200300574 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明（1 ) 【發明所屬的技術領域】 本發明是關於適合用來切割半導體晶圓的切削機，特 別是關於一種切削機’是在殼體內的前半部配置有：位方令 寬度方向中央的吸附區域、位於該吸附區域的其中一側的 淸洗區域、及位於吸附區域的另一側的晶圓匣盒載置區域 ’而在殼體的後半部是配置有位於寬度方向中央的切削區 域。 【習知技術】 在日本特開2 0 0 1 — 7 0 5 8公報中，是揭示有適 合以高效率來切割半導體晶圓的切削機。這種切削機，是 具有朝前後方向細長延伸的殼體，在該殼體的前面部是配 置有操作面板。在殻體的其中一側，是朝向後方依序配置 有：晶圓匣盒載置區域、吸附區域及淸洗區域。在殼體的 另一側的前後方向中央部是配置有切削區域。在吸附區域 是配置有臨時支承手段。而是配設有能選擇性地使其位於 吸附區域與切削區域的可動吸附手段。在晶圓匣盒載置區 域是配置了支承手段，在淸洗區域是配設有淸洗手段。在 殼體的上述另一側，是配設有兩個切削手段也就是第一切 削手段與第二切削手段。第一切削手段是具備有··第一旋 轉軸與安裝於該第一旋轉軸的切削刀具，第二切削手段是 具備有：第二旋轉軸與安裝於該第二旋轉軸的切削刀具。 第一旋轉軸與第二旋轉軸是將殼體的上述另一側一直線地 朝向前後方向延伸，第一切削刀具與第二切削刀具是分別 (請先閱讀背面之注意事項再填寫本頁) 一裝·200300574 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) [Technical Field to which the Invention belongs] The present invention relates to a cutting machine suitable for cutting semiconductor wafers, and particularly to a cutting machine. In the front half of the housing, a suction area in the center of the width direction, a cleaning area on one side of the suction area, and a cassette loading area on the other side of the suction area are disposed. In the rear half of the housing, a cutting area located at the center in the width direction is arranged. [Known Technology] Japanese Laid-Open Patent Publication No. 2000-2007 has disclosed a cutting machine suitable for cutting semiconductor wafers with high efficiency. This cutting machine has a casing that extends slenderly in the front-rear direction, and an operation panel is disposed on a front portion of the casing. On one side of the housing, a wafer cassette mounting area, a suction area, and a cleaning area are sequentially arranged toward the rear. A cutting region is arranged at a center portion in the front-rear direction on the other side of the housing. Temporary supporting means are arranged in the adsorption area. Instead, it is equipped with a movable suction means which can be selectively positioned in the suction area and the cutting area. Supporting means are arranged in the cassette loading area, and cleaning means are arranged in the cleaning area. On the other side of the casing, two cutting means, that is, a first cutting means and a second cutting means are provided. The first cutting means is provided with a first rotating shaft and a cutting tool attached to the first rotating shaft, and the second cutting means is provided with a second rotating shaft and a cutting tool attached to the second rotating shaft. The first rotation axis and the second rotation axis extend the other side of the housing in a straight line toward the front-rear direction. The first cutting tool and the second cutting tool are separate (please read the precautions on the back before filling this page). Loading ·
、1T d 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -5- 200300574 A7 B7 五、發明説明（2 ) 被安裝在第一旋轉軸的內側端也就是後端與第二旋轉軸的 內側端也就是前端，使其位置相互相對向。在切削機還裝 設有用來輸送被加工物的三個被加工物輸送手段也就是第 一被加工物輸送手段、第二被加工物輸送手段及第三被加 工物輸送手段。 在晶圓匣盒支承手段上載置有晶圓匣盒，在該晶圓匣 盒內是在上下方向隔著間隔收容有複數個被加工物也就是 經由安裝帶被安裝在形成於框架中央的安裝開口的半導體 晶圓。第一被加工物輸送手段會將晶圓匣盒內的被加工物 每次搬運出一枚輸送到臨時支承手段上。接下來，第二被 加工物輸送手段會將臨時支承手段上的被加工物輸送到位 於吸附區域的吸附手段上。吸附住了被加工物的吸附手段 會移動到切削區域。然後，在切削區域會讓第一刀具及第 二刀具作用於被加工物來進行所需要的切削，也就是執行 半導體晶圓的切割。當切削完成時，吸附手段會被移動到 吸附區域。接著，第三被加工物輸送手段會將吸附手段上 的被加工物輸送到淸洗手段。淸洗手段會將經過切削的被 加工物予以淸洗。淸洗過後的被加工物會藉由第二被加工 物輸送手段被輸送到臨時支承手段上。然後，第一被加工 物輸送手段會將臨時支承手段上的被加工物輸送到載置於 晶圓匣盒支承手段上的晶圓匣盒。 在曰本特開2 0 0 1 — 7 0 5 8公報所揭示的如上述 的切削機，與其他型態的切削機，例如日本特開平 1 1 一 2 6 4〇2號公報或日本特開平1 1 一 74 2 2 8 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） *«t衣-- (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 -6- 200300574 A7 B7 五、發明説明（3 ) (請先閲讀背面之注意事項再填寫本頁) 公報所揭示的切削機相比，是更將各區域的配置更下工夫 設計而更小型化。可是，並不是很完美的構造，具有如下 的問題。切削手段的切削刀具會由於切削的執行而磨損’ 而需要進行交換，可是從殼體的正面到切削刀具的安裝位 置有相當的距離，要從殼體的正面來進行切削刀具的交換 操作，不是不可能但也是相當困難。通常，操作員要位在 殼體的側面來執行切削刀具的交換操作，交換操作會比較 繁雜。而由於要作成在進行切削刀具的交換時能夠讓操作 員位在殼體的側面，而需要在殼體的側面部附近確保所需 要的空間，這樣會導致用來安裝切削機的空間變得較大。 要切削半導體晶圓而使用切削機時，是必須將切削機裝備 在所謂的潔淨室，用來裝備切削機的必須空間會變得較大 ，這個問題並不能予以忽視。 經濟部智慧財產局員工消費合作社印製 作爲要解決如上述的問題，要將切削刀具的交換操作 容易化，且減少用來裝備切削機的必須空間的切削機，本 申請人的申請的日本特願2 0 0 1 — 1 6 2 9 5 8號的說 明書及圖面（以下稱作「前申請說明書及圖面」），是揭示了 一種切削機，在殻體的前半部，在寬度方向中央部配置了 吸附區域，在該吸附區域的其中一側配置淸洗區域，在另 一側配置晶圓匣盒載置區域，在殼體的後半部，在寬度方 向中央部配置了切削區域。在這種切削機中，將殼體的前 面部的特定區域開放的話，就可以從殻體的前面部接近到 切削手段的切削刀具，可以容易且迅速地執行切削刀具的 交換操作。就不需要保有讓操作員進入到殼體的兩側或後 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -7- 200300574 A7 ___B7_ 五、發明説明（4 ) 面部的空間，就可以充分地縮小用來裝備切削機的必須空 可是，在前申請說明書及圖面所揭示的切削機中，並 沒有充分地檢討能夠因應需要來開放殼體的前面部的複數 個門部的構造，在進行切削手段的切削刀具的交換操作時 、或晶圓匣盒載置區域的朝向晶圓匣盒支承手段上的晶圓 匣盒的載置操作時，並不能非常合理地執行門部的開閉移 動操作，門部的開閉操作會很繁雜，會有這樣的問題。而 爲了要交換切削手段的切削刀具，操作員將其上半身進入 到殻體內時，並不能接近到操作手段，也不能看到會顯示 切削機的各種狀態的顯示手段，也會有這樣的問題。 在日本特開2 0 0 1 — 7 0 5 8公報所揭示的如上述 的切削機，是分別獨立設置三個被加工物輸送手段，也就 是第一被加工物輸送手段、第二被加工物輸送手段及第三 被加工物輸送手段，這三個被加工物輸送手段的存在會產 生，限制了小型化，且製作成本會變得較高這樣的問題。 【發明揭示】 本發明鑒於上述的情況，其第一目的，是要改良上述 前申請說明書及圖面所揭示的上述型態的切削機的殼體所 裝備的複數的門部的構造，要能夠充分且合理地執行因應 需要開放殻體的前面部的所需要的區域的門部的開閉操作 〇 本發明的第二目的，除了達成上述第一目的之外，當 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閱讀背面之注意事項再填寫本頁) |裝· 訂 經濟部智慧財產局員工消費合作社印製 -8- 200300574 A7 B7 五、發明説明（5 ) (請先閱讀背面之注意事項再填寫本頁) 操作員爲了要交換切削手段的切削刀具而讓上半身進入到 殼體內時，能讓操作員容易地接近到各種操作手段，且育g 夠容易地目視到顯示切削機的各種狀態的顯示手段。 本發明的第三目的，是要將第一被加工物輸送手段與 第二被加工物輸送手段的構造部分地共通化，而可讓加工 機器小型化且可減低製作成本。 藉由本發明的第一發明，爲了達成上述的第一目的， 在殼體的前面部是配設有三種門部，也就是配置有··安裝 成可於：覆蓋淸洗區域的前面部的關閉位置與從該關閉位 置朝殼體的單側方向改變位置來開放淸洗區域的前面部的 開啓位置之間移動自如的單側門部、安裝在單側門部，當 單側門部位於關閉位置時，可於：覆蓋吸附區域的前面部 的關閉位置與從該關閉位置朝單側方向改變位置而至少大 部分會位在單側門部的後方或前方的開放吸附區域的前面 部的開啓位置之間移動自如的中央門部、以及安裝成可於 :覆蓋晶圓匣盒區域的前面部的關閉位置與開放晶圓匣盒 區域的前面部的開啓位置之間移動自如的其他側門部。 經濟部智慧財產局員工消費合作社印製 也就是說，藉由本發明的第一發明，作爲達成上述第 一目的的切削機，在殼體內的前半部是配置有：位於寬度 方向中央部的吸附區域、位於該吸附區域的其中一側的淸 洗區域、及位於該吸附區域的另一側的晶圓匣盒載置區域 ，在該殻體內的後半部是配置有位於寬度方向中央部的切 削區域， 且具備有··配置於該淸洗區域的淸洗手段、配設於該 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -9- 200300574 A7 B7 五、發明説明（6 ) (請先閱讀背面之注意事項再填寫本頁) 晶圓匣盒載置區域的晶圓匣盒支承手段、朝前後方向移動 自如地配設於該殼體內的寬度方向中央部，可選擇性地使 其位於該吸附區域與該切削區域的吸附手段、以及配置在 該殻體內的後半部，具有位於該切削區域的切削刀具的切 削手段， 在該晶圓匣盒支承手段上是載置有收容了複數個被加 工物的晶圓匣盒，被收容在該晶圓匣盒的被加工物會依序 被輸送到該吸附區域，且在該吸附區域會被吸附到該吸附 手段上，會與該吸附手段一起被輸送到該切削區域，在該 切削區域藉由該切削手段的切削刀具來進行切削，接著會 與該切削手段一起回到該吸附區域，從該吸附區域被輸送 到該淸洗區域而被淸洗，然後被輸送回該晶圓匣盒， 經濟部智慧財產局員工消費合作社印製 在該殻體的前面部，是配置有：安裝成可於：覆蓋淸 洗區域的前面部的關閉位置與從該關閉位置朝該殻體的單 側方向改變位置來開放該淸洗區域的前面部的開啓位置之 間移動自如的單側門部、安裝在單側門部，當單側門部位 於關閉位置時，可於：覆蓋該吸附區域的前面部的關閉位 置與從該關閉位置朝單側方向改變位置而至少大部分會位 在該單側門部的後方或前方的開放該吸附區域的前面部的 開啓位置之間移動自如的中央門部、以及安裝成可於··覆 蓋該晶圓匣盒區域的前面部的關閉位置與開放晶圓匣盒區 域的前面部的開啓位置之間移動自如的其他側門部。 該其他側門部，最好是該其他側門部，是以實質上垂 直延伸於該殼體的該另一側的迴旋中心軸線爲中心，可於 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10- 200300574 A7 B7 五、發明説明（7 ) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 該關閉位置與該開啓位置之間自由迴旋。在用來達成上述 第二目的的切削機，當該中央門部被移到該開啓位置時， 該中央門部的至少大部分，會位於該單側門部的後方，在 該單側門部的前面部，是安裝有：以實質上垂直於該單側 門部的寬度方向內側緣部延伸的迴旋中心軸線爲中心，可 於··沿著該單側門部的前面部延伸的平常位置與從該單側 門部朝前方延伸出去的延出位置之間迴旋自如的支承構件 ’在該支承構件安裝有操作面板。該操作面板是由觸碰式 面板構成較佳。在較佳的實施型態，該切削手段是含有第 一切削手段與第二切削手段，該第一切削手段是具有：第 一旋轉軸、與安裝於該第一旋轉軸的第一切削刀具，第二 切削手段是具有··第二旋轉軸、與安裝於該第二旋轉軸的 第二切削刀具，該第一旋轉軸與該第二旋轉軸，是朝寬度 方向一直線地延伸於該殼體內的後半部，該第一切削刀具 與該第二切削刀具是分別被安裝在該第一旋轉軸的寬度方 向內側端與該第二旋轉軸的寬度方向內側端且位於互相相 對向的位置。在該吸附區域是配設有臨時支承手段，從該 晶圓匣盒被輸送到該吸附區域的被加工物，剛開始會被載 置於該臨時支承手段上，接著會從該臨時支承手段上被輸 送到吸附手段上，然後被分割且經過淸洗的被加工物，會 從該淸洗區域被輸送到該吸附區域，而被載置於該臨時支 承手段上之後，再被輸送入該晶圓匣盒。該臨時支承手段 是由一對支承構件所構成，該一對支承構件，可於··相互 隔著預定間隔而載置著跨越兩者間的被加工物的作用位置 本纸張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -11 - 200300574 A 7 B7 五、發明説明（8 ) (請先閱讀背面之注意事項再填寫本頁) 、與從該作用位置朝向互相分離的方向移動而允許被加工 物通過兩者之間下降的非作用位置之間自由移動，使該吸 附手段位於該吸附區域時，該吸附手段會位於該臨時支承 手段的下方。被加工物爲半導體晶圓，該切削刀具是圓板 形狀且含有鑽石粒子，來切割半導體晶圓。 藉由本發明的其他發明，爲了達成上述第三目的，是 配設有組合了傳統的切削機的第一被加工物輸送手段與第 二被加工物輸送手段的被加工物輸送手段，也就是在共通 可動支承構造體配設有第一保持手段與第二保持手段，第 一保持手段是作爲傳統的切削機的第一被加工物輸送手段 的功能，第二保持手段是作爲傳統的切削機的第二被加工 物輸送手段的功能，是將這樣組成的被加工物輸送手段裝 備於切削機。 經濟部智慧財產局員工消費合作社印製 也就是說，藉由本發明的其他發明，作爲用來達成上 述第三目的的切削機，是具備有：配置於晶圓匣盒載置區 域的晶圓匣盒支承手段、配設於吸附區域的臨時支承手段 、配設於切削區域的切削手段、選擇性地使其位於該吸附 區域與該切削區域的可動吸附手段、以及被加工物輸送手 段；在該晶圓匣盒支承手段上是載置了收容有被加工物的 晶圓匣盒，該被加工物輸送手段，會將被加工物從載置於 該晶圓匣盒支承手段上的晶圓匣盒輸送出，將其輸送到該 臨時支承手段上，接著將其從該臨時支承手段上輸送到位 於該吸附區域的該吸附手段上，在經過切削之後再將載置 於該臨時支承手段上的被加工物輸送入載置於該晶圓匣盒 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -12- 200300574 五、發明説明（9 ) 支承手段上的晶圓匣盒內之切削機， (請先閱讀背面之注意事項再填寫本頁) 該被加工物輸送手段，是包含有：共通可動支承構造 體、配設於該共通可動支承構造體且會進入到晶圓匣盒內 且可自由開放地保持著晶圓匣盒內的被加工物的第一保持 手段、以及配設於該共通可動支承構造體且可自由開放地 保持著被支承於該臨時支承手段上的被加工物的第二保持 手段，當將被加工物從載置於該晶圓匣盒支承手段上的晶 圓匣盒輸送出來將其輸送到該臨時支承手段上時、以及當 完成切削之後將載置於該臨時支承手段上的被加工物輸送 入載置於該晶圓匣盒支承手段上的晶圓匣盒內時，第一保 持手段會保持著被加工物，當將被加工物從該臨時支承手 段上輸送到位於該吸附區域的該吸附手段上時，該第二保 持手段會保持住被加工物。 經濟部智慧財產局員工消費合作社印製 本發明也可以適用於沒有配設淸洗手段與相關的被加 工物輸送手段也就是傳統的切削機的第三被加工物輸送手 段的切削機。在較佳的實施型態，被加工物是經由安裝帶 被安裝在在中央具有安裝開口的框架的該安裝開口的半導 體晶圓，在晶圓匣盒內是在上下方向隔著間隔收容有複數 個被加工物。該共通可動支承構造體，是包含有：安裝成 平行於與該晶圓匣盒載置區域與該吸附區域的分離方向且 實質上可朝水平方向自由來回移動的水平移動構件、以及 安裝成可朝實質上垂直於該水平移動手段的方向自由升降 移動的升降移動構件；該第一保持手段與該第二保持手段 是被配設在該升降移動構件較佳。該被加工物輸送手段的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29*7公釐） -13- 200300574 A7 B7 五、發明説明（1〇) (請先閲讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 該第一保持手段，其中在上下方向是隔著間隔突出且至少 其中一方，是由相對於另一方可自由接近及分離移動的一 對把持片所構成，該一對把持片會把持住框架的一側緣部 ，該被加工物輸送手段的該第二保持手段，是由用來真空 吸附框架的上面部的複數個吸附器所構成。在該被加工物 輸送手段的該升降移動構件是安裝有可選擇性地使其位於 垂下到下方的作用位置與朝上方延伸的非作用位置的可動 構件，該一對把持片是被配設在該可動構件，該可動構件 位於到該作用位置時，該一對把持片會從該可動構件朝外 側突出。該可動構件其基端部能夠以實質上朝水平延伸的 迴旋中心軸線爲中心迴旋自如地安裝於該升降構件。在較 佳的實施型態，該臨時支承手段是含有一對的支承構件， 該一對的支承構件可選擇性地位於：載置跨越兩者之間的 框架的作用位置、與可讓框架通過兩者之間升降的非作用 位置，該吸附手段位於該吸附區域的話，該吸附手段會位 於該臨時支承手段的該一對支承構件的下方。在具備有配 置於淸洗區域的淸洗手段的切削機，是配設有僅用來將位 於該吸附區域的該吸附手段上的經過加工後的被加工物從 該吸附手段上輸送到該淸洗手段所使用的附加被加工物輸 送手段，該被加工物輸送手段也使用用來將被加工物從該 淸洗手段輸送到該臨時支承手段上，當將被加工物從該淸 洗手段輸送到該臨時支承手段上時，可以讓該第二保持手 段保持住被加工物。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -14 - 200300574 A7 B7 五、發明説明（11 ) 【圖面說明】 (請先閱讀背面之注意事項再填寫本頁) 第1圖是顯示以本發明所構成的切削機的較佳實施型 態的立體圖。 第2圖是以使中央門部處於開啓位置且使安裝著中央 門部的單側門部處於開啓位置的狀態來顯示第1圖所示的 切削機的立體圖。 第3圖是爲了顯示第1圖的切削機的內部構造而省略 殻體等來圖示的立體圖。 第4圖是顯示藉由第1圖的切削機來進行切削的被加 工物（經由安裝帶被安裝在框架的半導體晶圓）的立體圖。 第5圖是顯示配設於第1圖的切削機的被加工物輸送 手段的立體圖。 【圖號說明】 經濟部智慧財產局員工消費合作社印製 A :晶圓匣盒載置區域 B :吸附區域 C :淸洗區域 D :切割區域 2 :殻體 4 :單側門部 6 :中央門部 8:其他側門部 1 0 :支承構件 1 2 :觸碰式面板 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -15- 200300574 A7 B7 五、發明説明（12 ) 1 4 :把手 1 6 :把手 (請先閱讀背面之注意事項再填寫本頁) 2 0 :把手 3 4 :晶圓匣盒支承手段 4 0 :升降台 4 2 :導軌 4 4 :公螺紋軸 4 6 :被加工物 4 8 :晶圓E盒 5 0 :框架 5 2 :安裝帶 5 4 :半導體晶圓 5 6 :切割道 6 4 :臨時支承手段 6 6 :支承構件 6 8 :吸附手段 7 0 :支承基台 7 2 :支承塊 經濟部智慧財產局員工消費合作社印製 7 4 :導軌 7 6 :滑動塊 7 8 :公螺紋軸 8 4 :把持機構 8 6 :可動把持片 8 8 :中空保護導管 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -16- 200300574 A7 ______B7 五、發明説明（13 ) 9 0 :淸洗手段 1 0 0 :空氣壓缸機構 1 1 2 a :第一切削手段 (請先閲讀背面之注意事項再填寫本頁) 1 1 2 b :第二切削手段 1 5 0 :被加工物輸送手段 【發明實施型態】 以下參照圖示的附圖來更詳細地說明以本發明所構成 的切削機的較佳實施型態。 經濟部智慧財產局員工消費合作社印製 第1圖是顯示以本發明所構成的切削機的全體。該切 削機是具備有以圖號2來顯示全體的殻體。圖示的殻體2 其全體爲縱長的長方體狀。在殼體2的前面部，是配設有 可自由開閉移動的三個門部，也就是配設有：位於寬度方 向其中一側（在圖示的實施型態中從前方來看是左側）的單側 門部4、位於寬度方向中央處的中央門部6、以及位於寬 部方向另一側（在圖示的實施型態中從前方來看是右側）的其 他側門部8。殻體2的除了單側門部4、中央門部6及其 他側門部8之外的部分也就是殼體主體，可以藉由連結適 當的板狀構件等來加以組成。 上述單側門部4是逆L字型，是從殼體2的其他區域 的前面部及上面部稍微朝前方及上方突出。單側門部4是 藉由適當的安裝手段（沒有圖示）而於實線所示的關閉位置與 兩點虛線所示的開啓位置之間沿著實質上水平且實質上垂 直延伸的平面（殼體2的前面部）移動自如地被安裝在殼體主 本紙張尺度適用中國國家標準（CNS ) A4規格（210 Χ；297公釐） -17- 200300574 A7 ____B7_ 五、發明説明（14 ) (請先閲讀背面之注意事項再填寫本頁) 體。在單側門部4是附設有適當的鎖定機構（沒有圖示），單 側門部4能在上述關閉位置與上述開啓位置的雙方自由解 除地加以鎖定。在單側門部4的前面部的上下方向中間區 域，是安裝有支承構件1 0。該支承構件1 0，是藉由適 當的安裝手段，以實質上垂直延伸於單側門部4的寬度方 向內側緣部的迴旋中心軸線1 1爲中心，是被安裝成可於 :實線所示的位置，也就是沿著單側門部4的前面部所延 伸的平常位置、與兩點虛線所示的位置，也就是實質上會 從單側門部4相對於其前面部垂直地延伸出去的延出位置 之間自由迴旋。而支承手段1 0，其本身是藉由習知的維 持手段（沒有圖示）在與上述平常位置與上述延出位置成任意 的角度位置被維持爲靜止狀態。在支承構件1 0是安裝有 矩形的觸碰式面板1 2。該觸碰式面板，是以用來顯示切 削機的各種作動狀態（例如，冷卻液的流動狀態，壓縮空氣 的流動狀態等）的顯示手段所構成，並且是以含有用來控制 切削機的作動的操作手段的操作面板所構成。在支承構件 1 0的下部是配設有朝水平方向延伸的把手1 4，當要使 支承構件1 0迴旋時則可以握住該把手1 4。 經濟部智慧財產局員工消費合作社印製 上述中央門部6是實質上垂直延伸的平板狀，不是安 裝在殼體主體，而是藉由適當的安裝手段，是沿著實質上 垂直延伸的平面（中央門部6本身延伸的平面）而可於實線所 示的關閉位置與兩點虛線所示的開啓位置之間實質上水平 自由移動地被安裝在上述單側門部4。在中央門部6是附 設有適當的鎖定機構（沒有圖示），中央門部6相對於單側門 本紙張尺度適用中國國家標準（CNS ) A4規格（210Χ 297公釐） ~ -18- 200300574 A7 B7 五、發明説明（15 ) 請 先 閲 讀 背 之 注 意 事 部4能在上述關閉位置與上述開啓位置的雙方自由解除地 加以鎖定。在圖示的實施型態中，中央門部6是被安裝在 單側門部4的後面部，當被移動到上述開啓位置時，其主 要部分（也就是從前方看到的右側緣部以外的部分）會位於單 側門部4的後方。後面更敘述到，在使中央門部6移動到 第1圖所示的開啓位置的狀態，將單側門部4移動到第1 圖所示的兩點虛線所示的開啓位置時，中央門部6會隨著 單側門部4的移動而移動，而成爲第2圖所示的狀態。在 中央門部6的從前方來看的右側緣部下部，是配設有朝垂 直方向延伸的把手1 6 ，當要使中央門部6移動時就可以 握住該把手1 6。 經濟部智慧財產局員工消費合作社印製 接下來參照第1圖繼續說明，上述其他側門部8其橫 剖面形狀爲L字型，是藉由適當的安裝手段（沒有圖示），以 實質上垂直延伸於殼體2的另一側（從前方來看是右側）的迴 旋中心軸線1 8爲中心，可於實線所示的關閉位置與兩點 虛線所示的開啓位置之間迴旋自如地被安裝在殻體主體。 在其他側門部8也附設有適當的鎖定機構（沒有圖示），能在 上述關閉位置與上述開啓位置的雙方自由解除地加以鎖定 。在其他側門部8的從前方來看的左側緣部中央部是配設 有朝垂直方向延伸的把手2 0 ，當要使單側門部8迴旋時 則可以握住把手2 0。 