TW200526476A - Apparatus for manufacturing flat-panel display - Google Patents

Abstract

An apparatus for precisely positioning and simultaneously aging a plurality of fluorescent lamps. Since the apparatus of the present includes fluorescent lamp supports capable of loading a plurality of fluorescent lamps in a short time, a plurality of fluorescent lamps can be loaded in a short time. Moreover, the apparatus further includes a fluorescent lamp position adjusting device for precisely arranging a plurality of fluorescent lamps so that a plurality of fluorescent lamps can be aged under the same conditions.

Description

200526476% < (ii) Description of the invention: [Technical field to which the invention belongs] The present invention relates to a device for manufacturing a flat panel display. [Prior art] Consider Figures 1 and 2, which show a conventional flat panel display (FPD) manufacturing device. The FPD manufacturing apparatus includes a load lock chamber 100, a feed chamber 200, and a processing chamber 300, which are connected in series to process a substrate for FPD. I The load lock chamber 100 is connected to an external station to receive a substrate to be processed in the FPD manufacturing apparatus to load a wire board 'or release the processed substrate in the FPD manufacturing apparatus to unload the wire board. The load lock chamber 100 repeatedly switches between a vacuum state and an atmospheric state so that the load lock chamber ⑽ selectively communicates with an external station. The feed chamber 200 is connected between the load lock chamber 100 and the processing chamber 300. As shown in FIG. 2, the feeding room 200 is provided with a feeding robot 21 located inside the feeding room 200 so that the feeding room 200 serves as an intermediate passage for locking the load room! The substrate is fed between 00 and the processing chamber 300 to load / unload the spring plate. Feed in and turn to vacuum so that the processing chamber can turn to vacuum. In FIG. 2, the processing chamber 300 is provided with a processing device 31 to perform a desired process for loading a substrate into the processing chamber 300. For example, the side processing is performed in a state where the processing chamber 300 is set to the empty state. The new trend for same-day FPD is to have a larger size. The size of the manufacturing equipment must be increased. The size of the clean room must also be increased. The clean room is equipped with a D manufacturing device. Therefore, the installation cost of the FPD manufacturing apparatus increases significantly. First, even if an early-FPD manufacturing apparatus is used, in order to reduce the manufacturing cost of the substrate for m, taking into account the high mounting cost, it is necessary to increase the basic efficiency of the manufacturing cost. 200526476 However, due to the increase in the size of the substrate, the time required to load / unload each substrate, that is, the time required to load the substrate into the load lock chamber 100 and unload the substrate from the load lock chamber 100 after the substrate processing is completed increase. Therefore, there is a great need to reduce the time required to load / unload each substrate. On the same day, a substrate transfer device 400 is provided adjacent to the load lock chamber 100 to transfer the substrate to the load lock chamber 100 as shown in FIG. 3. The substrate transfer device 400 is driven under atmospheric pressure. The substrate transfer device 400 is configured to feed the substrate into the load lock chamber 100, and the substrates are stacked on the substrate storage box 500 adjacent to the substrate transfer device 400. However, when the substrate is fed into the load lock chamber 100 in the above manner, the size of the clean room (where the FPD manufacturing device is installed) also increases because the mounting area of the Fpj) manufacturing device increases. As a result, a problem arises that the installation cost of the FPD manufacturing apparatus increases. Furthermore, the manufacturing cost of the substrate manufactured by the Fpj) manufacturing apparatus also increases. These problems have become more serious recently because the size of each chamber included in the FpD manufacturing apparatus has become larger due to the trend of increasing FPD size. Although a plurality of processing chambers 300 can be used in a feed chamber 200 to reduce the area occupied by the FPD manufacturing device (as shown in FIGS. 4 and 5), this method also has a problem that there are unused perimeters around the load lock chamber 100. space. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an FPD manufacturing apparatus including a load lock chamber, which can greatly reduce the time required for loading and unloading a substrate into and from the load lock chamber. Another object of the present invention is to provide a manufacturing apparatus' in which a substrate holder is provided on the side of a load lock chamber to quickly use the space in which the FPD manufacturing apparatus is installed. i 200526476 This month's 3 mesh is to provide a substrate feeding device, which can stably feed a large substrate in a short time. According to the features, the present invention provides a flat panel display manufacturing device, including: a load lock chamber, a feed-in chamber, and a processing chamber. The device further includes: a substrate inlet, which is arranged in the load lock chamber to lock the load to / and the load lock. Connected to the outside world; a plurality of gates are arranged in the load lock chamber to open and close the entrance of the substrate, and a plurality of healthy plate supports are separated into the scales to allow the silk plate to be placed on the upper surface of the substrate support. According to another feature, the present invention provides a flat panel display manufacturing apparatus including a load lock chamber, -feed into and at least-processing chamber, which is connected to the feed chamber, the apparatus further includes: at least one substrate support unit 7C 'each sighed on the side of the load lock chamber, which is adjacent to the side wall of the load lock chamber connected to the feed-in chamber, so that each substrate support unit communicates with the chamber through the side wall of the load lock chamber, the load lock chamber Adjacent to the side wall of the load lock chamber connected to the load lock chamber, a substrate is loaded into the load lock chamber and the substrate is unloaded from the load lock chamber. According to another-none, the present invention provides a fresh board age rhyme creation secret, including: at least one load lock chamber for receiving a substrate from the load lock chamber and transferring the substrate to the load lock chamber, while alternately establishing a -button state and -Atmospheric state; two feeding rooms are separated from each other and maintained in an atmospheric state, each feeding room receives a substrate from the load lock chamber, transfers the substrate to another feeding room, receives the substrate from another feeding room, and transfers the substrate to A load lock chamber; at least one processing chamber connected to each feed chamber 'and a processing device provided in the processing chamber to perform-preset processing of substrates for loading into the processing chamber; and-a common room, valued in the feed chamber A plurality of rooms are provided on opposite sides of the manufacturing room adjacent to the feeding room, so as to receive the substrate from the feeding room and feed the substrate into the feeding room. 200526476 According to another feature, Benga provides a method of making a small mouth, using a flat-panel display manufacturing system, the system includes at least two parallel flat small-plate dry-plate conversion devices, and each flat-panel display manufacturing The device includes:-a load lock room, a feeding room, and a common room located between the feeding rooms of the flat panel display manufacturing device. The steps include the following steps: a) check the normal operation of each load lock room; Zhen_frontal, supply-substrates to the feeding chambers of the various chrysanthemum chambers of copper, receive from the feeding chambers connected to the load lock chambers-the finished substrate, and process the retracted substrate, and if-the load lock chamber If the operation is not normal, the base plate is supplied to the feed room connected to the other load lock room through another load lock room; c) the substrate is transferred to the same room according to the read room operation received from another load lock room, and the base plate is supplied to The other is the feed room of the chamber. D) The substrate is transferred to the common room according to the operation of the feed room of the load lock room that is not operating normally. The substrate unloads the substrate from the common room and supplies the unloaded substrate to Processing room, which is connected with The feed chamber connected to the load lock chamber during normal operation; e) according to the feed-to-operation of the load lock chamber that is not normally operated, the processing substrate is unloaded from the processing chamber, and the processing chamber receives the abnormally obtained load The lock chamber and the unloaded substrate are transferred to the common chamber; and f) the processed substrate is transferred from the common chamber to the other load lock chamber according to the operation of the feed chamber received from another load lock chamber. [Performance Mode] Hereinafter, a typical example of the present invention will be described with reference to the accompanying drawings. In the following description, each element corresponding to 70 pieces in the figures 1-3 is represented by the same number. First Example Referring to Figs. 4 and 5, an FPD manufacturing apparatus according to a first example of the present invention will be described. In FIG. 4 or 5, the FPD manufacturing apparatus includes a load lock chamber 100 and a feed chamber 200 as shown in FIGS. 1 to 3 as is conventional. fpd

