TW200608149A - Polarized UV exposure system - Google Patents

Polarized UV exposure system

Info

Publication number
TW200608149A
TW200608149A TW094114598A TW94114598A TW200608149A TW 200608149 A TW200608149 A TW 200608149A TW 094114598 A TW094114598 A TW 094114598A TW 94114598 A TW94114598 A TW 94114598A TW 200608149 A TW200608149 A TW 200608149A
Authority
TW
Taiwan
Prior art keywords
alignment layer
polarized
light source
reflective structure
exposure system
Prior art date
Application number
TW094114598A
Other languages
English (en)
Inventor
Jeffrey Lynn Solomon
Michael Charles Lea
Richard Charles Allen
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of TW200608149A publication Critical patent/TW200608149A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • G02B5/3066—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state involving the reflection of light at a particular angle of incidence, e.g. Brewster's angle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V7/00—Reflectors for light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
    • F21V9/14—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters for producing polarised light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Polarising Elements (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW094114598A 2004-06-02 2005-05-05 Polarized UV exposure system TW200608149A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/858,998 US7413317B2 (en) 2004-06-02 2004-06-02 Polarized UV exposure system

Publications (1)

Publication Number Publication Date
TW200608149A true TW200608149A (en) 2006-03-01

Family

ID=35406231

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094114598A TW200608149A (en) 2004-06-02 2005-05-05 Polarized UV exposure system

Country Status (7)

Country Link
US (1) US7413317B2 (zh)
EP (1) EP1751616A2 (zh)
JP (1) JP2008501997A (zh)
KR (1) KR20070020090A (zh)
CN (1) CN1973243A (zh)
TW (1) TW200608149A (zh)
WO (1) WO2005119349A2 (zh)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4706255B2 (ja) * 2004-12-28 2011-06-22 ウシオ電機株式会社 偏光光照射装置
JP2006202628A (ja) * 2005-01-21 2006-08-03 Dainippon Printing Co Ltd 偏光光照射装置、偏光光照射方法、光配向膜、及び位相差フィルム
US8129290B2 (en) * 2005-05-26 2012-03-06 Applied Materials, Inc. Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure
US8643822B2 (en) * 2007-07-03 2014-02-04 Jds Uniphase Corporation Non-etched flat polarization-selective diffractive optical elements
DK2163923T3 (en) * 2008-09-12 2015-02-09 Jds Uniphase Corp Optiskhvirvel-delaying microarray
JP5287737B2 (ja) * 2010-01-13 2013-09-11 ウシオ電機株式会社 偏光光照射装置
DE102010001336B3 (de) * 2010-01-28 2011-07-28 Carl Zeiss SMT GmbH, 73447 Anordnung und Verfahren zur Charakterisierung der Polarisationseigenschaften eines optischen Systems
TWI409594B (zh) * 2010-11-16 2013-09-21 Au Optronics Corp 曝光燈組與曝光機
KR101462274B1 (ko) * 2012-04-19 2014-11-17 가부시키가이샤 에프케이 코우카쿠 겐큐쇼 광 배향 조사 장치
US9040229B2 (en) 2013-01-25 2015-05-26 Kent State University Maskless process for pre-tilting liquid crystal molecules
EP3060947B1 (en) * 2013-10-21 2021-04-14 Merck Patent GmbH Method of preparing a birefringent polymer film
JP6201707B2 (ja) * 2013-12-11 2017-09-27 東芝ライテック株式会社 紫外線照射装置
KR102222005B1 (ko) 2014-01-09 2021-03-04 삼성디스플레이 주식회사 노광 장치 및 이를 이용한 노광 방법
KR102166261B1 (ko) * 2014-03-25 2020-10-15 도시바 라이텍쿠 가부시키가이샤 편광 광 조사 장치
JP6187348B2 (ja) * 2014-03-25 2017-08-30 東芝ライテック株式会社 偏光光照射装置
DE102014205579A1 (de) * 2014-03-26 2015-10-01 Carl Zeiss Smt Gmbh EUV-Lichtquelle für eine Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage
CN104035204A (zh) * 2014-06-24 2014-09-10 中国科学院光电技术研究所 一种偏振纯化装置
KR102297802B1 (ko) * 2014-09-22 2021-09-03 도시바 라이텍쿠 가부시키가이샤 광원장치
CN106933043B (zh) * 2015-12-30 2019-11-22 上海微电子装备（集团）股份有限公司 光刻成像系统及其投影曝光方法
JP6613949B2 (ja) * 2016-02-16 2019-12-04 ウシオ電機株式会社 偏光素子ユニットおよび偏光光照射装置
KR102007751B1 (ko) * 2018-03-05 2019-08-06 동우 화인켐 주식회사 광배향 조사장치
CN111781773B (zh) * 2019-04-04 2022-07-01 上海微电子装备（集团）股份有限公司 光配向设备以及光配向方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4974941A (en) 1989-03-08 1990-12-04 Hercules Incorporated Process of aligning and realigning liquid crystal media
US5073294A (en) 1990-03-07 1991-12-17 Hercules Incorporated Process of preparing compositions having multiple oriented mesogens
US5383053A (en) * 1992-04-07 1995-01-17 Hughes Aircraft Company Virtual image display having a high efficiency grid beamsplitter
DE19703682B9 (de) 1996-02-01 2006-11-23 Lg. Philips Lcd Co., Ltd. UV-Licht-Bestrahlvorrichtung für Photoausrichtungsverfahren und Bestrahlverfahren unter Verwendung derselben
US5731405A (en) 1996-03-29 1998-03-24 Alliant Techsystems Inc. Process and materials for inducing pre-tilt in liquid crystals and liquid crystal displays
JP3146998B2 (ja) * 1996-09-12 2001-03-19 ウシオ電機株式会社 液晶表示素子の配向膜光配向用偏光光照射装置
US6061138A (en) 1997-08-05 2000-05-09 Elsicon, Inc. Optical exposure systems and processes for alignment of liquid crystals
US6307609B1 (en) 1997-08-05 2001-10-23 Wayne M. Gibbons Polarized light exposure systems for aligning liquid crystals
US6486997B1 (en) 1997-10-28 2002-11-26 3M Innovative Properties Company Reflective LCD projection system using wide-angle Cartesian polarizing beam splitter
TW536644B (en) * 1997-10-29 2003-06-11 Ushio Electric Inc Polarized light radiation device for alignment film of liquid crystal display element
JP3458733B2 (ja) * 1998-11-24 2003-10-20 ウシオ電機株式会社 斜め光照射装置
US6122103A (en) * 1999-06-22 2000-09-19 Moxtech Broadband wire grid polarizer for the visible spectrum
US6234634B1 (en) * 1999-07-28 2001-05-22 Moxtek Image projection system with a polarizing beam splitter
GB2358512A (en) 2000-01-18 2001-07-25 Screen Technology Ltd Production of a collimated beam
JP3603758B2 (ja) 2000-07-12 2004-12-22 ウシオ電機株式会社 液晶配向膜の光配向用偏光光照射装置の偏光素子
US6791749B2 (en) 2001-08-29 2004-09-14 Delpico Joseph Polarized exposure for web manufacture
US20030206337A1 (en) * 2002-05-06 2003-11-06 Eastman Kodak Company Exposure apparatus for irradiating a sensitized substrate
US6899440B2 (en) * 2002-05-17 2005-05-31 Infocus Corporation Polarized light source system with mirror and polarization converter
US6874899B2 (en) 2002-07-12 2005-04-05 Eastman Kodak Company Apparatus and method for irradiating a substrate
KR20040086077A (ko) * 2003-03-28 2004-10-08 삼성전자주식회사 컬러 스크롤 가능한 프로젝션 타입 화상 표시장치