同時參照第1圖與第3圖來加以說明，在殻體2內， 在其前半部是配設有：晶圓匣盒載置區域A、吸附區域B 及淸洗區域C。吸附區域B是配置在寬度方向中央處，晶 本纸張尺度適用中國國家標準（CNS ) Α4規格（210Χ29?公釐） -19- 200300574 A7 _ B7 五、發明説明（16 ) (請先閱讀背面之注意事項再填寫本頁) 圓匣盒區域A是配置在吸附區域B的其中一側（從前方來看 是右側），淸洗區域C是被配置在吸附區域B的另一側（從前 方來看是左側）。在殼體內的後半部的寬度方向中央處是配 置有加工區域D。在本說明書爲了說明上的方便，將前後 方向稱作X軸方向，將寬度方向稱作Y軸方向，將上下方 向稱作Z軸方向。淸洗區域C、吸附區域B及晶圓匣盒載 置區域A實質上是一直線地排列於Y軸方向較佳。而吸附 區域B及加工區域D實質上是一直線地排列於X軸方向較 佳 經濟部智慧財產局員工消費合作社印製 如第3圖的明顯的圖示，在晶圓匣盒載置區域A是配 設有晶圓匣盒支承手段3 4。其本體可以是習知的型態， 而晶圓匣盒支承手段3 4具備有升降台4 0。是固定有實 質上垂直延伸的兩條導軌4 2，在升降台4 0形成有被導 引溝槽（沒有圖示），藉由使升降台4 0的被導引溝槽滑動自 如地卡合於導軌4 2，來讓升降台4 0沿著導軌4 2可自 由升降地被安裝著。並且可自由旋轉地安裝有實質上垂直 延伸的公螺紋軸4 4，在升降台4 0是固定有可螺合於公 螺紋軸4 4的母螺紋構件（沒有圖示）。在公螺紋軸4 4是連 結有電動馬達（沒有圖示），藉由用電動馬達來使公螺紋軸 4 4正轉及逆轉則可讓升降台4 0進行升降。 在上述晶圓匣盒支承手段3 4的升降台4 〇上，是載 置了收容有複數個被加工物4 6的晶圓匣盒4 8。圖示的 實施型態的被加工物4 6 ，如第2圖所示，是經由安裝帶 5 2被安裝在其中央形成有安裝開口 5 1的框架5 〇的半 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 一 " -20- 200300574 A7 B7 五、發明説明（17 ) (請先閲讀背面之注意事項再填寫本頁} 導體晶圓5 4。安裝帶5 2是涵蓋延伸於框架5 〇的安裝 開口 5 1 ，是貼附在框架5 0的背面，位於框架5 〇的安 裝開口 5 1內的半導體晶圓5 4其背面會貼附在安裝帶 5 2。在半導體晶圓5 4的表面是形成有排列成格子狀的 切斷線也就是切割道5 6，在各個藉由切割道5 6所區劃 的矩形區域5 8是形成有電子電路。上述晶圓匣盒4 8具 有一對的側壁部6 0，在側壁部6 0的內面部是形成有在 上下方向隔著預定間隔朝水平方向延伸的複數個收容溝槽 。被加工物4 6藉由將框架5 0的兩側緣部插入到一對側 壁部6 0的成對的收容溝槽，而以在上下方向隔著預定間 隔而實質上水平延伸的狀態被收容著。從晶圓匣盒4 8的 前面部也就是從殻體的前面部來看其左側面是開放的。藉 由升降台4的升降，讓晶圓匣盒4 8的收容溝槽的各對位 於預定高度，而如後面所述，要進行切割的被加工物4 6 會從位於預定高度的收容溝槽的各對被輸送出來，而進行 加工也就是切割動作，然後被淸洗的被加工物4 6會被輸 送進位於預定高度的收容溝槽對。 經濟部智慧財產局員工消費合作社印製 支配是 1 而圓件 時隔 6 第。晶構 臨間 6 於置從承 有著件置位，支 設隔構位用時對 配有承地作置 一 是含支性的位越 B 包對擇示用跨 域是一選所作會 區，。可線於 6 附 4 6 是虛位 4 吸 6 6 ， 點 6 物 在段件如兩 6 工 ， 手構自與件加 明承承動置構被 說支支移位承的 續時對向用支來 繼臨一方作的出 圖該的軸非對送 3 。 向X的一輸 第 4 方朝示當被 照 6 軸可所，8 參段X成線述 4 手在裝實後盒 承設安圖如匣 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -21 - 200300574 A7 B7 五、發明説明（18 ) 請 先 閱 讀 背 面 之 注 意 6 6被載置著（換言之，被加工物4 6的框架5 0的兩側緣 部是被支承在一對支承構件6 6 )，而一對支承構件6 6移 動到非作用位置而相互分離的話，則可以通過一對支承構 件6 6間來使被加工物4 6升降。 在吸附區域B與切割區域D之間是配設有實質上可自 由水平移動於X軸方向的吸附手段6 8 °詳細敘述的話’ 是配設有實質上水平延伸的靜止支承基台7 0 ’在該支承 基台7 0上是在X軸方向隔著間隔固定有一對的支承塊 7 2 (在第2圖僅顯示其中一方）。在一對的支承塊7 2之間 是固定有在Y軸方向隔著間隔朝X軸方向延伸的一對導軌 7 4。在一對導軌7 4是安裝有滑動塊7 6。在滑動塊 經濟部智慧財產局員工消費合作社印製 7 6的下面部是形成有朝X方向延伸的一對被導引溝槽， 藉由使一對被導引溝槽卡合到一對導軌7 4 ’滑動塊7 6 會沿著導軌7 4被安裝成可朝X軸方向自由移動。在一對 的支承塊7 2之間，還可自由旋轉地安裝有朝X軸方向延 伸的公螺紋軸7 8。另一方面’在滑動塊7 6的下面部是 固定有母螺紋構件（沒有圖示）’讓母螺紋構件螺合到公螺紋 軸7 8。在公螺紋軸7 8是連結著電動馬達（沒有圖示），藉 由電動馬達的正轉及逆轉讓滑動塊7 6沿著導軌7 4朝向 X軸方向移動。在滑動塊7 6是固定有圓筒狀支承構件 8 0，在支承構件8 0是以實質上垂直延伸的中心軸線爲 中心旋轉自如地安裝有吸附構件8 2。在支承構件8 0內 是配設有可以是用來使吸附構件8 2旋轉的電動馬達的旋 轉驅動源（沒有圖示）。圓板狀的吸附構件8 2是由像多孔性 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -22- 200300574 A7 _____B7_ 五、發明説明（19 ) (請先閲讀背面之注意事項再填寫本頁) 陶瓷的多孔性材料所形成。在吸附構件8 2是附設有朝X 軸方向突出的一對把持機構8 4。各個把持機構8 4是含 有可動把持片8 6，可動把持片8 6，是藉由例如空氣壓 力作動器的作動手段（沒有圖示）來使其選擇性地位於第1圖 所示的非把持位置與從非把持位置朝內側迴旋的把持位置 。當吸附手段6 8如第1圖所示位於吸附區域B時，吸附 構件8 2 ，在X軸方向上是位於上述臨時支承手段6 4的 一對支承構件6 6之間，在Z軸方向是位於上述臨時支承 手段6 4的一對支承構件6 6的下方。在上述滑動塊7 6 ，是附設有會因應滑動塊7 6的移動而於第1圖的實線所 示的狀態與兩點虛線所示的狀態之間適當地變形的中空保 護導管8 8。由多孔性材料所形成的吸附構件8 2，會經 由配設於支承構件8 0、滑動塊7 6及中空保護導管8 8 內的吸引通路（沒有圖示）而選擇性地連通到適當的吸引源（ 沒有圖示）。用來使上述把持機構8 4的可動把持片8 6移 動的作動手段的電路配線也是延伸於支承構件8 0、滑動 塊76及中空導管88內。 經濟部智慧財產局員工消費合作社印製 在上述淸洗區域C是配設有淸洗手段9 0。其本體也 可以是習知的形態的淸洗手段9 0，是含有：固定於靜止 支承板9 2上的圓筒狀的隔壁部9 4、旋轉自如地配設於 該隔壁部9 4內的吸附機構9 6。吸附機構9 6，是含有 會於上升位置與從上升位置下降預定量的下降位置之間升 降移動的升降台9 8。升降台9 8是連結在實質上是垂直 配置的空氣壓缸機構1 0 〇的活塞，是藉由空氣壓缸機構 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） ' -23- 200300574 A7 B7 五、發明説明（20 ) (請先閱讀背面之注意事項再填寫本頁) 1〇0的作用來使其升降移動。在升降台9 8的上端是配 設有以實質上垂直延伸的中心軸線爲中心旋轉自如的圓板 狀的吸附構件1 〇 2。吸附構件1 0 2是由例如多孔性陶 瓷的多孔性材料所形成，是經由配設於升降台9 8內的吸 引通路（沒有圖示）而選擇性地被連通到適當的吸引源（沒有 圖示）。在吸附構件1 0 2的周圍也配設有四個把持機構 1 0 4。各個把持機構1 〇 4是含有可動把持片1 0 6， 可動把持片1 0 6藉由例如電池線圈的作動手段（沒有圖示） 而會選擇性地位置於第1圖所示的非把持位置與從該非把 持位置朝向內側迴旋的把持位置。在升降台9 8內是配設 有吸附構件1 0 2及用來使附設在該處的把持機構1 0 4 旋轉的電動馬達（沒有圖示）。淸洗手段9 0，還含有用來將 可以是純水的淸洗液體噴射出去的噴嘴（沒有圖示）。且如後 述’在進行淸洗時，保持著被加工物4 6的吸附構件 1 0 2及把持機構1 〇 4會以高速旋轉，並且淸洗液會從 噴嘴噴射向吸附構件1 0 2上的被加工物4 6。 經濟部智慧財產局員工消費合作社印製 參照第3圖來繼續說明，在上述支承基台7 0上是固 定有朝Y軸方向延伸的直立支承基板1 〇 8。在該支承基 板1 0 8的中央部，是形成有用來收容吸附構件8 2的較 大的缺口部1 1 〇。在支承基板1 〇 8是安裝有一對切削 手段，也就是第一切削手段1 1 2 a與第二切削手段 1 1 2 b。更詳細敘述的話，在支承基板1 〇 8的前面部 是配設有在上下方向隔著間隔朝Y軸方向延伸的一對導軌 1 1 4。第一切削手段1 1 2 a及第二切削手段1 1 2b 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -24- 200300574 A7 B7 五、發明説明（21 ) (請先閱讀背面之注意事項再填寫本頁) 是分別含有滑動塊1 1 6 a及1 1 6b，在這些滑動塊 1 1 6 a及1 1 6b的後面部，是形成有朝Y軸方向延伸 的一對被導引溝槽（沒有圖示）’滑動塊a與滑動塊b是朝Y 軸方向自由滑動地被安裝在一對的導軌1 1 4。在支承基 板1 0 8的前面部，是中介著軸承構件1 2 0 a及1 2 0 b而可自由旋轉地安裝有朝Y軸方向延伸的公螺紋軸 1 18a及1 18b。公螺紋軸118a及1 18b是配 置在一直線上。另一方面，在滑動塊1 1 6 a及1 1 6 b 的後面部是固定有母螺紋構件（沒有圖示）’而讓母螺紋構件 分別螺合於公螺紋軸1 1 8 a及1 1 8 b。在公螺紋軸 1 1 8 a及1 1 8b是連接著電動馬達1 2 2 a及1 22 b，當藉由電動馬達122a及122b來使公螺紋軸 1 1 8 a及1 1 8 b旋轉的話，滑動塊1 1 6 a及1 1 6 經濟部智慧財產局員工消費合作社印製 b會沿著一對導軌114朝Y軸方向移動。在滑動塊11 6 a及1 1 6b是分別安裝有升降塊1 26 a及1 26b 。在滑動塊116a及116b各前面部，是配設有在Y 軸方向隔著間隔且實質上垂直也就是朝z軸方向延伸的一 對導軌1 24 a及1 24b。在升降塊1 26 a及1 26 b的後面部是形成有朝Z軸方向延伸的一對被導引溝槽’ 藉由使該一對被導引溝槽卡合到一對導軌1 2 4 a及 124b，讓升降塊126a及126b會朝Z軸方向自 由升降移動地被安裝在滑動塊1 1 6 a及1 1 6 b °在滑 動塊1 1 6 a及1 1 6b，還可自由旋轉地安裝有朝2軸 方向延伸的公螺紋軸1 3 0 a及1 3 〇 b。另一方面，在 -25- 本紙張尺度適用中國國家襟準（CNS ) A4規格（210乂29<7公釐） 200300574 A7 B7 五、發明説明（22 ) 升降塊1 2 6 a及1 2 6 b的後面部是固定有母螺紋構件（ 沒有圖示），母螺紋構件會分別螺合到公螺紋軸1 3 0 a及 1 3 Ob。在公螺紋軸1 30 a及1 3 Ob是連接有電動 馬達1 32a及1 32b ’當藉由電動馬達1 32a及 1 3 2 b來使公螺紋軸1 3 0 a及1 3 0 b旋轉時，升降 塊1 26 a及1 26b會沿著一對導軌1 24 a及1 24 b升降動作。 在各升降塊1 2 6 a及1 2 6b，是經由連結托架 1 3 4a及1 3 4b而安裝著切削單元1 36 a及1 36 b。各切削單元1 1 2 a及1 1 2b，是含有略長方體狀 的盒體1 38a及1 38b。在盒體1 38a及1 38b ，是可自由旋轉地安裝有朝Y軸延伸的旋轉軸（在第2圖僅 圖示有安裝於盒體1 3 8 B的旋轉軸1 4 0 b )。旋轉軸是 朝寬度方向一直線狀地延伸。在旋轉軸的寬度方向內側端 也就是相互相對向的端部是固定有切削刀具（在第2圖僅圖 示有固定於旋轉軸1 4 0 b的切削刀具1 4 2 b )。切削刀 具可以是由含有鑽石顆粒的薄圓板所構成。在旋轉軸 1 4 0 a及1 4 0 b的外側端是連接有電動馬達1 4 4 a 及144b。在盒體138a及138b，也附設有含有 顯微鏡的攝像手段1 4 6 a及1 4 6 b。 在以本發明所構成的切削機中，將全體以圖號1 5 0 所示的被加工物輸送手段的配設是很重要的。在第3圖中 ，爲了避免讓圖面複雜化，被加工物輸送手段150，是 以兩點虛線來圖示其槪略情況。參照第5圖來說明的話， 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) •裝_ 、-5t» 經濟部智慧財產局員工消費合作社印製 -26 - 200300574 A7 ___ B7_ 五、發明説明（23 ) (請先閲讀背面之注意事項再填寫本頁} 經濟部智慧財產局員工消費合作社印製 被加工物輸送手段1 5 0是具備有共通可動支承構造體 152，該共通可動支承構造體152，是含有水平移動 構件1 5 4與升降移動構件1 5 6。更加詳細敘述的話， 在切削機的殼體2內的預定位置是經由適當的支承托架（沒 有圖示）而固定有在寬度方向實質上水平延伸的一對導軌 1 57。而在一對的導軌1 5 7之間是經由適當的軸承構件（ 沒有圖示）而旋轉自如地安裝有實質上朝寬度方向延伸的公 螺紋軸1 5 8。公螺紋軸1 5 8是連接在固定於預定位置 的電動馬達1 6 0的輸出軸。在一對導軌1 5 7是朝寬度 方向也就是朝Y軸方向滑動自如地安裝著上述水平移動構 件1 5 4。更詳細敘述的話，水平移動構件1 5 4是具有 基部1 6 2，在該基部1 6 2是形成有實質上朝水平延伸 的一對被導引溝槽1 6 4，且藉由使該一對的被導引溝槽 1 6 4卡合於上述一對的導軌1 5 7，來把水平移動構件 1 5 4能沿著一對導軌1 5 7自由移動地安裝著。在水平 移動構件1 5 4的基部1 6 2是形成有在一對被導引溝槽 1 6 4之間實質上水平延伸的貫穿母螺紋1 6 6，該貫穿 母螺紋1 6 6會螺合在上述公螺紋軸1 5 8。於是，使電 動馬達1 6 0正轉且使公螺紋軸1 5 8朝向預定方向旋轉 時，水平移動構件1 5 4會向Y軸方向其中一端移動，使 電動馬達1 6 0逆轉且使公螺紋軸1 5 8朝向相反方向旋 轉時，水平移動構件1 5 4會向Y軸方向另一側移動。水 平移動構件1 5 4是具有藉由連結臂部1 7 2而連接在基 部1 6 2的支承部1 7 4，在支承部1 7 4是安裝有一對 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -27- 200300574 A7 ____B7_ 五、發明説明（24 ) (請先閱讀背面之注意事項再填寫本頁) 空氣壓缸機構，一對空氣壓缸機構的活塞1 7 6是從支承 部1 7 4實質上垂直地朝下方突出（在第5圖僅圖示有一對 空氣壓缸機構的活塞1 7 6 )。而且在活塞1 7 6的下端是 固定有上述升降移動構件1 5 6。當一對空氣壓缸開始作 動而使活塞1 7 6伸張及收縮時，會讓升降移動構件 1 5 6上升及下降（也就是朝Z軸方向移動）。在升降移動構 件1 5 6是配設有第一保持手段1 7 8與第二保持手段 18 0° 經濟部智慧財產局員工消費合作社印製 第一保持手段1 7 8，是含有安裝在形成於升降移動 構件1 5 6的前端的雙股形狀部的可動構件1 8 2。第一 保持手段1 7 8的可動構件1 8 2是經由安裝銷栓1 8 4 而安裝成可於：第5圖的實線所示的作用位置也就是從升 降移動構件1 5 6的前端向下方下垂的作用位置、與第5 圖的兩點虛線所示的非作用位置也就是從升降移動構件 1 5 6的前端朝上方延伸的非作用位置之間自由迴旋。安 裝銷栓1 8 4是實質上水平地配設著，可動構件1 8 2是 以實質上水平延伸的迴旋中心軸線爲中心自由迴旋。在安 裝銷栓1 8 4是附設有可以是空氣馬達的作動手段1 8 6 ，藉由該作用手段1 8 6則可讓可動構件1 8 2選擇性地 位於上述作用位置與上述非作用位置。在可動構件1 8 2 是安裝有一對把持片1 8 8。一對把持片1 8 8的至少其 中一方，最好是雙方，是藉由以內藏於可動構件1 8 2內 的電磁線圈所構成的作動手段（沒有圖示），而會適當地移動 向互相接近且分離的方向，是可自由解除地把持著安裝有 本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公釐） -28- 200300574 A7 B7 __ 五、發明説明（25 ) (請先閱讀背面之注意事項再填寫本頁) 如第5圖的兩點虛線所示的被加工物4 6也就是半導體晶 圓5 4的框架5 0的單側緣部。一對把持片1 8 8是充分 地小型化，且如後面更詳細的敘述，當藉由第一保持手段 1 7 8保持著被加工物4 6來將被加工物4 6從晶圓匣盒 4 8 (第3圖）輸送出或是將其輸送進晶圓匣盒4 8時’則可 讓一對把持片1 8 8進入到晶圓匣盒4 8內來把持住被加 工物4 6或是以保持著被加工物4 6的狀態進入到晶圓匣 盒4 8內。 經濟部智慧財產局員工消費合作社印製 第二保持手段1 8 0，是含有固定在上述升降移動構 件1 5 6的基部下面部地全體爲Η字型的支承板1 9 0。 在實質上水平延伸的支承板1 9 0的四個前端部，是各安 裝有朝下方垂下的吸附器1 9 2。在升降移動構件1 5 6 的基部內是配設有吸引歧管（沒有圖示），各吸附器1 9 2是 藉由導管1 9 4而連接在吸引歧管，吸引歧管1 9 4是經 由導管1 9 6而選擇性地連通到真空源（沒有圖示）。第二保 持手段1 8 0，在第5圖如兩點虛線所示，吸附器1 9 2 會吸附著框架5 0的上面部，會保持著被加工物4 6也就 是安裝於框架5 0的半導體晶圓5 4。 再參照第3圖來加以說明，在圖示的切削機中，還配 設有附加被加工物輸送手段1 9 6。在殻體2內的前端部 是配設有在寬度方向隔著間隔的一對支承板1 9 8，在該 支承板1 9 8之間是固定有在寬度方向實質上水平延伸的 導桿2 0 0，且同樣地旋轉自如地安裝著在寬度方向實質 上水平延伸的公螺紋軸2 〇 2。在公螺紋軸2 〇 2是連接 本纸張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐）'---- -29~ 200300574 A7 B7 五、發明説明（26 ) (請先閱讀背面之注意事項再填寫本頁) 有電動馬達2 0 4。附加被加工物輸送手段1 9 6是具有 滑動塊2 0 6，在該滑動塊2 0 6是形成有：用來插通上 述導桿2 0 0的被導引孔、與用來螺合上述公螺紋軸 2 0 2的母螺紋孔。在滑動塊2 0 6是配設有具有實質垂 直地向上方延伸出來的活塞2 0 8的空氣壓缸機構，在活 塞2 0 8的前端是固定有略L字型的臂部2 1 0。在朝向 臂部2 1 0的前後方向延伸的部分的下面部是固定有一對 支承片部2 1 2，在各支承片部2 1 2的下面部示安裝有 吸附器2 1 4。各吸附器2 1 4是經由適當的吸引通路（沒 有圖示）選擇性地連通到吸引源（沒有圖示），則可以吸附住 被加工物4 6的框架5 0。而讓電動馬達2 0 4作動時， 會讓滑動塊2 0 6朝向寬度方向也就是Y方向移動，於是 吸附器2 1 4會朝Y軸方向移動，而讓空氣壓缸機構的活 塞2 0 8伸縮的話，則吸附器2 1 4會朝垂直方向也就是 Z軸方向升降。而如後述，附加被加工物輸送手段1 9 6 ，是僅使用來將吸附手段6 8的吸附構件8 2上的被加工 物4 6輸送到淸洗手段9 0的吸附構件1 〇 2上。 經濟部智慧財產局員工消費合作社印製 槪要地說明上述的切削機的作用的話，如下述。使晶 圓匣盒支承手段3 4的升降台4 0上升到需要的高度（或下 降），而被收容在載置於升降台4 0上的晶圓匣盒4 8內的 複數個的被加工物4 6的特定的一*個會位於預定高度。在 該狀態，讓被加工物輸送手段1 5 0作動，位在第5圖的 實線所示的作用位置的第一保持手段1 7 8的一對把持片 1 8 8會進入到晶圓匣盒4 8內來把持住上述特定的一枚 本纸張尺度適用巾BI國家標準（CNS ) A4規格（210X297公楚） -30- 200300574 A7 B7 五、發明説明（27 ) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 被加工物4 6的框架5 0，會將被加工物4 6從晶圓匣盒 載置區域A輸送到吸附區域B，在吸附區域B會使被加工 物4 6位於臨時支承手段6 4上。接著，第一保持手段 1 7 8的一對把持片1 8 8會從被加工物4 6脫離，第一 保持手段1 7 8會迴旋到第5圖所示的非作用位置。然後 ，被加工物輸送手段1 5 0的第二保持手段1 8 0會位於 位在臨時支承手段6 4上的被加工物4 6的上方，接著， 下降的第二保持手段1 8 0的吸附器1 9 2會緊密接合於 被加工物4 6的框架5 0。吸附器1 9 2會連通到吸引源 ，被加工物4 6會被吸附在吸附器1 9 2。然後，臨時支 承手段6 4的一對支承構件6 6會移動到實線所示的非作 用位置，而會從被加工物4 6的下方後退。接著，第二保 持手段1 8 0會下降，吸附在吸附器1 9 2的被加工物 4 6會位於吸附手段6 8的吸附構件8 2上。吸附構件 8 2是連通到吸引源，藉此來讓被加工物4 6的半導體晶 圓5 4被吸附在吸附構件8 2上。而來使附設於吸附構件 8 2的一對把持機構8 4的可動把持片8 6位於把持位置 來把持住框架5 0。第二保持手段1 8 0的吸附器1 9 2 ，從吸引源脫離而使被加工物4 6脫離之後會上升。 接著，吸附手段6 8會跨越所需要的距離而朝後方移 動，附設於第一切削手段1 1 2 a及第二切削手段1 1 2 b的攝像手段1 4 6 a及1 4 6 b的顯微鏡會位於面對在 吸附構件8 2上的半導體晶圓5 4的表面的位置，來拍攝 半導體晶圓5 4的表面的影像，藉此讓吸附構件8 2上的 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） -31 - 200300574 A7 ____ B7 五、發明説明（28 ) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 半導體晶圓5 4相對於第一切削手段1 1 2 a的切削刀具（ 沒有圖示）及第二切削手段1 1 2 b的切削刀具1 4 2 b進 行充分精密的位置校對。在校對位置時，吸附構件8 2會 因應需要朝X軸方向移動，且以中心軸線爲中心旋轉。然 後，吸附手段6 8會再向後方移動而位於切削區域D，來 進行吸附在吸附構件8 2上的半導體晶圓5 4的切削也就 是切割。當進行切割時，吸附構件8 2會向X軸方向移動 ，第一切削手段1 1 2 a的切削刀具與第二切削手段 1 1 2 b的切割刀具1 4 2 b會同時或伴隨著稍微的時間 差而作用在半導體晶圓5 4沿著朝X軸方向延伸的切割道 5 6進行切削。第一切削手段1 1 2 a的切削單元1 3 6 a及第二切削手段1 1 2 b的切削單元1 3 6 b會位置於 所需要的高度，並且朝Y軸方向週期性地移動。當沿著朝 X軸方向延伸的切割道5 6進行完切割動作時，吸附構件 8 2會旋轉9 0度，開始重新沿著位在沿著Y軸的狀態的 切割道5 6開始進行切削。這樣吸附構件8 2上的半導體 晶圓5 4會沿著排列成格子狀的切割道5 6進行切削。