SU750433A1 - Pulsed regulator - Google Patents

Description

(54) PULSE REGULATORY DEVICE

I

The invention relates to the field of automation, namely to devices for automatic control of technological parameters and can be used, for example, to control objects whose dynamic characteristics are HesnoTCH during a technological process.

Known pulse regulating devices 1D and 23, containing .reverse pulse counter, actuator, pulse generator.

These devices are intended for automatic regulation of technological, parameters of objects with unchanged -. mi during the process dynamic characteristics.

A disadvantage of the known devices is that, as applied to objects with variable dynamic characteristics, they cannot provide the specified quality indicators of regulation during the technological process.

Of the known devices, the pulsed regulating device 3 comprises the pulse control device 3 in series, which contains a forcing unit, a pulse generator, a reversible counter, an actuating element, a heating element, the output of which is connected to the input of the control object that is output through the temperature sensor with the input element. the comparison unit, the corresponding input of which is connected to the output of the setting device, and the outputs with the control inputs of the reversing counter.

In this device, the frequency of the pulse generator is determined by the requirements of the quality control indicators, and is set at its adjustment. In addition, the frequency of the pulse generator depends on the magnitude of the deviation of the controlled parameter from the set value.

The assessment of the quality indicators of regulation is most often carried out 3 according to a generalized integral criterion, the expression of which, in general, is filled with the following. at once:

v2j, v, / d xd 2 / cJ xd 21

Claims (3)

 J; yi {7r) ifa (lI5 -) - lfn (pr) Jdl, is the error of the current regippers and its production. JTuX -.-Ifn - coefficients, the values of which depend on the dynamic characteristics of the control object and the setting of the pulse generator during adjustment . By selecting the parameters of the initial setting of the pulse generator, MBKHMHSH can be used to determine the value of the 3-amp integra and thus achieve the specified quality control parameters. A disadvantage of this device is that in the case of using this device as applied to objects with variable dynamic characteristics, coefficients jfj, ... The expression of the generalized integral criterion will change during the manufacturing process, which will lead to a deterioration in the quality of pralization. Therefore, in the above case, the known device will not provide the specified quality control indicators during the process. The aim of the invention is to improve the accuracy of the device. This is achieved by the fact that it contains a sensor of the heating element state and a frequency regulator, the output of which is connected to the corresponding input of the pulse generator, the input to the input of the booster unit and to the output of the sensor of the heating element state, the input of which is connected with the corresponding output of the heating element. The drawing shows a structural pulsed regulating device for automatic control valves of the substrate surface temperature, the dynamic characteristics of which are replaced by the B process. It contains a temperature sensor 1 and a setting device 2 connected to the input of the comparison unit 3. The comparison unit 3 consists of a series-connected adder 4 and a zero-organ 5, the outputs of the null organ 5 and the pulse generator 6 are connected respectively to the control and clock inputs of the reBersive counter. pulses 7. The output to the reversible leg of the counter 7 is connected to the serially connected actuator 8 and the heating element 9, the heating element 9 is connected to the control object 1O and the frequency correction unit 11, consisting of the serially connected sensor of the state of the heating element 12 and the regulator frequency 13. The output of the state sensor of the heating element 2 is connected to the forcing unit 14. The outputs of the frequency controller 13 and the forcing unit 14 are connected to the pulse generator 6, At the input of the adder 4 The al-ebraic summation of signals from temperature sensor 1 and preset 2 is set. Depending on the sign of the sum signal, the null organ 5 issues a signal to Add or Decrease on the control inputs of the reversing pulse counter 7. The reversing pulse counter 7 controls the operation of the actuator 8, 1 complementary element 8 acts on. heating element 9, and heating element 9 - for an adjustable pair - meter of the object to be controlled 10 - the substrate temperature. C. The output of the pulse generator 6 to the synchronizing input of the reverse pulse counter 7 receives unipolar pulses. The boosting unit 14 is designed to increase the speed of the pulse control device as a whole. Depending on the current value of the heating element 9, which is an unambiguous function of the dynamic characteristics of the control object Yu, the frequency of the pulse generator is corrected. The selection of the parameters of the frequency corrections 11 and Forcing block 14 during adjustment, it is possible to ensure the specified quality indicators for controlling the temperature of the substrate surface during the entire technological process. The described pulsed regulating device for automatic regulation of the substrate surface temperature is tested on polycrystalline silicon hydrogen reduction apparatus. Preliminary bench tests showed that the use of this device on hydrogen reduction devices will improve the accuracy of controlling the temperature of the substrate surface to i 5 C. Throughout the entire process. The expected technical and economic effect from the introduction of the device in the existing production capacity will be 18,000 rubles. Claims of the invention A pulse control device comprising a forcing unit connected in series, a pulse generator, a reversible counter, an actuation element, a heating element whose output is connected to the input of the control object, the output of which is connected through the temperature sensor to the input of the comparator unit whose corresponding input is connected with an output of the setting device, and the outputs with the control inputs of the reversible counter, which are different) that, in order to improve the accuracy of the device, it contains a sensor with a heating element and a frequency regulator, the output of which is connected to the corresponding input of the pulse generator, the input to the output of the boosting unit and the sensor output of the heating element, whose input is connected to the corresponding output of the heating element. Sources of information taken into account in the examination 1. USSR author's certificate number 224933, cl. C-O5 B 11/14, 01.06.67. 2. USSR author's certificate number 505996, cl. О- 05 11/14 dated 1/14/74. 3. USSR author's certificate No. 196969, CLO-05 B 11/14 of August 13, 2006 (prototype).