CN1235270C - Cutter - Google Patents

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Publication number
CN1235270C
CN1235270C CN 02152868 CN02152868A CN1235270C CN 1235270 C CN1235270 C CN 1235270C CN 02152868 CN02152868 CN 02152868 CN 02152868 A CN02152868 A CN 02152868A CN 1235270 C CN1235270 C CN 1235270C
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CN
China
Prior art keywords
machined
door
casket box
cutter
binding domain
Prior art date
Application number
CN 02152868
Other languages
Chinese (zh)
Other versions
CN1420529A (en
Inventor
大宫直树
Original Assignee
株式会社迪思科
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2001355598 priority Critical
Priority to JP2001355598A priority patent/JP2003158094A/en
Priority to JP2001362084A priority patent/JP2003163181A/en
Priority to JP2001362084 priority
Application filed by 株式会社迪思科 filed Critical 株式会社迪思科
Publication of CN1420529A publication Critical patent/CN1420529A/en
Application granted granted Critical
Publication of CN1235270C publication Critical patent/CN1235270C/en

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Abstract

Single side door portion, central door portion and the other side door portion are disposed on the front portion of the cutting machine housing. The single side door portion is mounted to have the capability of moving freely in between the opening positions, which cover the closing position of the front portion of the cleaning region and change position toward the single side direction of the housing to open the front portion of the cleaning region. The central door portion is mounted to have the capability of moving freely in between the opening positions by covering the closing position of the front portion of the adsorbing region and changing position toward the single side direction so as to open the front portion of the adsorbing region at least when it is mostly at the backside or front side of the single side door. The other side door portion is mounted to have the capability of moving freely in between the opening positions for covering the front portion of the wafer cartridge box region and opening the front portion of the wafer cartridge box region. The invention is provided with a means for transferring the processed object. The transferring means of the processed object is disposed to have the first holding means and the second means for holding the processed object on the commonly movable supporting frame body.

