TW200607098A - Crystallization apparatus, crystallization method, and phase modulation device - Google Patents

Crystallization apparatus, crystallization method, and phase modulation device

Info

Publication number
TW200607098A
TW200607098A TW094110397A TW94110397A TW200607098A TW 200607098 A TW200607098 A TW 200607098A TW 094110397 A TW094110397 A TW 094110397A TW 94110397 A TW94110397 A TW 94110397A TW 200607098 A TW200607098 A TW 200607098A
Authority
TW
Taiwan
Prior art keywords
modulation device
phase modulation
area
crystallization
phase
Prior art date
Application number
TW094110397A
Other languages
English (en)
Inventor
Tomoya Kato
Masakiyo Matsumura
Yukio Taniguchi
Original Assignee
Adv Lcd Tech Dev Ct Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004226669A external-priority patent/JP2006049481A/ja
Priority claimed from JP2004226668A external-priority patent/JP4711166B2/ja
Application filed by Adv Lcd Tech Dev Ct Co Ltd filed Critical Adv Lcd Tech Dev Ct Co Ltd
Publication of TW200607098A publication Critical patent/TW200607098A/zh

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/08Arrangements for controlling the speed or torque of a single motor
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B1/00Single-crystal growth directly from the solid state
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16Heating of the molten zone
    • C30B13/22Heating of the molten zone by irradiation or electric discharge
    • C30B13/24Heating of the molten zone by irradiation or electric discharge using electromagnetic waves
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/14Electronic commutators
    • H02P6/16Circuit arrangements for detecting position
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1004Apparatus with means for measuring, testing, or sensing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Recrystallisation Techniques (AREA)
  • Thin Film Transistor (AREA)
TW094110397A 2004-08-03 2005-03-31 Crystallization apparatus, crystallization method, and phase modulation device TW200607098A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004226669A JP2006049481A (ja) 2004-08-03 2004-08-03 結晶化装置、結晶化方法、および位相変調素子
JP2004226668A JP4711166B2 (ja) 2004-08-03 2004-08-03 結晶化装置、および結晶化方法

Publications (1)

Publication Number Publication Date
TW200607098A true TW200607098A (en) 2006-02-16

Family

ID=35756177

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094110397A TW200607098A (en) 2004-08-03 2005-03-31 Crystallization apparatus, crystallization method, and phase modulation device

Country Status (3)

Country Link
US (1) US7347897B2 (zh)
KR (1) KR20060047347A (zh)
TW (1) TW200607098A (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200541078A (en) * 2004-03-31 2005-12-16 Adv Lcd Tech Dev Ct Co Ltd Crystallization apparatus, crystallization method, device, optical modulation element, and display apparatus
US20070201014A1 (en) * 2006-02-27 2007-08-30 Yukio Taniguchi Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, semiconductor device, and light modulation element
JP2008270726A (ja) * 2007-03-23 2008-11-06 Advanced Lcd Technologies Development Center Co Ltd 結晶化装置、結晶化方法、デバイス、および光変調素子
JP2009272509A (ja) * 2008-05-09 2009-11-19 Advanced Lcd Technologies Development Center Co Ltd 光照射装置、結晶化装置、結晶化方法、およびデバイス
WO2011045065A1 (en) * 2009-10-15 2011-04-21 Sony Corporation Birefringent device with application specific pupil function and optical device
KR101688074B1 (ko) * 2010-01-27 2016-12-21 삼성디스플레이 주식회사 표시기판 및 이의 제조방법
JP5412350B2 (ja) * 2010-03-26 2014-02-12 富士フイルム株式会社 複屈折パターンを有する物品
TWI577840B (zh) * 2014-04-29 2017-04-11 中美矽晶製品股份有限公司 多晶矽鑄錠與來自其的矽晶圓
CN106651932B (zh) * 2016-11-17 2020-05-26 天津大学 基于多尺度梯度差值的单幅图像散焦模糊估计算法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5529951A (en) * 1993-11-02 1996-06-25 Sony Corporation Method of forming polycrystalline silicon layer on substrate by large area excimer laser irradiation
JP4403599B2 (ja) 1999-04-19 2010-01-27 ソニー株式会社 半導体薄膜の結晶化方法、レーザ照射装置、薄膜トランジスタの製造方法及び表示装置の製造方法
JP4307041B2 (ja) * 2002-09-20 2009-08-05 株式会社 液晶先端技術開発センター 結晶化装置および結晶化方法
TW200500512A (en) * 2002-12-04 2005-01-01 Adv Lcd Tech Dev Ct Co Ltd Crystallization apparatus and crystallization method

Also Published As

Publication number Publication date
KR20060047347A (ko) 2006-05-18
US7347897B2 (en) 2008-03-25
US20060027162A1 (en) 2006-02-09

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