而 不會切削存在於框架5 0與半導體晶圓5 4之間的安裝帶 5 2，在進行完半導體晶圓5 4的切削後，框架5 0、安 裝帶5 2及進行過切割的半導體晶圓5 4會被維持爲一體, 1T d The size of this paper applies to Chinese National Standard (CNS) A4 (210X297 mm) -5- 200300574 A7 B7 V. Description of the Invention (2) The inner end of the first rotary shaft is the rear end and the inner end of the second rotary shaft is the front end. Position them facing each other. The cutting machine is also equipped with three workpiece conveying means for conveying the workpiece, that is, the first workpiece conveying means, The second processing means and the third processing means. A cassette cassette is placed on a cassette cassette supporting means, A plurality of processed objects, that is, semiconductor wafers which are mounted in a mounting opening formed in the center of the frame via a mounting tape, are accommodated in the wafer cassette at intervals in the vertical direction. The first workpiece conveyance means conveys the workpieces in the wafer cassette one at a time to the temporary support means. Next, The second workpiece conveyance means conveys the workpiece on the temporary support means to the adsorption means located in the adsorption area. The suction means that has held the workpiece will move to the cutting area. then, In the cutting area, the first tool and the second tool are applied to the workpiece to perform the required cutting. That is, dicing of a semiconductor wafer is performed. When cutting is complete, The adsorption means will be moved to the adsorption area. then, The third processing means conveys the processing means on the adsorption means to the cleaning means. The washing method will wash the cut workpiece. The washed object is transferred to the temporary support means by the second object conveying means. then, The first workpiece conveyance means conveys the workpiece on the temporary support means to the cassette box placed on the cassette support means. The cutting machine described above in Japanese Patent Application Laid-Open No. 2000-2007 0 8 With other types of cutting machines, For example, Japanese Unexamined Patent Publication No. 1 1 2 6 402 or Japanese Unexamined Patent Publication No. 1 1 74 2 2 8 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) * «t clothing-(Please (Please read the notes on the back before filling out this page.) Order printed by the Intellectual Property Bureau's Consumer Cooperatives of the Ministry of Economic Affairs-6- 200300574 A7 B7 V. Description of the Invention (3) (Please read the precautions on the back before filling this page) Compared with the cutting machine disclosed in the bulletin, The layout of each area is more designed and more compact. but, Not perfect It has the following problems. The cutting tools of the cutting means will be worn due to the execution of the cutting ’and need to be exchanged. However, there is a considerable distance from the front of the housing to the installation position of the cutting tool. To change the cutting tool from the front of the housing, Not impossible but also quite difficult. usually, The operator is positioned on the side of the housing to perform the cutting tool exchange operation. The swap operation can be complicated. And because it is necessary to place the operator on the side of the housing when the cutting tool is exchanged, It is necessary to ensure the required space near the side of the case, This results in a larger space for installing the cutting machine. When using a cutting machine to cut semiconductor wafers, It is necessary to equip the cutting machine in a so-called clean room, The space required to equip the cutting machine becomes larger, This issue cannot be ignored. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs To ease the cutting tool exchange operation, And reduce the amount of space needed to equip the cutting machine, The Japanese Patent Application No. 2000-1—1 6 2 9 5 8 explanation and drawings (hereinafter referred to as "former application description and drawings") submitted by the applicant, Is revealing a cutting machine, In the front half of the case, A suction area is arranged at the center in the width direction. A scouring area is arranged on one side of the adsorption area, Configure the cassette loading area on the other side, In the back half of the case, A cutting area is arranged at the center in the width direction. In this cutting machine, If you open a specific area of the front face of the case, You can access the cutting tool of the cutting means from the front of the housing, The cutting tool exchange operation can be performed easily and quickly. There is no need to keep the operator to enter the sides or back of the housing. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -7- 200300574 A7 ___B7_ Invention description (4) Face space, Can reduce the space required to equip the cutting machine. In the cutting machine disclosed in the previous application description and drawings, Did not sufficiently review the structure of the plurality of door portions that can open the front portion of the case as needed, When performing the cutting tool exchange operation of the cutting means, Or when the cassette cassette mounting area faces the cassette cassette mounting operation on the cassette cassette supporting means, Does not perform the opening and closing movement of the door very reasonably, The door opening and closing operations can be complicated, There will be such problems. In order to exchange cutting tools, When the operator puts his upper body into the housing, Can't get close to the operation means, You also ca n’t see the display means that show the various states of the cutting machine. There will also be such problems. The cutting machine as described above in Japanese Patent Laid-Open No. 2000-2007 0-8, It is set up three conveying means of processed objects independently, That is, the first means of conveying the workpiece, The second processing means and the third processing means, The existence of these three means of conveying objects will produce, Limits miniaturization, And the production cost becomes higher. [Disclosure of the Invention] In view of the above-mentioned circumstances, the present invention, Its first purpose, It is to improve the structure of the plurality of door parts provided in the housing of the cutting machine of the above-mentioned type disclosed in the foregoing application specification and drawings. It is necessary to be able to fully and reasonably perform the opening and closing operation of the door portion that opens the required area of the front portion of the housing as required. The second object of the present invention, In addition to achieving the above first purpose, When this paper size is in accordance with Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page) B7 V. Description of the Invention (5) (Please read the precautions on the back before filling this page) When the operator puts the upper body into the housing in order to exchange cutting tools for cutting means, Provides operators with easy access to various operating methods, In addition, it is easy to visually display means for displaying various states of the cutting machine. The third object of the present invention, It is to partially share the structure of the first processing object conveying means and the second processing object conveying means, This allows miniaturization of processing machines and reduces manufacturing costs. With the first invention of the present invention, In order to achieve the above first purpose, There are three types of door sections on the front of the housing. That is configured with · Installed to: A single-sided door that moves freely between a closed position covering the front portion of the rinsing area and an open position that changes the position from the closed position to one side of the housing to open the front portion of the rinsing area Installed on one side door, When the one-sided door is in the closed position, Available at: The center between the closed position of the front part that covers the adsorption area and the open position of the front part of the open adsorption area that changes at least from the closed position to the one-sided direction, at least most of it will be located behind Door, And installed to: Other side door portions that can move freely between the closed position of the front portion covering the cassette case area and the open position of the front portion of the opened cassette case area. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs With the first invention of the present invention, As a cutting machine that achieves the first objective, The front half of the housing is configured with: The suction area at the center in the width direction, The scrubbing area on one side of the adsorption area, And the cassette mounting area on the other side of the suction area, The rear half of the housing is provided with a cutting area located at the center in the width direction. And provided with a washing means arranged in the washing area, Configured on this paper, the size of the paper is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) -9- 200300574 A7 B7 Description of the Invention (6) (Please read the precautions on the back before filling out this page) The cassette support means of the cassette loading area, It can move freely in the front-back direction and it is arrange | positioned in the center part of the width direction in this case, It can be selectively located in the adsorption means of the adsorption region and the cutting region, And the rear half of the housing, Cutting means with a cutting tool located in the cutting area, A wafer cassette supporting means is a wafer cassette containing a plurality of processed objects. The processed objects stored in the wafer cassette are sequentially transferred to the adsorption area, And will be adsorbed on the adsorption means in the adsorption area, Will be transported to the cutting area together with the suction means, Cutting by the cutting tool of the cutting means in the cutting area, Then it will return to the adsorption area together with the cutting means. Is transported from the adsorption area to the washing area and washed, Is then transported back to the cassette, Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs on the front of the case, Is configured with: Installed to: A single-sided door portion that can move freely between a closed position covering the front portion of the rinsing area and an open position that changes the position from the closed position to one side of the housing to open the front portion of the rinsing area, Installed on one side door, When the side door is in the closed position, Available at: Move between the closed position of the front portion covering the adsorption area and the position that changes from the closed position to the one-sided direction, at least most of which will be located behind or in front of the single-sided door portion, and the open position of the front portion that opens the adsorption area Free central door, And other side door portions that are freely movable between a closed position covering the front portion of the cassette case region and an open position of the front portion of the opened cassette case region. That other side door, Preferably, the other side door, Is centered around a center of rotation axis that extends substantially perpendicular to the other side of the housing, Applicable to Chinese paper standard (CNS) A4 (210X297 mm) at this paper size -10- 200300574 A7 B7 V. Description of the Invention (7) (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The freely rotating position between the closed position and the open position. In the cutting machine used to achieve the above second purpose, When the central door is moved to the open position, At least most of the central door, Will be behind the one-sided door, At the front of the one-sided door, Is installed with: With the center of rotation center axis extending substantially perpendicular to the widthwise inner edge portion of the one-sided door portion as a center, A support member that can rotate freely between a normal position extending along the front portion of the one-sided door portion and an extended position extending forward from the one-sided door portion ′ An operation panel is mounted on the support member. The operation panel is preferably constituted by a touch panel. In a better implementation, The cutting means includes a first cutting means and a second cutting means. The first cutting means is provided with: First rotation axis, And a first cutting tool mounted on the first rotary shaft, The second cutting means has a second rotation axis, And a second cutting tool mounted on the second rotary shaft, The first rotation axis and the second rotation axis, Is extending linearly in the rear half of the housing, The first cutting tool and the second cutting tool are respectively mounted on the inner side end in the width direction of the first rotary shaft and the inner side end in the width direction of the second rotary shaft and are located opposite to each other. Temporary support means are provided in this adsorption area, The object to be processed from the wafer cassette to the suction area, Will initially be placed on this temporary support, It will then be transported from the temporary support means to the adsorption means, Then the processed object that is divided and washed, From the scrubbing area to the adsorption area, After being placed on the temporary support, It is then transported into the cassette. This temporary support means is composed of a pair of support members, The pair of support members, Can be placed at a predetermined interval from each other to place the working position across the two. