 of the workpiece unloading part 14 within the time which is grinding | polishing. Therefore, it is possible to provide a fully automated workpiece manufacturing method and workpiece manufacturing apparatus that can perform the polishing process continuously without interrupting the polishing process.

It is explanatory drawing which shows the manufacturing method and workpiece manufacturing apparatus concerning one Example of this invention. It is explanatory drawing which shows the manufacturing method and the manufacturing apparatus of the conventional workpiece | work.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cassette supply part 2 Cassette 3 Work 4 Work supply conveyor 5 Work mounting part 6 Loading table 7 Work mounting part 8 Polishing apparatus 9 Carrier 12 Unloading table 13 Work mounting part 14 Work unloading part 15 Work mounting part 16 Cleaning apparatus 17 Drying equipment

Claims (4)

The workpieces placed in the cassette are transported to the workpiece placement unit of the workpiece supply conveyor by the number corresponding to the number of workpieces placed on the carrier used for polishing, and placed on the workpiece placement unit. All the workpieces placed on the carry-in table are collectively conveyed to a plurality of carriers arranged in the polishing apparatus and conveyed to the carrier. A method for manufacturing a workpiece, wherein all workpieces are polished at once. The workpieces placed in the cassette are transported to the workpiece placement unit of the workpiece supply conveyor by the number corresponding to the number of workpieces placed on the carrier used for polishing, and placed on the workpiece placement unit. All the workpieces placed on the carry-in table are collectively conveyed to a plurality of carriers arranged in the polishing apparatus and conveyed to the carrier. All workpieces are polished at once, all the workpieces that have been polished are collectively transferred to the workpiece placement portion of the carry-out table, and placed on the workpiece placement portion of the carry-out table corresponding to the carrier. The placed workpieces are collectively transferred to the workpiece placement unit of the workpiece unloading unit, the workpieces are transferred to a cleaning device for cleaning, the workpieces after the cleaning is transferred to a drying device for drying, in front Method for producing a workpiece, characterized in that for accommodating the drying has finished the work on the cassette. A cassette supply unit for supplying a cassette containing workpieces, a workpiece mounting unit of a workpiece supply conveyor for mounting a number of workpieces corresponding to the number of workpieces mounted on a carrier used for polishing, and the workpiece A plurality of work placement units of a carry-in table that collectively places the work placed on the placement unit, and a plurality of polishing apparatuses that collectively place all the work placed on the carry-in table. An apparatus for manufacturing a workpiece, comprising: a carrier; and a polishing apparatus that collectively polishes all the workpieces conveyed to the carrier. A cassette supply unit for supplying a cassette containing workpieces, a workpiece mounting unit of a workpiece supply conveyor for mounting a number of workpieces corresponding to the number of workpieces mounted on a carrier used for polishing, and the workpiece A plurality of work placement units of a carry-in table that collectively places the work placed on the placement unit, and a plurality of polishing apparatuses that collectively place all the work placed on the carry-in table. A carrier, a polishing apparatus that collectively polishes all the workpieces transported to the carrier, a workpiece placement portion of a carry-out table that collectively places all the workpieces that have undergone the polishing, and the carrier The workpiece placement unit of the workpiece carry-out unit that collectively places the workpieces placed on the workpiece placement unit of the carry-out table corresponding to the above, a cleaning device that cleans the workpiece, and the cleaning is finished Workpiece manufacturing apparatus characterized a drying device for drying the workpiece, that the workpiece has been completed the drying and a cassette housing portion for accommodating the cassette.

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