Description

Cutter
Technical field
The present invention relates to be fit to be used for the cutter of cutting semiconductor wafer, be specifically related to a kind of cutter, wherein the first half in housing disposes: be positioned at Width central authorities binding domain, be positioned at this binding domain a wherein side the cleaning zone and be positioned at the wafer casket box mounting zone of the opposite side of binding domain, and at the latter half of cutting zone that is positioned at Width central authorities that disposes of housing.
Background technology
Open the Japan Patent spy and to have disclosed a kind of cutter that is fit to come the cutting semiconductor wafer in the 2001-7058 communique with high efficiency.This cutter has forward the rear to the housing of elongated extension, disposes guidance panel at the front face of this housing.Wherein side at housing disposes in regular turn towards the rear: wafer casket box mounting zone, binding domain and cleaning zone.Fore-and-aft direction central portion at the opposite side of housing disposes cutting zone.Dispose the temporary support device at binding domain.And be equipped with the movable adsorbent equipment that can optionally be located at binding domain and cutting zone.In wafer casket box mounting area configurations supporting arrangement is arranged, be equipped with cleaning device in the cleaning zone.Above-mentioned opposite side at housing is equipped with two topping machanisms i.e. first topping machanism and second topping machanism.First topping machanism comprises first rotating shaft and the cutting tip that is installed on this first rotating shaft, and second topping machanism comprises second rotating shaft and the cutting tip that is installed on this second rotating shaft.First rotating shaft and second rotating shaft extend the above-mentioned opposite side one of housing point-blank towards fore-and-aft direction, the medial extremity that first cutting tip and second cutting tip are installed in first rotating shaft respectively is that the medial extremity of the rear end and second rotating shaft is a front end, make its position mutually relatively to.Also be equiped with three machined object conveying devices i.e. first machined object conveying device, the second machined object conveying device and the 3rd machined object conveying device that is used for carrying machined object at cutter.
Upload at wafer casket box supporting arrangement and to be equipped with wafer casket box, in this wafer casket box, contain a plurality of machined objects promptly are installed in the construction opening that is formed at framework central authorities via mounting strap semiconductor crystal wafer along the vertical direction at interval.The first machined object conveying device is carried out one piece with the machined object in the wafer casket box at every turn and is transported on the temporary support device.Next, the second machined object conveying device is transported to the machined object on the temporary support device on the adsorbent equipment that is positioned at binding domain.The adsorbent equipment of absorption machined object moves to cutting zone.Then, make first cutter and second cutter act on machined object at cutting zone and carry out needed cutting, promptly carry out the cutting of semiconductor crystal wafer.When cutting was finished, adsorbent equipment was moved to binding domain.Then, the 3rd machined object conveying device is transported to cleaning device with the machined object on the adsorbent equipment.Cleaning device will be cleaned through the machined object of cutting.Cleaning machined object later is transported on the temporary support device by the second machined object conveying device.Then, the first machined object conveying device is transported to the wafer casket box of mounting on wafer casket box supporting arrangement with the machined object on the temporary support device.
The Japan Patent spy open that the 2001-7058 communique disclosed as the cutter of above-mentioned cutter and other kenel for example the cutter that disclosed of Japanese patent laid-open 11-26402 communique or Japanese patent laid-open 11-74228 communique compare, be in the configuration in each zone more work hard design and more miniaturization.But be not very perfect structure, and has following problem, promptly, the cutting tip of topping machanism need exchange owing to cutting abrasion, the installation position from the front of housing to cutting tip is equipped with suitable distance, the swap operation that carry out cutting tip from the front of housing be not impossible but also be quite difficult.Usually, the swap operation of cutting tip is carried out in the side that the operator will be positioned at housing, and swap operation is more numerous and diverse.And owing to will make and when carrying out the exchange of cutting tip, can make the operator be positioned at the side of housing, and need near the side surface part of housing, guarantee needed space, the space that causes being used for installing cutter like this becomes bigger.Cut semiconductor crystal wafer and when using cutter, be cutter to be equipped in so-called clean room, the necessary space that is used for equipping cutter becomes bigger, and this problem can not be ignored.
For solving the above problems, will be with the swap operation facilitation of cutting tip, and reduce the cutter in the necessary space be used for equipping cutter, the applicant is willing to disclose a kind of cutter in 2001-162958 number specification and the accompanying drawing (below be called " preceding application specification and accompanying drawing ") in that the Japan Patent applied for is special, wherein, first half at housing, disposed binding domain at the Width central portion, the zone is cleaned in wherein side configuration at this binding domain, in opposite side configuration wafer casket box mounting zone, latter half of at housing disposed cutting zone at the Width central portion.In this cutter, as the specific region of the front face of housing is open, just can be close to the cutting tip of topping machanism from the front face of housing, can be easily and promptly carry out the swap operation of cutting tip.Do not make the operator enter into the both sides of housing or the space of rear face with regard to not needing to possess, can dwindle the necessary space that is used for equipping cutter fully.
; in the cutter that preceding application specification and accompanying drawing disclosed not fully self-criticism can come the structure of a plurality of portions of the front face of open shells in response to needs; when the swap operation of the cutting tip that carries out topping machanism or the mounting of the wafer casket box on wafer casket box supporting arrangement in wafer casket box mounting zone when operation; can not very reasonably carry out the switching move operation of a portion, the opening and closing operations of door portion is very numerous and diverse.And, when the operator enters into it in housing above the waist, can not be close to operating means in order to exchange the cutting tip of topping machanism, can not see the indication device of the various states of expression cutter.
The Japan Patent spy open that the 2001-7058 communique disclosed as above-mentioned cutter in, be that three machined object conveying devices independently are set respectively, the i.e. first machined object conveying device, the second machined object conveying device and the 3rd machined object conveying device, the existence of these three machined object conveying devices has limited miniaturization, and has the cost of manufacture problem of higher.
Summary of the invention
The present invention is in view of above-mentioned situation, its first purpose be to improve above-mentioned before the structure of a plurality of portions equipping of the housing of cutter of the above-mentioned kenel that disclosed of application specification and accompanying drawing, and the zone that can need corresponding to the front face of open shells is fully easily and reasonably carry out the opening and closing operations of a portion.
Second purpose of the present invention, except realizing above-mentioned first purpose, for when the operator enters in the housing above the waist for the cutting tip that exchanges topping machanism makes, can make the operator easily be close to various operating means, and can easily visual display unit to the various states of representing cutter.
The 3rd purpose of the present invention is will be with the structure of the first machined object conveying device and the second machined object conveying device commonization partly, and can makes the processing machine miniaturization and can lower cost of manufacture.
By first technical scheme of the present invention, for realizing the first above-mentioned purpose, front face at described housing disposes a side door, central authorities' door, and another side door, a described side door be mounted to can an off-position that covers the described front face that cleans the zone and a side from described off-position towards described housing change the position open between the enable possition of the regional front face of this cleanings mobile freely, described central authorities door is installed on the described side door, when a described side door is positioned at off-position, described central authorities door can move freely between the enable possition of the off-position of the front face that covers described binding domain most of at least front face at a described side door rear or the place ahead and open described binding domain with changing the position from described off-position towards a side, described another side door be mounted to can be between the enable possition of the off-position of the front face that covers described wafer casket box mounting zone and the front face of opening described wafer casket box mounting zone mobile freely.
Promptly, by first technical scheme of the present invention, as the cutter of realizing above-mentioned first purpose, first half in housing disposes: be positioned at the Width central portion binding domain, be positioned at this binding domain a side the cleaning zone and be positioned at the wafer casket box mounting zone of this binding domain opposite side, the latter half of cutting zone that is positioned at the Width central portion that disposes in this housing
Comprise: be equipped on this cleaning zone cleaning device, be equipped on this wafer casket box mounting zone wafer casket box supporting arrangement, can move freely and its topping machanism that is positioned at the adsorbent equipment of described binding domain and described cutting zone and is configured in the latter half of of described housing and has the cutting tip that is positioned at described cutting zone optionally along fore-and-aft direction at the Width central portion in this housing
Mounting contains the wafer casket box of a plurality of machined objects on the described wafer casket box supporting arrangement,
It is characterized in that: the front face at described housing disposes a side door, central authorities' door, and another side door, a described side door be mounted to can an off-position that covers the described front face that cleans the zone and a side from described off-position towards described housing change the position open between the enable possition of the regional front face of this cleanings mobile freely, described central authorities door is installed on the described side door, when a described side door is positioned at off-position, described central authorities door can move freely between the enable possition of the off-position of the front face that covers described binding domain most of at least front face at a described side door rear or the place ahead and open described binding domain with changing the position from described off-position towards a side, described another side door be mounted to can be between the enable possition of the off-position of the front face that covers described wafer casket box mounting zone and the front face of opening described wafer casket box mounting zone mobile freely.