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -11-200300574 A 7 B7 V. Invention Description (8) (Please read the precautions on the back before filling out this page), And the non-acting position which moves from the active position to a direction separated from each other to allow the workpiece to be freely moved down When the adsorption means is located in the adsorption area, The suction means will be located below the temporary support means. The processed object is a semiconductor wafer, The cutting tool is in the shape of a circular plate and contains diamond particles. To cut semiconductor wafers. With other inventions of the invention, In order to achieve the above third objective, Is equipped with a first workpiece conveying means and a second workpiece conveying means combined with a conventional cutting machine, That is, the first movable holding means and the second retaining means are provided in the common movable supporting structure. The first holding means functions as a first workpiece conveying means of a conventional cutting machine. The second holding means functions as a second workpiece conveying means of a conventional cutting machine. The workpiece conveying means thus constituted is mounted on a cutting machine. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs With other inventions of the invention, As a cutting machine used to achieve the third purpose, Yes has: The cassette support means arranged in the cassette loading area, Temporary support means arranged in the adsorption area, Cutting means placed in the cutting area, A movable adsorption means that selectively locates the adsorption region and the cutting region, And the conveying method of the processed object; On this cassette support means, a cassette containing a workpiece is placed. This workpiece conveyance means, Transports the processed object from the cassette box mounted on the cassette box supporting means, Transport it to this temporary support, It is then transported from the temporary support means to the adsorption means located in the adsorption area, After cutting, the workpieces placed on the temporary support means are transported into the cassette. The paper size is in accordance with China National Standard (CNS) A4 (210X 297 mm) -12- 200300574. Fives, Description of the invention (9) A cutting machine in a wafer cassette box on a supporting means, (Please read the precautions on the back before filling out this page.) It contains: Common movable support structure, The first holding means arranged in the common movable supporting structure and entering the wafer cassette and holding the workpiece in the wafer cassette freely and openly; And a second holding means arranged on the common movable supporting structure and holding the workpiece supported by the temporary supporting means freely and openly, When the object to be processed is conveyed out of the wafer cassette placed on the wafer cassette support means, and transferred to the temporary support means, And when the workpieces placed on the temporary support means are conveyed into the cassette box placed on the cassette support means after the cutting is completed, The first holding means will hold the processed object, When the workpiece is transported from the temporary support means to the adsorption means located in the adsorption area, This second holding means holds the workpiece. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics The present invention can also be applied to a cutting machine that is not equipped with a washing means and related processing means conveying means, that is, a third cutting means conveying means of a conventional cutting machine. In a better implementation, The object to be processed is a semiconductor wafer mounted on a frame having a mounting opening in the center via a mounting tape. A plurality of workpieces are stored in the wafer cassette in the vertical direction at intervals. This common movable support structure, It contains: A horizontal moving member installed parallel to the separation direction from the wafer cassette mounting area and the suction area and substantially freely movable back and forth in the horizontal direction, And a lifting and moving member installed to be freely moved up and down in a direction substantially perpendicular to the horizontal moving means; It is preferable that the first holding means and the second holding means are arranged on the elevating and moving member. The paper size of the conveying means of the processed object is applicable to the Chinese National Standard (CNS) A4 specification (210X29 * 7mm) -13- 200300574 A7 B7 V. Description of the Invention (1〇) (Please read the notes on the back before filling out this page) Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Among them, at least one of them protrudes at intervals in the vertical direction, It consists of a pair of holding pieces that can be freely approached and separated from each other. The pair of holding pieces will hold one edge of the frame, The second holding means of the workpiece conveying means, It consists of a plurality of adsorbers for vacuum-adsorbing the upper surface of the frame. The up-and-down moving member in the workpiece conveyance means is a movable member that is selectively attached to an active position which is suspended downward and a non-active position extending upward, The pair of holding pieces are arranged on the movable member, When the movable member is in the action position, The pair of holding pieces protrude outward from the movable member. A base end portion of the movable member can be rotatably attached to the elevating member around a rotation center axis extending substantially horizontally. In a better implementation, The temporary support means includes a pair of support members, The pair of support members may be selectively located at: Place the action position of the frame across the two, And an inactive position that allows the frame to rise and fall between the two, If the adsorption means is located in the adsorption area, The suction means is positioned below the pair of support members of the temporary support means. In a cutting machine equipped with a washing means arranged in a washing area, Is provided with an additional processing object conveying means used only to transport the processed object on the adsorption means located in the adsorption area from the adsorption means to the washing means, The workpiece conveyance means is also used to convey the workpiece from the washing means to the temporary support means, When the workpiece is transported from the washing means to the temporary support means, The second holding means can hold the workpiece. This paper size applies to China National Standard (CNS) A4 (210X 297 mm) -14-200300574 A7 B7 V. Description of the invention (11) [Illustration of the drawing] (Please read the precautions on the back before filling out this page) Figure 1 is a perspective view showing a preferred embodiment of a cutting machine constructed by the present invention. Fig. 2 is a perspective view showing the cutting machine shown in Fig. 1 in a state where the center door portion is in the open position and the one-sided door portion on which the center door portion is installed is in the open position. Fig. 3 is a perspective view showing the internal structure of the cutting machine shown in Fig. 1 without a casing or the like. Fig. 4 is a perspective view showing a workpiece (semiconductor wafer mounted on a frame via a mounting tape) which is cut by the cutting machine of Fig. 1. Fig. 5 is a perspective view showing a workpiece conveying means arranged in the cutting machine of Fig. 1; [Illustration of figure number] Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A: Cassette box mounting area B: Adsorption area C: Washing area D: Cutting area 2: Case 4: One-sided door 6: Central door section 8: Other side door sections 1 0: Support members 1 2: Touch panel This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) -15- 200300574 A7 B7 V. Invention description (12) 1 4: Handle 1 6: Handle (Please read the notes on the back before filling this page) 2 0: Handle 3 4: Wafer box support means 4 0: Lifting table 4 2: Rail 4 4: Male Threaded Shaft 4 6: Workpiece 4 8: Wafer E box 5 0: Frame 5 2: Mounting band 5 4: Semiconductor wafer 5 6: Cutting line 6 4: Temporary support means 6 6: Support members 6 8: Adsorption means 7 0: Support abutment 7 2: Support block Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 7 4: Rail 7 6: Slide 7 8: Male Threaded Shaft 8 4: Holding mechanism 8 6: 8 8: Hollow protective tube This paper is in accordance with Chinese National Standard (CNS) A4 specification (210X 297 mm) -16- 200300574 A7 ______B7 V. Invention description (13) 9 0: Washing means 1 0 0: Air cylinder mechanism 1 1 2 a: The first cutting method (Please read the precautions on the back before filling this page) 1 1 2 b: Second cutting means 1 5 0: Workpiece conveying means [Inventive embodiment] Hereinafter, a preferred embodiment of a cutting machine constituted by the present invention will be described in more detail with reference to the drawings. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Fig. 1 shows the entire cutting machine constructed by the present invention. This cutting machine is provided with a case shown in Fig. 2 as a whole. The casing 2 shown in the figure is a vertically long rectangular parallelepiped. On the front of the housing 2, It is equipped with three doors that can be opened and closed freely. That is equipped with: One-sided door section located on one side in the width direction (left side in front view in the illustrated embodiment) 4, Central door section located at the center in the width direction And the other side door portion 8 located on the other side in the direction of the wide portion (the right side when viewed from the front in the illustrated embodiment). Except for the single-sided door 4 of the housing 2, The part other than the central door part 6 and other side door parts 8 is also the housing body, It can be composed by connecting appropriate plate-shaped members or the like. The one-sided door portion 4 is an inverse L-shape, It protrudes slightly forward and upward from the front portion and the upper surface portion of the other areas of the housing 2. The single-sided door portion 4 is a plane (shell that extends substantially horizontally and substantially vertically between a closed position shown by a solid line and an open position shown by a two-dot chain line by an appropriate mounting means (not shown) The front part of the body 2) can be installed in the housing freely. The paper size of the main paper is applicable to the Chinese National Standard (CNS) A4 specification (210 ×; 297 mm) -17- 200300574 A7 ____B7_ V. Invention Description (14) (Please read the precautions on the back before filling this page). An appropriate locking mechanism (not shown) is attached to the one-sided door portion 4, The single-side door portion 4 can be locked in a freely disengageable manner at both the closed position and the open position. In the middle area in the vertical direction of the front portion of the one-sided door portion 4, It is a support member 10 attached. The support member 10, Is through proper installation, With the center of rotation center axis 11 which extends substantially perpendicularly to the widthwise inner edge portion of the one-sided door portion 4, as a center, Is installed to be available in: The position shown by the solid line, That is, the normal position extending along the front portion of the one-sided door portion 4, With the two dotted lines, In other words, the one-sided door portion 4 substantially freely rotates from an extended position extending perpendicularly to the front portion thereof. And the support means 1 0, It itself is maintained in a stationary state by a conventional maintenance means (not shown) at an arbitrary angular position from the normal position and the extended position. A rectangular touch panel 12 is mounted on the support member 10. The touch panel, Is used to show the various operating states of the cutter (for example, The flow of the coolant, Compressed air flow status, etc.) It is also composed of an operation panel including an operation means for controlling the operation of the cutting machine. On the lower part of the support member 10 is a handle 1 4 extending in a horizontal direction. The handle 14 can be held when the support member 10 is to be rotated. