TW200611948A - Sucking and fixing sheet and its manufacturing method - Google Patents

Sucking and fixing sheet and its manufacturing method

Info

Publication number
TW200611948A
TW200611948A TW094119035A TW94119035A TW200611948A TW 200611948 A TW200611948 A TW 200611948A TW 094119035 A TW094119035 A TW 094119035A TW 94119035 A TW94119035 A TW 94119035A TW 200611948 A TW200611948 A TW 200611948A
Authority
TW
Taiwan
Prior art keywords
sucking
fixing sheet
manufacturing
fixing
sheet
Prior art date
Application number
TW094119035A
Other languages
English (en)
Other versions
TWI381028B (zh
Inventor
Hiroyuki Iida
Junichi Moriyama
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of TW200611948A publication Critical patent/TW200611948A/zh
Application granted granted Critical
Publication of TWI381028B publication Critical patent/TWI381028B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B3/00—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form
    • B32B3/26—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer
    • B32B3/266—Layered products comprising a layer with external or internal discontinuities or unevennesses, or a layer of non-planar shape; Layered products comprising a layer having particular features of form characterised by a particular shape of the outline of the cross-section of a continuous layer; characterised by a layer with cavities or internal voids ; characterised by an apertured layer characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24893—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including particulate material
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249978—Voids specified as micro
    • Y10T428/249979—Specified thickness of void-containing component [absolute or relative] or numerical cell dimension
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/249991—Synthetic resin or natural rubbers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249987—With nonvoid component of specified composition
    • Y10T428/249991—Synthetic resin or natural rubbers
    • Y10T428/249992—Linear or thermoplastic

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Laminated Bodies (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
TW94119035A 2004-07-13 2005-06-09 And a method for manufacturing the same TWI381028B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004206307A JP4285651B2 (ja) 2004-07-13 2004-07-13 吸着固定用シートおよびその製造方法

Publications (2)

Publication Number Publication Date
TW200611948A true TW200611948A (en) 2006-04-16
TWI381028B TWI381028B (zh) 2013-01-01

Family

ID=35783670

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94119035A TWI381028B (zh) 2004-07-13 2005-06-09 And a method for manufacturing the same

Country Status (6)

Country Link
US (1) US7851058B2 (zh)
JP (1) JP4285651B2 (zh)
KR (1) KR100975492B1 (zh)
CN (1) CN1964841B (zh)
TW (1) TWI381028B (zh)
WO (1) WO2006006314A1 (zh)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4285651B2 (ja) 2004-07-13 2009-06-24 日東電工株式会社 吸着固定用シートおよびその製造方法
JP4883763B2 (ja) * 2006-02-27 2012-02-22 日東電工株式会社 多孔質シートの製造方法及びその製造方法により得られる多孔質シート
JP4803803B2 (ja) * 2006-04-12 2011-10-26 日東電工株式会社 吸着固定用シートの製造方法
JP4947631B2 (ja) * 2006-07-19 2012-06-06 ミライアル株式会社 クッションシート付ウエハ収納容器
JP2008238029A (ja) * 2007-03-27 2008-10-09 Sumitomo Chemical Co Ltd 塗布方法
TWI439351B (zh) * 2008-09-29 2014-06-01 Nitto Denko Corp Adsorption tablets
JP5529435B2 (ja) * 2009-04-16 2014-06-25 日東電工株式会社 多孔質シートの製造方法及び多孔質シート
JP5519475B2 (ja) * 2010-01-08 2014-06-11 日東電工株式会社 摺動部材およびその製造方法
JP5662177B2 (ja) * 2010-01-25 2015-01-28 日東電工株式会社 吸着ユニットへの作業対象物の吸着方法ならびにセラミックコンデンサの製造方法
KR101773779B1 (ko) * 2011-04-26 2017-09-12 주식회사 탑 엔지니어링 진공흡착장치
KR101347358B1 (ko) * 2011-06-10 2014-01-07 (주)탑나노시스 피가공체를 흡착하는 진공 척에 사용되는 완충시트
KR20140085537A (ko) * 2011-10-28 2014-07-07 닛토덴코 가부시키가이샤 통기성 시트, 흡착 유닛에의 작업 대상물의 흡착 방법 및 세라믹 콘덴서의 제조 방법
WO2013082076A1 (en) * 2011-11-30 2013-06-06 Corning Incorporated Carrier for thin glass sheets and method of using
JP6082266B2 (ja) * 2012-02-17 2017-02-15 日東電工株式会社 吸着用多孔質シートおよび吸着用多孔質シートに用いる交換用表面層
JP6275397B2 (ja) * 2013-05-10 2018-02-07 旭化成株式会社 多孔質積層体、吸着緩衝材、及び吸着方法
US10723850B2 (en) 2014-09-24 2020-07-28 Nitto Denko Corporation Polymer film, waterproof sound-permeable membrane, waterproof sound-permeable member, electronic device, electronic device case, waterproof sound transmission structure, waterproof gas-permeable membrane, waterproof gas-permeable member, waterproof ventilation structure, suction sheet, method for holding workpiece by suction on suction unit, method for producing ceramic capacitor, optical film, optical member, and composition
JP6307729B1 (ja) * 2016-11-30 2018-04-11 株式会社新川 ボンディング装置及びボンディング方法
JP2018103270A (ja) * 2016-12-22 2018-07-05 東京エレクトロン株式会社 多層多孔質板及び多層多孔質板の製造方法
KR102290206B1 (ko) * 2017-05-09 2021-08-20 셀폴 고교 가부시키가이샤 다공질 소결 시트 및 그의 제조 방법
JP6462802B2 (ja) * 2017-08-31 2019-01-30 旭化成株式会社 多孔質積層体、吸着緩衝材、及び吸着方法
KR102354612B1 (ko) * 2017-09-05 2022-02-08 셀폴 고교 가부시키가이샤 다공질 시트 및 그의 제조 방법
JP6968751B2 (ja) * 2018-05-31 2021-11-17 日東電工株式会社 ワーク保護用シート
JP7262283B2 (ja) * 2019-04-16 2023-04-21 住友化学株式会社 非水電解液二次電池用多孔質層
KR102692411B1 (ko) 2019-10-23 2024-08-07 아사히 가세이 가부시키가이샤 폴리에틸렌 파우더, 성형체