This another side door portion is preferably being freely to circle round between described off-position and described enable possition in the center at the vertically extending in fact centre of gyration axis of the opposite side of this housing.At the cutter that is used for realizing above-mentioned second purpose, when this door portion of central authorities is moved to this enable possition, at least the major part of this door portion of central authorities is positioned at the rear of this side door portion, front face in this side door portion is equipped with: the supporting member to circle round between the centre of gyration axis that extends perpendicular to the Width medial margin portion of this side door portion in fact extended position that to be the center extend out towards the place ahead along usual position that the front face of this side door portion extends and from this side door portion freely is equipped with guidance panel at this supporting member.This guidance panel is preferable to be made of touch panel.In preferable enforcement kenel, this topping machanism comprises first topping machanism and second topping machanism, this first topping machanism has first rotating shaft and first cutting tip that is installed on this first rotating shaft, second topping machanism has second rotating shaft and second cutting tip that is installed on this second rotating shaft, this first rotating shaft and this second rotating shaft extend latter half of in this housing point-blank towards Width one, and this first cutting tip and this second cutting tip are installed in the Width medial extremity of the Width medial extremity of this first rotating shaft and this second rotating shaft respectively and are positioned at the position of mutual subtend.Be equipped with the temporary support device at this binding domain, the machined object that is transported to this binding domain from this wafer casket box begins by mounting on this temporary support device, then be transported on the adsorbent equipment from this temporary support device, then, cut apart and be transported to this binding domain from this cleaning zone, behind this temporary support device, be conveyed into this wafer casket box again in mounting through the machined object that cleans.This temporary support device is made of a pair of supporting member, this a pair of supporting member is crossed over the active position of machined object between the two and is moved freely between the non-working position of machined object by decline between the two with moving and allow towards direction disconnected from each other from this active position in be separated by predetermined space and mounting, when making this adsorbent equipment be positioned at this binding domain, this adsorbent equipment is positioned at the below of this temporary support device.Machined object is a semiconductor crystal wafer, and this cutting tip is circular plate shape and contains the diamond particle with the cutting semiconductor wafer.
By other invention of the present invention, in order to realize above-mentioned the 3rd purpose, be equipped with the first machined object conveying device that made up traditional cutter and the machined object conveying device of the second machined object conveying device, promptly in common movable support tectosome, be equipped with first holding device and second holding device, first holding device is the function as the first machined object conveying device of traditional cutter, second holding device is the function as the second machined object conveying device of traditional cutter, and the machined object conveying device of forming like this is equipped on cutter.
Promptly, by other invention of the present invention, realize that as being used for the cutter of above-mentioned the 3rd purpose comprises: be disposed at wafer casket box mounting zone wafer casket box supporting arrangement, be equipped on binding domain the temporary support device, be equipped on the topping machanism of cutting zone, optionally be located at the movable adsorbent equipment and the machined object conveying device of this binding domain and this cutting zone; This wafer casket box supporting arrangement is uploaded and is equipped with the wafer casket box that contains machined object, this machined object conveying device is sent machined object from the wafer casket box of mounting on this wafer casket box supporting arrangement, and be transported on this temporary support device, then it is delivered to from this temporary support device on this adsorbent equipment that is positioned at this binding domain, after cutting, again mounting is being sent in the wafer casket box of mounting on this wafer casket box supporting arrangement in the machined object on this temporary support device.
This machined object conveying device comprises: common movable support tectosome, be equipped on this common movable support tectosome and enter in the wafer casket box and can keep first holding device of the machined object in the wafer casket box free and openly, and be equipped on this common movable support tectosome and can keeping being supported in second holding device of the machined object on this temporary support device free and openly, when sending and be sent to this temporary support device on from the wafer casket box of mounting on this wafer casket box supporting arrangement machined object, and after finishing cutting with mounting when the machined object on this temporary support device is sent in the wafer casket box of mounting on this wafer casket box supporting arrangement, first holding device keeps machined object, when with machined object when this temporary support device is delivered on this adsorbent equipment that is positioned at this binding domain, this second holding device keeps machined object.
The present invention also goes for not setting the cutter that cleaning device and relevant machined object conveying device are the 3rd machined object conveying device of traditional cutter.In preferable enforcement kenel, machined object is a semiconductor crystal wafer, and this semiconductor crystal wafer is installed in this construction opening place that central authorities have the framework of construction opening via mounting strap, contains a plurality of machined objects in wafer casket box along the vertical direction at interval.This common movable support tectosome comprises: be mounted to be parallel to this wafer casket box mounting zone and the detaching direction of this binding domain and in fact can towards horizontal direction freely move around move horizontally member and be mounted to can be towards the lifting moving member that moves perpendicular to the direction free lifting of this horizontally moving device in fact; This first holding device and this second holding device are preferable to be provided in this lifting moving member.This first holding device of this machined object conveying device is outstanding at interval along the vertical direction, and one of them side is by can freely constituting near reaching the mobile a pair of holding piece of separation with respect to the opposing party, one side edge part of this a pair of holding piece holding frame, this second holding device of this machined object conveying device constitutes by being used for the facial a plurality of absorbers of going up of vacuum suction framework.Be equipped with at this lifting moving member of this machined object conveying device the active position that optionally is located at below hanging down with towards above the movable link of the non-working position that extends, this a pair of holding piece is provided on this movable link, when this movable link was positioned at this active position, this a pair of holding piece was side-prominent outwardly from this movable link.The root of this movable link is being to circle round and be installed on this lift component freely in the center towards horizontally extending centre of gyration axis in fact.In preferable enforcement kenel, this temporary support device comprises a pair of supporting member, this a pair of supporting member optionally is positioned at mounting and crosses over the active position of framework between the two and can make framework pass through the non-working position of lifting between the two, be positioned at this binding domain as this adsorbent equipment, then this adsorbent equipment is positioned at the below of this a pair of supporting member of this temporary support device.Have and be disposed at the cleaning device that cleans the zone and only be used for the machined object after cutting that is positioned on this adsorbent equipment of this binding domain is delivered to the employed additional machined object conveying device of this cleaning device from this adsorbent equipment, this machined object conveying device also is used for machined object is delivered on this temporary support device from this cleaning device, when delivering to machined object on this temporary support device from this cleaning device, can make this second holding device keep machined object.
Description of drawings
Fig. 1 is the stereogram of the preferable enforcement kenel of the expression cutter that the present invention constituted.
Fig. 2 is so that door portion of central authorities is in the enable possition and make the side door portion that central door portion is installed be in the stereogram of the state representation of enable possition cutter shown in Figure 1.
Fig. 3 is the stereogram that omits housing etc. for the internal structure of the cutter of presentation graphs 1.
Fig. 4 is the stereogram of the machined object (being installed in the semiconductor crystal wafer of framework via mounting strap) that cuts of the cutter of expression by Fig. 1.
Fig. 5 is the stereogram of machined object conveying device that expression is equipped on the cutter of Fig. 1.
Embodiment
The following preferable enforcement kenel that illustrates in greater detail the cutter that the present invention constitutes with reference to accompanying drawing.
What Fig. 1 was expression with cutter that the present invention was constituted is all.This cutter is represented whole housing with label 2.Whole housing 2 is the rectangular-shaped of lengthwise.But the front face at housing 2 is equipped with three door portions that freely openable moves, and promptly is equipped with: be arranged in Width wherein a side door portion 4, the door portion 6 of central authorities that is arranged in the Width centre and another side door portion 8 that is positioned at wide direction opposite side (is the right side from the place ahead in illustrated enforcement kenel) of a side (is the left side from the place ahead in illustrated enforcement kenel).The part except a side door portion 4, door portion 6 of central authorities and another side door portion 8 of housing 2 is that housing body can constitute by linking suitable tabular component.
An above-mentioned side door portion 4 is the fonts of falling L, be from other regional front face of housing 2 and go up face a little towards the place ahead and the top outstanding.One side door portion 4 moves along level and vertically extending in fact plane (front face of housing 2) in fact between the enable possition shown in off-position shown in the solid line and the double dot dash line by suitable erecting device (not shown) to be installed in housing body freely.Set up suitable locking mechanism (not shown) in a side door portion 4, a side door portion 4 can be locked in above-mentioned off-position and above-mentioned enable possition both sides with freely removing.Above-below direction zone line at the front face of a side door portion 4 is equipped with supporting member 10.This supporting member 10 by suitable erecting device with vertical extent in fact in the centre of gyration axis 11 of the Width medial margin portion of a side door portion 4 be the center be mounted to the position shown in the solid line promptly along the usual position that front face was extended of a side door portion 4, and double dot dash line shown in the position promptly prolong between the position and freely circle round with respect to what its front face vertically extended out from a side door portion 4 in fact.The position and becoming arbitrarily that angular position is maintained inactive state with above-mentioned prolonging with above-mentioned usual position and supporting arrangement 10 itself is a holdout device (not shown) by prior art.The touch panel 12 of rectangle is installed on supporting member 10.This touch panel with the various actuator states that are used for showing cutter (for example, the flow regime of cooling fluid, compressed-air actuated flow regime etc.) display unit constitutes, and is that guidance panel with the operating means that contains the start that is used for controlling cutter is constituted.Be equipped with the handle 14 that extends towards horizontal direction in the bottom of supporting member 10, when supporting member 10 is circled round, then can hold this handle 14.