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The above-mentioned central door 6 is a flat plate extending substantially vertically. Instead of being mounted on the housing body, But through proper installation, It is installed along the substantially vertically extending plane (the plane where the central door portion 6 itself extends) between the closed position shown by the solid line and the open position shown by the two-dot chain line so as to be substantially horizontally movable. Unilateral door section 4. An appropriate locking mechanism (not shown) is attached to the central door portion 6, The central door 6 is relative to the single-sided door. The paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) ~ -18- 200300574 A7 B7. DESCRIPTION OF THE INVENTION (15) Please read the note of the memorandum section 4 to lock it freely in both the closed position and the open position. In the illustrated embodiment, The central door portion 6 is attached to the rear portion of the one-sided door portion 4, When moved to the above open position, The main part (that is, the part other than the right edge part viewed from the front) is located behind the one-sided door part 4. As described later, When the central door portion 6 is moved to the open position shown in FIG. 1, When the one-sided door 4 is moved to the open position shown by the two-dot chain line shown in FIG. 1, The central door portion 6 moves with the movement of the one-sided door portion 4, The state shown in FIG. 2 is obtained. In the lower part of the right edge of the central door section 6 as viewed from the front, Is equipped with a handle 1 6 extending in a vertical direction, When the central door portion 6 is to be moved, the handle 16 can be held. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs The other side door portion 8 is L-shaped in cross section, Through proper installation methods (not shown), With the center of rotation axis 18 extending substantially perpendicularly to the other side of the housing 2 (the right side when viewed from the front), It can be freely mounted on the housing body between the closed position shown by the solid line and the open position shown by the two-dot dotted line. Appropriate locking mechanisms (not shown) are also attached to the other side door portions 8, It can be unlocked freely at both the closed position and the open position. The center portion of the left edge portion of the other side door portion 8 as viewed from the front is provided with a handle 2 0 extending in the vertical direction. When the single-sided door 8 is to be rotated, the handle 20 can be held. Illustrated with reference to Figures 1 and 3 at the same time. Within the housing 2, In the front half it is equipped with: Wafer box mounting area A, Adsorption area B and washing area C. The adsorption area B is arranged at the center in the width direction. The paper size is applicable to China National Standard (CNS) A4 specification (210 × 29? Mm) -19- 200300574 A7 _ B7 V. Description of the invention (16) (Please read the precautions on the back before filling out this page) The box area A is arranged on one side of the adsorption area B (the right side when viewed from the front), The rinsing area C is arranged on the other side of the adsorption area B (the left side as viewed from the front). A processing area D is arranged at the center in the width direction of the rear half in the housing. For the convenience of explanation in this manual, The front-back direction is called the X-axis direction, The width direction is called the Y-axis direction, The up-down direction is referred to as the Z-axis direction. Wash area C, It is preferable that the suction area B and the cassette mounting area A are substantially aligned in the Y-axis direction. The adsorption area B and the processing area D are substantially aligned in the X-axis direction, which is printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. In the cassette case mounting area A, a cassette case supporting means 34 is provided. Its ontology can be a known form, The wafer cassette support means 34 is provided with a lifting table 40. Is fixed with two guide rails 4 2 that extend substantially vertically, Guided grooves (not shown) are formed in the lifting platform 40, The guided groove of the lifting platform 40 can be slidably engaged with the guide rail 42, Let the lifting platform 40 be freely lifted along the guide rail 42. And a substantially vertically extending male thread shaft 4 4 is rotatably mounted, A female screw member (not shown) that is screwed to the male screw shaft 4 4 is fixed to the lifting table 40. An electric motor (not shown) is connected to the male screw shaft 4 4. By using an electric motor to rotate the male screw shaft 4 4 forward and reverse, the lifting platform 40 can be raised and lowered. On the lifting table 40 of the above-mentioned cassette support means 34, A wafer cassette 48 containing a plurality of processed objects 4 6 is mounted thereon. The processed object 4 6 of the illustrated embodiment, As shown in Figure 2, It is a half of a frame 5 with a mounting opening 5 1 formed in the center via a mounting tape 5 2. The paper size is in accordance with the Chinese National Standard (CNS) A4 (210X 297 mm)-" -20- 200300574 A7 B7 V. Invention Description (17) (Please read the precautions on the back before filling out this page} Conductor wafer 5 4. The mounting tape 5 2 is a mounting opening 5 1 extending to the frame 50. Is attached to the back of the frame 50, The semiconductor wafer 5 4 located in the mounting opening 5 1 of the frame 50 is attached to the mounting tape 5 2 at the back. On the surface of the semiconductor wafer 54, there are formed cut lines arranged in a grid pattern, that is, scribe lines 56. An electronic circuit is formed in each of the rectangular regions 58 divided by the scribe lines 56. The above-mentioned cassette box 48 has a pair of side wall portions 60, A plurality of receiving grooves are formed in the inner surface portion of the side wall portion 60 and extend in the horizontal direction at predetermined intervals in the vertical direction. The processed object 46 is inserted into the pair of receiving grooves of the pair of side wall portions 60 by inserting the edge portions on both sides of the frame 50. On the other hand, it is accommodated in a state where it extends substantially horizontally with a predetermined interval therebetween. The left side of the cassette case 48 is open when viewed from the front portion of the cassette case 48, that is, from the front portion of the case. By lifting the lifting platform 4, Let each pair of the accommodating grooves of the cassette box 48 be at a predetermined height, As described later, The workpieces 4 6 to be cut are conveyed from each pair of storage grooves at a predetermined height, And processing is the cutting action, The washed objects 46 are then conveyed into a pair of receiving grooves at a predetermined height. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The crystal structure Linjian 6 Yu Zhicong Cheng has a piece set, The support structure is used to set up the supporting land. The first is the supporting position. The B package is an optional conference area for cross-domain selection. . Can be connected to 6 attached 4 6 is a virtual position 4 suck 6 6, Point 6 things like two 6 workers, The self-contained structure of the hand-made structure and the bearing-supported structure are said to support the displacement of the bearing. A loss to X, the 4th side, shows that when the photo is taken on 6 axes, 8 Paragraph X into the line description 4 Hand-installed box after installation Anturu box This paper size applies to China National Standard (CNS) A4 specifications (210X 297 mm) -21-200300574 A7 B7 V. DESCRIPTION OF THE INVENTION (18) Please read the note on the back 6 6 is placed (in other words, The edges of both sides of the frame 50 of the workpiece 4 6 are supported by a pair of support members 6 6), On the other hand, if a pair of support members 66 are moved to an inactive position and separated from each other, Then, the workpiece 46 can be raised and lowered by a pair of supporting members 66. Between the suction area B and the cutting area D, there is provided a suction means 68 which can move substantially horizontally in the X-axis direction. In detail, 'is provided with a substantially horizontally extending static support abutment 7 0' A pair of support blocks 7 2 are fixed to the support base 70 at intervals in the X-axis direction (only one of them is shown in FIG. 2). Between the pair of support blocks 72, a pair of guide rails 74, which extend in the X-axis direction at intervals in the Y-axis direction, are fixed. On the pair of guide rails 74, a slide block 76 is attached. A pair of guided grooves extending in the X direction are formed on the lower part of the sliding block printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs By engaging a pair of guided grooves to a pair of guide rails 7 4 ′, the slide block 7 6 is mounted along the guide rails 7 4 so as to be freely movable in the X-axis direction. Between a pair of support blocks 72, A male screw shaft 7 8 extending in the X-axis direction is also rotatably mounted. On the other hand, a female screw member (not shown) is fixed to the lower portion of the slider 7 6 so that the female screw member is screwed to the male screw shaft 78. An electric motor (not shown) is connected to the male screw shaft 78. By forward and reverse transfer of the electric motor, the slider 7 6 moves along the guide rail 7 4 in the X-axis direction. A cylindrical support member 80 is fixed to the slide block 76. An adsorption member 82 is rotatably attached to the support member 80 around a central axis extending substantially vertically. A rotation drive source (not shown) that can be an electric motor for rotating the suction member 82 is disposed in the support member 80. The disc-shaped adsorption member 8 2 is made of porous material. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -22- 200300574 A7 _____B7_ V. Description of the Invention (19) (Please read the precautions on the back before filling out this page) Porous materials made of ceramics. The suction member 82 is provided with a pair of gripping mechanisms 84 that protrude in the X-axis direction. Each holding mechanism 8 4 includes a movable holding piece 86. Movable holding piece 8 6, It is, for example, an air pressure actuator actuating means (not shown) to selectively place it in the non-holding position shown in FIG. 1 and the holding position which rotates inward from the non-holding position. When the adsorption means 68 is located in the adsorption area B as shown in FIG. 1, Adsorption member 8 2, In the X-axis direction, it is located between a pair of support members 6 6 of the temporary support means 64. In the Z-axis direction, the pair of support members 66 are located below the temporary support means 64. In the above sliding block 7 6, In accordance with the movement of the slider 76, a hollow protection duct 88 is provided which is appropriately deformed between the state shown by the solid line in FIG. 1 and the state shown by the two-dot chain line. The adsorption member 8 2 made of a porous material, It is arranged on the support member 8 0, The suction block (not shown) in the slide block 76 and the hollow protection duct 8 8 is selectively connected to an appropriate suction source (not shown). The circuit wiring of the operating means for moving the movable holding piece 86 of the holding mechanism 84 is also extended to the supporting member 80, Inside the slider 76 and the hollow catheter 88. