TW200615389A - Film forming method, electronic device and electronic apparatus - Google Patents
Film forming method, electronic device and electronic apparatusInfo
- Publication number
- TW200615389A TW200615389A TW094129503A TW94129503A TW200615389A TW 200615389 A TW200615389 A TW 200615389A TW 094129503 A TW094129503 A TW 094129503A TW 94129503 A TW94129503 A TW 94129503A TW 200615389 A TW200615389 A TW 200615389A
- Authority
- TW
- Taiwan
- Prior art keywords
- forming method
- film forming
- forming
- electronic device
- electronic
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 2
- 239000002184 metal Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 239000010408 film Substances 0.000 abstract 2
- 238000007747 plating Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 238000001947 vapour-phase growth Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/146—By vapour deposition
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/14—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using spraying techniques to apply the conductive material, e.g. vapour evaporation
- H05K3/143—Masks therefor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0347—Overplating, e.g. for reinforcing conductors or bumps; Plating over filled vias
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
- Y10T428/12861—Group VIII or IB metal-base component
- Y10T428/12882—Cu-base component alternative to Ag-, Au-, or Ni-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
- Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Chemically Coating (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004270891A JP2006083442A (ja) | 2004-09-17 | 2004-09-17 | 成膜方法、電子デバイス、及び電子機器 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200615389A true TW200615389A (en) | 2006-05-16 |
TWI278522B TWI278522B (en) | 2007-04-11 |
Family
ID=36074388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094129503A TWI278522B (en) | 2004-09-17 | 2005-08-29 | Film forming method, electronic device and electronic apparatus |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060062978A1 (zh) |
JP (1) | JP2006083442A (zh) |
KR (1) | KR100665424B1 (zh) |
CN (1) | CN100414682C (zh) |
TW (1) | TWI278522B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI658603B (zh) * | 2017-07-04 | 2019-05-01 | 茂迪股份有限公司 | 單面受光式太陽能電池及其製造方法 |
TWI789569B (zh) * | 2019-01-31 | 2023-01-11 | 日商大日本印刷股份有限公司 | 蒸鍍遮罩群、電子裝置之製造方法及電子裝置 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5139429B2 (ja) * | 2006-08-07 | 2013-02-06 | インクテック カンパニー リミテッド | 金属積層板の製造方法 |
RU2494201C2 (ru) * | 2009-03-31 | 2013-09-27 | Андрей Виленович Любомирский | Облицовочная панель (варианты) |
RU2494202C2 (ru) * | 2009-03-31 | 2013-09-27 | Андрей Виленович Любомирский | Облицовочная панель (варианты) |
DE102009022660B3 (de) * | 2009-05-26 | 2010-09-16 | Semikron Elektronik Gmbh & Co. Kg | Befestigung eines Bauelements an einem Substrat und/oder eines Anschlusselementes an dem Bauelement und/oder an dem Substrat durch Drucksinterung |
DE102015108494B4 (de) * | 2015-05-29 | 2024-01-18 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zum Herstellen eines Gehäusedeckels und Verfahren zum Herstellen eines optoelektronischen Bauelements |
JP2017150017A (ja) * | 2016-02-23 | 2017-08-31 | 株式会社ジャパンディスプレイ | 蒸着マスクの製造方法及び有機elディスプレイの製造方法 |
DE102017126590A1 (de) * | 2017-11-13 | 2019-05-16 | Doduco Solutions Gmbh | Verfahren zum Herstellen einer Bodenplatte für ein Elektronikmodul |
CN110592526A (zh) * | 2018-06-12 | 2019-12-20 | 张东晖 | 金属蒸镀遮罩结构 |
JP7189846B2 (ja) * | 2019-07-16 | 2022-12-14 | 株式会社東芝 | 半導体装置の製造方法および金属の積層方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4011143A (en) * | 1973-06-25 | 1977-03-08 | Honeywell Inc. | Material deposition masking for microcircuit structures |
US3897324A (en) * | 1973-06-25 | 1975-07-29 | Honeywell Inc | Material deposition masking for microcircuit structures |
US4122215A (en) * | 1976-12-27 | 1978-10-24 | Bell Telephone Laboratories, Incorporated | Electroless deposition of nickel on a masked aluminum surface |
US4715940A (en) * | 1985-10-23 | 1987-12-29 | Gte Products Corporation | Mask for patterning electrode structures in thin film EL devices |
JP2552159B2 (ja) * | 1987-02-02 | 1996-11-06 | セイコーエプソン株式会社 | 半導体装置及びその製造方法 |
JPH04236758A (ja) * | 1991-01-16 | 1992-08-25 | Oki Electric Ind Co Ltd | 蒸着用マスク |
US6316097B1 (en) * | 1998-09-28 | 2001-11-13 | Seagate Technology Llc | Electroless plating process for alternative memory disk substrates |
JP2001185350A (ja) * | 1999-12-24 | 2001-07-06 | Sanyo Electric Co Ltd | 被着用マスク、その製造方法、エレクトロルミネッセンス表示装置及びその製造方法 |
JP3656612B2 (ja) * | 2001-06-08 | 2005-06-08 | 株式会社村田製作所 | 金属膜およびその製造方法ならびに積層セラミック電子部品およびその製造方法 |
JP4932094B2 (ja) * | 2001-07-02 | 2012-05-16 | 日本リーロナール有限会社 | 無電解金めっき液および無電解金めっき方法 |
JP2004039628A (ja) * | 2003-06-04 | 2004-02-05 | Hitachi Metals Ltd | メタルマスク |
-
2004
- 2004-09-17 JP JP2004270891A patent/JP2006083442A/ja active Pending
-
2005
- 2005-08-11 US US11/201,467 patent/US20060062978A1/en not_active Abandoned
- 2005-08-23 CN CNB2005100921500A patent/CN100414682C/zh not_active Expired - Fee Related
- 2005-08-29 TW TW094129503A patent/TWI278522B/zh not_active IP Right Cessation
- 2005-09-15 KR KR1020050086025A patent/KR100665424B1/ko not_active IP Right Cessation
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI658603B (zh) * | 2017-07-04 | 2019-05-01 | 茂迪股份有限公司 | 單面受光式太陽能電池及其製造方法 |
TWI789569B (zh) * | 2019-01-31 | 2023-01-11 | 日商大日本印刷股份有限公司 | 蒸鍍遮罩群、電子裝置之製造方法及電子裝置 |
US11566316B2 (en) | 2019-01-31 | 2023-01-31 | Dai Nippon Printing Co., Ltd. | Deposition mask group, manufacturing method of electronic device, and electronic device |
US11649539B2 (en) | 2019-01-31 | 2023-05-16 | Dai Nippon Printing Co., Ltd. | Deposition mask group, manufacturing method of electronic device, and electronic device |
US11939659B2 (en) | 2019-01-31 | 2024-03-26 | Dai Nippon Printing Co., Ltd. | Deposition mask group, manufacturing method of electronic device, and electronic device |
Also Published As
Publication number | Publication date |
---|---|
KR20060051312A (ko) | 2006-05-19 |
CN1750250A (zh) | 2006-03-22 |
CN100414682C (zh) | 2008-08-27 |
TWI278522B (en) | 2007-04-11 |
JP2006083442A (ja) | 2006-03-30 |
US20060062978A1 (en) | 2006-03-23 |
KR100665424B1 (ko) | 2007-01-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |