200532603 九、發明說明： (一） 發明所屬之技術領域 本發明係關於電漿顯示器面板或電發 之背光部面板等之顯示器用中空平面面 對向的玻璃基板間的中空部進行給排氣） (二） 先前技術 一般，電漿顯示器面板，係一對玻璃 將設置於內面的多數條平行電極線互相 之電漿產生氣體在減壓狀態（一般爲1/3 於兩玻璃基板間的中空部內，經由在兩 放電而產生電漿，因而施行所需要圖型 是，近年之中電漿顯示器之大型化頗有 尺寸爲60英吋或80英吋之大畫面電绿 視等已經上市販賣。 習知，此種電漿顯示器面板之製造上 所示，在兩玻璃基板3 1，3 2之內面上必 等塗佈，或以真空成膜法所形成的導電 之圖型蝕刻等，而形成平行電極線3 3 a · 一方之玻璃基板3 1的角落部等形成通氣 板3 1，3 2在周緣部間以含有玻料之玻料 而重疊，更將玻璃基板3 1的通氣孔3 5 之給排氣管3 7藉由同樣的漿料3 6，依照 立地設置，在該狀態下一面將全體加熱 氣管3 7施行抽真空，使漿料熔劑蒸發· [•位址液晶顯示器 板，在製造時，在 1之給排氣裝置。 基板成對向配置， 直交，將氖及氙等 大氣壓左右）下封入 側電極的交叉部之 的發光顯示者。但 進展，使用對角線 【顯示器做成電漿電 ，如第 10(A)(B)圖 (導電性漿料之網印 金屬膜之光蝕刻法 …，33b···，同時在其 孔3 5，將兩玻璃基 密封用漿料3 6塗佈 之外側上將玻璃製 (圖示之假想線而直 燒成，一面從給排 熔融玻璃化之同時 -6- 200532603 ，並將兩玻璃基板3 1 5 3 2間之中空部3 0內之空氣排出。然 後，在該排氣完成而使全體冷卻之後，電漿產生氣體通過 該給排氣管3 7導入中空部3 0內後，將該給排氣管3 7之根 部側以氣體燃燒器等炙熱之，而如圖示之實線進行熔斷並 封合，因而將電漿產生氣體封入於中空部3 0內。 而，兩玻璃基板31，32爲取得與平行電極線33a…，33b… 之導線連接，彼此一側緣係形成從對手側突出1 5毫米左右 之形狀。並且，雖然在第9(A) (B)圖中省略，但是亦有在兩 玻璃基板3 1，3 2之內面上塗佈含有玻料之漿料，利用上述 之燒成而形成將平行電極線33a…，3 3b…覆蓋之玻璃層，且 在兩玻璃基板3 1，3 2之一方的內面之各電極線間，蓋滿含 有玻料的隔壁形成用漿料，利用上述之燒成而設置玻璃隔 壁之情形。 (三）發明內容 【本發明所欲解決之課題】 但是，先前之電漿顯示器面板，係在厚的（通常厚度爲3〜5 毫米左右）玻璃基板3 1上，需要以很大的功夫而做鑽孔加 工，以形成通氣孔3 5，在該鑽孔加工後附著的硏磨材或玻 璃粉雖然可以洗淨而除去，但是欲完全施行該洗淨除去很 困難，因此有由殘留的硏磨材或玻璃粉所引起的顯示特性 不良而造成良率降低的問題。並且，通氣孔35當然係設置 在面臨中空部3 0的位置上之故，該通氣孔3 5之形成領域 變成非顯示空間，或給排氣管3 7對玻璃基板3 1之面係垂 直立設固定之故，因而有設計上的限制很大之難點。再者 200532603 ’加上該通氣孔35之孔徑有界限，形成中空部30的兩玻 璃基板31，32之對向間隔一般爲數百；zm左右，並且從中 空部3 0的非常狹小的間隙朝向通氣孔3 5之排氣通路係爲 直角之故，其排氣阻抗很大，排氣到預定之真空度要花費 很多時間，尤其對角線尺寸爲60英吋或80英吋之大畫面 電漿顯示器用面板之情形，排氣時間變長，因而有製造效 率降低之問題。 本發明係鑑於上述情況而開發者，其目的在提供一種電 漿顯示器面板等之顯示器用中空平面面板的給排氣裝置， 其不需要對玻璃基板做鑽孔加工，因而，可使製造工程簡 易化及防止良率之降低，同時與先前比較，其設計之自由 度更格外地擴大，並且排氣效率提高，因而使製造效率亦 可大幅地提高。 【解決課題之手段】 爲了達成上述目的，本發明之申請專利範圍第1項之顯 示器用中空平面面板的給排氣裝置，係在對向的玻璃基板 間利用相互周緣部之玻料密封而設置中空部的顯示器用中 空平面面板的給排氣裝置，其特徵爲··兩玻璃基板間之周 緣的一部分設置未具有上述玻料密封的通氣間隙，在具有. 該通氣間隙的面板側緣部之外側上，安裝有內部連通到該 通热間隱的玻璃製給排氣配接器，藉由該給排氣配接器而 對上述中空部進行給排氣。 申請專利範圍第2項之發明，係針對申請專利範圍第1 項之顯示器用中空平面面板的給排氣裝置，其中上述給排 200532603 氣配接器係由配接器本體，及從該配接器本體突出之給排 氣管所構成。 申請專利範圍第3項之發明，係針對申請專利範圍第1 或2項之顯示器用中空平面面板的給排氣裝置，其中上述 給排氣配接器，係跨嵌在一方之玻璃基板的端緣部與另一 方之玻璃基板的之突出部之間構成的段部之狀態下被固定 〇 申請專利範圍第4項之發明，係針對申請專利範圍第1 或2項之顯示器用中空平面面板的給排氣裝置，其中上述 給排氣配接器係將兩玻璃基板之重疊部分，從外側抱持的 狀態被固定。 申請專利範圍第5項之發明，係針對申請專利範圍第1 或2項之顯示器用中空平面面板的給排氣裝置，其中上述 中空平面面板，係爲兩玻璃基板之內面上設置有互相直交 方向之平行電極線的電漿顯示器用中空平面面板。 如依照申請專利範圍第1項之顯示器用中空平面面板的 給排氣裝置，兩玻璃基板間之周緣的一部分設置未具有上 述玻料密封的通氣間隙，藉由設置在具有該通氣間隙的給 排氣配接器，而對上述中空部進行給排氣之故，因此不薷 要如先前技術之對一方基板所做的鑽孔加工，僅此即可使 製造工程簡化，同時可避免隨著鑽孔加工而產生的硏磨材 或玻璃粉之附著所造成的良率降低，並且由於給排氣管的 安裝而使有効顯示領域不受到限制，而且排氣方向可做種 種的設定，因此與先前技術比較’其設計之自由度格外地 200532603 擴大’並且給排氣配接器之通氣剖面積被做大，且通氣間 隙的寬度可寬廣地設定，而且從中空部朝向該配接器內部 之排氣方向係爲直線之故，排氣時之排氣阻抗變小，僅此 即可使排氣效率提高且排氣時間縮短，在大型面板中亦可 在短時間將排氣完成，因此其製造效率可大幅地提高。並 且，給排氣配接器係爲玻璃製之小物品之故，可以低成本 容易地製作出種種的形態。 如依照申請專利範圍第2項之發明，上述給排氣配接器 係由配接器本體及給排氣管部所構成，因此其各個之構造 變成簡單’同時具有可以價廉地將各個量產之優點。 如依照申請專利範圍第3項之發明，上述給排氣配接器 係做成跨嵌在兩玻璃基板的端緣間構成的段部之構造，因 此具有使該給排氣配接器的安裝容易進行之優點。 如依照申請專利範圍第4項之發明，上述給排氣配接器 係做成將兩玻璃基板之重疊部分從外側抱持的構造，因此 具有由於該排氣配接器之安裝而使體積增大被設定成更少 之優點。 如依照申請專利範圍第5項之發明，尤其以電漿顯示器 用面板做爲對象時，具有：其製造效率及良率可大幅地提 高，並且設計之自由度變大之優點。 (四）實施方式 以下，將參照附圖而具體地說明本發明之顯示器用中空 平面面板的給排氣裝置適用於電漿顯示器用面板之實施形 態。第1圖及第2圖係顯示第1實施形態、第3圖係顯示 -10- 200532603 第2實施形態、第4圖係顯示第3實施形態、第5圖係顯 示第4實施形態、第6圖係顯示第5實施形態、第7圖係 顯示第6實施形態、第8圖係顯示第7實施形態、第9圖 係顯示第8實施形態。 第1實施形態之給排氣裝置，如第1(A) (B)圖及第2(A) (B) 圖所示，在做成互相之一側緣從對方側突出1 5毫米左右之 對向配置的玻璃基板1，2之間，利用相互周緣部之玻料密 封3 A而設置有中空部4的中空平面面板1 0之中，沿著在 圖示之上側的玻璃基板1之端緣側1 b與下側之玻璃基板2 之突出部2a之間構成的段部1 0a之位置上，由於玻料密封 3 A之中斷，而形成使中空部4之內外透通的通氣間隙5， 同時在該通氣間隙5之形成位置上藉由玻料密封3B而安裝 有玻璃製之給排氣用配接器6 A。而，雨玻璃基板1，2之突 出部la，2a之表面上，具有從中空部4內連接之平行電極 線11…，2 1···，配接器6A相對於玻璃基板2係配置於突出 部2a之平行電極線2 1的形成領域上。 該給排氣用配接器6A，係由下方開放的具有段差之箱形 配接器本體6 1、及下端開放成喇叭狀的給排氣管62所構成 。然後，配接器本體6 1係在具段差部6 1 a密接於玻璃基板 1之緣角的形態下跨嵌於段部1 〇a上，其內部空間60連通 到通氣間隙5中。並且，給排氣管62係面臨設置於配接器 本體61之上壁的圓形開口 61b，而在該配接器本體61上藉 由玻料密封3 C而直立地設置。 玻料密封3A〜3C係將比兩玻璃基板1，2及配接器6A之 -11- 200532603 玻璃原料之熔點更低之玻料，在載具中混合所成的漿料塗 佈所成者’在獎料的形態下可發揮黏著作用，利用燒成而 溶劑蒸發·熔融玻璃化。 第2實施形態之給排氣裝置，如第3(A)〜（c)圖所示，在 沿著與上述第1實施形態同樣的中空平面面板1 〇中的段部 1 0 a之位置上，由於玻料密封3 a之中斷，而形成使中空部 4之內外透通的通氣間隙5，同時在該通氣間隙5之形成位 置上安裝有玻璃製之給排氣用配接器6B。 該給排氣用配接器6 B，係由下方開放的具有段差之箱形 配接器本體63、及從該配接器本體63向前方突出之給排氣 管64所構成。然後，配接器本體63係在具段差部63a密 接於玻璃基板1之緣角的形態下跨嵌於段部1 〇 a上，其內 部空間6 0連通到通氣間隙5中。並且，給排氣管6 4之後 端係插嵌於設置在配接器本體63之靠近前壁上部之位置的 圓孔63b，而連通到該配接器本體63之內部空間60中。而 ’雖然圖示省略，相對於配接器本體63之兩玻璃基板1，2 的抵接部，及相對於該配接器本體63之給排氣管64之插 嵌部上，塗佈有玻料密封之漿料。 第3實施形態之給排氣裝置，如第4(A) (B)圖所示，在沿 著與上述第1實施形態同樣的中空平面面板1 0中的段部1 〇a 之位置上，由於玻料密封3 A之中斷，而形成使中空部4之 內外透通的通氣間隙5，同時在該通氣間隙5之形成位置上 安裝有玻璃製之給排氣用配接器6C。 該給排氣用配接器6C係由上部構成圓筒狀之給排氣管 -12- 200532603 65a，下部向下方開放之具段差四角錐部65b成爲一體之玻 璃成型物6 5所形成，而下部四角錐部6 5 b之具段差部6 5 c 係在密接於玻璃基板1之緣角的形態下跨嵌於段部1 0 a上 ，其內部空間60連通到通氣間隙5中，同時給排氣管65a 係垂直地配置。然後，雖然圖示省略，在該給排氣用配接 器6 C中，相對於下部6 5 b之兩玻璃基板1，2的抵接部上 亦塗佈有玻料密封之漿料。 在利用上述第1〜第3實施形態之給排氣裝置的電漿顯示 器用面板之製作中，如已敘述者，在給排氣用配接器6A〜6C Φ 安裝於中空平面面板1 〇之段部1 〇a的狀態下，其全體係配 置於加熱爐內，同時配接器6A〜6C之給排氣管62,64,65 a 的前端部連接到給排氣管路，在玻料密封之玻料的熔點以 上，且未達到兩玻璃基板1，2及配接器6A〜6C之玻璃原料 的熔點之溫度下，一面進行加熱燒成，一面從給排氣管 62,64,65a進行抽真空。因而，使玻料密封之漿料溶劑蒸發 •熔融玻璃化，而形成玻璃層，同時，可使兩玻璃基板1，2 之中空部4內的空氣被排出到外部。然後，在該排氣完成 # 而使全體冷卻之後，如氣氣或氣氣之電發產生氣體通過給 排氣管62，64,65a而導入中空部4內，其後將該給排氣管 62,64,65a之根部側以氣體燃燒器等炙熱之而進行熔斷封合 ，因而可將電漿產生氣體封入於中空部4內。 在利用此種給排氣裝置的電漿顯示器用面板之製作中， 玻璃基板1，2之一方不需要如先前技術一樣的鑽孔加：C， 因此也不需要該鑽孔加工後之嚴格洗淨，因而製造工程可 -13- 200532603 大幅地簡化，同時不會產生隨著鑽孔加工產生之硏磨材或 玻璃粉所引起的性能不良，因而與先前技術比較時良率格 外地提高。並且，加上給排氣用配接器6A〜6C係安裝於重 疊的玻璃基板1，2之側緣間所構成的段部1 〇a中，構成該 段部1 〇a的一方之玻璃基板2的突出部2a中，與平行電極 線2 1…之形成領域上接合亦無障礙之故，因而不會使中空 部4中之有効顯示領域縮小。並且，通氣間隙5的寬度在 面臨配接器6A〜6C之內部空間60的範圍內可寬廣地設定 ，而且從中空部4朝向配接器6A〜6C之內部空間60的排 氣方向係爲直線之故，排氣時之排氣阻抗變小，僅此即可 使排氣效率提高且排氣時間縮短，在大型面板中亦可在短 時間將排氣完成，因此其製造效率可大幅地提高。 第4實施形態之給排氣裝置，如第5(A) (B)圖所示，在對 向配置的玻璃基板1，2之間，利用相互周緣部之玻料密封 3A而設置有中空部4的中空平面面板1〇之角落部中，將 圖示上側之玻璃基板1的角部切除，沿著該切斷端部1 c及 下側之玻璃基板2之等腰三角形的角落部2c之間構成的段 部1 〇a之位置上，由於玻料密封3 A之中斷，而形成使中空 部4之內外透通的通氣間隙5，同時在該通氣間隙5之形成 位置上藉由玻料密封3B而安裝有玻璃製之給排氣用配接器 6D。而，符號1 1，2 1係設置在兩玻璃基板1，2之內面的平 行電極線。 該給排氣用配接器6D，係由下方開放的附有段差之箱形 配接器本體66、及下端開放成喇叭狀的給排氣管67所構成 200532603 。然後，配接器本體66係在附段差部66a密接於玻璃基板 1之緣角的形態下跨嵌於段部1 〇 b上，其內部空間6 0連通 到通氣間隙5中。並且，給排氣管67係面臨設置於配接器 本體61之上壁的圓形開口 66b，而在該配接器本體66上藉 由玻料密封3 C而直立地設置。 