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs In the above-mentioned washing area C, washing means 90 are provided. The body can also be a cleansing means of the conventional form 90, Contains: Cylindrical partition wall portion 9 fixed to a stationary support plate 92, An adsorption mechanism 96 is rotatably disposed in the partition wall portion 94. Adsorption mechanism 9 6, It is a lifting table 98 which includes a lifting movement between a raised position and a lowered position lowered by a predetermined amount from the raised position. The lifting table 98 is a piston connected to a pneumatic cylinder mechanism 100 which is arranged substantially vertically. It is through the air pressure cylinder mechanism. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). '-23- 200300574 A7 B7 V. Description of the invention (20) (Please read the precautions on the back before filling this page) The function of 100 is to make it move up and down. At the upper end of the elevating platform 98, a disk-shaped adsorption member 102 is rotatably arranged about a central axis extending substantially vertically. The adsorption member 102 is formed of a porous material such as porous ceramics. It is selectively connected to an appropriate suction source (not shown) through an suction path (not shown) provided in the lifting platform 98. Four holding mechanisms 104 are also arranged around the suction member 102. Each holding mechanism 104 includes a movable holding piece 106. The movable holding piece 106 is selectively placed in a non-holding position shown in FIG. 1 and a holding position swiveling inward from the non-holding position by, for example, a battery coil operating means (not shown). The lifting platform 98 is provided with an adsorption member 102 and an electric motor (not shown) for rotating the holding mechanism 104 attached thereto. Washing means 9 0, It also contains a nozzle (not shown) for spraying out a washing liquid, which can be pure water. And as described later, ’ The suction member 102 and the holding mechanism 104 holding the workpiece 46 are rotated at a high speed. In addition, the cleaning solution is sprayed from the nozzle toward the workpiece 46 on the suction member 102. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs On the support base 70, an upright support substrate 108 extending in the Y-axis direction is fixed. In the center of the support substrate 108, A large notch 11 is formed to accommodate the adsorption member 82. A pair of cutting means are mounted on the support substrate 108, That is, the first cutting means 1 1 2 a and the second cutting means 1 1 2 b. In more detail, A pair of guide rails 1 1 4 are arranged on the front portion of the support substrate 108 and extend in the Y-axis direction at intervals in the vertical direction. The first cutting means 1 1 2 a and the second cutting means 1 1 2b The paper size applies to the Chinese National Standard (CNS) A4 (210X 297 mm) -24- 200300574 A7 B7 V. Description of the invention (21) (Please read the notes on the back before filling this page) It contains slide blocks 1 1 6 a and 1 1 6b, On the back of these sliders 1 1 6 a and 1 1 6b, A pair of guided grooves (not shown) that extend in the Y-axis direction are formed. The slider a and the slider b are mounted on a pair of guide rails 1 1 4 so as to slide freely in the Y-axis direction. On the front of the support substrate 108, Male screw shafts 118a and 118b extending in the Y-axis direction are rotatably mounted via the bearing members 1220a and 1220b. The male threaded shafts 118a and 118b are arranged on a straight line. on the other hand, A female screw member (not shown) is fixed to the rear of the slide blocks 1 1 6 a and 1 1 6 b, and the female screw member is screwed to the male screw shaft 1 1 8 a and 1 1 8 b, respectively. The male screw shafts 1 1 8 a and 1 1 8b are connected to electric motors 1 2 2 a and 1 22 b. When the male screw shafts 1 1 8 a and 1 1 8 b are rotated by the electric motors 122 a and 122 b, The slides 1 1 6 a and 1 1 6 are printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and will move along the pair of guide rails 114 in the Y-axis direction. Lifting blocks 126a and 126b are attached to the sliding blocks 11 6a and 1 1b, respectively. On the front faces of the sliders 116a and 116b, A pair of guide rails 1 24a and 1 24b are arranged at intervals in the Y-axis direction and extend substantially perpendicularly, that is, in the z-axis direction. A pair of guided grooves extending in the Z-axis direction are formed on the rear portions of the lifting blocks 1 26 a and 1 26 b. The pair of guided grooves are engaged with a pair of guide rails 1 2 4 a and 124b, The lifting blocks 126a and 126b are mounted on the sliding blocks 1 1 6 a and 1 1 6 b so that they can move up and down in the Z-axis direction. On the sliding blocks 1 1 6 a and 1 1 6b, Male screw shafts 1 3 a and 1 3 b extending in two-axis directions can also be rotatably mounted. on the other hand, -25- This paper size applies to China National Standard (CNS) A4 specifications (210 乂 29 < 7 mm) 200300574 A7 B7 V. Description of the invention (22) The rear part of the lifting blocks 1 2 6 a and 1 2 6 b is fixed with a female screw member (not shown), and the female screw member will be screwed to each Male threaded shafts 1 3 0 a and 1 3 Ob. Electric motors 1 32a and 1 32b are connected to the male screw shafts 1 30 a and 1 3 Ob. When the male screw shafts 1 3 0 a and 1 3 0 b are rotated by the electric motors 1 32 a and 1 3 2 b. The lifting blocks 1 26 a and 1 26 b will move up and down along a pair of guide rails 1 24 a and 1 24 b. Cutting units 1 36 a and 1 36 b are attached to each of the lifting blocks 1 2 6 a and 1 2 6b via the connecting brackets 1 3 4a and 1 3 4b. Each of the cutting units 1 1 a and 1 1 b includes box bodies 1 38a and 1 38b having a slightly rectangular parallelepiped shape. A rotation shaft extending to the Y-axis is rotatably mounted on the case bodies 1 38a and 1 38b (only the rotation shaft 1 4 0 b attached to the case body 1 3 8 B is shown in FIG. 2). The rotation axis extends linearly in the width direction. A cutting tool is fixed to the inner end of the rotation axis in the width direction, that is, the end opposite to each other (only the cutting tool 1 4 2 b fixed to the rotation axis 1 4 0 b is shown in FIG. 2). The cutting tool may be composed of a thin circular plate containing diamond particles. Electric motors 1 4 4 a and 144 b are connected to the outer ends of the rotating shafts 1 4 0 a and 1 4 0 b. The case bodies 138a and 138b are also provided with imaging means 1 4 6 a and 1 4 6 b including a microscope. In the cutting machine comprised by this invention, it is important to arrange | position the whole to-be-processed object conveyance means shown by the figure number 150. In Fig. 3, in order to avoid complicating the drawing, the workpiece conveyance means 150 is shown by two dotted lines to show its outline. To explain with reference to Figure 5, this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page) • Install _, -5t »Ministry of Economy Wisdom Printed by the Consumer Affairs Cooperative of the Property Bureau -26-200300574 A7 ___ B7_ V. Description of Invention (23) (Please read the precautions on the back before filling out this page} The printed material conveyance method printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy 50 is provided with a common movable support structure 152 which includes a horizontally moving member 1 5 4 and an elevating and moving member 1 5 6. In more detail, in the housing 2 of the cutting machine, At a predetermined position, a pair of guide rails 1 57 extending substantially horizontally in the width direction is fixed via an appropriate support bracket (not shown). Between the pair of guide rails 1 5 and 7 is an appropriate bearing member (not shown). (Illustrated) and a male screw shaft 158 extending substantially in the width direction is rotatably mounted. The male screw shaft 158 is an output shaft of an electric motor 160 connected to a predetermined position. The above-mentioned horizontal moving member 1 5 4 is slidably mounted on the guide rail 1 5 7 in the width direction, that is, in the Y-axis direction. In more detail, the horizontal moving member 1 5 4 has a base 1 6 2. 6 2 is formed with a pair of guided grooves 1 6 4 extending substantially horizontally, and the pair of guided grooves 1 6 4 is engaged with the pair of guide rails 1 5 7, The horizontal moving member 1 5 4 can be installed to move freely along a pair of guide rails 15 7. A base 1 6 2 of the horizontal moving member 1 5 4 is formed with a pair of guided grooves 1 6 4 The through-female thread 1 6 6 extends substantially horizontally, and the through-female thread 1 6 6 is screwed onto the above-mentioned male thread shaft 1 5 8. Therefore, the electric motor 16 is rotated forward and the male thread shaft 1 5 8 When rotating in a predetermined direction, the horizontal moving member 1 5 4 moves to one end of the Y-axis direction. When the electric motor 1 60 is reversed and the male screw shaft 1 5 8 is rotated in the opposite direction, the horizontal moving member 1 5 4 will move toward It moves on the other side in the Y-axis direction. The horizontal moving member 1 5 4 is connected to the base 1 6 by a connecting arm portion 1 2 The supporting part 1 2 of 2 is mounted on the supporting part 1 7 4 and a pair of this paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) -27- 200300574 A7 ____B7_ V. Description of the invention (24) (Please Read the precautions on the back before filling in this page) Air cylinder mechanism, a pair of pistons 1 7 6 of the air cylinder mechanism protrude substantially vertically from the support portion 1 7 4 (only one is shown in Figure 5) The piston of the air cylinder mechanism is 17 6). The lower end of the piston 176 is fixed with the lifting and lowering member 156. When the pair of air cylinders starts to move and the piston 176 is stretched and contracted, the lifting and moving member 156 will be raised and lowered (that is, moved in the Z-axis direction). The first moving means 1 5 6 is equipped with a first holding means 1 7 8 and a second holding means 18 0 °. The first holding means 1 78 is printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs and is mounted on the The movable member 1 8 2 of the double-stranded portion at the tip of the moving member 1 5 6 is raised and lowered. The movable member 1 8 2 of the first holding means 1 7 8 is mounted via a mounting pin 1 8 4 so that the action position shown by the solid line in FIG. 5 is from the front end of the lifting and moving member 1 5 6 to The downward drooping active position and the non-active position shown by the two-dot chain line in FIG. 5 are freely rotating between the non-active position extending upward from the front end of the elevating and moving member 156. The mounting pins 1 84 are arranged substantially horizontally, and the movable member 18 2 is freely rotated around the center axis of the rotation that extends substantially horizontally. The mounting pin 1 84 is provided with an actuating means 1 8 6 which can be an air motor. By the action means 1 6, the movable member 1 8 2 can be selectively located at the above-mentioned active position and the above-mentioned non-acting position. A pair of holding pieces 1 8 8 are attached to the movable member 1 8 2. At least one, preferably both, of the pair of holding pieces 1 8 8 is an appropriate moving means (not shown) by means of an electromagnetic coil built into the movable member 1 8 2 to move to each other appropriately. The approaching and separating direction can be freely held. The size of this paper is installed. Applicable to China National Standard (CNS) A4 (210 X 297 mm). -28- 200300574 A7 B7 __ 5. Description of the invention (25) (Please Read the precautions on the back before filling in this page.) The processed object 46, which is shown by the two-dot chain line in Figure 5, is the one-sided edge of the frame 50 of the semiconductor wafer 54. The pair of holding pieces 1 8 8 are sufficiently miniaturized, and as will be described in more detail later, when the processed object 4 6 is held by the first holding means 1 7 8, the processed object 4 6 is removed from the wafer cassette. 