Door portion 6 of above-mentioned central authorities is vertically extending in fact tabular, be not mounted on the housing body, but by suitable erecting device along vertically extending in fact plane (planes of door portion of central authorities 6 extensions itself) and can be between the enable possition shown in off-position shown in the solid line and the double dot dash line in fact level be installed in an above-mentioned side door portion 4 with moving freely.Set up suitable locking mechanism (not shown) in door portion 6 of central authorities, door portion 6 of central authorities can be locked in above-mentioned off-position and above-mentioned enable possition both sides with respect to a side door portion 4 with freely removing.In illustrated enforcement kenel, door portion 6 of central authorities is installed in the rear face of a side door portion 4, and when moving to above-mentioned enable possition, its major part (part beyond the margo dexter portion of promptly seeing from the place ahead) is positioned at the rear of a side door portion 4.As described later, when the state that makes door portion of central authorities 6 move to enable possition shown in Figure 1 moved to a side door portion 4 enable possition shown in the double dot dash line shown in Figure 1, door portion 6 of central authorities moved along with the mobile of a side door portion 4, and becomes state shown in Figure 2.The margo dexter subordinate portion from the place ahead in door portion 6 of central authorities is equipped with the handle 16 that extends towards vertical direction, can hold this handle 16 when door portion 6 of central authorities is moved.
Next describe with reference to Fig. 1, above-mentioned another side door portion 8 its cross section shapes are the L font, being by suitable erecting device (not shown), is to circle round between the enable possition shown in off-position shown in the solid line and the double dot dash line and be installed in housing body freely in the center with vertical extent in fact in the centre of gyration axis 18 of the opposite side (is the right side from the place ahead) of housing 2.Also set up suitable locking mechanism (not shown) in another side door portion 8, can be locked with freely removing in above-mentioned off-position and above-mentioned enable possition both sides.The left border portion central portion from the place ahead in another side door portion 8 is to be equipped with the handle 20 that extends towards vertical direction, can hold handle 20 when a side door portion 8 is circled round.
Be illustrated with reference to Fig. 1 and Fig. 3 simultaneously, in housing 2, its first half is equipped with wafer casket box mounting zone A, binding domain B and cleans zone C.Binding domain B is configured in the Width centre, and wafer casket box zone A is configured in the wherein side (is the right side from the place ahead) of binding domain B, cleans the opposite side (is the left side from the place ahead) that zone C is configured in binding domain B.Latter half of Width centre in housing disposes machining area D.For the convenience on illustrating, fore-and-aft direction is called X-direction in this manual, Width is called Y direction, above-below direction is called Z-direction.Cleaning zone C, binding domain B and wafer casket box mounting zone A is preferably and comes down to one and be arranged in Y direction point-blank.Come down to one and be arranged in X-direction point-blank and binding domain B and machining area D are preferable.
Clearly illustrate as Fig. 3, A is equipped with wafer casket box supporting arrangement 34 in wafer casket box mounting zone.Its body can be the kenel of prior art, and wafer casket box supporting arrangement 34 has lifting platform 40.Be fixed with vertically extending in fact two guide rails 42, on lifting platform 40, be formed with and be guided groove (not shown), but be sticked in guide rail 42 sliding freely lifting platform 40 is installed along guide rail 42 free lifting ground by the groove that is guided that makes lifting platform 40.And vertically extending in fact pin thread axle 44 can be installed with rotating freely, be fixed with the female threaded member (not shown) that can be screwed together in pin thread axle 44 at lifting platform 40.Linking on pin thread axle 44 has electro-motor (not shown), pin thread axle 44 is just being changeed and reverses by electro-motor, can make lifting platform 40 carry out lifting.
Upload at the lifting platform 40 of above-mentioned wafer casket box supporting arrangement 34 and to be equipped with the wafer casket box 48 that contains a plurality of machined objects 46.As shown in Figure 2, the machined object 46 of diagram enforcement kenel is installed in the semiconductor crystal wafer 54 that its central authorities are formed with the framework 50 of construction opening 51 via mounting strap 52.Mounting strap 52 is contained the construction opening 51 that extends framework 50, and is attached to the back side of framework 50, and semiconductor crystal wafer 54 its back sides that are positioned at the construction opening 51 of framework 50 are attached at mounting strap 52.Be formed with on the surface of semiconductor crystal wafer 54 that to be arranged in cancellate cut-out line be Cutting Road 56, be formed with electronic circuit in each rectangular area 58 of dividing by Cutting Road 56.Above-mentioned wafer casket box 48 has pair of sidewalls portion 60, is formed with a plurality of grooves of accommodating that extend towards horizontal direction across predetermined space along the vertical direction at the interior face of side wall portion 60.Machined object 46 is inserted into the paired groove of accommodating of pair of sidewalls portion 60 by the both side edges portion with framework 50, and accommodates along the vertical direction across predetermined space and horizontally extending in fact state.From the front face of wafer casket box 48 is open from its left surface of front face of housing promptly.Lifting by lifting platform 4 makes each groove of accommodating to wafer casket box 48 be positioned at predetermined altitude, and as hereinafter described, will with the machined object 46 of cutting from be positioned at predetermined altitude each be cutting action to accommodating that groove sends out and process, then the machined object 46 that is cleaned is sent to be positioned at predetermined altitude to accommodate groove right.
Go on to say with reference to Fig. 3, be equipped with temporary support device 64 at binding domain B.This temporary support device 64 includes to be provided in a pair of supporting member 66 of X-direction at interval.A pair of supporting member 66 is mounted to and can moves freely towards X-direction, and optionally is positioned at the active position shown in non-working position shown in Fig. 1 solid line and the double dot dash line.And as described later, when a pair of supporting member 66 is positioned at active position, being sent the machined object 46 that comes from wafer casket box 48 crosses over a pair of supporting member 66 in addition mounting is (in other words, the both side edges portion of the framework 50 of machined object 46 is supported in a pair of supporting member 66), and when a pair of supporting member 66 moves to non-working position and is separated from each other, then can make machined object 46 come lifting by 66 of a pair of supporting members.
Between binding domain B and cutting zone D, be equipped with the adsorbent equipment 68 that can freely move horizontally in fact in X-direction.Specifically be equipped with horizontally extending in fact static supporting base station 70, with fixed interval a pair of rest pad 72 (only representing a wherein side at Fig. 2) arranged in these supporting base station 70 upper edge X-directions.Between a pair of rest pad 72, be fixed with along the pair of guide rails 74 of Y direction to extend towards X-direction at interval.Sliding shoe 76 is installed on pair of guide rails 74.Lower face at sliding shoe 76 is formed with a pair of groove that is guided that extends towards directions X, engages with pair of guide rails 74 by making a pair of groove that is guided, and sliding shoe 76 is mounted to and can moves freely towards X-direction along guide rail 74.The pin thread axle 78 that extends towards X-direction also can be installed between a pair of rest pad 72 with rotating freely.On the other hand, be fixed with female threaded member (not shown) at the lower face of sliding shoe 76, and make female threaded member be screwed to pin thread axle 78.Linking electro-motor (not shown) on pin thread axle 78, just commentaries on classics by electro-motor and counter-rotating make sliding shoe 76 move towards X-direction along guide rail 74.Being fixed with cylindric supporting member 80 on sliding shoe 76, is that center rotation is equipped with adsorption element 82 freely with vertically extending in fact central axis on supporting member 80.In supporting member 80, be equipped with the rotary driving source (not shown) of the electro-motor that can be used to make adsorption element 82 rotations.Discoideus adsorption element 82 is formed by the porous material as porous ceramics.On adsorption element 82, set up towards the outstanding a pair of fixture 84 of X-direction.Each fixture 84 contains movable holding piece 86, and movable holding piece 86 makes it optionally be positioned at non-clip position shown in Figure 1 and the clip position that inwards circles round from non-clip position by for example acting device of air pressure actuator (not shown).When adsorbent equipment 68 was positioned at binding domain B as shown in Figure 1, adsorption element 82 between a pair of supporting member 66 of above-mentioned temporary support device 64, was positioned at the below of a pair of supporting member 66 of above-mentioned temporary support device 64 along X-direction along Z-direction.On above-mentioned sliding shoe 76, set up the hollow armour tubing 88 that between the state shown in state shown in the solid line of Fig. 1 and the double dot dash line, suitably is out of shape corresponding to moving of sliding shoe 76.The adsorption element 82 that is formed by porous material optionally is communicated with suitable attraction source (not shown) via being equipped on the attraction paths (not shown) in supporting member 80, sliding shoe 76 and the hollow armour tubing 88.Be used to make the circuit layout of the acting device that the movable holding piece 86 of above-mentioned fixture 84 moves also to extend in supporting member 80, sliding shoe 76 and the hollow conduit 88.
In above-mentioned cleaning zone C, be equipped with cleaning device 90.Its body also can be the cleaning device 90 of the form of prior art, comprising: be fixed in wall part cylindraceous 94 on the static support plate 92, rotation is equipped on the adsorbing mechanism 96 in this wall part 94 freely.Adsorbing mechanism 96 is included in lifting position and from the lifting platform 98 of lifting moving between the down position of lifting position decline scheduled volume.Lifting platform 98 links the piston of the air cylinder pressure mechanism 100 of arranged perpendicular in fact, and is used for making its lifting moving by air cylinder pressure mechanism 100.Being equipped with vertically extending in fact central axis in the upper end of lifting platform 98 is center rotation discoideus adsorption element 102 freely.Adsorption element 102 is that the porous material by for example porous ceramics is formed, and is optionally to be communicated with suitable attraction source (not shown) via being equipped on the attraction paths (not shown) in the lifting platform 98.Around adsorption element 102, also be equipped with four fixtures 104.Each fixture 104 comprises movable holding piece 106, and movable holding piece 106 optionally is positioned at non-clip position shown in Figure 1 and the clip position that circles round towards the inboard from this non-clip position by the acting device (not shown) of for example battery coil.In lifting platform 98, be equipped with adsorption element 102 and be used for making the electro-motor (not shown) of fixture 104 rotation that is attached to this place.Cleaning device 90 comprises that also being used for can be the nozzle (not shown) that the cleaning liquid of pure water ejects.And as described later, when cleaning, keeping the adsorption element 102 of machined object 46 and fixture 104 with high speed rotating, and cleaning fluid is from the machined object 46 of nozzle ejection on adsorption element 102.