第5實施形態之給排氣裝置，如第6(A) (B)圖所示，在沿 著與上述第1實施形態同樣的中空平面面板1 0中的段部1 〇b 之位置上，由於玻料密封3A之中斷，而形成使中空部4之 內外透通的通氣間隙5，同時在該通氣間隙5之形成位置上 藉由玻料密封3 B安裝有玻璃製之給排氣用配接器6E。 該給排氣用配接器6E，係由下方開放的具有段差之箱形 配接器本體68、及從該配接器本體68向前方突出之給排氣 管6 9所構成。然後，配接器本體6 8係在具段差部6 8 a密 接於玻璃基板1之緣角的形態下跨嵌於段部1 〇b上，其內 部空間60連通到通氣間隙5中。並且，給排氣管69之後 端係插嵌於設置在配接器本體68之側壁上的圓孔68b中， 而連通到該配接器本體6 8之內部空間6 0中。並且，給排 氣管69之後端插嵌於設置在配接器本體68之側壁上的圓 孔6 8 b中，而連通到配接器本體6 8之內部空間6 0中。而 ，相對於該配接器本體6 8之給排氣管69之插嵌部上，塗 佈有玻料密封3 C之漿料。 第6實施形態之給排氣裝置，如第7(A)(B)圖所示，在沿 著與上述第5及第6實施形態同樣的中空平面面板10之角 落部的段部1 〇b之位置上，由於玻料密封3 A之中斷，而形 -15- 200532603 成使中空部4之內外透通的通氣間隙5，同時在該通氣間隙 5之形成位置上藉由玻料密封3 B而安裝有玻璃製之給排氣 用配接器6F。 該給排氣用配接器6F係由，上部構成圓筒狀之給排氣管 70a，下部向下方開放之具段差四角錐部70b成爲一體之玻 璃成型物70所形成，四角錐部70b之具段差部70c係在密 接於玻璃基板1之緣角的形態下跨嵌於段部1 上，其內 部空間60連通到通氣間隙5中，同時給排氣管70a係垂直 地配置。 ® 在利用上述第4〜第6實施形態之給排氣裝置的電漿顯示 器用面板之製作中，如已敘述者，在給排氣用配接器6D〜6 F 安裝於中空平面面板1 〇之段部1 Ob的狀態下，其全體係配 置於加熱爐內，同時配接器6D〜6F之給排氣管67,69,70a 的前端部連接到給排氣管路，與已經敘述的第1〜第3實施 形態同樣地一面進行加熱燒成，一面從給排氣管67,69,70a 進行抽真空，因而，使玻料密封3A/3C之漿料溶劑蒸發· 熔融玻璃化，而形成玻璃層，同時，可使兩玻璃基板1，2 ® 之中空部4內進行排氣，在該排氣完成而使全體冷卻之後 ，如気氣或氣氣之電黎產生氣體通過給排氣管67,69,70a而 導入中空部4內後，將該給排氣管67，69,70a之根源側以氣 體燃燒器等炙熱之而熔斷封合，因而可將電漿產生氣體封 入於中空部4內。 在利用此種第4〜第6實施形態之給排氣裝置的電漿顯示 器用面板之製作中，玻璃基板1，2之一方不需要如先前技 -16- 200532603 術一樣的鑽孔加工，因此也不需要該鑽孔加工後之嚴格洗 淨。然後，雖然一方之玻璃基板1的角落部被切除，但是 該切除係比鑽孔加工更容易，因而與先前技術比較其製造 工程可大幅地簡化，同時不會產生隨著鑽孔加工產生之硏 磨材或玻璃粉所引起的良率降低。並且，加上給排氣用配 接器6D〜6F係安裝於中空平面面板10之角落部中，因而不 會使中空部4中之有効顯示領域縮小，並且，以後之顯示 器組裝操作亦變成不麻煩。並且，與上述第1〜第3實施形 態同樣地，通氣間隙5的寬度可寬廣地設定，同時從中空 部4朝向配接器6D〜6F之內部空間60的排氣方向係爲直線 之故，排氣時之排氣阻抗變小，故可使排氣時間縮短。 第7實施形態之給排氣裝置，如第8(A)〜（C)圖所示，在 對向配置的玻璃基板1，2之間，利用相互周緣部之玻料密 封3A而設置有中空部4的中空平面面板10之角落部中， 由於玻料密封3A之中斷，而形成使中空部4之內外透通的 通氣間隙5，同時在該角落部中安裝有玻璃製之給排氣用配 接器6G。 該給排氣用配接器6G係由，平面視爲大致等腰三角形的 斜邊側及向上方開放之本體框部7 1、在該本體框部7 1上從 上被覆之平面視爲大致等腰三角形的蓋框部72、及後端插 嵌在設置於本體框部7 1之側壁且朝向上方打開之U字狀缺 口部7 1 a中的給排氣管73，之3個構件所形成，以本體框 部7 1及蓋框部72將中空平面面板1 0之角落部從上下抱持 的狀態下，給排氣管73配置成向側方突出。但是’雖然圖 -17- 200532603 示省略，相對於本體框部7 1及蓋框部72之兩玻璃基板1，2 的抵接部分、本體框部7 1及蓋框部72之嵌合部、相對於 本體框部7 1之給排氣管73的插嵌部上，分別塗佈有玻料 密封之漿料。 在該第7實施形態之給排氣裝置中，加上與上述第4〜第 6實施形態同樣的作用効果，玻璃基板1，2之一方不需要 將角落切除之故，可使電漿顯示器用面板之製造工程更簡 化，同時由於配接器的安裝而有體積之增大可設定成更少 之優點。 _ 使用於本發明給排氣裝置中之給排氣用配接器，例如上 述第3及第6實施形態中所使用的給排氣用配接器6C，6F 之中四角錐部65b，70b變成圓筒形的形態開始，在上述第 1〜第7實施形態中所例示以外亦可採用種種的形態，這些 均爲玻璃製的小物品之故，可以低成本容易地製作，同時 將使用於現有種種用途之管狀或箱狀之玻璃零件保持原樣 或加工成具有段差等之時亦可利用。並且，依照本發明之 給排氣裝置之時，如上述第1〜第7實施形態中所例示者， ® 利用所採用給排氣用配接器之構造而可將排氣方向做種種 設定，因此與先前技術比較，其設計的自由度格外地擴大 ，並且將給排氣用配接器之給排氣管部分的直徑做大，可 使排氣效率更加提高。因此，如第1、第2、第4、第5、 第7實施形態中之給排氣用配接器6A、6B、6D、6E、6G ，將配接器本體與給排氣管部做成爲分別構件之構成的話 ，可使其各個構造變成簡單化，並且具有各個可價廉地量 -18- 200532603 產之優點。 而，又利用附加加熱機構之真空室而對中空平面面板之 中空部進行給排氣之方式，採用此方式之情況下，本發明 之給排氣裝置也極爲有効。即，在該真空室方式中，利用 一對之玻璃基板間相互周緣部之玻料密封而設置中空部的 中空平面面板之全體配置於真空室內，將該室在加熱之下 抽真空，可預先藉由設置於該面板的通氣部而將中空部內 的空氣排出，同時可將玻料密封予以熔融玻璃化，其次將 室內做成電漿產生用氣體的環境，使該中空部內在充滿該 氣體之後，將通氣部封止。 然而，在一方之玻璃基板上設置孔以做爲通氣部之情形 ，如已經敘述者，需要麻煩之鑽孔加工，因而會產生由殘 留之硏磨材或玻璃粉所引起的顯示特性不良。相對於此， 利用本發明之給排氣裝置之時，不需要在玻璃基板上設孔 ，例如在上述第1〜第 7實施形態中，在中空平面面板1 0 上安裝給排氣用配接器6A〜6G的狀態下，裝塡到真空室內 ，如上述將氣體充滿中空部 4內之後，將給排氣管 62,64,65a，67,69,70a，73予以熔斷封止，或者將其前端開口 部藉由玻料密封以栓等予以封止的話即可。 但是，如上述第1〜第7實施形態之給排氣用配接器的給 排氣管，係做爲連接到給排氣管路所必須之故，因而適用 於真空室方式之情況的給排氣用配接器方面，例如第9圖 所顯示之給排氣用配接器6H者，爲不必設置給排氣管之構 成。該第8實施形態之給排氣裝置之給排氣用配接器6H， -19- 200532603 係與使用於上述第1實施形態之給排氣裝置的給排氣用配 接器6 A之配接器本體6 1爲同一形態，其係與該接器本體 6 1同樣地，由於構成中空平面面板1 〇之中空部4的玻料密 封3 A之中斷，而面臨通氣間隙5之形成位置，被安裝成藉 由玻料密封3 B而跨嵌到兩玻璃基板1，2間之段部1 上的 狀態。 安裝該給排氣用配接器6H之中空平面面板1〇’在真空 方式中會受到包含在玻料密封3 A，3 B之漿料中之溶劑成分 之不良影響，因此在空氣中進行暫時燒成之前處理’以使 溶劑揮散除去，同時在漿料固化（非熔融）之後，裝塡到真 空室內而施行既述之處理。在該處理中，首先利用加熱下 之抽真空，將中空部4內的空氣經由通氣間隙5及給排氣 用配接器6H，而從該給排氣用配接器6H之上壁的圓形開 口 74排出，同時由於玻料密封3A，3B之熔融玻璃化而使各 接合部固著，其次在真空室內做成電漿產生用氣體環境之 時，該氣體係由經路之反向而充滿中空部4內之故，在該 狀態下如附圖所示，玻璃製之蓋板7 6藉由玻料密封3 D而 被覆在給排氣用配接器6H之上，其次將被覆部之局部加熱 以使該玻料密封3 D熔融玻璃化，而將圓形開口 74封止。 本發明之給排氣裝置，並不限於例示之電漿顯示器用面 板，亦可適用於在電漿·位址液晶顯示器之背光部面板等 之其它種種顯示器用中空平面面板之製造時，必須在對向 的玻璃基板間之中空部進行給排氣之情況下較佳。 200532603 (五）圖式簡單說明 第1圖係顯示本發明之顯示器用中空平面面板之給排氣 裝置的第1實施形態，（A)係立體圖，（B)係縱剖開側面圖 第2圖係在同第1實施形態，（a )係顯示通氣間隙之構成 之下側玻璃基板的平面圖，（B)係給排氣裝置之平面圖； 第3圖係顯不同第2實施形態之給排氣裝置，（A)係平面 圖’（B)係正面圖，（C)係線之剖面箭頭方向視圖； 第4圖係顯示同第3實施形態之給排氣裝置，（A)係立體 圖’（B)係縱剖開側面圖； 第5圖係顯示周第4實施形態之給排氣裝置，（A)係平面 圖’（B)係（A)之口-口線之剖面箭頭方向視圖； 第6圖係顯示同第5實施形態之給排氣裝置，（A)係平面 圖’（B)係（A)之/、-八線之剖面箭頭方向視圖； 第7圖係顯示同第6實施形態之給排氣裝置，（A)係平面 圖，(B)係（A)之二-二線之剖面箭頭方向視圖； 第8圖係顯示同第4實施形態之給排氣裝置，（A)係平面 圖，（B)係正面圖，（C)係（A)之示-尔線之剖面箭頭方向視圖 第9圖係顯示同第8實施形態之給排氣裝置之縱剖開側 面圖； 第10圖係顯示先前技術中之電漿顯示器用中空平面面板 之給排氣部，（A)係立體圖，（B)係（A)之線之剖面箭頭 方向視圖。 200532603 【符號之說明】 1…玻璃基板 la…突出部 2…玻璃基板 2a5 2c…突出部 3 A…玻料密封 4…中空部 5…通氣間隙 6 A〜6H…給排氣用配接器 60…內部空間 61，63…配接器本體 6 2 5 6 4…給排氣管 65a，70a…給排氣管 65b，70b…給排氣管 6 6, 6 8…配接器本體 67，69…給排氣管 7 1…本體框部（配接器本體） 72…本體框部（配接器本體） 7 3…給排氣管 1 〇…中空平面面板 10a，10b…段部 11，21…平行電極線 -22-200532603 IX. Description of the invention: (1) The technical field to which the invention belongs The present invention relates to a hollow portion between glass substrates facing a hollow flat surface of a display panel such as a plasma display panel or an electro-luminescent backlight panel to supply and exhaust air) (2) In the prior art, generally, a plasma display panel is a pair of glasses, and a plurality of parallel electrode wires arranged on the inner surface of the plasma generates gas in a decompressed state (generally 1/3 is hollow between two glass substrates) In the Ministry, plasma is generated by two discharges. Therefore, the required pattern is that in recent years, the size of the plasma display has been enlarged, and large green TVs with a size of 60 inches or 80 inches have been marketed. Conventionally, as shown in the manufacture of such a plasma display panel, it is necessary to wait for coating on the inner surfaces of two glass substrates 31, 32, or conductive pattern etching formed by a vacuum film formation method, etc., and The parallel electrode wires 3 3 a are formed at the corners of one glass substrate 3 1, and the ventilation plates 3 1, 3 2 are overlapped with glass frit containing glass between the peripheral portions, and the ventilation holes 3 of the glass substrate 3 1 are further formed. 