4 8 (Figure 3) When conveyed out or into the cassette box 4 8 ', a pair of holding pieces 1 8 8 can be entered into the cassette box 4 8 to hold the processed object 4 6 Or it enters into the cassette cassette 48 with the to-be-processed object 46. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the second holding means 18 0 is a supporting plate 1 90 which is fixed in the lower part of the base of the above-mentioned lifting and moving member 156. At the four front end portions of the support plate 190 that extends substantially horizontally, there are attached adsorbers 192 that hang downward. A suction manifold (not shown) is arranged in the base of the lifting and moving member 1 5 6. Each adsorber 1 9 2 is connected to the suction manifold through a pipe 1 9 4. The suction manifold 1 9 4 is It is selectively connected to a vacuum source (not shown) via a conduit 196. The second holding means 18 0 is shown by a two-dotted dotted line in FIG. 5. The adsorber 19 2 adsorbs the upper surface of the frame 50 0 and holds the processed object 4 6, which is mounted on the frame 50 0. Semiconductor wafer 5 4. Referring to Fig. 3 again, the cutting machine shown in the figure is further provided with an additional workpiece conveying means 196. A pair of support plates 198 are arranged in the front end portion of the housing 2 with a gap in the width direction. Between the support plates 198, guide bars 2 extending substantially horizontally in the width direction are fixed. Similarly, a male screw shaft 2 0 2 extending substantially horizontally in the width direction is also rotatably mounted. On the male screw shaft 2 〇2 is connected to this paper standard applicable Chinese National Standard (CNS) A4 specification (210X297 mm) '---- -29 ~ 200300574 A7 B7 V. Description of the invention (26) (Please read the back first Note for refilling this page) Electric motor 2 0 4 is available. The additional workpiece conveying means 196 is provided with a sliding block 206, and the sliding block 206 is formed with a guided hole for inserting the guide rod 2 0 0 and screwing the above. Female threaded hole for male threaded shaft 2 0 2. An air cylinder mechanism having a piston 208 extending substantially vertically upward is arranged on the sliding block 206, and a slightly L-shaped arm portion 2 1 0 is fixed to the front end of the piston 208. A pair of support piece portions 2 1 2 are fixed to a lower portion of a portion extending toward the front-rear direction of the arm portion 2 10, and an adsorber 2 1 4 is attached to a lower portion of each support piece portion 2 1 2. Each of the adsorbers 2 1 4 is selectively connected to a suction source (not shown) through an appropriate suction path (not shown), and can adsorb the frame 50 of the processed object 4 6. When the electric motor 204 is actuated, the slider 2 06 will be moved in the width direction, that is, the Y direction, so the adsorber 2 1 4 will be moved in the Y axis direction, and the piston 2 0 8 of the air cylinder mechanism will be moved. When retracted, the adsorber 2 1 4 will rise and fall in the vertical direction, that is, in the Z-axis direction. As will be described later, the additional workpiece conveyance means 196 is used only to convey the workpiece 46 on the adsorption member 82 of the adsorption means 68 to the adsorption member 102 of the cleaning means 90. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The elevator table 40 of the cassette support means 34 is raised to the required height (or lowered), and a plurality of wafer cassettes 48 stored in the elevator table 40 are processed. A specific one of the objects 46 will be located at a predetermined height. In this state, the workpiece conveying means 150 is operated, and a pair of holding pieces 1 8 of the first holding means 1 78 located at the action position shown by the solid line in FIG. 5 enters the wafer cassette. Hold the specific one of the above paper in the box 48, and apply the BI national standard (CNS) A4 specification (210X297). -30- 200300574 A7 B7 5. Description of the invention (27) (Please read the back Please fill in this page again.) The consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints the frame 50 of the processed object 46, and will transfer the processed object 4 from the cassette loading area A to the adsorption area B. The suction area B places the workpiece 46 on the temporary support means 64. Then, the pair of holding pieces 1 8 of the first holding means 1 7 8 are separated from the workpiece 46, and the first holding means 1 78 is swung to the non-acting position shown in FIG. 5. Then, the second holding means 18 of the processed object conveying means 150 is located above the processed object 46 on the temporary support means 64, and then the adsorption of the lowered second holding means 180 is performed. The device 1 9 2 is tightly connected to the frame 50 of the workpiece 4 6. The adsorber 192 is connected to the suction source, and the processed object 46 is adsorbed on the adsorber 192. Then, the pair of supporting members 66 of the temporary supporting means 64 is moved to the non-active position shown by the solid line, and is retracted from below the workpiece 46. Next, the second holding means 180 is lowered, and the workpiece 46 adsorbed on the adsorber 19 2 is located on the adsorption member 82 of the adsorption means 68. The suction member 82 is connected to a suction source, whereby the semiconductor crystal circle 54 of the workpiece 46 is sucked onto the suction member 82. Then, the movable holding piece 86 of a pair of holding mechanisms 84 attached to the suction member 82 is positioned at a holding position to hold the frame 50. The adsorber 19 2 of the second holding means 180 is detached from the suction source, and the workpiece 46 is lifted after being detached. Next, the suction means 68 moves across the required distance and moves backward, and the microscopes 1 4 6 a and 1 4 6 b are attached to the first cutting means 1 1 2 a and the second cutting means 1 1 2 b. The image of the surface of the semiconductor wafer 54 will be taken at a position facing the surface of the semiconductor wafer 54 on the adsorption member 82, so that the paper size on the adsorption member 82 can be adapted to Chinese national standards ( CNS) A4 specification (210X 297 mm) -31-200300574 A7 ____ B7 V. Description of invention (28) (Please read the precautions on the back before filling out this page) Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative, printed semiconductor wafers 5 4 The position of the cutting tool (not shown) of the first cutting means 1 1 2 a and the cutting tool of the second cutting means 1 1 2 b 1 4 2 b are sufficiently accurately aligned. At the proofreading position, the suction member 8 2 moves in the X-axis direction as required, and rotates about the central axis. Then, the suction means 68 is moved further backward and is located in the cutting area D, so that the semiconductor wafer 54 which is sucked on the suction member 82 is cut, that is, dicing. When cutting, the suction member 8 2 moves in the X-axis direction, and the cutting tool of the first cutting means 1 1 2 a and the cutting tool 1 2 2 of the second cutting means 1 1 2 b are simultaneously or accompanied by a slight The time difference acts on the semiconductor wafer 54 to cut along a scribe line 56 extending in the X-axis direction. The cutting unit 1 3 6 a of the first cutting means 1 1 2 a and the cutting unit 1 3 6 b of the second cutting means 1 1 2 b are positioned at a desired height and are periodically moved in the Y-axis direction. When the cutting operation is completed along the cutting line 56 extending in the X-axis direction, the suction member 82 will rotate 90 degrees and start cutting again along the cutting line 56 located in the state along the Y-axis. In this way, the semiconductor wafer 54 on the suction member 82 is cut along the scribe lines 56 arranged in a grid pattern. It does not cut the mounting tape 52 existing between the frame 50 and the semiconductor wafer 54. After the semiconductor wafer 54 is cut, the frame 50, the mounting tape 52, and the cut semiconductor wafer are not cut. Circle 5 4 will be maintained as one
C 接下來，吸附手段6 8會回到吸附區域B。而附加被 加工物輸送手段1 9 6的吸附器2 1 4會位置於被保持於 吸附構件8 2上的被加工物4 6的上方，然後會下降而與 本纸張尺度適用中國國家糯準（CNS ) A4規格（2丨0X297公釐） -32 - 200300574 A7 B7 五、發明説明（29 ) (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 被加工物4 6的框架5 0緊密接合。而吸附器2 1 4會連 通到吸引源而被加工物4 6會被吸附到吸附器2 1 4，並 且吸附構件8 2會從吸引源切離而解除了對吸附構件8 2 的半導體晶圓5 4的吸附。而附設於吸附構件8 2的一對 把持機構8 4的可動把持片8 6會回到非把持位置而解除 了框架5 0的把持。然後，附加被加工物輸送手段1 9 6 的吸附器2 1 4會稍微上升，接著會朝向γ軸方向移動而 使被加工物4 6移動到淸洗區域C。然後，會使附加被加 工物輸送手段1 9 6的吸附器2 1 4下降，讓吸附在吸附 器2 1 4的被加工物4 6被載置於淸洗手段9 0的吸附構 件1 0 2上。吸附構件1 0 2會連通到吸引源讓被加工物 4 6被吸附到吸附構件1 〇 2上，並且附加被加工物輸送 手段1 9 6的吸附器2 1 4會從吸引源切離，被加工物會 從吸附器2 1 4脫離。另一方面，在淸洗區域C，吸附著 被加工物4 6的吸附構件1 0 2會連通到吸引源，讓半導 體晶圓5 4被吸附在吸附構件1 0 2上。而附設於吸附構 件1 0 2的把持機構1 0 4的可動把持片1 0 6會位於把 持位置把持住框架5 0。接下來，讓升降台9 8下降，吸 附著被加工物4 6的吸附構件1 0 2會下降到所需要的位 置。會以可以是純水的淸洗液從噴嘴（沒有圖示）向被加工物 4 6噴射，而吸附構件會以6 0 0 r · p . m左右的速度 旋轉，來淸洗附著有由於切削所生成的切削屑的被加工物 4 6。接著，會停止來自於噴嘴的淸洗液的噴射，會使吸 附構件以3 0 0 0 r . p . m左右的速度旋轉，來將被加 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -33- 200300574 A7 B7 五、發明説明（3〇 ) 工物旋轉乾燥。 (請先閱讀背面之注意事項再填寫本頁) 結束淸洗動作時，升降台9 8會上升讓吸附構件 1 0 2上升。然後吸附構件1 〇 2會從吸引源切離而解除 半導體晶圓5 4的吸附，而把持機構1 〇 4的可動把持片 1 0 6會回到非把持位置而解除了框架5 0的把持。接著 ’被加工物輸送手段1 5 0的第二保持手段1 8 0會位置 於吸附構件1 0 2上的被加工物4 6的上方，該吸附器 1 9 2會緊密接合於框架5 0。第二保持手段1 8 0的吸 附器1 9 2會連通到吸引源，讓被加工物吸附在吸附器 2 1 4。接著，第二保持手段1 8 0的吸附器1 9 2會上 升到所需要的高度，在Y軸方向會移動到吸附區域B。然 後’第二保持手段1 8 0會稍微下降，被加工物4 6會跨 越位於第3圖的兩點虛線所示的作用位置的臨時支承手段 6 4的一對支承構件6 6上而被載置著。接著吸附器 1 9 2會從吸引源切離，被加工物4 6會從吸附器1 9 2 脫離。 經濟部智慧財產局員工消費合作社印製 當把如上述經過了切削、淸洗的被加工物4 6載置於 臨時支承手段6 4上時，被加工物輸送手段1 5 0的第一 保持手段1 7 8的可動構件1 8 2會迴旋到第5圖實線所 示的作用位置，並且裝備在可動構件1 8 2的一對把持片 1 8 8會相對於被加工物4 6而位在所需要的位置也就是 把持住框架5 0的寬度方向左側緣部的位置。然後，使第 一保持手段1 7 8的一對把持片1 8 8作動，來把持住臨 時支承手段6 4上的被加工物4 6的框架5 0。接著，使 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） »34- 200300574 A7 ___B7 五、發明説明（31 ) (請先閱讀背面之注意事項再填寫本頁) 被加工物輸送手段1 5 0朝向晶圓匣盒載置區域A移動， 藉此讓被加工物4 6插入到晶圓匣盒4 8內。然後，第一 保持手段1 7 8的一對把持片1 8 8會從被加工物4 6脫 離，被加工物輸送手段1 5 0會回到預定待機位置。 在之前的被加工物4 6在淸洗區域C進行淸洗的期間 ，會將收容在晶圓匣盒4 8內的接下來要進行切割的被加 工物4 6從晶圓匣盒4 6輸送到臨時支承手段6 4上，然 後吸附到吸附手段6 8的吸附構件8 2上，在進行過所需 要的位置校對之後將其輸送到切割區域D，則可以用第一 切削手段1 1 2 a及第二切削手段1 1 2 b來開始切割。 經濟部智慧財產局員工消費合作社印製 藉由比較參照第1圖及第3圖而可正確地理解，當上 述的單側門部4位於第1圖實線所示的關閉位置時，殻體 2內的前半部的配置於寬度方向單側的淸洗區域C是以單 側門部4所覆蓋。而且除了單側門部4位於關閉位置之外 ，當安裝於單側門部4的上述中央門部6也位於第1圖實 線所示的關閉位置時，殻體2內的前半部的配置於寬度方 向中央部的吸附區域B (及吸附區域B的後方，也就是殼體 2的後半部的配置於寬度方向中央部的切割區域D )是以中 央門部6所覆蓋。並且，當上述其他側門部8位於第1圖 實線所示的關閉位置時，晶圓匣盒載置區域A會藉由其他 側門部8所覆蓋。 當將晶圓匣盒4 8載置於配設在晶圓匣盒載置區域A 的晶圓匣盒支承手段3 4上時、及將晶圓匣盒4 8從晶圓 匣盒支承手段3 4上取出時，或把持住該把手2 0將其他 本纸張尺度適用中國國家標準（CNS ) A4規格（210X；297公釐） -35- 200300574 A7 B7 五、發明説明（32 ) (請先閲讀背面之注意事項再填寫本頁) 側門部8朝向第1圖的兩點虛線所示的開啓位置迴旋移動 。這樣會開放晶圓匣盒載置區域A的前面部，則可容易地 將晶圓匣盒4 8載置於晶圓匣盒支承手段3 4上或可以將 晶圓匣盒4 8從晶圓匣盒支承手段3 4上取出。 經濟部智慧財產局員工消費合作社印製 當藉由第一切削手段1 1 2 a及第二切削手段1 1 2 b來反覆進行半導體晶圓5 4的切削時，第一切削手段 1 1 2 a的切削刀具及第二切削手段1 1 2 b的切削刀具 1 4 2 b會耗損，而需要進行交換。此時，則把持住把手 1 6來將中央門部6朝向第1圖的兩點虛線所示的開啓位 置移動。並且因應需要，將安裝著中央門部6的單側門部 4與中央門部6 —起移動向第1圖的兩點虛線所示的開啓 位置，而成爲第2圖所示的狀態。