I 200526476 4 The manufacturing apparatus also includes at least one processing chamber 300, operatively connected to the load lock chamber 200, and preferably at least one processing to 300. In the example of FIG. 4, two processing chambers 300 are provided. In the example of Fig. 5, two further processing chambers 300 are provided. The load lock chamber 100 includes a plurality of gates arranged in pairs as shown in FIG. 6. In the example in the figure, one gate pair (which includes two gates 11 and 120) is included in the load lock chamber 100. The substrate inlet 130 is formed on the side wall of the load lock chamber ι0 opposite to the feed chamber 200. The gate can open and close the substrate inlet 13. Each gate n0, the machine has an area larger than that of the substrate inlet 130, so as to completely cover the substrate inlet 130, so that the inside of the load lock chamber 100 is separated from the outside of the negative lock chamber 100. Therefore, the gate UG, 12 can maintain the interior of the load lock chamber 100 in a vacuum state by completely closing the substrate inlet 130 ffii. In Fig. 6, the first and second gates 110, 120 are mounted on the side wall of the load lock chamber 100, in which a substrate entrance 130 is formed so that the gates 110, 120 overlap. In particular, the configuration of the first and second rooms 11 and 12 is such that when the second gate 120 is positioned to close the substrate inlet 13o, the first gate 1 10 is positioned to be separated from the substrate inlet 130, And when the second gate 120 is positioned in a separated state from the substrate inlet 130, the first gate 110 is positioned in a state in which the substrate inlet 13 is closed. The first and first gates 11 and 120 are hinged to the load lock chamber 100 at opposite sides of the side wall of the load lock chamber 100. In the substrate inlet 130, the first and second gates 110 and 120 can be independent of each other. Hinge. As shown in Figure 6. When one of the first and second gates 11 (), 12G, for example, the first gate closes the base plate 130%, and the other of the first and first UQ '12o, such as the second gate, is positioned at a position Among them, the second gate 120 opens the substrate inlet 13, which is based on the closing operation of the second gate 120. Preferably, each of the first and second gates 110, 120 is coupled to the relevant side ends of the load lock chamber ⑽ through the hinge unit 14, as shown in FIG. 7. 200526476 In Fig. 7, the hinge unit 140 includes a hinge element 142 mounted on a side wall of the load lock chamber loo, and a base plate inlet 130 is formed therein. The hinge element 142 protrudes from the side wall of the load lock chamber 100 by a desired length 'so that the parties of the gates 110 and 120 can be hinged at least 180 degrees to easily achieve the loading and unloading of the substrate. According to this configuration, when one of the first and second gates 110 and 120 closes the substrate inlet 130 as the first gate 110, the other of the first and second gates 110 and 120 may be the second gate 120. The hinge is rotated 180 degrees to allow the substrate to be easily loaded into the load lock chamber 100 through the substrate inlet 130. As shown in FIGS. 6 and 7, a planar substrate supporting member 150 is connected to one of the first and second gates 11 and 12 to support the substrate on the substrate supporting member 150. Preferably, the substrate supporting member 15 has a thin plate structure to support a substrate thereon. A plurality of substrate contact elements 152 are disposed on the substrate support 150 and are evenly separated from each other at the same time, so that the contact area of the substrate is minimized. The base plate supporting member 150 also has a structure including a plurality of base plate supporting arms 154 as shown in FIGS. 6 and 7. Preferably, the base plate supporting arm 154 has a gradual increase so that the base plate supporting arm 154 is separated from the part having a very small length and related to the gate and connected to the load lock chamber 100 with a great distance. 'It is separated from the side part and connected to the lock chamber 100 with a minimum rotation, and has a maximum length. Reasons for the substrate support arm 154 to have these lengths