5 rows The tube 3 7 is installed in the same position with the same slurry 3 6. In this state, the entire heating gas tube 3 7 is evacuated to evaporate the slurry flux. [• Address LCD panel, Air-supply and exhaust device of 1. The substrates are arranged opposite to each other, orthogonally, and the light-emitting display is enclosed in the intersection of the side electrodes under atmospheric pressure such as neon and xenon. However, progress has been made using a diagonal line [display made of plasma electricity, as shown in Figure 10 (A) (B) (photoetching of screen-printed metal film of conductive paste ..., 33b ...) at the same time 3 5. Apply two glass-based sealing pastes 3 6 on the outer side and make glass (the imaginary line shown in the figure) and sinter directly. One side melts and vitrifies from the supply and discharge at the same time. The air in the hollow portion 30 between the substrates 3 1 5 3 2 is exhausted. Then, after the exhaust is completed and the entire body is cooled, the plasma-generating gas is introduced into the hollow portion 30 through the supply / exhaust pipe 37. The root side of the gas supply and exhaust pipe 37 is heated with a gas burner or the like, and the solid line shown in the figure is fused and sealed, so that the plasma-generating gas is enclosed in the hollow portion 30. Moreover, the two glasses The substrates 31 and 32 are connected to the lead wires of the parallel electrode lines 33a ..., 33b ..., and the edges of each of the substrates are formed to protrude from the opponent side by about 15 millimeters. Moreover, although shown in FIG. 9 (A) (B) Omitted, but there is also a glass frit-containing slurry coated on the inner surfaces of the two glass substrates 3 1, 3 2 and firing as described above. A glass layer is formed to cover the parallel electrode wires 33a ..., 3 3b ..., and between each electrode wire on the inner surface of one of the two glass substrates 31, 32 is covered with a slurry for forming a partition wall containing glass frit, A case where a glass partition wall is provided by firing as described above. (3) Summary of the invention [Problems to be Solved by the Invention] However, the conventional plasma display panel is based on a thick (usually a thickness of about 3 to 5 mm) glass substrate. On the 3 1, it is necessary to perform a drilling process with great effort to form the ventilation holes 3 5. Although the honing material or glass powder adhered after the drilling process can be washed and removed, the washing is required to be completely performed. Clean removal is difficult, so there is a problem that the yield is reduced due to poor display characteristics caused by the remaining honing material or glass frit. Of course, the vent hole 35 is of course provided at a position facing the hollow portion 30, The formation area of the vent holes 35 becomes a non-display space, or the surface of the glass substrate 31 is vertically fixed to the surface of the gas supply and exhaust pipe 37, which has a great difficulty in design restrictions. Furthermore, 200532603 ' Plus this ventilation The aperture of 35 has a limit, and the opposing interval between the two glass substrates 31 and 32 forming the hollow portion 30 is generally hundreds; about zm, and the exhaust path from the very narrow gap of the hollow portion 30 to the vent hole 35. Due to the right angle, the exhaust resistance is very large, and it takes a lot of time to exhaust to a predetermined vacuum degree, especially in the case of a large-screen plasma display panel with a diagonal size of 60 inches or 80 inches. It takes a long time to reduce the manufacturing efficiency. The present invention was developed in view of the above circumstances, and an object thereof is to provide a hollow flat panel air supply and exhaust device for a display such as a plasma display panel, which does not require a glass substrate. As a result of drilling, the manufacturing process can be simplified and the yield rate can be prevented. At the same time, compared with the previous one, the degree of freedom in design is greatly expanded, and the exhaust efficiency is improved, so that the manufacturing efficiency can be greatly improved. . [Means for solving the problem] In order to achieve the above-mentioned object, the air supply and exhaust device for a hollow flat panel for a display of the first patent application scope of the present invention is provided between glass substrates facing each other and sealed with glass frits at the peripheral edges. The air supply and exhaust device of a hollow flat panel for a display of a hollow portion is characterized in that: a part of the peripheral edge between the two glass substrates is provided with a ventilation gap without the above-mentioned frit seal, and is provided at a side edge portion of the panel having the ventilation gap. On the outside, a glass supply / exhaust adapter which is internally connected to the heat-passing space is installed, and the hollow portion is supplied and exhausted by the supply / exhaust adapter. The invention of the scope of patent application No. 2 is for the air supply and exhaust device of the hollow flat panel for display of the scope of patent application No. 1. The above-mentioned supply and exhaust 200532603 air adapter is composed of the adapter body and from the adapter. The main body of the device is formed by the exhaust pipe. The invention in the scope of patent application No. 3 is an air supply and exhaust device for a hollow flat panel for a display in the scope of patent application No. 1 or 2, in which the above-mentioned air supply and exhaust adapter is inserted across one end of a glass substrate The segment formed between the edge part and the protruding part of the other glass substrate