TW200602441A - Immersion liquid for liquid immersion lithography process, and resist-pattern forming method using immersion liquid - Google Patents

Immersion liquid for liquid immersion lithography process, and resist-pattern forming method using immersion liquid

Info

Publication number
TW200602441A
TW200602441A TW094117170A TW94117170A TW200602441A TW 200602441 A TW200602441 A TW 200602441A TW 094117170 A TW094117170 A TW 094117170A TW 94117170 A TW94117170 A TW 94117170A TW 200602441 A TW200602441 A TW 200602441A
Authority
TW
Taiwan
Prior art keywords
liquid
immersion
resist
lithography process
liquid immersion
Prior art date
Application number
TW094117170A
Other languages
English (en)
Other versions
TWI299518B (zh
Inventor
Taku Hirayama
Kazumasa Wakiya
Kotaro Endo
Masaaki Yoshida
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200602441A publication Critical patent/TW200602441A/zh
Application granted granted Critical
Publication of TWI299518B publication Critical patent/TWI299518B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW094117170A 2004-05-25 2005-05-24 Immersion liquid for liquid immersion lithography process, and resist-pattern forming method using immersion liquid TW200602441A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004155274A JP2005340397A (ja) 2004-05-25 2004-05-25 液浸露光プロセス用浸漬液および該浸漬液を用いたレジストパターン形成方法

Publications (2)

Publication Number Publication Date
TW200602441A true TW200602441A (en) 2006-01-16
TWI299518B TWI299518B (zh) 2008-08-01

Family

ID=35451133

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117170A TW200602441A (en) 2004-05-25 2005-05-24 Immersion liquid for liquid immersion lithography process, and resist-pattern forming method using immersion liquid

Country Status (4)

Country Link
US (1) US20090011375A1 (zh)
JP (1) JP2005340397A (zh)
TW (1) TW200602441A (zh)
WO (1) WO2005117074A1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006140429A (ja) * 2004-10-13 2006-06-01 Asahi Glass Co Ltd 液浸型露光方法および液浸型露光用媒体
JP4616884B2 (ja) * 2005-04-26 2011-01-19 三井化学株式会社 液浸式露光用液体、液浸式露光用液体の精製方法および液浸式露光方法
JP4485994B2 (ja) * 2005-06-03 2010-06-23 パナソニック株式会社 パターン形成方法
WO2007026573A1 (ja) * 2005-08-29 2007-03-08 Mitsui Chemicals, Inc. 液浸式露光用液体および液浸式露光方法
US7745102B2 (en) * 2006-05-26 2010-06-29 Massachusetts Institute Of Technology Immersion fluids for lithography
US7586103B2 (en) 2006-09-09 2009-09-08 E. I. Du Pont De Nemours And Company High refractive index fluids for immersion lithography
US7771919B2 (en) 2006-09-09 2010-08-10 E. I. Du Pont De Nemours And Company High refractive index fluids for immersion lithography
US9468251B2 (en) * 2012-05-30 2016-10-18 Nike, Inc. Sole assembly including a central support structure for an article of footwear
JP2020118743A (ja) * 2019-01-21 2020-08-06 セイコーエプソン株式会社 偏光素子の製造方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2845287B2 (ja) * 1990-09-28 1999-01-13 オリンパス光学工業株式会社 顕微鏡用液浸油
JPH07220990A (ja) * 1994-01-28 1995-08-18 Hitachi Ltd パターン形成方法及びその露光装置
EP1225478B1 (en) * 1998-04-06 2012-12-19 FUJIFILM Corporation Photosensitive resin composition
JP4565534B2 (ja) * 2001-07-19 2010-10-20 昭和電工株式会社 化学増幅型レジスト用難溶化層形成防止材料及び防止方法
JP4025683B2 (ja) * 2003-05-09 2007-12-26 松下電器産業株式会社 パターン形成方法及び露光装置
US7432042B2 (en) * 2003-12-03 2008-10-07 United Microelectronics Corp. Immersion lithography process and mask layer structure applied in the same
US7125652B2 (en) * 2003-12-03 2006-10-24 Advanced Micro Devices, Inc. Immersion lithographic process using a conforming immersion medium

Also Published As

Publication number Publication date
US20090011375A1 (en) 2009-01-08
JP2005340397A (ja) 2005-12-08
WO2005117074A1 (ja) 2005-12-08
TWI299518B (zh) 2008-08-01

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