Or 120 hinge-like movement, the substrate support arm I% of the board support 54 has a reduced length, and the hinge point of the base support piece is separated by the same length, and the substrate support arm 154 'support member 150 is connected to The relevant gates 110 must have different lengths so that each base-11-200526476 each of the first and second openings 110, 120 includes a plurality of substrate supports 150a, 150b, and 150c, which are vertically separated from each other as shown in FIG. In this example, a plurality of substrates can be loaded simultaneously using one gate. Now, the operation of loading a substrate into a load lock chamber 100 and unloading a substrate from a load lock chamber 100 in a manufacturing apparatus flat panel display device will now be described based on the above example of the present invention. First, as shown in FIG. 4, the substrate to be processed is placed on the substrate support member 15 of the -H10 in the opened state of the first cell 110. In this state, the second gate turns to the closed state to close 1 soil plate into 130. Once the substrate to be processed is placed on the substrate support of the first gate, this state is maintained until a process is performed in the FPD manufacturing apparatus to process the substrate loaded in the substrate and the process has been completed. After the processing is completed, the second gate 120 is hingedly moved in a-state to open the substrate population, and the processed substrate is placed on the second chamber. Next, the substrate to be processed is placed on the first gate /, that is, the hinge is moved to load the substrate into the load lock chamber 1⑻, and the substrate reader 15 is also installed on the first gate to perform the hinged movement of the first gate 11 (). Until the first contact, the substrate inlet 130 is contacted, and thus the substrate inlet 13 is closed. When Tian closed the substrate inlet 130, a pumping process was performed to maintain the load lock chamber in a vacuum state. When a vacuum is established in the load lock chamber 100, the third room 22 (which is installed between the load lock chamber and the feed to 20◦) is opened. In the open state of the third gate 22o, a feeding robot (which is located in the load lock chamber) feeds the substrate placed on the substrate support 第 of the gate gate 入 into the processing chamber. After the substrate is processed in the processing chamber 300, the feeding chamber 200 feeds the substrate from the processing chamber 300 into the substrate support 15 of the gate 110. Once the processed substrate is placed on the substrate support 15 of the first gate 110, the third gate 200 is closed. Then change the inside of the load lock chamber ⑽ to maintain the atmosphere. In the processing room ⑽ -12- 200526476

I «The Atmosphere of the State 'first gate 110 hingedly moves the population of the Kai Kai substrate 13G. The substrate is then unloaded from the load lock chamber while the substrate is placed on the substrate support 150 of the gate 110. In the above-mentioned substrate processing operation, the substrate above the second gate 120 is unloaded from the second idle 120, which is again in a -like state, and a new substrate to be processed is placed on the second gate. Therefore, immediately after the first-chamber 110 is turned on, the second-cheek closure 12o is closed to start a new process. Therefore, the time required for loading and pure substrates is greatly reduced, increasing the substrate processing efficiency of FPD manufacturing equipment. Second Example Referring to FIG. 10, S11 is a FPD manufacturing apparatus according to a second example of the present invention. In FIG. 10 or VII, the FPD manufacturing apparatus includes a load lock chamber 100 and a feed chamber 200. The FPD manufacturing apparatus also includes at least a processing chamber 300, operatively connected to a load lock chamber, and preferably at least two processing chambers. In the example of FIG. 10, two processing chambers 300 are provided. In the example of Fig. U, three processing chambers 300 are provided. _ The substrate support unit 16Q is provided at the side of the 1GG side of the chrysanthemum chamber 1 so that the substrate support element 16 can extend into the loadlock chamber ⑽ through the side wall of the loadlock chamber ⑽ opposite to the feed-in chamber 2GG and exit from the loadlock chamber 100. According to its extension and withdrawal, the substrate support unit 160 loads the substrate into the load lock chamber 100 and unloads the substrate from the load lock chamber 100. In the conventional example, the door is provided on the side wall of the load lock chamber 100 opposite to the feed chamber 200 so as to load a substrate into the load lock chamber 100, and the loaded substrate is from the load lock chamber 100 through the feed chamber 200. Feed into the processing chamber 300 in a tandem direction. However, according to the present invention, the remaining space defined by the substrate supporting unit 160 between the load lock chamber 100 and the processing chamber 300 is shown in FIG. 10 or 11 so that the space efficiency of the FPD manufacturing apparatus can be maximized. -13-200526476 The FPD manufacturing apparatus includes a single substrate support unit 160 to load / unload substrates through the side i of the load lock chamber 100, or includes a substrate support unit 160 to pass through opposite side walls of the load lock chamber. And load / unload substrates. That is, in the FPD manufacturing apparatus, it includes two processing chambers 300. As shown in FIG. 10, a single substrate supporting unit 160 is disposed on the side of the load lock chamber 100 so that the substrate supporting unit 160 passes opposite the feeding chamber 200. The side wall of the load lock chamber 100 extends into the load lock chamber 100 and exits from the load lock chamber 100. On the other hand, in the FPD manufacturing apparatus, which includes three processing chambers 300, as shown in FIG. ，, two substrate support units 160 are disposed on opposite sides of the load lock chamber 100 so that the substrate support units 160 pass through the load lock chamber respectively The relevant side wall of 100 extends into the load lock chamber 100 and exits from the load lock chamber 100. When two substrate support units 160 are provided, two substrate inlets 170 are formed on the opposite side walls of the load lock chamber 100 to allow the substrate support unit 160 to extend into the load lock chamber 100 through the side walls of the load lock chamber 100 and Exit from the load lock chamber 100. Furthermore, a door (not shown) is provided on the opposite side wall of the load lock chamber 100 to close the relevant substrate inlet 170 respectively. In this example, when the door must be controlled to drive a substrate support unit ，, the substrate population π0 opposite the substrate support unit 160 is formed on the side wall of the load lock chamber 100 associated with the substrate support unit 160. That is, when a substrate support unit 160 is driven on one side of the load lock chamber 100, the other side of the load lock chamber 100 must be closed in order to establish a vacuum in the load lock chamber 1QQ. Each substrate supporting element 160 is preferably operatively connected to the cymbals on the opposite side of the substrate supporting unit 160 so as to close the load lock chamber 100 with osmium. The slab support unit 1 includes a base plate support member 180 having a support surface to support the base plate, and a plurality of remaining 5¾irm, buckles 190 ′ adapted to move the base plate support member 180 back and forth along the load lock chamber 100. -14- 200526476 According to this configuration, the base board cutting unit _ from _ please the outside board to load the load lock, and call the plate from the load lock room. The soil plate is preferably a county plate, and each feeder 190 includes a guide 192 for sliding 190, and is set up * 'For this-sliding operation' Each feeder is placed in the load lock chamber 100, and a guide 192 mobile. The guide block 194 is connected to the feeding substrate G8. The Wuwucai County warfare warfare is therefore detailed in the configuration of the above-mentioned methods, which can be used to face the board branch building early. This is because the board support element moves along the path set by the guide. Moreover, the movement of the substrate supporting unit is simple, so the probability of damaging the substrate during the feeding operation is reduced, and the time required for feeding the substrate is also reduced. The substrate support 180 has a structure including a thin plate support 182 and a rest on it. The substrate catching arm 1H is separated from each other by the money substrate support 180 and the area where the substrate contacts 180 is minimized to prevent the substrate above the substrate support 180 from moving during the feeding operation. A plurality of substrate support members 180 may be used, which are vertically separated from each other as shown in FIG. 3. A method of loading a substrate into the substrate supporting unit 160 and unloading the substrate from the substrate supporting unit 160 will be described below. When the FPD manufacturing device is installed in a cluster configuration, the substrate transfer device 400 is installed adjacent to the load lock chamber 100 so as to feed the substrate or the substrate to the substrate support unit 160. By using the substrate transfer device 400, a substrate can be loaded into and unloaded from the substrate support unit 160. The substrate transfer device 400 has a robot structure as shown in FIG. 3. For example substrate transfer -15-