is fixed in the state of the patent application No. 4 invention, which is for the hollow flat panel for display of the patent application No. 1 or 2 The air supply and exhaust device, wherein the air supply and exhaust adapter is fixed in a state where the overlapping portion of the two glass substrates is held from the outside. The invention in the scope of the patent application No. 5 is for the air supply and exhaust device of the hollow flat panel for the display in the scope of the patent application No. 1 or 2. The above-mentioned hollow flat panel is an inner surface of two glass substrates which are orthogonal to each other. Directional parallel electrode line hollow flat panel for plasma display. For example, according to the air supply and exhaust device for a hollow flat panel for a display according to item 1 of the scope of the patent application, a part of the peripheral edge between the two glass substrates is provided with a ventilation gap without the above-mentioned frit seal. Gas adapter, because the above-mentioned hollow part is supplied and exhausted, so it is not necessary to perform the drilling process on a substrate as in the prior art, which can simplify the manufacturing process and avoid The yield caused by the attachment of the honing material or glass frit caused by the hole processing is reduced, and the effective display area is not limited due to the installation of the exhaust pipe, and the exhaust direction can be set in various ways. Technical comparison 'the degree of freedom of its design is exceptionally enlarged 200532603' and the ventilation cross-sectional area of the exhaust adapter is enlarged, and the width of the ventilation gap can be set widely, and from the hollow part to the row inside the adapter The direction of the air is straight, so the exhaust resistance during exhausting becomes smaller, which can improve the exhausting efficiency and shorten the exhausting time. Between the exhaust is completed, so that the manufacturing efficiency can be increased significantly. In addition, since the air supply / exhaust adapter is a small article made of glass, various forms can be easily manufactured at low cost. According to the invention according to item 2 of the scope of patent application, the above-mentioned air supply and exhaust adapter is composed of the adapter body and the air supply and exhaust pipe section, so each structure becomes simple. Production advantages. According to the invention according to item 3 of the scope of the patent application, the above-mentioned air supply and exhaust adapter has a structure that is constructed by spanning the segment formed between the ends of the two glass substrates. Easy to carry advantage. According to the invention according to item 4 of the scope of patent application, the above-mentioned air supply and exhaust adapter has a structure that holds the overlapping portion of the two glass substrates from the outside, and therefore has an increased volume due to the installation of the exhaust adapter. Big is set to the advantage of less. According to the invention according to item 5 of the scope of patent application, especially when a panel for a plasma display is taken as an object, it has the advantages that its manufacturing efficiency and yield can be greatly improved, and the degree of freedom in design is increased. (4) Embodiment Hereinafter, an embodiment in which the air supply and exhaust device for a hollow flat panel for a display of the present invention is applied to a panel for a plasma display will be specifically described with reference to the drawings. The first and second figures show the first embodiment, the third figure shows -10- 200532603 The second embodiment, the fourth figure shows the third embodiment, the fifth figure shows the fourth embodiment, and the sixth figure The figure shows the fifth embodiment, the figure 7 shows the sixth embodiment, the figure 8 shows the seventh embodiment, and the figure 9 shows the eighth embodiment. The air supply and exhaust device of the first embodiment, as shown in Figs. 1 (A) (B) and 2 (A) (B), is formed so that one side edge of each other protrudes from the opposite side by about 15 mm. Between the glass substrates 1 and 2 arranged opposite to each other, among the hollow flat panel 10 provided with the hollow portion 4 with a glass seal 3 A at the peripheral edge portion, the end of the glass substrate 1 along the upper side of the figure is shown. At the position of the segment portion 10a formed between the edge 1b and the protruding portion 2a of the lower glass substrate 2, the air gap 5 that allows the inside and outside of the hollow portion 4 to pass through is formed by the interruption of the glass seal 3A. At the same time, a glass-made air supply / exhaust adapter 6A is installed at the position where the air gap 5 is formed by glass frit seal 3B. On the surface of the rain glass substrates 1 and 2, the protruding portions 1a and 2a have parallel electrode lines 11... 2 1 connected to the hollow portion 4. The adapter 6A is disposed on the glass substrate 2. In the formation area of the parallel electrode line 21 of the protruding portion 2a. The air-supply / exhaust adapter 6A is formed by a box-shaped adapter main body 61 having a stepped opening below, and a horn-shaped air-supply / exhaust pipe 62 opened at the lower end. Then, the adapter body 61 is embedded in the segment portion 10a in a form in which the stepped portion 6a is closely adhered to the edge corner of the glass substrate 1, and the internal space 60 thereof communicates with the ventilation gap 5. In addition, the air supply and exhaust pipe 62 faces a circular opening 61b provided on the upper wall of the adapter body 61, and the adapter body 61 is provided upright by a glass seal 3C. The glass frit seal 3A ~ 3C is a glass frit with a lower melting point than the two glass substrates 1,2 and the adapter 6A-11-200532603. The glass frit has a lower melting point than the glass material. 