Go on to say with reference to Fig. 3, on above-mentioned supporting base station 70, be fixed with the direct bearing substrate 108 that extends towards Y direction.Central portion at this supporting substrates 108 is formed with the bigger notch part 110 that is used for accommodating adsorption element 82.At supporting substrates 108 a pair of topping machanism is installed, i.e. the first topping machanism 112A and the second topping machanism 112B.More particularly, the front face at supporting substrates 108 is equipped with the pair of guide rails 114 to extend towards Y direction at interval along the vertical direction.The first topping machanism 112A and the second topping machanism 112B comprise sliding shoe 116A and 116B respectively, rear face at these sliding shoes 116A and 116B is formed with a pair of groove (not shown) that is guided that extends towards Y direction, and sliding shoe A and sliding shoe B are installed in a pair of guide rail 114 towards Y direction with being free to slide.Front face at supporting substrates 108 can be equipped with pin thread axle 118A and the 118B that extends towards Y direction through bearing components 120A and 120B with rotating freely.Pin thread axle 118A and 118B configuration are in a straight line.On the other hand, be fixed with female threaded member (not shown) at the rear face of sliding shoe 116A and 116B, and make female threaded member be screwed together in pin thread axle 118A and 118B respectively.Connecting electro-motor 122A and 122B on pin thread axle 118A and 118B, when making pin thread axle 118A and 118B when rotation by electro-motor 122A and 122B, sliding shoe 116A and 116B move towards Y direction along pair of guide rails 114.On sliding shoe 116A and 116B, be separately installed with elevator 126A and 126B.Be equipped with in Y direction across interval and vertical in fact pair of guide rails 124A and the 124B that promptly extends at sliding shoe 116A and each front face of 116B towards Z-direction.Rear face at elevator 126A and 126B is formed with a pair of groove that is guided that extends towards Z-direction, by making this a pair of groove that is guided be engaged to pair of guide rails 124A and 124B, make elevator 126A and 126B be installed in sliding shoe 116A and 116B movably towards the Z-direction free lifting.The pin thread axle 130A and the 130B that extend towards Z-direction also can be installed on sliding shoe 116A and 116B with rotating freely.On the other hand, be fixed with female threaded member (not shown) at the rear face of elevator 126A and 126B, female threaded member screws togather with pin thread axle 130A and 130B respectively.Be connected with electro-motor 132A and 132B on pin thread axle 130A and 130B, when making pin thread axle 130A and 130B rotation by electro-motor 132A and 132B, elevator 126A and 126B are along pair of guide rails 124A and 124B lifting action.
On each elevator 126A and 126B, cutting unit 136A and 136B are installed through linking carriage 134A and 134B.Each cutting unit 112A and 112B comprise roughly rectangular-shaped box body 138A and 138B.On box body 138A and 138B, can be equipped with rotating freely the rotating shaft that extends towards Y-axis (Fig. 2 only figure be shown with the rotating shaft 140B that is installed on box body 138B).Rotating shaft extends towards Width one linearity ground.The Width medial extremity of rotating shaft promptly mutually relatively to the end be fixed with cutting tip (Fig. 2 only figure be shown with the cutting tip 142B that is fixed in rotating shaft 140B).Cutting tip can be made of the thin plectane that contains diamond grains.Outboard end at rotating shaft 140A and 140B is connected with electro-motor 144A and 144B.On box body 138A and 138B, also set up and comprised microscopical camera head 146A and 146B.
In the cutter that the present invention constituted, be very important to all setting with the machined object conveying device shown in the figure number 150.In Fig. 3, for fear of making accompanying drawing complicated, machined object conveying device 150 illustrates its summary situation with double dot dash line.With reference to Fig. 5, machined object conveying device 150 has common movable support tectosome 152, and this common movable support tectosome 152 comprises and moves horizontally member 154 and lifting moving member 156.More particularly, the precalculated position in the housing 2 of cutter is fixed with in the horizontally extending in fact pair of guide rails 157 of Width via suitable frame support bracket (not shown).And rotation is equipped with the pin thread axle 158 that extends towards Width in fact freely via suitable bearing components (not shown) between a pair of guide rail 157.Pin thread axle 158 links with the output shaft of the electro-motor 160 that is fixed in the precalculated position.On pair of guide rails 157, promptly the above-mentioned member 154 that moves horizontally is installed sliding freely towards Y direction towards Width.More particularly, move horizontally member 154 and have base portion 162, on this base portion 162, be formed with in fact towards the horizontally extending a pair of groove 164 that is guided, and by making this a pair of groove 164 that is guided be sticked in above-mentioned a pair of guide rail 157 and make and move horizontally member 154 and can install along pair of guide rails 157 with moving freely.Be formed with a pair of at the base portion 162 that moves horizontally member 154 and be guided the horizontally extending in fact negative thread 166 that runs through between the groove 164, this runs through negative thread 166 and screws togather with above-mentioned pin thread axle 158.So, electro-motor 160 just changeed and make pin thread axle 158 when predetermined direction rotates, move horizontally member 154 to Y direction wherein an end move; Make electro-motor 160 counter-rotatings and make pin thread axle 158 when rightabout rotates, move horizontally member 154 and move to the Y direction opposite side.Moving horizontally member 154 has by linking arm 172 and is connected with the support 174 of base portion 162, a pair of air cylinder pressure mechanism is installed on support 174, the piston 176 of a pair of air cylinder pressure mechanism in fact vertically outstanding from support 174 towards the below (Fig. 5 only figure be shown with the piston 176 of a pair of air cylinder pressure mechanism).And be fixed with above-mentioned lifting moving member 156 in the lower end of piston 176.When a pair of air cylinder pressure begins start and piston 176 is upheld and when shrinking, lifting moving member 156 is risen and descend (promptly moving) towards Z-direction.Be equipped with first holding device 178 and second holding device 180 at lifting moving member 156.
First holding device 178 comprises the movable link 182 of the bifilar shape portion that is installed in the front end that is formed at lifting moving member 156.The movable link 182 of first holding device 178 be mounted to via pin 184 is installed the active position shown in the solid line of Fig. 5 promptly from the sagging downwards active position of the front end of lifting moving member 156, with the non-working position shown in the double dot dash line of Fig. 5 promptly from the front end of lifting moving member 156 towards above freely circle round between the non-working position of extension.Pin 184 is installed in fact flatly setting, movable link 182 is freely to circle round in the center with horizontally extending in fact centre of gyration axis.Setting up on installation pin 184 can be the acting device 186 of air motor, can make movable link 182 optionally be positioned at above-mentioned active position and above-mentioned non-working position by 186 of this acting devices.A pair of holding piece 188 is installed on movable link 182.One of them side of a pair of holding piece 188, both sides preferably, be by suitably moving to direction near each other and that separate to be built in the acting devices that solenoid was constituted (not shown) in the movable link 182, can freely remove the machined object 46 that is equipped with shown in the double dot dash line of Fig. 5 of clamping be a side edge part of the framework 50 of semiconductor crystal wafer 54.A pair of holding piece 188 abundant miniaturizations, and as after specifically as described in, when keeping machined objects 46 that machined object 46 is sent or when sending it to wafer casket box 48 from wafer casket box 48 (Fig. 3) by first holding device 178, a pair of holding piece 188 is entered into coming clamping machined object 46 in the wafer casket box 48 or entering in the wafer casket box 48 with the state that keeps machined object 46.
Second holding device 180 includes the support plate 190 of H font as the integral body below the base portion that is fixed on above-mentioned lifting moving member 156.Four leading sections of substantially horizontally extending support plate 190 respectively are equipped with the absorber 192 that hangs down towards the below.Be equipped with attraction manifold (not shown) in the base portion of lifting moving member 156, each absorber 192 is connected by conduit 194 and with attracting manifold, attracts manifold 194 optionally to be communicated with vacuum source (not shown) via conduit 196.Second holding device 180 is shown in double dot dash line among Fig. 5, and going up of absorber 192 absorption frameworks 50 is facial, and the semiconductor crystal wafer 54 that machined object 46 promptly is installed on framework 50 keeps.
Refer again to Fig. 3 and be illustrated, in illustrated cutter, also be equipped with additional machined object conveying device 196.Leading section in housing 2 is equipped with broad ways a pair of support plate 198 at interval, between this support plate 198, be fixed with the horizontally extending in fact guide rod 200 of broad ways, and similarly rotation is equipped with the horizontally extending in fact pin thread axle 202 of broad ways freely.On pin thread axle 202, be connected with electro-motor 204.Additional machined object conveying device 196 has sliding shoe 206, is formed with to be used for inserting being guided the hole and being used to screw togather the female threaded hole of above-mentioned pin thread axle 202 of logical above-mentioned guide rod 200 on this sliding shoe 206.On sliding shoe 206, be equipped with air cylinder pressure mechanism, be fixed with the roughly arm 210 of L font at the front end of piston 208 with piston 208 that essence vertically extends out upward.Be fixed with a pair of supporting slice portion 212 at the lower face of the part of extending, absorber 214 be installed at the lower face of each supporting slice portion 212 towards the fore-and-aft direction of arm 210.Each absorber 214 via suitable attraction path (not shown) optionally with attraction source (not shown) when being communicated with, adsorbable framework 50 of living machined object 46.And as when making electro-motor 204 starts, making sliding shoe 206 is that the Y direction moves towards Width, so absorber 214 moves towards Y direction, and makes the piston 208 of air cylinder pressure mechanism flexible, then absorber 214 is the Z-direction lifting towards vertical direction.And as described later, additional machined object conveying device 196 only is used for the machined object 46 on the adsorption element 82 of adsorbent equipment 68 is transported to the adsorption element 102 of cleaning device 90.
The effect of above-mentioned cutter below summarily is described.The lifting platform 40 of wafer casket box supporting arrangement 34 is risen (or decline) to required height, and be housed in specific in a plurality of machined objects 46 in the wafer casket box 48 of mounting on lifting platform 40 one and be positioned at predetermined altitude.Under this state, make 150 starts of machined object conveying device, the a pair of holding piece 188 that is positioned at first holding device 178 of the active position shown in the solid line of Fig. 5 enters into the framework 50 of the above-mentioned specific one piece of machined object 46 of wafer casket box 48 clampings, and machined object 46 is transported to binding domain B from wafer casket box mounting zone A, and machined object 46 is positioned on the temporary support device 64.Then, a pair of holding piece of first holding device 178 188 breaks away from machined object 46, first holding device 178 non-working position shown in Figure 5 that circles round.Then, second holding device 180 of machined object conveying device 150 is positioned at the top of machined object 46 on the temporary support device 64, then, and the absorber 192 of second holding device 180 of decline and framework 50 fluid-tight engagement of machined object 46.Absorber 192 is communicated with the attraction source, and machined object 46 is adsorbed in absorber 192.Then, a pair of supporting member 66 of temporary support device 64 moves to the non-working position shown in the solid line, and retreats from the below of machined object 46.Then, second holding device 180 descends, and the machined object 46 that is adsorbed on absorber 192 is positioned on the adsorption element 82 of adsorbent equipment 68.Adsorption element 82 is communicated with the attraction source, uses the semiconductor crystal wafer 54 that makes machined object 46 and is adsorbed on the adsorption element 82.And the movable holding piece 86 that makes a pair of fixture 84 that is attached to adsorption element 82 is positioned at clip position with holding frame 50.The absorber 192 of second holding device 180 breaks away from the attraction source and makes machined object 46 break away from rising afterwards.