I 200526476 t The device 400 includes a multiple joint rotation with an end effector at one end. The upper surface of the end effector is provided with a support surface to support the base plate. Therefore, the substrate can be fed in according to the robot's operation. On the other hand, when the FPD manufacturing device is installed in a linear configuration, the substrate is fed into the transmission system transfer device around the load lock chamber 100 to load the substrate. The substrate supporting unit 160 and the substrate are unloaded from the substrate supporting unit 160. Since the FPD manufacturing apparatus according to this example is suitable for processing a large substrate, the FpD manufacturing apparatus is preferably a deposition apparatus or a side apparatus. Third Example Referring to FIG. 14, the FPD manufacturing apparatus according to the second example of the present invention will be described. In FIG. 14, the FPD manufacturing apparatus includes a load lock chamber 100, a feed chamber 200, and a processing chamber 300. The substrate supporting units 160 are respectively disposed on the sides of the load lock chamber 100, and are adjacent to the side wall of the load lock chamber 100 connected to the feeding chamber 200 so that each substrate support unit 160 extends into the load through the side wall of the load lock chamber 100. The lock chamber 100 and the exit from the load lock chamber 100 are adjacent to the side wall of the load lock chamber 100 connected to the feed chamber 200. The FPD manufacturing apparatus also includes a substrate feeding device 600 for loading the substrates s (Fig. Π) into each substrate supporting unit 160 and unloading the substrate S from the substrate supporting unit 160. Each substrate support unit 160 has a structure capable of supporting. As shown in FIG. 14, each substrate support unit 160 can extend into the load lock chamber 100 and exit from the load lock chamber 100 through the relevant side wall of the load lock chamber 100. The lock chamber 100 is adjacent to a side wall of the load lock chamber 100 connected to the feed chamber 200. Although not shown, the gate is provided on the opposite side wall of the load lock chamber 100 so that the substrate support unit 160 can be moved back and forth through the gate to enter and exit the load lock chamber 100 respectively. Therefore, under a condition (where the substrate-16-200526476 is placed on the substrate war sheet S), each substrate cutting unit ⑽ loads ___ into the lock chamber 100 and unloads the substrate from the load lock chamber 100. . In FIG. 14, the substrate feeding device 600 according to this example uses a transfer system. The transmission system here refers to a system that feeds the substrate between two positions (which are separated from each other by a certain distance). The substrate feeding device includes a substrate feeding person H, which extends a certain secret and continuously moves at a constant speed to feed the substrate placed thereon. In FIG. 15, the substrate feeding device 600 (which uses a transfer system) includes a roller support belt 61, and a plurality of rollers 620 are connected to the roller support f 610 while mutually loading molds are equally separated. Each of the rollers 620 has a diameter larger than the thickness of the roller support belt 61o, so that the upper surface of the roller 62o is positioned higher than the roller support belt 610. Therefore, when the substrate is placed on the substrate feeding device _, the roller 620 supports the substrate as shown in FIG. 17. In this state, the roller 61 can rotate to feed the substrate. The rollers 620 can be rotated independently, and the preferred rollers 62 can be rotated in the forward and reverse directions to feed the substrates to the substrate supporting unit 16 in order to rotate in the corresponding direction to load the substrates. The substrate is unloaded from the substrate supporting unit. φ In FIG. 16, the substrate feeding device 600 can be moved vertically to transfer a substrate from the substrate feeding device 6⑼ to the substrate supporting unit 160. That is, as shown in FIG. 17, when the substrate feeding device 600 moves downwards (where the board support 180 is inserted into the space defined by the roller 62 of the substrate feeding device 600 and the substrate s), the Shanghai transmission Substrate S to substrate support 180. In this state, the operation substrate support unit 160 is configured to insert the substrate S to the load lock chamber 100. When the -to-subbase support unit 16Q is located on the opposite side of the load lock chamber, the load lock chamber is -17-