'In the form of a prize, it can be used as a cohesive agent, and the solvent evaporates and melts glass by firing. The air supply and exhaust device according to the second embodiment is, as shown in FIGS. 3 (A) to (c), at a position along the section portion 10a of the hollow flat panel 10, which is the same as the first embodiment. Due to the interruption of the frit seal 3a, a ventilation gap 5 is formed which allows the inside and outside of the hollow portion 4 to pass through. At the same time, a glass-made air supply and exhaust adapter 6B is installed at the position where the ventilation gap 5 is formed. The air supply / exhaust adapter 6 B is composed of a box-shaped adapter main body 63 having a stepped opening which is opened below, and an air supply / exhaust pipe 64 protruding forward from the adapter main 63. Then, the adapter body 63 is embedded in the segment portion 10 a in a form in which the step portion 63 a is in close contact with the edge corner of the glass substrate 1, and the internal space 60 thereof communicates with the ventilation gap 5. The rear end of the exhaust pipe 64 is inserted into a circular hole 63b provided near the upper portion of the front wall of the adapter body 63 and communicates with the internal space 60 of the adapter body 63. While 'not shown', the abutting portions of the two glass substrates 1 and 2 with respect to the adapter body 63 and the inserting portions of the supply and exhaust pipe 64 with respect to the adapter body 63 are coated with Glass frit sealed slurry. As shown in Fig. 4 (A) (B), the air supply and exhaust device of the third embodiment is located along the section 10a of the hollow flat panel 10, which is the same as the first embodiment. Due to the interruption of the frit seal 3 A, a ventilation gap 5 is formed which allows the inside and outside of the hollow portion 4 to pass through. At the same time, a glass air supply and exhaust adapter 6C is installed at the position where the ventilation gap 5 is formed. The air-supply / exhaust adapter 6C is formed by a glass molded product 65 formed by forming a cylindrical air-supply / exhaust pipe 12-200532603 65a in the upper part and a stepped quadrangular pyramid part 65b opened in the lower part, and The stepped portion 6 5 c of the lower quadrangular pyramid portion 6 5 b is embedded in the segment portion 10 a in a form closely contacting the edge angle of the glass substrate 1, and the internal space 60 communicates with the ventilation gap 5 and simultaneously The exhaust pipe 65a is arranged vertically. Then, although the illustration is omitted, the glass-sealed paste is also applied to the contact portions of the two glass substrates 1 and 2 with respect to the lower portion 6 5 b of the air supply and exhaust adapter 6 C. In the production of the plasma display panel using the air supply and exhaust device according to the first to third embodiments, as described above, the air supply and exhaust adapters 6A to 6C are installed on the hollow flat panel 1. In the state of the section 10a, the entire system is arranged in the heating furnace, and the front ends of the supply and exhaust pipes 62, 64, 65a of the adapters 6A to 6C are connected to the supply and exhaust pipes, and the glass Above the melting point of the sealed glass frit and below the melting point of the glass raw materials of the two glass substrates 1,2 and the glass raw materials of the adapters 6A to 6C, one side is heated and fired while the other is from the supply and exhaust pipes 62, 64, 65a Evacuate. Therefore, the solvent of the slurry sealed with the glass frit is evaporated. • The glass is melted to form a glass layer. At the same time, the air in the hollow portion 4 of the two glass substrates 1 and 2 can be discharged to the outside. Then, after the exhaust is completed # and the entire body is cooled, gas such as gas or electric power generated by gas is introduced into the hollow portion 4 through the exhaust pipes 62, 64, 65a, and the exhaust pipe is thereafter The roots of 62,64,65a are fused and sealed with a hot gas such as a gas burner, so that the plasma-generating gas can be enclosed in the hollow portion 4. In the production of a plasma display panel using such an air supply and exhaust device, one of the glass substrates 1 and 2 does not need to be drilled in the same manner as in the prior art, and C is not required. Therefore, it is not necessary to perform strict washing after the drilling process. Therefore, the manufacturing process can be greatly simplified, and the poor performance caused by the honing material or glass frit produced during the drilling process is not generated. Therefore, the yield is greatly improved when compared with the prior art. In addition, the air supply and exhaust adapters 6A to 6C are mounted on the glass substrates 1a, which are formed between the side edges of the overlapped glass substrates 1, 2 and the glass substrates constituting one of the segmented portions 10a. In the protruding portion 2a of 2, there is no problem in joining with the formation area of the parallel electrode lines 2 1... So that the effective display area in the hollow portion 4 is not reduced. In addition, the width of the ventilation gap 5 can be set widely within a range facing the internal space 60 of the adapters 6A to 6C, and the exhaust direction from the hollow portion 4 toward the internal space 60 of the adapters 6A to 6C is straight. Therefore, the exhaust resistance during