Then, adsorbent equipment 68 is crossed over required separation distance and is moved towards the rear, the microscope that is attached to the camera head 146A of the first topping machanism 112A and the second topping machanism 112B and 146B is positioned in the face of the position on the surface of the semiconductor crystal wafer on the adsorption element 82 54 image with the surface of taking semiconductor crystal wafer 54, makes the semiconductor crystal wafer 54 on the adsorption element 82 carry out fully accurate position adjustments with respect to the cutting tip (not shown) of the first topping machanism 112A and the cutting tip 142B of the second topping machanism 112B by this.When adjusting position, adsorption element 82 moves and is the center rotation with the central axis towards X-direction corresponding to needs.Then, adsorbent equipment 68 rearward moves and is positioned at cutting zone D, and the cutting that is adsorbed on the semiconductor crystal wafer 54 on the adsorption element 82 is promptly cut.When cutting, adsorption element 82 is to moving along X-direction, and the cutting tool 142B of the cutting tip of the first topping machanism 112A and the second topping machanism 112B simultaneously or be accompanied by the time difference a little and act on semiconductor crystal wafer 54 and cut along the Cutting Road 56 that extends towards X-direction.The cutting unit 136B of the cutting unit 136A of the first topping machanism 112A and the second topping machanism 112B is positioned at desired height, and periodically moves towards Y direction.When finish cutting action along the Cutting Road 56 that extends towards X-direction, adsorption element 82 revolves and turn 90 degrees, and begins again to begin to cut along the Cutting Road 56 that is positioned at along the state of Y-axis.Semiconductor crystal wafer 54 on the adsorption element 82 cuts along being arranged in cancellate Cutting Road 56 like this.And do not cut the mounting strap 52 that is present between framework 50 and the semiconductor crystal wafer 54, after the cutting that finishes semiconductor crystal wafer 54, framework 50, mounting strap 52 and the semiconductor crystal wafer 54 that carried out cutting are maintained one.
Then, adsorbent equipment 68 is got back to binding domain B.And the absorber 214 of additional machined object conveying device 196 is positioned at the top of the machined object 46 that is held on the adsorption element 82, descend then and with framework 50 fluid-tight engagement of machined object 46.And absorber 214 is communicated with the attraction source and machined object 46 is adsorbed onto absorber 214, and adsorption element 82 cuts off with the attraction source and removed absorption to the semiconductor crystal wafer 54 of adsorption element 82.The movable holding piece 86 that is attached to a pair of fixture 84 of adsorption element 82 is got back to non-clip position and has been removed the clamping of framework 50.Then, the absorber 214 of additional machined object conveying device 196 rises a little, follows towards Y direction and moves and make machined object 46 move to the cleaning zone C.Then, the absorber 214 of additional machined object conveying device 196 is descended, the attraction source that is adsorbed on the absorber 214 is adsorbed on the adsorption element 102 machined object 46, and the absorber 214 of additional machined object conveying device 196 cuts off machined object and absorber 214 disengagings with the attraction source.On the other hand, in cleaning zone C, the adsorption element 102 of absorption machined object 46 is communicated with the attraction source and semiconductor crystal wafer 54 is adsorbed on the adsorption element 102.The movable holding piece 106 that is attached to the fixture 104 of adsorption element 102 is positioned at clip position and holding frame 50.Then, lifting platform 98 is descended, the adsorption element 102 of absorption machined object 46 drops to desired location.Spray to machined object 46 from nozzle (not shown) with the cleaning fluid that can be pure water, and the speed rotation of adsorption element about, the machined object 46 that is attached with the cutting swarf that cutting generates is cleaned with 600r.p.m.Then, stop to come from the injection of the cleaning fluid of nozzle, the speed rotation about making adsorption element with 3000r.p.m is with the machined object Rotary drying.
When finishing to clean action, lifting platform 98 rises and adsorption element 102 is risen.Adsorption element 102 cuts off from the attraction source and removes the absorption of semiconductor crystal wafer 54 then, and the movable holding piece 106 of fixture 104 is got back to non-clip position and remove the clamping of framework 50.Then, second holding device 180 of machined object conveying device 150 is positioned at the top of the machined object 46 on the adsorption element 102, this absorber 192 and framework 50 fluid-tight engagement.The absorber 192 of second holding device 180 is communicated with the attraction source, and machined object is adsorbed on the absorber 214.Then, the absorber 192 of second holding device 180 rises to desired height and moves to binding domain B along Y direction.Then, second holding device 180 descends a little, and machined object 46 is crossed on a pair of supporting member 66 of temporary support device 64 of the active position shown in the double dot dash line that is positioned at Fig. 3 and mounting in addition.Then, absorber 192 cuts off with the attraction source, and machined object 46 breaks away from absorber 192.
When machined object 46 mountings that above-mentioned process is cut, cleaned are on temporary support device 64, the movable link 182 of first holding device 178 of machined object conveying device 150 active position shown in Fig. 5 solid line that circles round, and a pair of holding piece 188 that is loaded on movable link 182 is positioned at the position that desired location is the Width left border portion of holding frame 50 with respect to machined object 46.Then, make a pair of holding piece 188 starts of first holding device 178, with the framework 50 of the machined object 46 on the clamping temporary support device 64.Then, machined object conveying device 150 is moved towards wafer casket box mounting zone A, machined object 46 is inserted in the wafer casket box 48.Then, a pair of holding piece 188 of first holding device 178 breaks away from machined object 46, and machined object conveying device 150 is got back to predetermined position of readiness.
During previous machined object 46 is cleaned in the cleaning zone C, the machined object that next will cut 46 that is housed in the wafer casket box 48 is transported on the temporary support device 64 from wafer casket box 46, be adsorbed onto then on the adsorption element 82 of adsorbent equipment 68, be transported to cutting zone D after carrying out the desired location adjusting, the then available first topping machanism 112A and the second topping machanism 112B begin cutting.
By relatively can understanding clearly with reference to Fig. 1 and Fig. 3, when an above-mentioned side door portion 4 was positioned at off-position shown in Fig. 1 solid line, the cleaning zone C that is disposed at Width one side in the first half in the housing 2 covered with a side door portion 4.And be positioned at the off-position except that a side door portion 4, when off-position that the door portion of above-mentioned central authorities 6 that is installed on a side door portion 4 also is positioned at shown in Fig. 1 solid line, the binding domain B that is disposed at the Width central portion of the first half in the housing 2 (and the rear of binding domain B, i.e. latter half of cutting zone D that is disposed at the Width central portion of housing 2) covers with door portion of central authorities 6.And when above-mentioned another side door portion 8 was positioned at off-position shown in Fig. 1 solid line, wafer casket box mounting zone A was covered by another side door portion 8.
When with wafer casket box 48 mountings on the wafer casket box supporting arrangement 34 that is provided in wafer casket box mounting zone A the time and with wafer casket box 48 when wafer casket box supporting arrangement 34 takes out, this handle 20 of clamping circles round mobile towards the enable possition shown in the double dot dash line of Fig. 1 another side door portion 8.At this moment, the front face of wafer casket box mounting zone A is opened, then can be easily with wafer casket box 48 mountings on wafer casket box supporting arrangement 34, maybe wafer casket box 48 can be taken out from wafer casket box supporting arrangement 34.
When carrying out the cutting of semiconductor crystal wafer 54 repeatedly by the first topping machanism 112A and the second topping machanism 112B, the cutting tip 142B of the cutting tip of the first topping machanism 112A and the second topping machanism 112B consumes and need exchange.At this moment, then grip handle 16 so that door portion 6 of central authorities is moved towards the enable possition shown in the double dot dash line of Fig. 1.And the side door portion 4 that door portion of central authorities 6 will be installed corresponding to needs moves to the enable possition shown in the double dot dash line of Fig. 1 with central door portion 6, and becomes state shown in Figure 2.This moment, clamping central authorities door portion 6 handle 16 moved to the opening direction of a side door portion 4 with central door portion 6.At state shown in Figure 2, the binding domain B that is disposed at the Width central portion of the first half in the housing 2 and the cutting zone D that is positioned at its rear open forwardly, clean zone C and also open forwardly.So the operator can enter into it in housing 2 from the front face of housing 2 above the waist, can easily be close to the cutting tip that is positioned at cutting zone D, can be rapidly and easily carry out the swap operation of cutting tool.When needing the operation cutter or wanting the actuator state of visual cutter, then hold supporting member 10 that handle 14 will be equipped on a side door portion 4 and go out the position towards prolonging shown in the double dot dash line of Fig. 1 and Fig. 2 and circle round during operation.Like this, even the operator is with the state that enters into above the waist in the housing 2, also can touch necessity operation of carrying out cutter, or come the necessary actuator state of identification cutter by the desired area of visual touch panel 12 desired area of the touch panel 12 that is equipped on supporting arrangement 10.
Though more than the preferable enforcement kenel of the cutter that the present invention constituted has been done detailed description, and the present invention is not limited to this enforcement kenel, only otherwise depart from the scope of the present invention, then can carry out all distortion and correction.For example, in illustrated enforcement kenel, though from front face is the right side that wafer casket box mounting zone A is provided in binding domain B, and will clean the left side that zone C is provided in binding domain B, and also can be configured in the right side corresponding to wafer casket box mounting zone A being configured in the left side of binding domain B and will cleaning zone C.In this case, preferably the configuration of a side door portion 4, central authorities door portion 6 and another side door portion 8 is made kenel with illustrated situation line symmetry.