I 200526476

I is adjacent to the side wall of the load lock chamber 100 connected to the feed chamber 200. The FPD manufacturing apparatus preferably includes a pair of substrate feed devices 600 disposed on opposite sides of the load lock chamber 100 to feed the substrate s to the relevant The substrate supporting unit 160 is shown in FIG. 14. Moreover, each substrate feeding device 600 must extend to at least one position, where the substrate feeding device 600 overlaps the path of movement of the relevant substrate supporting unit 160. This path will be referred to as a substrate supporting unit moving path. In particular, as shown in FIG. 16 ′ 17 ′, it is preferable to provide a substrate stopper 630 at one end of each substrate feeding device to prevent further movement of the substrate δ fed into a desired position (such as the above-mentioned overlapping position). When the substrate s fed along the substrate feeding device _ upper surface reaches the desired position, the substrate s contacts the resist 630 and prevents the substrate s from moving further. It is preferable to provide another-substrate blocking member at the other end of the substrate feeding device surface to prevent the substrate from being excessively moved while the substrate is unloaded. In the following, a substrate feeding device will be used to explain the process of loading the substrate s into the load lock chamber ιOO and unloading the substrate S from the load lock chamber vice. The following description will be an example of cooperation, in which the substrate feeding device_ includes two substrate feeding units, that is, a horizontal substrate feeding unit_ and a vertical substrate feeding unit 600b. When it is desired to load the substrate S, the lateral substrate feed unit aa is first moved downward to allow the substrate support unit ⑽ to listen to itself. Guiji lacks material, and he has been in Zhenzai Lock Room ⑽, and from the load lock, please go to _, Qi Siji unit ⑽ and the vertical base domain entry unit overlap. In this state, the vertical substrate feeding unit _ moves upward to position the substrate supporting member 180 with a “knife” between adjacent rollers of the vertical substrate feeding unit _ as shown in FIG. 17. Then the vertical substrate feeding unit 6_ starts from Transverse substrate donating unit _receiving-to-be-processed substrate-18- 200526476 board s' and feed the substrate s into the longitudinal substrate feeding unit 600b and the substrate supporting unit moving path heavy position. When the substrate s reaches the overlapping position At this time, the vertical substrate feeding unit 600b is moved downward to transfer the substrate S to the substrate supporting unit 16o. Once the substrate S is placed on the substrate supporting member 18o, the substrate supporting unit 16 () is operated to feed the substrate S into Load lock chamber 100. Therefore, the substrate feeding device 600 completes loading the substrate s into the load lock chamber 100. The substrate feeding device 600 performs the process of unloading the substrate s from the load lock to 100 in the reverse order of the loading process described above. That is, the substrate support unit 操作 first operates to move the substrate S above the substrate feeding device 600, and the substrate feeding device 600 then moves upward to transfer the substrate s from the substrate support unit 160 to the vertical substrate feeding unit 6 〇〇b. Then control the longitudinal substrate feeding unit 600b so that its rollers rotate in the reverse direction. As a result, the substrate s is fed into the lateral substrate feeding unit 600a along the longitudinal substrate feeding unit 600b. Then the longitudinal substrate feeding unit 600a. 600b moves down to make the substrate support unit 160 back into the load lock chamber 100. The unloading of the substrate s is thus completed. The fourth example is roughly an FPD manufacturing device installed in a clean room to prevent the substrate in the process from being contaminated, and accurately Generally, several FPD manufacturing devices are connected in parallel in the clean room as shown in Figure 18. In the example of Figure 18, two adjacent FPD manufacturing devices la and lb are shown. The FPD manufacturing devices la and lb are connected to a single external Substrate supplier 400 to form an FPD manufacturing system. That is, at least two FpD manufacturing systems are left out to form an FPD manufacturing system. All FpD manufacturing devices included in the FPD manufacturing system are -19- 200526476 In this example, the external substrate supply robot 410 is set in the external substrate supplier 400. * The external substrate supply robot 410 sends the substrate to be processed into the load lock chambers 100a and 1b of the FPD manufacturing apparatuses 1a and 1b. lOOb, and the processed substrates are transferred to the next processing station while moving along the holder 420. Due to the FPD manufacturing, the load lock chambers 100a and 100b of the split la and lb perform substrate loading. At the same time as loading and unloading, an atmospheric state and a vacuum state are repeatedly and alternately established, so a pumping device for establishing a vacuum state in the load lock chambers 100a and 100b and a load lock chamber iOOa & 100b • Atmospheric exhaust devices that are built in the air will often fail. In this connection, when the FPD manufacturing device of the FPD manufacturing system operates independently as described above, a problem arises that when any FPD manufacturing device fails, the entire FPD manufacturing The system must be stopped because no substrate processing can be performed until the load lock chamber of the failed FPD manufacturing device is completely repaired. At the same time, the increased number of substrates must be processed in a limited number of clean rooms because the installation cost of the clean room is higher as described above. Especially when large FPD manufacturing equipment is required to make extremely large FPDs, the efficiency of using the space in the clean room becomes extremely important. In order to meet this demand, an FPD manufacturing system is provided according to this example, in which the common room 150 σ is again placed between the adjacent fpd manufacturing device 忉 ⑽ and the individual feed rooms 1203 and i2b here, so that The substrates are received from the feed chambers 120a and 120b and transferred to the feed chambers 12 and 120. For example, in FIG. 19, another common room 700 is provided between the individual feed chambers 120a and 120b of adjacent FPD manufacturing apparatuses 10a and 100b) in the FPD manufacturing system. The common room 700 serves as an intermediate position to transfer substrates for receiving from a feed room connected to the common room 700 or receiving this -20- 4 200526476