exhausting becomes smaller, and the exhausting efficiency can be improved and the exhausting time can be shortened. The exhausting can be completed in a short time even in large panels, so the manufacturing efficiency can be greatly improved. . As shown in FIG. 5 (A) (B), the air supply and exhaust device of the fourth embodiment is provided with a hollow portion between glass substrates 1 and 2 arranged opposite to each other by a glass frit seal 3A at the peripheral portions. In the corner portion of the hollow flat panel 10 of 4, the corner portion of the glass substrate 1 on the upper side of the figure is cut out, and the corner portion 2c of the isosceles triangle of the cut-off end portion 1 c and the lower side of the glass substrate 2 is cut. At the position of the segment portion 10a formed by the gap, a ventilation gap 5 is formed to allow the inside and outside of the hollow portion 4 to pass through due to the interruption of the glass seal 3A. At the same time, the glass gap is formed at the position where the ventilation gap 5 is formed. A 3B air-supply / exhaust adapter 6D is mounted to seal 3B. The reference numerals 1 and 21 are parallel electrode lines provided on the inner surfaces of the two glass substrates 1, 2. The air-supply / exhaust adapter 6D is formed by a box-shaped adapter main body 66 with a stepped opening below, and a horn-shaped air-supply / exhaust pipe 67 opened at the lower end. Then, the adapter body 66 is embedded in the segment portion 10 b in a form in which the attached step portion 66 a is in close contact with the edge corner of the glass substrate 1, and the internal space 60 thereof communicates with the ventilation gap 5. In addition, the supply / exhaust pipe 67 faces the circular opening 66b provided on the upper wall of the adapter body 61, and the adapter body 66 is provided upright by being sealed by 3C with glass frit. The air supply and exhaust device of the fifth embodiment is, as shown in FIG. 6 (A) (B), at a position along the segment portion 10b in the hollow flat panel 10 similar to the first embodiment. Due to the interruption of the frit seal 3A, a ventilation gap 5 is formed which allows the inside and outside of the hollow portion 4 to pass through. At the same time, the glass gap 3 B is installed at the position where the ventilation gap 5 is formed.接 器 6E。 Connector 6E. The air-supply / exhaust adapter 6E is composed of a box-shaped adapter main body 68 which has a stepped opening and a air-supply / exhaust pipe 69 which protrudes forward from the adapter main 68. Then, the adapter body 6 8 is embedded in the segment portion 10 b in a form in which the segment difference portion 6 8 a is in close contact with the edge corner of the glass substrate 1, and the internal space 60 thereof communicates with the ventilation gap 5. Further, the rear end of the exhaust pipe 69 is inserted into a circular hole 68b provided in a side wall of the adapter body 68, and communicates with the internal space 60 of the adapter body 68. Further, the rear end of the supply and exhaust pipe 69 is inserted into a circular hole 6 8 b provided in a side wall of the adapter body 68 and communicates with the internal space 60 of the adapter body 68. And, the inserting part of the air supply and exhaust pipe 69 of the adapter body 68 is coated with a slurry sealed with glass frit 3C. As shown in FIG. 7 (A) (B), the air supply / exhaust device of the sixth embodiment is provided along the section portion 10b along the corner portion of the hollow flat panel 10 similar to the above-mentioned fifth and sixth embodiments. In the position, due to the interruption of the glass seal 3 A, the shape -15-200532603 is formed into a ventilation gap 5 that allows the inside and outside of the hollow portion 4 to pass through. At the same time, the formation of the ventilation gap 5 is sealed with glass 3 B. On the other hand, a glass air supply and exhaust adapter 6F is installed. The air-supply and exhaust adapter 6F is formed by a cylindrical shaped air-supply pipe 70a in the upper part, and a stepped quadrangular pyramid 70b that is opened downwards in the lower part into a glass molding 70 integrally formed. The stepped portion 70c is embedded in the stepped portion 1 in a state of being in close contact with the edge angle of the glass substrate 1. The internal space 60 of the stepped portion 70c communicates with the ventilation gap 5, and the exhaust pipe 70a is vertically arranged. ® In the production of the plasma display panel using the air supply and exhaust device of the fourth to sixth embodiments described above, the air supply and exhaust adapters 6D to 6F are mounted on the hollow flat panel 1 as described above. In the state of 1 Ob, the entire system is arranged in a heating furnace, and the front ends of the air supply and exhaust pipes 67, 69, 70a of the adapters 6D to 6F are connected to the air supply and exhaust pipes. The first to third embodiments are similarly heated and fired, and evacuated from the supply and exhaust pipes 67, 69, 70a, so that the slurry solvent of the glass frit seal 3A / 3C is evaporated and melted and vitrified, and The glass layer is formed, and at the same time, the two glass substrates 1, 2 ® can be exhausted in the hollow portion 4. After the exhaustion is completed and the entire body is cooled, the gas such as radon or gas is passed through the exhaust gas. After the pipes 67, 69, 70a are introduced into the hollow portion 4, the root side of the air supply and exhaust pipes 67, 69, 70a is fused and sealed with a hot gas such as a gas burner, so that the plasma generated gas can be sealed in the hollow. Within the department 4. In the production of a panel for a plasma display using such a gas supply