TW200508128A - Transporting apparatus - Google Patents

Transporting apparatus

Info

Publication number
TW200508128A
TW200508128A TW093120986A TW93120986A TW200508128A TW 200508128 A TW200508128 A TW 200508128A TW 093120986 A TW093120986 A TW 093120986A TW 93120986 A TW93120986 A TW 93120986A TW 200508128 A TW200508128 A TW 200508128A
Authority
TW
Taiwan
Prior art keywords
transporting
transporting apparatus
units
transported object
unit
Prior art date
Application number
TW093120986A
Other languages
Chinese (zh)
Other versions
TWI295657B (en
Inventor
Yoshiteru Ikehata
Takayoshi Ono
Yuichi Morimoto
Original Assignee
Daifuku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2003281678A external-priority patent/JP4258714B2/en
Priority claimed from JP2003281677A external-priority patent/JP2005047675A/en
Application filed by Daifuku Kk filed Critical Daifuku Kk
Publication of TW200508128A publication Critical patent/TW200508128A/en
Application granted granted Critical
Publication of TWI295657B publication Critical patent/TWI295657B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Steering-Linkage Mechanisms And Four-Wheel Steering (AREA)
  • Branching, Merging, And Special Transfer Between Conveyors (AREA)
  • Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)

Abstract

It is object of the invention to provide an apparatus for transporting a transported object in a transporting direction as the transported object is supported by air, the apparatus having a plurality of transporting units. A specific transporting unit of the plurality of transporting units is controlled based on the transporting state of at least one other transporting unit. Thus, it is possible to reduce the number of problems that may occur during transporting.
TW093120986A 2003-07-29 2004-07-14 Transporting apparatus TWI295657B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003281678A JP4258714B2 (en) 2003-07-29 2003-07-29 Transport device
JP2003281677A JP2005047675A (en) 2003-07-29 2003-07-29 Carrying device

Publications (2)

Publication Number Publication Date
TW200508128A true TW200508128A (en) 2005-03-01
TWI295657B TWI295657B (en) 2008-04-11

Family

ID=34137909

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093120986A TWI295657B (en) 2003-07-29 2004-07-14 Transporting apparatus

Country Status (4)

Country Link
US (2) US7140827B2 (en)
KR (2) KR101140834B1 (en)
CN (2) CN1576200B (en)
TW (1) TWI295657B (en)

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TWI295657B (en) * 2003-07-29 2008-04-11 Daifuku Kk Transporting apparatus
TWI295658B (en) * 2003-08-21 2008-04-11 Daifuku Kk Transporting apparatus
TWI295659B (en) * 2003-08-29 2008-04-11 Daifuku Kk Transporting apparatus
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CN103381965B (en) * 2013-07-02 2016-02-03 深圳市华星光电技术有限公司 A kind of air-flotation type guide wheel transmission device of liquid crystal panel
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US10858202B1 (en) * 2014-04-14 2020-12-08 Amazon Technologies, Inc. Air cushioned materials handling system
WO2015164264A1 (en) 2014-04-21 2015-10-29 Grabit, Inc. Automated item handling with reconfigurable totes
US9620006B2 (en) 2014-11-21 2017-04-11 At&T Intellectual Property I, L.P. Systems, methods, and computer readable storage devices for controlling an appearance of a surface using sound waves
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WO2017123818A1 (en) 2016-01-12 2017-07-20 Grabit, Inc. Methods and systems for combined negative pressure and electroadhesion-based manipulation in manufacturing
JP6723055B2 (en) * 2016-04-04 2020-07-15 株式会社荏原製作所 Substrate processing apparatus and method for confirming presence/absence of substrate
US10074554B2 (en) * 2016-06-27 2018-09-11 Tel Nexx, Inc. Workpiece loader for a wet processing system
WO2018071722A1 (en) * 2016-10-12 2018-04-19 Grabit, Inc. Systems and methods for aerodynamically lifting parts
US10666715B2 (en) * 2017-05-08 2020-05-26 International Business Machines Corporation Incident management for complex information technology platforms
WO2019229927A1 (en) * 2018-05-31 2019-12-05 株式会社Ｆｕｊｉ Waste tape conveying device and component mounting system
CN110844496A (en) * 2019-11-25 2020-02-28 威海职业学院 Intelligent electromechanical automatic feeding control system and method
TWD212890S (en) * 2020-06-24 2021-07-21 大陸商武漢蔚來能源有限公司 Swap station parking platform
CN113184539A (en) * 2021-05-08 2021-07-30 郑少华 Glass panels pushing mechanism, conveyor and go up unloading equipment

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Also Published As

Publication number Publication date
KR101140834B1 (en) 2012-06-27
US7140827B2 (en) 2006-11-28
US20070003400A1 (en) 2007-01-04
US20050036873A1 (en) 2005-02-17
CN1576200A (en) 2005-02-09
KR20050013978A (en) 2005-02-05
KR101142809B1 (en) 2012-05-14
TWI295657B (en) 2008-04-11
CN1576200B (en) 2011-02-02
CN102101590B (en) 2013-03-27
CN102101590A (en) 2011-06-22
KR20120023587A (en) 2012-03-13

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Legal Events

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MK4A Expiration of patent term of an invention patent