I substrate, and transfer the substrate to another feed chamber. : The gate valves 720a and 720b are respectively provided between the common room 700 and one feed room 2000a, and between the common room 700 and the other feed room 200b to close the feed rooms i20a and 12b respectively. . After completion of the substrate transfer, the gate valves 720a and 720b can reliably close the relevant feed chambers i20a and i20b to prevent interference with other processes performed by the FPD manufacturing apparatus 1a and 2a. A loading mold 710 is provided in the common room 700 so as to temporarily load the substrate into the common room 270. When the feeding robot 21a provided in one of the feeding rooms 200a and 200b (such as the feeding room 200a) transfers the substrate to the common 胄 700, the substrate must be temporarily loaded into the common t 700 to then transfer the substrate to another One feed chamber 200b. Therefore, a loading die 71 is provided in the common room 700, and its function is to load at least-a substrate. The function of the common room 7GG is a processing room, which can independently perform a certain processing of the substrate. That is, the common room 700 is not only a simple intermediate position for substrate transfer, but also a processing room to independently perform a certain process of the substrate. Therefore, when a load lock chamber of an FPD manufacturing apparatus fails, the normal FPD manufacturing apparatus and the faulty FPD manufacturing apparatus are also transferred from the load lock of the normal FPD manufacturing apparatus to the receiving substrate via the feed chamber of the normal FPD manufacturing apparatus. Adjacent, and the substrate is transferred to the processing chamber of the fault manufacturing apparatus via the feed chamber of the old FPD manufacturing apparatus. On the other hand, when the two load lock chambers of the FPD manufacturing apparatus are normally operated, the common chamber is used as a general processing chamber. Therefore, the space defined between adjacent FPD manufacturing devices can be effectively used. In addition, several processing chambers can be connected to each of the feeding chambers of the manufacturing apparatus. As shown in Figure 2 ′, in this example, the efficiency of the use of the clean room space can be improved, while the manufacturing apparatus is installed in the clean room. -21-200526476 ·-Since the common room 700 is included in the FPD manufacturing system according to this example, this FH) manufacturing system can still operate when one of the feed chambers 200a and 200b is connected to the load lock chamber. A method for operating the system according to this example, ie)), according to this example will be described below with reference to FIG. 21. In order to facilitate the description, the following description will be described with an example. The FPD manufacturing system includes two fPD manufacturing devices, which are called first and second FPD manufacturing devices. First, the operation of the fpd manufacturing system during normal operation of the two FPD manufacturing apparatuses will be explained. • The external substrate supply robot 410 provided in the external substrate supplier 4 卯 supplies substrates to each of the FPD manufacturing apparatuses la and lb, and moves to a position in which the FpD manufacturing apparatus 仏 or lb is installed, and receives the processed substrates. . For example, the external substrate supply robot 410 first transfers the first substrate to be processed to the load lock chamber 100a of the first FpD manufacturing apparatus la. After the first load lock chamber receives the first substrate, the first interlock 120a is closed. In this state, the first load lock chamber is pumped to establish a vacuum therein. After the vacuum is established in the first load-lock chamber 100a, the second gate valve 220a located between the first load-lock chamber and the first feed-in chamber scale receives the first substrate loaded into the first load-lock chamber, and This first substrate is transferred to the first processing chamber 300a. The desired processing of the first substrate is then performed in the first processing chamber. At the same time, the external substrate supply robot 410 moves to the second FPD garment Ub '& which transfers the second substrate to be processed to the second manufacturing device adjacent to the first manufacturing device la to 100b. The substrate transfer operation related to the first FPD manufacturing apparatus 1b is the same as the substrate transfer insertion related to the first FpD manufacturing apparatus 1a. Although the desired processing of the second substrate is performed in the second manufacturing device close processing chamber 3_, 22- 200526476 », the first substrate selected by the external substrate supply robot 410 (which has been processed in the first FPD manufacturing device la ), And the external substrate supply robot 410 feeds the first substrate into the next processing station. When the common room 700 is set as a processing room, the feed robots 210a and 210b provided in the feed rooms 200a and 200b supply substrates to the common room 700 so as to process the substrates waiting to be processed therein. An FPD manufacturing apparatus will now be described. The operation of the FPD manufacturing system during normal operation. In order to facilitate the explanation, the following description will be described with an example in which the load lock chamber 100a made by the first FPD manufacture fails. The external base board is used for 410 buttons and key management by the money maker—the second load lock chamber rattan that is the masterpiece of the masterpiece. The second feeding robot in the second feeding chamber receives the first substrate and transmits the first substrate to the second processing chamber 3. Then, the first substrate is processed in the second processing chamber b. At the same time, the second substrate is sent to the second load lock chamber surface. Of course, the second load lock chamber may be dirty in a state where a plurality of health boards have been supplied. The second feed robot dove then receives the second substrate from the second load lock chamber and transmits the second substrate to the common chamber paste. Then, the first feeding robot from the first feeding to 200a receives the second substrate from the common room, and transfers the second substrate to the first processing chamber, which performs the desired processing of the second substrate. When the processing performed by the first substrate is completed during the execution of the second substrate processing, the second ballasting robot _ selects the first substrate from the second processing chamber, and unloads the second substrate from the outside via the second chamber surface. The second feed robot recommends that the third substrate be fed into the second processing chamber. Although the processing of the third substrate is performed in the second processing protocol, the first mining robot -23- 200526476

I t ⑽a unloads the second substrate from the first processing chamber_a, and feeds the second substrate into the common chamber and then the second feeding robot is loaded into the common chamber through the second load lock chamber surface The second substrate is unloaded from the outside, and then the fourth substrate is sent to the manufacturing room 700. Therefore, according to the repetition of the above operation, all the processing chambers can be used even in the abnormal situation of the load-lock chamber. When the FPD manufacturing system includes a plurality of Jianlian manufacturing equipment, the efficiency of the FPD manufacturing system can be improved. 'This is because even if the number of processing chambers provided in each FpD manufacturing equipment is not enough to handle the increased number of substrates', or at least either When the failure of the processing chamber is insufficient, the deficiency can be removed by using a processing chamber provided in an adjacent FPD manufacturing apparatus. As can be seen from the foregoing description, the present invention provides many advantages. That is, according to the first example of the present invention, a load lock chamber (which has two closures) is used to greatly reduce the time for downloading a person / unloading board in the atmosphere, so that the efficiency of substrate processing can be improved. When the substrate supporting unit according to the second example of the present invention is used, it is possible to reduce the time required to load the substrate into and load the substrate from the load lock chamber, and to simplify the structure of the device used in feeding the substrate. • According to the second example of the present invention, despite the fact that the FPD manufacturing apparatus is relatively large in size, the space usage efficiency in which the FPD manufacturing apparatus is installed can be made extremely high. According to the third example of the present invention, the device used in the feeding substrate is relatively simple, so that the manufacturing cost of the device can be reduced to increase the efficiency of substrate feeding, and the time required for feeding the substrate is reduced, thereby increasing the efficiency of substrate production. In the FPD manufacturing system according to the fourth example of the present invention, a common room is provided between adjacent feed rooms so that the FPD manufacturing apparatus related to the feed room can transfer the substrates through the common room. Therefore, it is possible to reduce -24- 200526476 FPD manufacturing system occupying the area of the clean room 'while increasing the operating efficiency of the FPD manufacturing system. Although it has been said for the purpose of narrative, the present invention is a better example, and those skilled in the art can understand the additions and substitutions without departing from the spirit and scope of the present invention disclosed in the scope of the attached patent application. Various modifications [Brief description of the drawings] From the above detailed description and the accompanying drawings, the above-mentioned objects and other features and stopping points of the present invention have been understood, in which: FIG. 1 is a schematic plan view illustrating a conventional FPD manufacturing device; FIG. 2 It is a schematic side view of the conventional FPD manufacturing apparatus to explain the constituent elements of the conventional fpd manufacturing apparatus; FIG. 3 is a schematic plan view of the conventional FPD manufacturing apparatus to explain the operation of the constituent elements of the conventional fpd manufacturing apparatus Figures 4 and 5 respectively illustrate different configurations of the fpd manufacturing apparatus according to the first example of the present invention; Figure 6 is a schematic plan view of the FPD manufacturing apparatus according to the first example of the present invention to illustrate the brakes installed in the load lock chamber; 7 is a schematic perspective view of the FpD manufacturing apparatus according to the first example of the present invention to explain the substrate supporting members connected to each gate; FIG. 8 is a schematic plan view to explain the operation of the substrate supporting member; FIG. 9 is a schematic side view to Describe a gate with a multilayer substrate support structure, which is an example according to the present invention, which is a modification of the first example of the present invention; FIG. 10 ′ 11 is a schematic plan view to illustrate each According to different configurations of the second example of the present invention FPJ) manufacturing apparatus; ® 12 Cloth illustrates a perspective view to illustrate tolerance brake according to a second example of the present invention; -25-