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02214647A (ja) 1989-02-14 1990-08-27 Nitto Denko Corp 超高分子量ポリエチレン多孔質体の製造法
JPH0566855A (ja) 1991-09-06 1993-03-19 Toshiba Corp 画像入力装置付きラツプトツプ型コンピユータ
DE4341497A1 (de) * 1993-12-06 1995-06-08 Hoechst Ag Verfahren zur Herstellung poröser Formkörper
JPH08258198A (ja) * 1995-03-22 1996-10-08 Nitto Denko Corp 吸着固定用多孔質シート
JP3952419B2 (ja) 1995-12-21 2007-08-01 日東電工株式会社 通気性多孔質シートの製法
JP2001028390A (ja) * 1999-07-13 2001-01-30 Nitto Denko Corp 吸着固定搬送用シート
JP4371512B2 (ja) 1999-12-20 2009-11-25 日東電工株式会社 多孔質フィルムとその製造方法、及びラベル
JP4730864B2 (ja) * 2000-06-13 2011-07-20 旭化成ケミカルズ株式会社 吸引に用いるシート及びそれを用いた装置
JP2002173250A (ja) 2000-12-07 2002-06-21 Nitto Denko Corp 吸着搬送方法および吸着加工方法
US6828013B2 (en) * 2000-12-11 2004-12-07 Exxonmobil Oil Corporation Porous biaxially oriented high density polyethylene film with hydrophilic properties
JP3705167B2 (ja) 2001-07-19 2005-10-12 松下電工株式会社 出窓出隅部におけるキッチンボードの納め構造
JP2003277702A (ja) * 2002-03-25 2003-10-02 Nitto Denko Corp 両面粘着テープ及びそれを用いた吸着固定用シート
JP2004095831A (ja) * 2002-08-30 2004-03-25 Mitsubishi Materials Corp 吸着パッド、吸引治具、及び吸着パッドの製造方法
JP4305656B2 (ja) * 2004-02-19 2009-07-29 日東電工株式会社 吸着固定用シート及びその製造方法
JP4285651B2 (ja) 2004-07-13 2009-06-24 日東電工株式会社 吸着固定用シートおよびその製造方法
JP4883763B2 (ja) * 2006-02-27 2012-02-22 日東電工株式会社 多孔質シートの製造方法及びその製造方法により得られる多孔質シート

Also Published As

Publication number Publication date
KR20070031892A (ko) 2007-03-20
US7851058B2 (en) 2010-12-14
WO2006006314A1 (ja) 2006-01-19
JP4285651B2 (ja) 2009-06-24
TWI381028B (zh) 2013-01-01
CN1964841B (zh) 2012-04-18
CN1964841A (zh) 2007-05-16
US20080075935A1 (en) 2008-03-27
KR100975492B1 (ko) 2010-08-11
JP2006026981A (ja) 2006-02-02

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