TW200505780A - System for fabricating electrical circuits employing a fluid flow supporter - Google Patents
System for fabricating electrical circuits employing a fluid flow supporterInfo
- Publication number
- TW200505780A TW200505780A TW093105535A TW93105535A TW200505780A TW 200505780 A TW200505780 A TW 200505780A TW 093105535 A TW093105535 A TW 093105535A TW 93105535 A TW93105535 A TW 93105535A TW 200505780 A TW200505780 A TW 200505780A
- Authority
- TW
- Taiwan
- Prior art keywords
- supporter
- electrical circuits
- fluid flow
- circuits employing
- fabricating electrical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Solid Materials (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003055361A JP3995617B2 (ja) | 2003-03-03 | 2003-03-03 | 空気浮上装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200505780A true TW200505780A (en) | 2005-02-16 |
Family
ID=32958661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093105535A TW200505780A (en) | 2003-03-03 | 2004-03-03 | System for fabricating electrical circuits employing a fluid flow supporter |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP3995617B2 (zh) |
TW (1) | TW200505780A (zh) |
WO (1) | WO2004079496A2 (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7908885B2 (en) | 2004-11-08 | 2011-03-22 | New Way Machine Components, Inc. | Non-contact porous air bearing and glass flattening device |
JP4664117B2 (ja) * | 2005-03-03 | 2011-04-06 | 住友重機械工業株式会社 | 搬送物浮上ユニット、搬送物浮上装置、及びステージ装置 |
JP4869612B2 (ja) * | 2005-03-25 | 2012-02-08 | 東京エレクトロン株式会社 | 基板搬送システムおよび基板搬送方法 |
JP4830339B2 (ja) * | 2005-04-27 | 2011-12-07 | 株式会社Ihi | 搬送装置 |
JP4553376B2 (ja) | 2005-07-19 | 2010-09-29 | 東京エレクトロン株式会社 | 浮上式基板搬送処理装置及び浮上式基板搬送処理方法 |
JP4700430B2 (ja) * | 2005-07-26 | 2011-06-15 | シーケーディ株式会社 | 非接触支持装置の検査方法 |
JP4917780B2 (ja) * | 2005-09-08 | 2012-04-18 | 住友化学株式会社 | 露光装置 |
JP4535972B2 (ja) * | 2005-09-09 | 2010-09-01 | 株式会社ブイ・テクノロジー | ワークステージ及び露光装置 |
JP4594241B2 (ja) * | 2006-01-06 | 2010-12-08 | 東京エレクトロン株式会社 | 基板搬送装置、基板搬送方法及びコンピュータプログラム |
JP2007182304A (ja) * | 2006-01-06 | 2007-07-19 | Tokyo Electron Ltd | 基板搬送装置、基板搬送方法及びコンピュータプログラム |
JP2007194508A (ja) * | 2006-01-20 | 2007-08-02 | Tokyo Electron Ltd | 基板搬送装置、基板搬送方法及びコンピュータプログラム |
JP2007283428A (ja) * | 2006-04-14 | 2007-11-01 | Yokogawa Electric Corp | ワーク加工装置およびワーク移送システム |
JP2008140953A (ja) * | 2006-12-01 | 2008-06-19 | Tanken Seal Seiko Co Ltd | 浮上装置 |
JP5221508B2 (ja) * | 2009-12-25 | 2013-06-26 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5485928B2 (ja) * | 2011-03-09 | 2014-05-07 | 東京エレクトロン株式会社 | 基板浮上搬送装置及び基板処理装置 |
JP2014218342A (ja) * | 2013-05-09 | 2014-11-20 | オイレス工業株式会社 | 支持用エアプレートおよびその気体流抵抗器 |
JP2015034078A (ja) * | 2013-08-09 | 2015-02-19 | オイレス工業株式会社 | 支持用エアプレートおよびその気体流抵抗器 |
CN115070493A (zh) * | 2022-07-25 | 2022-09-20 | 南通康弘机械制造有限公司 | 一种数控机床加工用加工接料机构 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3589704A (en) * | 1968-11-12 | 1971-06-29 | Ibm | Holders for irregularly formed integrated circuit devices |
JPH10270535A (ja) * | 1997-03-25 | 1998-10-09 | Nikon Corp | 移動ステージ装置、及び該ステージ装置を用いた回路デバイス製造方法 |
JPH11214887A (ja) * | 1998-01-27 | 1999-08-06 | Fuji Mach Mfg Co Ltd | 電気部品装着機支持装置 |
US6711797B1 (en) * | 1999-06-21 | 2004-03-30 | Dek International Gmbh | Hydraulic tooling fixture |
US6666928B2 (en) * | 2001-09-13 | 2003-12-23 | Micell Technologies, Inc. | Methods and apparatus for holding a substrate in a pressure chamber |
-
2003
- 2003-03-03 JP JP2003055361A patent/JP3995617B2/ja not_active Expired - Fee Related
-
2004
- 2004-03-02 WO PCT/IL2004/000201 patent/WO2004079496A2/en active Application Filing
- 2004-03-03 TW TW093105535A patent/TW200505780A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
JP2004262608A (ja) | 2004-09-24 |
WO2004079496A2 (en) | 2004-09-16 |
JP3995617B2 (ja) | 2007-10-24 |
WO2004079496A3 (en) | 2006-05-04 |
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