TW200605357A - Thin film transistor structure and method of fabricating the same - Google Patents
Thin film transistor structure and method of fabricating the sameInfo
- Publication number
- TW200605357A TW200605357A TW093132620A TW93132620A TW200605357A TW 200605357 A TW200605357 A TW 200605357A TW 093132620 A TW093132620 A TW 093132620A TW 93132620 A TW93132620 A TW 93132620A TW 200605357 A TW200605357 A TW 200605357A
- Authority
- TW
- Taiwan
- Prior art keywords
- layer
- thin film
- film transistor
- etch
- fabricating
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 125000006850 spacer group Chemical group 0.000 abstract 3
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78609—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device for preventing leakage current
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78663—Amorphous silicon transistors
- H01L29/78669—Amorphous silicon transistors with inverted-type structure, e.g. with bottom gate
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093132620A TWI345312B (en) | 2004-07-26 | 2004-10-27 | Thin film transistor structure and method of fabricating the same |
US11/053,628 US7652285B2 (en) | 2004-07-21 | 2005-02-08 | Thin film transistor structure and method of fabricating the same |
US12/639,436 US7960729B2 (en) | 2004-07-21 | 2009-12-16 | Thin film transistor structure and method of fabricating the same |
US13/103,395 US8288194B2 (en) | 2004-07-21 | 2011-05-09 | Method of fabricating thin film transistor structure |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW93121800 | 2004-07-26 | ||
TW093132620A TWI345312B (en) | 2004-07-26 | 2004-10-27 | Thin film transistor structure and method of fabricating the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200605357A true TW200605357A (en) | 2006-02-01 |
TWI345312B TWI345312B (en) | 2011-07-11 |
Family
ID=35657756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093132620A TWI345312B (en) | 2004-07-21 | 2004-10-27 | Thin film transistor structure and method of fabricating the same |
Country Status (2)
Country | Link |
---|---|
US (3) | US7652285B2 (zh) |
TW (1) | TWI345312B (zh) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7566913B2 (en) * | 2005-12-02 | 2009-07-28 | Nitronex Corporation | Gallium nitride material devices including conductive regions and methods associated with the same |
JP5371341B2 (ja) * | 2007-09-21 | 2013-12-18 | 株式会社半導体エネルギー研究所 | 電気泳動方式の表示装置 |
US7998801B2 (en) * | 2008-04-25 | 2011-08-16 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing method of thin film transistor having altered semiconductor layer |
JP5096437B2 (ja) * | 2009-09-28 | 2012-12-12 | 株式会社ジャパンディスプレイイースト | 有機el表示装置 |
US8912536B2 (en) * | 2010-11-19 | 2014-12-16 | Samsung Electronics Co., Ltd. | Transistors, methods of manufacturing the same and electronic devices including transistors |
JP5719610B2 (ja) * | 2011-01-21 | 2015-05-20 | 三菱電機株式会社 | 薄膜トランジスタ、及びアクティブマトリクス基板 |
JPWO2016093087A1 (ja) * | 2014-12-09 | 2017-09-07 | 東京エレクトロン株式会社 | パターン形成方法、ガスクラスターイオンビーム照射装置及びパターン形成装置 |
CN104576318B (zh) * | 2014-12-24 | 2017-09-05 | 深圳市华星光电技术有限公司 | 一种非晶硅表面氧化层形成方法 |
CN105097944A (zh) * | 2015-06-25 | 2015-11-25 | 京东方科技集团股份有限公司 | 薄膜晶体管及其制备方法、阵列基板、显示装置 |
US10325543B2 (en) | 2015-12-15 | 2019-06-18 | a.u. Vista Inc. | Multi-mode multi-domain vertical alignment liquid crystal display and method thereof |
US10114251B2 (en) | 2015-12-17 | 2018-10-30 | A.U. Vista, Inc. | Liquid crystal display having holding member and method of fabricating same |
US10217707B2 (en) * | 2016-09-16 | 2019-02-26 | International Business Machines Corporation | Trench contact resistance reduction |
US10269834B2 (en) | 2017-01-10 | 2019-04-23 | A.U. Vista, Inc. | TFT array for use in a high-resolution display panel and method for making same |
US10151953B2 (en) | 2017-02-22 | 2018-12-11 | A. U. Vista, Inc. | In-plane switching display having protrusion electrodes with metal enhanced adhesion |
WO2019234890A1 (ja) * | 2018-06-07 | 2019-12-12 | 堺ディスプレイプロダクト株式会社 | 薄膜トランジスタおよびその製造方法 |
CN109461658A (zh) * | 2018-10-09 | 2019-03-12 | 深圳市华星光电技术有限公司 | 一种薄膜晶体管的制备方法及薄膜晶体管 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4523372A (en) * | 1984-05-07 | 1985-06-18 | Motorola, Inc. | Process for fabricating semiconductor device |
US5032883A (en) * | 1987-09-09 | 1991-07-16 | Casio Computer Co., Ltd. | Thin film transistor and method of manufacturing the same |
US5198694A (en) * | 1990-10-05 | 1993-03-30 | General Electric Company | Thin film transistor structure with improved source/drain contacts |
US5384271A (en) * | 1993-10-04 | 1995-01-24 | General Electric Company | Method for reduction of off-current in thin film transistors |
JP2900229B2 (ja) * | 1994-12-27 | 1999-06-02 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法および電気光学装置 |
US5835177A (en) * | 1995-10-05 | 1998-11-10 | Kabushiki Kaisha Toshiba | Array substrate with bus lines takeout/terminal sections having multiple conductive layers |
JP3409542B2 (ja) * | 1995-11-21 | 2003-05-26 | ソニー株式会社 | 半導体装置の製造方法 |
US5811325A (en) * | 1996-12-31 | 1998-09-22 | Industrial Technology Research Institute | Method of making a polysilicon carbon source/drain heterojunction thin-film transistor |
JPH10326748A (ja) | 1997-05-26 | 1998-12-08 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
TW415110B (en) * | 1999-08-12 | 2000-12-11 | Hannstar Display Corp | Fabrication method of thin-film transistor |
US6413846B1 (en) * | 2000-11-14 | 2002-07-02 | Advanced Micro Devices, Inc. | Contact each methodology and integration scheme |
US6465286B2 (en) * | 2000-12-20 | 2002-10-15 | General Electric Company | Method of fabricating an imager array |
-
2004
- 2004-10-27 TW TW093132620A patent/TWI345312B/zh active
-
2005
- 2005-02-08 US US11/053,628 patent/US7652285B2/en active Active
-
2009
- 2009-12-16 US US12/639,436 patent/US7960729B2/en active Active
-
2011
- 2011-05-09 US US13/103,395 patent/US8288194B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI345312B (en) | 2011-07-11 |
US8288194B2 (en) | 2012-10-16 |
US7652285B2 (en) | 2010-01-26 |
US20100093137A1 (en) | 2010-04-15 |
US20110212606A1 (en) | 2011-09-01 |
US7960729B2 (en) | 2011-06-14 |
US20060019433A1 (en) | 2006-01-26 |
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