此時會把持住中央門部 6的把手1 6與中央門部6 —起移動向單側門部4的開啓 方向。在第2圖所圖示的狀態，殼體2內的前半部的配置 於寬度方向中央部的吸附區域B及位於其後方的切割區域 D會在前方被開放，淸洗區域C也在前方被開放。於是， 操作者可將其上半身從殼體2的前面部進入到殼體2內， 能夠容易地接近到位於切削區域D的切削刀具，可以迅速 且容易地進行切割刀具的交換操作。在進行作業時，當需 要操作切削機或要目視切削機的作動狀態時，則握住把手 1 4將配設於單側門部4的支承構件1 0會朝向第1圖及 第2圖的兩點虛線所示的延出位置迴旋。這樣子即使操作 者是將上半身進入到殼體2內的狀態，也可對配設於支承 手段1 0的觸碰式面板1 2的所需要的部位進行觸碰來執 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -36- 經濟部智慧財產局員工消費合作社印製 200300574 A7 B7 五、發明説明（33 ) 行切削機的必須操作，或藉由目視觸碰式面板1 2的所需 要的部位來辨識切削機的必須作動狀態。 雖然是針對本發明所構成的切削機的較佳實施型態來 詳細說明，而本發明並不限定於該實施型態，而只要不脫 離本發明的範圍則可進行種種的變形及修正。例如，在圖 示的實施型態中，雖然從前面部來看是將晶圓匣盒載置區 域A配設在吸附區域B的右側，且將淸洗區域C配設在吸 附區域B的左側，而也可因應需要將晶圓匣盒載置區域A 配置在吸附區域B的左側且將淸洗區域C配置在右側。在 該情況，最好是將單側門部4、中央門部6及其他側門部 8的配置作成與圖示的情況線對稱的型態。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29?公釐） (請先閲讀背面之注意事項再填寫本頁)C Next, the adsorption means 68 will return to the adsorption area B. On the other hand, the adsorber 2 1 4 attached to the workpiece conveying means 1 9 6 will be positioned above the workpiece 4 6 held on the adsorption member 8 2, and then it will be lowered. (CNS) A4 specification (2 丨 0X297 mm) -32-200300574 A7 B7 V. Invention Description (29) (Please read the precautions on the back before filling this page) The Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives printed and processed The frames 50 of objects 46 are tightly coupled. The adsorber 2 1 4 is connected to the suction source and the processed object 4 6 is adsorbed to the adsorber 2 1 4, and the adsorption member 8 2 is cut away from the attraction source to release the semiconductor wafer to the adsorption member 8 2. 5 4 Adsorption. On the other hand, the movable holding piece 86 of a pair of holding mechanisms 84 attached to the suction member 82 is returned to the non-holding position and the holding of the frame 50 is released. Then, the adsorber 2 1 4 to which the workpiece conveying means 1 9 6 is added rises slightly, and then moves toward the γ-axis direction to move the workpiece 4 6 to the cleaning area C. Then, the adsorber 2 1 4 attached with the workpiece conveying means 1 9 6 is lowered, and the workpiece 4 6 adsorbed on the adsorber 2 1 4 is placed on the adsorption member 1 0 2 of the cleaning means 9 0. on. The adsorption member 10 and 2 will be connected to the suction source to allow the workpiece 46 to be adsorbed on the adsorption member 102, and the adsorber 2 1 4 attached with the workpiece transportation means 196 will be cut off from the suction source and be The processed material is detached from the adsorber 2 1 4. On the other hand, in the cleaning area C, the suction member 102 holding the workpiece 46 is connected to the suction source, and the semiconductor wafer 54 is sucked on the suction member 102. The movable holding piece 106 attached to the holding mechanism 104 of the suction member 102 is located at the holding position to hold the frame 50. Next, the lifting platform 98 is lowered, and the suction member 102 that sucks and adheres to the workpiece 46 is lowered to a desired position. The cleaning solution, which can be pure water, is sprayed from the nozzle (not shown) to the workpiece 46, and the adsorption member is rotated at a speed of about 600 r · p. M to clean the surface due to cutting. The workpiece 4 6 of the generated chips. Then, the spraying of the washing liquid from the nozzle will be stopped, and the adsorption member will be rotated at a speed of about 3000 r.p.m to apply the Chinese paper standard (CNS) A4 specification to the paper size to be added ( 210X297 mm) -33- 200300574 A7 B7 V. Description of the invention (3) The work is spin-dried. (Please read the precautions on the back before filling in this page.) When the cleaning operation is completed, the lifting table 9 8 will be raised to allow the suction member 1 2 to rise. Then, the suction member 102 is cut away from the suction source to release the suction of the semiconductor wafer 54, and the movable holding piece 106 of the holding mechanism 104 is returned to the non-holding position to release the holding of the frame 50. Next, the second holding means 18 of the workpiece conveying means 150 is positioned above the workpiece 46 on the adsorption member 102, and the adsorber 192 is tightly joined to the frame 50. The adsorber 19 2 of the second holding means 180 is connected to the suction source, and the processed object is adsorbed on the adsorber 2 1 4. Next, the adsorber 192 of the second holding means 180 is raised to the required height, and moves to the adsorption area B in the Y-axis direction. Then, the "second holding means 1 0 0" is slightly lowered, and the workpiece 4 6 is carried across a pair of supporting members 6 6 of the temporary supporting means 6 4 located at the active position shown by the two-dot dotted line in Fig. 3. Place it. Then, the adsorber 1 9 2 is cut off from the suction source, and the workpiece 4 6 is detached from the adsorber 1 9 2. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the processed object 46, which has been cut and washed as described above, is placed on the temporary support means 64, the first holding means of the processed object conveyance means 150. The movable member 1 8 2 of 1 7 8 will rotate to the active position shown in the solid line in FIG. 5, and a pair of holding pieces 1 8 8 equipped on the movable member 1 8 2 will be positioned relative to the workpiece 4 6. The required position is the position holding the left edge of the frame 50 in the width direction. Then, a pair of holding pieces 1 8 of the first holding means 17 8 is actuated to hold the frame 50 of the workpiece 46 on the temporary supporting means 64. Next, make this paper size applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) »34- 200300574 A7 ___B7 V. Description of the invention (31) (Please read the precautions on the back before filling this page) Workpiece The conveyance means 150 moves toward the cassette case mounting area A, thereby inserting the workpiece 46 into the cassette case 48. Then, the pair of holding pieces 1 8 of the first holding means 17 8 are separated from the workpiece 4 6, and the workpiece conveying means 1 50 is returned to the predetermined standby position. During the previous cleaning process in the cleaning area C, the processed object 4 6 to be cut in the cassette box 48 is transported from the cassette box 4 6. To the temporary support means 64, and then to the adsorption member 8 2 of the adsorption means 68, and after the required position calibration is carried out and transported to the cutting area D, the first cutting means 1 1 2 a can be used And the second cutting means 1 1 2 b to start cutting. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. By comparing and referring to Figures 1 and 3, it can be correctly understood that when the single-sided door portion 4 is located in the closed position shown by the solid line in Figure 1, the housing 2 The rinsing area C of the inner front half portion disposed on one side in the width direction is covered with the one-sided door portion 4. In addition to the one-sided door portion 4 in the closed position, when the central door portion 6 mounted on the one-sided door portion 4 is also in the closed position shown by the solid line in FIG. 1, the front half of the housing 2 is arranged in the width The suction area B (and the rear of the suction area B, that is, the cutting area D of the rear half of the housing 2 disposed at the widthwise center portion) in the direction center portion is covered by the center door portion 6. When the other side door portion 8 is located in the closed position shown by the solid line in FIG. 1, the cassette loading area A is covered by the other side door portion 8. When the cassette cassette 4 8 is placed on the cassette cassette supporting means 3 4 disposed in the cassette cassette mounting area A, and the cassette cassette 4 8 is removed from the cassette cassette supporting means 3 4 when taking out, or holding the handle 20, the other paper size applies the Chinese National Standard (CNS) A4 specification (210X; 297 mm) -35- 200300574 A7 B7 V. Description of the invention (32) (please first Read the notes on the back and fill in this page again.) The side door 8 moves back and forth toward the open position shown by the two dotted lines in Figure 1. This will open the front portion of the cassette case mounting area A, so that the cassette case 4 8 can be easily placed on the cassette case supporting means 34 or the cassette case 4 8 can be removed from the wafer Take out the cassette support means 34. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs When the first cutting means 1 1 2 a and the second cutting means 1 1 2 b are used to repeatedly cut the semiconductor wafer 5 4, the first cutting means 1 1 2 a The cutting tool 1 2b and the cutting tool 1 2b of the second cutting means 1 1 2 b will be worn and need to be exchanged. At this time, the handle 16 is held to move the central door portion 6 toward the open position shown by a two-dot chain line in FIG. 1. If necessary, the one-sided door portion 4 with the central door portion 6 and the central door portion 6 are moved together to the open position shown by a two-dot chain line in FIG. 1 to be in the state shown in FIG. 2. At this time, the handle 16 holding the center door portion 6 and the center door portion 6 are moved together in the opening direction of the one-side door portion 4. In the state shown in FIG. 2, the suction region B and the cutting region D located at the rear half of the front half of the housing 2 disposed in the center in the width direction are opened in the front, and the washing region C is also closed in the front. open. Therefore, the operator can enter the upper body into the housing 2 from the front portion of the housing 2, and can easily access the cutting tool located in the cutting area D, and can quickly and easily perform the cutting tool exchange operation. During operation, when the cutting machine needs to be operated or the operating state of the cutting machine needs to be visually observed, the handle 1 will be held, and the supporting member 10 arranged on the single-side door portion 4 will face the two positions shown in FIG. 1 and FIG. 2. The extended position circled by the dotted line circled. In this way, even if the operator enters the upper body into the casing 2, he can touch the required part of the touch panel 12 arranged on the support means 10 to execute the paper. The standard of the paper is applicable in China Standard (CNS) A4 specification (210X297 mm) -36- Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 200300574 A7 B7 V. Description of the invention (33) The operation of the cutting machine must be operated, or the visual touch panel 1 2 required parts to identify the necessary operating state of the cutting machine. Although the preferred embodiment of the cutting machine constituted by the present invention will be described in detail, the present invention is not limited to this embodiment, and various modifications and corrections can be made without departing from the scope of the present invention. For example, in the embodiment shown in the figure, although viewed from the front, the cassette loading area A is arranged on the right side of the suction area B, and the cleaning area C is arranged on the left side of the suction area B. Alternatively, the wafer cassette mounting area A may be arranged on the left side of the suction area B and the cleaning area C may be arranged on the right side as needed. In this case, it is preferable that the arrangement of the one-side door portion 4, the center door portion 6, and the other side door portions 8 is a line-symmetrical configuration with the case shown in the figure. This paper size applies to China National Standard (CNS) A4 (210X29? Mm) (Please read the precautions on the back before filling this page)
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