Also Published As

Publication number Publication date
WO2005119349A2 (en) 2005-12-15
KR20070020090A (ko) 2007-02-16
US7413317B2 (en) 2008-08-19
JP2008501997A (ja) 2008-01-24
CN1973243A (zh) 2007-05-30
WO2005119349A3 (en) 2006-06-01
EP1751616A2 (en) 2007-02-14
US20050270617A1 (en) 2005-12-08

Similar Documents

Publication Publication Date Title
TW200608149A (en) Polarized UV exposure system
US6985291B2 (en) Non-inverting transflective assembly
CN105093649B (zh) 防蓝光偏光板及液晶显示面板
EP2237103A1 (en) Liquid crystal display
JP4228004B2 (ja) 透過型液晶表示装置
JP2002372622A (ja) 複合位相差板、円偏光板及び液晶表示装置、有機ｅｌ表示装置
WO2004036300A8 (ja) 表示装置および表示装置搭載機器
ATE537473T1 (de) Elliptisch polarisierende transparente schutzschicht, polarisationsschicht, transparenter träger und optisch anisotrope schicht aus flüssigkristallmolekülen
JP2005512112A (ja) 液晶表示装置に使用するための偏光子
TW200604636A (en) Liquid crystal display
JP2005504333A5 (zh)
EP1975686A3 (en) Liquid crystal display provided with an optical phase retarder
US6654081B2 (en) Optic element, illumination device and/or liquid-crystal display device
TW200622316A (en) Polarizer, polarizing plate, optical film and image display device
WO2007079148A3 (en) An optical film composite for tf systems having integrated functions of light diffusion and reflective polarization
US8922740B2 (en) Light efficiency enhancing optical devices
CN105062504A (zh) 一种增亮膜用可聚合性液晶组合物
TW200732736A (en) Reflective liquid crystal display panel
FR2808891B1 (fr) Dispositif bistable d'affichage en reflexion
JP2004538515A (ja) 反射型液晶ディスプレイ
TWI225942B (en) Optical device and liquid-crystal display apparatus
TW554192B (en) Method of imparting preferred alignment, and liquid crystal device elements incorporating a preferred alignment
TW200708827A (en) Semi-transmissive liquid crystal display device
JP2005308988A (ja) 円偏光型反射偏光板、光学素子、集光バックライトシステムおよび液晶表示装置
JP2003270411A (ja) 異方性散乱素子、これを用いた偏光板、光学素子、画像表示装置