and exhaust device according to the fourth to sixth embodiments, one of the glass substrates 1 and 2 does not need to be drilled as in the prior art-16-200532603. There is also no need for strict cleaning after the drilling process. Then, although the corner portion of one glass substrate 1 is cut off, this cut-off is easier than drilling, so that its manufacturing process can be greatly simplified compared with the prior art, and at the same time, there is no problem caused by drilling. Yield reduction caused by abrasive materials or glass powder. In addition, the adapters 6D to 6F for air supply and exhaust are installed in the corner portion of the hollow flat panel 10, so that the effective display area in the hollow portion 4 will not be reduced, and the subsequent display assembly operation will not be reduced. trouble. In addition, similar to the first to third embodiments, the width of the ventilation gap 5 can be set widely, and the exhaust direction from the hollow portion 4 to the internal space 60 of the adapters 6D to 6F is straight. The exhaust resistance during exhaust becomes smaller, so the exhaust time can be shortened. As shown in FIGS. 8 (A) to (C), the air supply and exhaust device of the seventh embodiment is provided with a glass seal 1A between the oppositely disposed glass substrates 1 and 2 to provide a hollow space. The corner portion of the hollow flat panel 10 of the portion 4 is formed by the interruption of the glass seal 3A to form a ventilation gap 5 that allows the inside and outside of the hollow portion 4 to pass through. At the same time, a glass for air supply and exhaust is installed in the corner portion. Adapter 6G. The air-supply / exhaust adapter 6G is formed by a plane that is regarded as a hypotenuse of a substantially isosceles triangle and a body frame portion 71 that opens upward. A plane that is covered from above on the body frame portion 7 1 is regarded as approximately. The cover frame portion 72 of the isosceles triangle and the rear end are inserted into the U-shaped cutout portion 7 1 a provided in the U-shaped notch portion 7 1 a provided on the side wall of the main body frame portion 71 and the three components The exhaust pipe 73 is formed so as to protrude laterally in a state where the corner portion of the hollow flat panel 10 is held from above and below with the main body frame portion 71 and the cover frame portion 72. However, although '-17-200532603' is omitted, the contact portions of the two glass substrates 1, 2 of the main body frame portion 71 and the cover frame portion 72, the fitting portions of the main frame portion 71, and the cover frame portion 72, The inserting portions of the air-supplying and exhausting pipes 73 with respect to the main body frame portion 71 are respectively coated with a frit-sealed slurry. In the air supply and exhaust device of the seventh embodiment, the same functions and effects as those of the fourth to sixth embodiments are added. One of the glass substrates 1 and 2 does not need to be cut off at the corners, so that the plasma display can be used. The manufacturing process of the panel is more simplified, and the increase in volume due to the installation of the adapter can be set to less advantages. _ The air-supply and exhaust adapter used in the air-exhaust device of the present invention, for example, the quadrangular pyramids 65b, 70b of the air-supply and exhaust adapters 6C and 6F used in the third and sixth embodiments described above. Beginning with a cylindrical shape, various forms other than those exemplified in the above-mentioned first to seventh embodiments can be adopted. These are small articles made of glass, which can be easily manufactured at low cost and used in It is also possible to use the existing tubular or box-shaped glass parts for various purposes when they are left as they are or processed into steps. In addition, in the case of the air supply and exhaust device according to the present invention, as exemplified in the above-mentioned first to seventh embodiments, ® the exhaust direction can be set in various ways by using the structure of the air supply and exhaust adapter. Therefore, compared with the prior art, the degree of freedom of its design is greatly expanded, and the diameter of the gas supply and exhaust pipe part of the gas supply and exhaust adapter is made larger, which can further improve the exhaust efficiency. Therefore, as with the adapters 6A, 6B, 6D, 6E, and 6G for air supply and exhaust in the first, second, fourth, fifth, and seventh embodiments, the adapter body and the air supply and exhaust pipe sections are made. If the structure of each component is made simple, each structure can be simplified, and each of them can be produced at a low cost. In addition, a vacuum chamber with an additional heating mechanism is used to supply and exhaust the hollow portion of the hollow flat panel. In this case, the air supply and exhaust device of the present invention is also extremely effective. That is, in this vacuum chamber method, the entire hollow flat panel in which a hollow portion is provided by sealing a glass frit between a pair of glass substrates at a peripheral edge portion is disposed in a vacuum chamber, and the chamber may be evacuated under heating, and may be previously The air in the hollow part is exhausted by the ventilation part provided in the panel, and the glass frit can be sealed and melted, and the room can be made into an environment for generating plasma gas, so that the hollow part is filled with the gas. , Seal the vent. However, in the case where a hole is provided on one glass substrate as a venting portion, as already described, troublesome drilling processing is required, so that the display