I 200526476. FIG. 13 is a schematic perspective view to illustrate a substrate supporting member according to the second example of the present invention, which is connected; ^ ® 14 is a schematic plan view to illustrate an FPD manufacturing apparatus according to the third example of the present invention; FIG. 15 Is a perspective view to explain a part of the substrate feeding device according to the third example of the present invention; FIG. 16 is a schematic side view to explain the substrate feeding device; FIG. 17 is a schematic side view to explain the operation of the substrate feeding device; 18, 19, and 20 are schematic plan views respectively illustrating different configurations of a manufacturing apparatus according to a fourth example of the present invention; and FIG. 21 is a flowchart illustrating a method for operating a flat panel display manufacturing system according to the present invention. [Description of component symbols] la, lb FPD manufacturing equipment 100, 100a, 100b Load lock chamber 110, 120 Gate 120a, 120b, 200, 200a, 200b Feed chamber 130, 170 Substrate entrance Lu 140 Hinging unit 142 Hinging element 150, 150a, 150b, 150c, 180 substrate support 152 substrate contact element 154 support arm 160 substrate support unit 190 feeder-26- 200526476

I 192 guide rail 194 guide block 210, 210a, 210b feed robot 300, 300a, 300b processing chamber 310 processing device 400 substrate transfer device 410 external substrate supply robot φ 420 rail 5QQ substrate storage box 600 substrate feed device 600a transverse substrate Feeding unit 600b Longitudinal substrate feeding unit 610 Roller support belt 620 Roller • 630 Substrate stopper 700 Common chamber 710 Loading mold 720a, 720b Gate valve S substrate

Claims (1)