Claims (18)

1. cutter,
First half in housing disposes: be positioned at the Width central portion binding domain, be positioned at this binding domain a side the cleaning zone and be positioned at the wafer casket box mounting zone of this binding domain opposite side, the latter half of cutting zone that is positioned at the Width central portion that disposes in this housing
Comprise: be equipped on this cleaning zone cleaning device, be equipped on this wafer casket box mounting zone wafer casket box supporting arrangement, can move freely and its topping machanism that is positioned at the adsorbent equipment of described binding domain and described cutting zone and is configured in the latter half of of described housing and has the cutting tip that is positioned at described cutting zone optionally along fore-and-aft direction at the Width central portion in this housing
Mounting contains the wafer casket box of a plurality of machined objects on the described wafer casket box supporting arrangement,
It is characterized in that: the front face at described housing disposes a side door, central authorities' door, and another side door, a described side door be mounted to can an off-position that covers the described front face that cleans the zone and a side from described off-position towards described housing change the position open between the enable possition of the regional front face of this cleanings mobile freely, described central authorities door is installed on the described side door, when a described side door is positioned at off-position, described central authorities door can move freely between the enable possition of the off-position of the front face that covers described binding domain most of at least front face at a described side door rear or the place ahead and open described binding domain with changing the position from described off-position towards a side, described another side door be mounted to can be between the enable possition of the off-position of the front face that covers described wafer casket box mounting zone and the front face of opening described wafer casket box mounting zone mobile freely.
2. cutter as claimed in claim 1 is characterized in that: described another side door is being freely to circle round between described off-position and described enable possition in the center at the vertically extending in fact centre of gyration axis of the opposite side of this housing.
3. cutter as claimed in claim 1, it is characterized in that: when door portion of described central authorities is moved to described enable possition, at least the major part of door portion of described central authorities is positioned at the rear of a described side door portion, the centre of gyration axis that is equipped with to extend perpendicular to the Width medial margin portion of a described side door portion in fact at the front face of a described side door portion is the center, can circle round between usual position of extending along the front face of a described side door portion and the extended position that extends out towards the place ahead from a described side door portion freely supporting member is equipped with guidance panel on described supporting member.
4. cutter as claimed in claim 2, it is characterized in that: when door portion of described central authorities moves on to described enable possition, at least the major part of door portion of described central authorities is positioned at the rear of a described side door, front at this side door is installed with supporting member, this supporting member is center and can on described supporting member guidance panel be installed circling round freely between the usual position of extending previously of a described side door and the extended position that extends out towards the place ahead from a described side door with the vertically extending in fact centre of gyration axis of Width medial margin portion at a described side door.
5. cutter as claimed in claim 3 is characterized in that: described guidance panel is made of touch panel.
6. cutter as claimed in claim 4 is characterized in that: described guidance panel is made of touch panel.
7. as claim 1,2,3,4,5 or 6 described cutters, it is characterized in that: described topping machanism comprises first topping machanism and second topping machanism, described first topping machanism has: first rotating shaft, with first cutting tip that is installed on this first rotating shaft, described second topping machanism has: second rotating shaft, with second cutting tip that is installed on described second rotating shaft, described first rotating shaft and described second rotating shaft extend latter half of in this housing point-blank towards Width one, and described first cutting tip and this second cutting tip are installed in the Width medial extremity of the Width medial extremity of described first rotating shaft and described second rotating shaft respectively and are positioned at the position of subtend each other.
8. as claim 1,2,3,4,5 or 6 described cutters, it is characterized in that: be equipped with the temporary support device at described binding domain, the machined object that is transported to described binding domain from described wafer casket box has just begun by mounting on described temporary support device, then be transported on the described adsorbent equipment from described temporary support device, then, be cut and through the machined object that cleaning be sent to this binding domain from described cleaning zone and by mounting after on this temporary support device, be admitted to described wafer casket box again.
9. cutter as claimed in claim 8, it is characterized in that: described temporary support device is made of a pair of supporting member, described a pair of supporting member can the active position of crossing over machined object between the two in be separated by predetermined space and mounting and move freely between the non-working position of machined object by decline between the two with moving and allow towards direction disconnected from each other from described active position, when making described adsorbent equipment be positioned at this binding domain, described adsorbent equipment is positioned at the below of described temporary support device.
10. as claim 1,2,3,4,5 or 6 described cutters, it is characterized in that: described machined object is a semiconductor crystal wafer, and described cutting tip is circular plate shape and contains the diamond particle with the cutting semiconductor wafer.
11. a cutter comprises: be equipped on wafer casket box mounting zone wafer casket box supporting arrangement, be equipped on binding domain the temporary support device, be equipped on the topping machanism of cutting zone, optionally be located at the movable adsorbent equipment and the machined object conveying device of described binding domain and described cutting zone; Upload at described wafer casket box supporting arrangement and to be equipped with the wafer casket box that contains machined object, described machined object conveying device is sent machined object and be sent on the described temporary support device from the wafer casket box of mounting on described wafer casket box supporting arrangement, then deliver to it on this adsorbent equipment that is positioned at described binding domain from described temporary support device, after cutting, again mounting is being sent in the wafer casket box of mounting on described wafer casket box supporting arrangement in the machined object on the described temporary support device, it is characterized in that:
Described machined object conveying device comprises: common movable support tectosome, be equipped on described common movable support tectosome and enter in the wafer casket box and can keep first holding device of the machined object in the wafer casket box free and openly, and be equipped on described common movable support tectosome and can keep being supported in second holding device of the machined object on the described temporary support device free and openly, when sending and be sent to this temporary support device on from the wafer casket box of mounting on described wafer casket box supporting arrangement machined object, and after finishing cutting with mounting when the machined object on the described temporary support device is sent in the wafer casket box of mounting on described wafer casket box supporting arrangement, described first holding device keeps machined object, and when with machined object when described temporary support device is delivered on the described adsorbent equipment that is positioned at described binding domain, described second holding device keeps machined object.
12. cutter as claimed in claim 11, it is characterized in that: described machined object is a semiconductor crystal wafer, this semiconductor crystal wafer is installed in central authorities and has this construction opening place on the framework of construction opening via mounting strap, contain a plurality of machined objects in wafer casket box along the vertical direction at interval.
13. cutter as claimed in claim 12 is characterized in that: described common movable support tectosome comprises: be mounted to be parallel to described wafer casket box mounting zone and the detaching direction of this binding domain and in fact can towards horizontal direction freely move around move horizontally member and be mounted to can be towards the lifting moving member that moves perpendicular to the described direction free lifting that moves horizontally member in fact; Described first holding device and described second holding device are provided on this lifting moving member.
14. cutter as claimed in claim 13, it is characterized in that: described first holding device of described machined object conveying device by be separated with at interval outstanding along the vertical direction and one of them side by can be free with respect to the opposing party near and separate mobile a pair of holding piece and constitute, one side edge part of described a pair of holding piece holding frame, this second holding device of described machined object conveying device constitutes by being used for the facial a plurality of absorbers of going up of vacuum suction framework.
15. cutter as claimed in claim 14, it is characterized in that: be equipped with on this lifting moving member of described common movable support tectosome optionally be located at the active position that hangs down downwards with towards above the movable link of the non-working position that extends, described a pair of holding piece is provided on the described movable link, and described a pair of holding piece is side-prominent outwardly from described movable link when described movable link is positioned at this active position.
16. cutter as claimed in claim 15 is characterized in that: the root of described movable link is being to circle round and be installed in freely on the described lift component in the center towards horizontally extending centre of gyration axis in fact.
17. as each described cutter in the claim 12 to 16, it is characterized in that: described temporary support device comprises a pair of supporting member, described a pair of supporting member optionally is positioned at mounting and crosses over the active position of framework between the two and can make framework pass through the non-working position of lifting between the two, when described adsorbent equipment was positioned at this binding domain, described adsorbent equipment was positioned at the below of the described a pair of supporting member of described temporary support device.
18. as each described cutter in the claim 11 to 16, it is characterized in that, comprise: be equipped on the cleaning device that cleans the zone, and the machined object after cutting that only is used for being positioned on the described adsorbent equipment of described binding domain is transported to the employed additional machined object conveying device of described cleaning device from this adsorbent equipment, described machined object conveying device also is used for machined object is transported to described temporary support device from described cleaning device, when being transported to machined object on the described temporary support device from described cleaning device, described second holding device keeps machined object.
CN 02152868 2001-11-21 2002-11-21 Cutter CN1235270C (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2001355598 2001-11-21
JP2001355598A JP2003158094A (en) 2001-11-21 2001-11-21 Cutting machine
JP2001362084A JP2003163181A (en) 2001-11-28 2001-11-28 Machining apparatus
JP2001362084 2001-11-28