characteristics caused by the remaining honing material or glass powder may be poor. In contrast, when using the air supply and exhaust device of the present invention, it is not necessary to provide a hole in the glass substrate. For example, in the first to seventh embodiments described above, a fitting for air exhaust is mounted on the hollow flat panel 10. Under the conditions of 6A ~ 6G, install in the vacuum chamber. After filling the hollow part 4 with gas as described above, the exhaust pipes 62, 64, 65a, 67, 69, 70a, 73 will be fused and sealed, or The opening at the front end may be sealed by a glass material with a plug or the like. However, the air supply and exhaust pipes of the air supply and exhaust adapters of the first to seventh embodiments described above are necessary for connecting to the air supply and exhaust pipes, and are therefore suitable for the supply of the vacuum chamber system. As for the exhaust gas adapter, for example, the 6H gas supply and exhaust gas adapter shown in FIG. 9 is a structure that does not need to be provided to the exhaust pipe. The air supply and exhaust adapter 6H, -19-200532603 of the air supply and exhaust device of the eighth embodiment is matched with the air supply and exhaust adapter 6 A used in the air supply and exhaust device of the first embodiment. The connector body 61 is in the same form, and is the same as the connector body 61, because of the interruption of the glass seal 3A constituting the hollow portion 4 of the hollow flat panel 10, and facing the formation position of the air gap 5, It is mounted in the state of being straddled to the section 1 between the two glass substrates 1 and 2 by the glass seal 3 B. The hollow flat panel 10 'installed with the air supply and exhaust adapter 6H is adversely affected by the solvent components contained in the slurry of the glass seal 3 A and 3 B in the vacuum mode. Therefore, it is temporarily performed in air. Treatment before firing 'removes the solvent and removes it. At the same time, after the slurry is solidified (non-melted), it is installed in a vacuum chamber to perform the aforementioned treatment. In this process, the air in the hollow portion 4 is first passed through the air gap 5 and the air supply and exhaust adapter 6H by using a vacuum under heating, and the air from the upper wall of the air supply and exhaust adapter 6H is passed. The shaped opening 74 is discharged, and at the same time, the joints are fixed by the molten glass of the glass seal 3A, 3B. When the gas environment for plasma generation is made in the vacuum chamber, the gas system is reversed by the path. The inside of the hollow portion 4 is filled. In this state, as shown in the drawing, the glass cover plate 7 6 is covered with the glass sealing 3 D and covered on the air supply and exhaust adapter 6H, and the cover portion is next. It is locally heated to seal the frit into 3D molten glass, and the circular opening 74 is sealed. The air supply and exhaust device of the present invention is not limited to the exemplified panels for plasma displays, but can also be applied to the manufacture of hollow flat panels for various types of displays, such as plasma and address LCD backlight panels. The case where the hollow part between the opposing glass substrates is supplied and exhausted is preferable. 200532603 (V) Brief description of the drawings The first diagram is a first embodiment showing the air supply and exhaust device of the hollow flat panel for a display of the present invention, (A) is a perspective view, and (B) is a side view in longitudinal section. FIG. 2 It is the same as the first embodiment, (a) is a plan view showing a glass substrate under the structure of the air gap, (B) is a plan view of the air supply and exhaust device, and FIG. 3 is a view showing a different air supply and exhaust system of the second embodiment (A) is a plan view '(B) is a front view, (C) is a cross-sectional arrow direction view of the line; FIG. 4 is a view showing the air supply and exhaust device of the third embodiment, and (A) is a perspective view' (B ) Is a side view in longitudinal section; FIG. 5 is a view showing the air supply and exhaust device of the fourth embodiment of the week; (A) is a plan view; (B) is a sectional arrow direction view of the mouth-to-mouth line of (A); The drawing is the same as the fifth embodiment of the air supply and exhaust device, (A) is a plan view, (B) is the (A) /,-eight-line cross-section arrow direction view; FIG. 7 is the same as the sixth embodiment Air supply and exhaust device, (A) is a plan view, (B) is a cross-sectional arrow direction view of (A) bis-second line; FIG. 8 shows the same as the fourth (A) is a plan view, (B) is a front view, and (C) is a cross-sectional arrow direction view of the line shown in (A). The ninth figure is the same as the eighth embodiment. Side view of a vertical section of the exhaust device; FIG. 10 shows the air supply and exhaust section of a hollow flat panel for a plasma display in the prior art, (A) is a perspective view, and (B) is a cross-sectional arrow of the line (A) Direction view. 200532603 [Explanation of symbols] 1 ... glass substrate la ... projection 2 ... glass substrate 2a5 2c ... projection 3 A ... glass seal 4 ... hollow part 5 ... ventilation gap 6 A ~ 6H ... supply and exhaust adapter 60 ... internal space 61,63 ... adapter body 6 2 5 6 4 ... supply and exhaust pipes 65a, 70a ... supply and exhaust pipes 65b, 70b ... supply and exhaust pipes 6 6, 6 8 ... adapter bodies 67,69 ... supply and exhaust pipe 7 1 ... body frame (adapter body) 72 ... body frame (adapter body) 7 3 ... supply and exhaust pipe 1 0 ... hollow flat panel 10a, 10b ... section section 11, 21 … Parallel electrode wires-22-