I 200526476 Scope of patent application: _ 1. A flat panel display manufacturing device, including a load lock chamber, a feed-in chamber, and a processing chamber, the device further includes: a substrate inlet, which is arranged in the load lock chamber and the load lock chamber Communicates with the load lock's outer space; a plurality of gates are provided in the load lock chamber to open and close the substrate entrance; and a plurality of substrate supports are respectively connected to the gates to allow the substrate to be placed on the upper surface of the substrate support. 2. The flat panel display manufacturing device according to item 1 of the patent application scope, in which:% 忒 and other gates are arranged in pairs on the side wall of the load lock chamber, and the substrate entrance is formed so that the gates included in each gate pair can overlap; And the gate population in each gate pair replaces the substrate population, so that the gate of each gate pair and the gate entrance • ^ When the first of the gate pairs closes the gate entrance, opens the gate entrance, and when the second When the gate is separated from the substrate entrance, the first gate closes the substrate entrance to open the substrate entrance. 3. As in the second flat panel display II manufacturing device of Shen Mian, the first and second gates are connected to the end of the load lock chamber so that the first and second gates are hinged independently of each other. The flat panel display H manufacturing device of the towel item 3 of her head is connected to the end of the load lock chamber by a hinge element respectively. Female Shen. The flat-panel display manufacturing device of the fourth patent of the invention, wherein the hinge elements are respectively connected to the hinge support members protruding from the end of the load lock chamber. For example, the flat panel display manufacturing device of item 4 in the patent scope of claim 4, wherein each substrate support includes a substrate support arm, which has a gradual increase, so that the substrate support arm is multiplexed to the load lock at a great distance. A part of the relevant gate is separated and has a very small length, and the base plate supporting arm is separated from the relevant gate connected to the load lock chamber and has a very small length. -28- I 200526476 t • 丨 If the flat panel display manufacturing device of the first item of the patent application scope, wherein each substrate support has a "multi-layer structure, which has a plurality of substrate support layers to support a plurality of substrates at the same time. 8. — A flat panel display manufacturing device includes a load lock chamber, a feed chamber, and at least one processing chamber connected to the feed chamber. The apparatus further includes: at least one substrate support unit, each of which is disposed at a side of the load lock chamber, and The side walls of the load lock chamber connected to the feed-in chamber are adjacent so that each substrate supporting unit communicates with the load lock chamber via the side wall of the load lock chamber. In order to load a substrate into the load lock and unload the substrate from the load lock chamber. 9. For a flat panel display manufacturing device according to item 8 of the patent application, wherein the two substrate support units are disposed on the two sides of the load lock chamber, the The load lock chamber is adjacent to the side wall of the load lock chamber connected to the feed-in chamber, so that each substrate supporting unit communicates with the load lock chamber through the side wall of the load lock chamber, and the load lock chamber The side wall is adjacent to the side wall of the load lock chamber that is connected to the feed-in room. 10. The flat panel display miscellaneous device of item 8 or 9 of Shen Zhuanli, where each of the base plate branch units includes: Lu-base plate support, A floor is provided to support a base plate; and the feed-in is adapted to move the base plate supporting pieces back and forth along the load lock chamber. 11. As shown in the patent application, the flat panel display miscellaneous device surrounding item 1 () The feeding device includes: a guide rail, which is arranged in the load lock chamber; and-a guide block, which is connected to the substrate cutting part and can move along the guide rail. Manufacturing device, in which the substrate supporting piece has a multi-layer structure, and its financial and economic status. -29 > 200526476 " i3 · If the flat-panel display manufacturing device with the scope of patent application No. ι0, still includes:- A substrate transfer device is adjacent to the load lock chamber to feed a substrate carrying cassette to each substrate support unit. 14. If the flat panel display manufacturing device of item 10 of the patent application scope further includes: a substrate feed transfer system for To transfer a substrate to each substrate The support unit and the substrate are received from the substrate support unit, thereby loading the substrate into the substrate support unit and unloading the substrate from the substrate support unit. Device or an etching device. Φ16. The flat panel display manufacturing device according to item 9 of the patent application scope, further comprising: a substrate inlet formed on a side wall of the load lock chamber, and the load lock chamber and the load lock chamber connected to the feed-in chamber. The side walls are adjacent to allow the substrate support unit to pass through the substrate entrance respectively; and a plurality of doors are provided on the side walls of the load lock chamber to respectively close the relevant substrate entrances, wherein the special is controlled so that when the first one of the substrate support unit is driven The door opposite to the first substrate supporting unit closes the substrate entrance, which is formed on the side wall of the load lock chamber associated with the first substrate supporting unit. • 17. The flat panel display manufacturing device according to item 10 of the patent application scope, further comprising: a substrate feeding device for feeding a substrate to the side wall of the load lock chamber, so that the relevant substrate support unit can communicate with the load lock Chamber, wherein the substrate feeding device includes a transfer system. 18. If the flat-panel display manufacturing device according to item 17 of the patent application scope, wherein the substrate feeding device comprises: a plurality of roller support belts; and a plurality of rollers' connected between the roller building belts and separated equally from each other, each roller can be Independent rotation. -30- I 200526476 ·-19 · If the flat-panel display manufacturing device according to item 17 of the patent application scope, wherein the substrate feeding device can be vertically moved. 20. The flat-panel display manufacturing device according to item 17 of the patent application scope, wherein the substrate feeding device extends to a position, wherein the substrate feeding device overlaps a path, and one of the substrate supporting units moves along it. 21. The flat panel display manufacturing device according to item π of the patent application range, wherein each of the wheels can be turned in the forward and reverse directions' and controlled to rotate in the forward direction when loading a substrate and in the opposite direction when unloading a substrate. φ22. For the flat panel display manufacturing device of the μ scope of the patent application, the substrate feeding device further includes: a substrate blocking member provided at one end of the substrate feeding device to prevent the substrate feeding device from exceeding a substrate feeding A preset position. 23 · —A flat panel display manufacturing system, including at least one load lock chamber for receiving a substrate from the load lock chamber and transferring the substrate to the load lock chamber while simultaneously establishing a vacuum state and an atmospheric state; Φ a Feed to, separate from each other and maintain an atmospheric state, each feed chamber receives a substrate from the load lock chamber, transfers the substrate to another feed chamber, receives the substrate from another feed chamber, and transfers the substrate to the load lock chamber; at least A processing chamber is connected to each of the feeding chambers, and a processing device is provided in the processing chamber to perform a preset processing for loading the substrate of the processing chamber; and a common chamber is located between the feeding chambers and is connected with the feeding chamber. The opposite side walls of the common room adjacent to the entrance room are respectively provided with a plurality of rooms in order to receive the substrate from the feed room and feed the substrate into the feed room. -31-200526476 24. The flat panel display manufacturing system according to item 23 of the patent application, wherein at least one load lock chamber includes two load lock chambers respectively connected to the feed-in chambers. 25. The flat panel display manufacturing system according to item 24 of the patent application, wherein the common room includes a loading mold located in the common room to load the substrates from the feeding room; and the common room function is an intermediate position for The substrate is transferred between the feed chambers. 26. For example, the flat-panel display manufacturing system named No. 24 in the patent scope, where the common room still includes a processing device 'located in the common room' and a plurality of gate valves are adapted to close the idle respectively; and the function of the common room is-the processing room to Independently execute the preset process for substrates in the manned common room. 27 ·-A method for manufacturing the flat panel display II, using the _ flat panel display manufacturing system ', which includes at least two parallel flat panel display 11 manufacturing devices, each flat panel display manufacturing device includes:-load lock to feed to-processing room, And—the common room is located between the feed-in rooms of the flat panel display manufacturing device, and the method includes the following steps: a) check that each load lock room is operating normally; ⑩b) if each load lock room is operating normally, Feed room supply of the room—substrates, from the substrates that receive the load lock to the receiver to collect the finished substrate, and the place to receive the substrate, and the right load lock to the wrong work, through another load lock room to The feed-in room received from another load lock chamber supplies a substrate; c) the substrate is transferred to the common room according to the feed-in operation received from another load-locked officer, and the substrate is supplied to the other load-lock chamber The feed room of the room; d) The substrate is transferred to the common-32-200526476 room according to the operation of the feed room of the load lock room that is not operating normally. , Received the feed chamber connected to the load lock chamber for abnormal operation; e) According to the operation of the feed chamber connected to the load lock chamber for abnormal operation, and unloaded the processed substrate from the processing chamber, the processing chamber received abnormal operation The load lock chamber and transferring the unloaded substrate to the common chamber; and 0 according to the operation of the feed chamber received from another load lock chamber, the processed substrate is transferred from the common chamber to another load lock chamber. -33-