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CN1420529A CN1420529A (en) 2003-05-28
CN1235270C true CN1235270C (en) 2006-01-04

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HK (1) HK1054122A1 (en)
TW (1) TWI272673B (en)

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CN104552631A (en) * 2013-10-21 2015-04-29 先进科技新加坡有限公司 Singulation apparatus and method

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JP2005046979A (en) * 2003-07-31 2005-02-24 Disco Abrasive Syst Ltd Cutting device
JP4377702B2 (en) * 2004-01-08 2009-12-02 株式会社ディスコ Cutting groove measurement method
JP4502260B2 (en) * 2004-10-28 2010-07-14 株式会社ディスコ Spinner cleaning device and dicing device
JP2006278869A (en) * 2005-03-30 2006-10-12 Disco Abrasive Syst Ltd Cutting method and cutting device of wafer
JP2008112884A (en) * 2006-10-31 2008-05-15 Disco Abrasive Syst Ltd Processing method of wafer
JP5129002B2 (en) * 2008-04-10 2013-01-23 株式会社ディスコ Processing equipment
JP5373517B2 (en) * 2009-09-14 2013-12-18 株式会社ディスコ Conveying mechanism and processing device
CN102194732A (en) * 2010-02-02 2011-09-21 株式会社迪思科 Holding method and holding mechanism for work piece unit
CN103681418A (en) * 2012-09-25 2014-03-26 昆山英博尔电子科技有限公司 A twelve-inch wafer framework
JP6214901B2 (en) * 2013-04-04 2017-10-18 株式会社ディスコ Cutting equipment
JP6560110B2 (en) * 2015-11-30 2019-08-14 株式会社ディスコ Cutting equipment

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Publication number Priority date Publication date Assignee Title
CN101992505A (en) * 2009-08-21 2011-03-30 株式会社迪思科 Cutting device
CN104552631A (en) * 2013-10-21 2015-04-29 先进科技新加坡有限公司 Singulation apparatus and method

Also Published As

Publication number Publication date
TW200300574A (en) 2003-06-01
HK1054122A1 (en) 2003-11-14
CN1420529A (en) 2003-05-28
TWI272673B (en) 2007-02-01

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