SU743850A1 - Apparatus for one-side lapping of planar surfaces of parts - Google Patents

Description

one

The invention relates to the field of abrasive machining and can be used for finishing nlosic and surfaces of parts from different light and i-semiconducting materials.

The device is a device for one-sided insulating and shielding nlastin containing a finishing disc, on which holders are hinged on the vertical stems of non-cylindrical JQ cylinders and produced in the form of discs. Each pneumatic cylinder serves both for loading and for the removal of holders. The argument has an iridescent irivod of the wrench, en11, and the holders have a joint, -, rotation due to friction with the back of the 1J disk.

One of the drawbacks of the known devices is the strength of the treated area and the possibility of 90 percent of the view. It is known that the magnitude of material removal is a function of the speed of an unshifted plastic relative to the finishing disk and the value of the specific pressure on the plates. Since the speed of movement of the plates is different in the radial direction of the holder, and the specific pressure at all points of the processed plates is the same, the removal rate of the material in different treatment zones is different.

2

private, which causes, in particular, but the phenomenon klnnovndnn.

The aim of the invention is to improve processing accuracy.

This goal is achieved by the fact that the mechanism is made in the form of a sound board and is provided with an elastic diaphragm placed between the holder on the disk and the generatrix of the floor with at least two through holes in the dnska. This hole is connected to autonomous sources of compressed air, and the holder is made in the form of identical sectors, hinged on its axis with rotatable axial movement and connected with each other with the possibility of rotation in radial direction and direction. Disk mechanism ustaovleya and osp vran; enp holder with but .mioio hinge.

This design of the device compensates for the difference in linear velocities on the surface of the rotating finishing disc due to the appropriately compressed pressure distributed on the surface of the processed plate in the radar direction, eliminating the need to observe a certain ratio of rotational speeds of the refining dska and holder. As a result, it is possible to increase the speed of rotation of the holder at a constant critical speed of rotation of the finishing disk (or when the holder rotates in airavleiii and opposing the rotation of the finishing disk), which ultimately improve the accuracy of machining.

FIG. 1 image device section; in fig. 2 shows section A-A in FIG. one.

The device has a lapping disc 1 mounted on the shaft 2 of rotation with a number of bearings. Above the disk 1 there is a holder 3, designed to hold the workpieces, and mounted sirenno on the shaft 4 of rotation, parallel to the shaft of rotation 2, and the cup

5. Holder 3 is made in the form of a disk divided into four identical sectors.

6, which are rotated on its axis of rotation (shaft of rotation 4) and connected to each other with the possibility of rotation in the radial direction with a pair of ball joints 7. Coaxially to the holder 3, a clamp mechanism 8 is installed. The disk 8 is pivotally attached to the shaft 4 of rotation. The disk 8 is provided with a uniform diaphragm 9, a small foil, for example, made of rubber and placed between the holder. Km 3 and the disk 8. The disk 8 has two through holes 10 n I, connected to independent sources of compressed air and located in the annular cavities 12, 13 formed by the diaphragm 9. The shaft 2 of rotation of the finishing disc 1 and the shaft 4 of rotation of the holder 3 are individually actuated and mounted on a stannyi (not shown in the drawing).

The proposed device operates as follows.

The parts 14, such as semiconductor silicon, are processed using wax attachment or vacuum grippers (not shown) to secure the working surface of the holder 3. Using a pressing mechanism formed by a disk 8 with a diaphragm 9, with iodine of compressed air into the holes 10, 11 The holder 3 with the parts 14 is lowered to the contacting of the processed surfaces with the working surface of the finishing dns 1. The rotation of this disk 1 and the holder 3 is reported by the rotation indicator from the individual irivods, and the working area is fed razivia suspension.

In order to obtain a given machining accuracy, the pressure of the machined part 14 is not created in the radial pressure of the holder 3 and, thereby, iodine pressure is applied to the surface of the workpiece. 14.

This is achieved by providing a predetermined pressure difference in the cavities 12 n 13, located respectively inside the inner and outer irimeters of the finishing disc 1 by connecting to the orifices 10, 11 auto-source sources of compressed air. In this case, the resulting pressure difference is not applied to the part 14 through the means of the sectors 6 of the holder 3.

This is achieved by the fact that the whole system, formed by sectors 6, has the ability to jointly (all sectors) move in vertical direction Io o: and shaft 4 within the established gaps

(approximately 4-5 mm), as well as across the erected unplaced sectors 6 relative to each other in the vertical of the nairaleppi parallel to themselves, as well as with a change in the angle relative to the axis of the axis 11

for ball joints 7 within the same established clearances.

This device makes it possible to redirect efforts processed in detail to a given linear law in the radius: | in one form, i.e., to change the force in the replacement of the part with the finishing disc in a radial direction, due to which there is a sufficient difference with the technical capabilities of the mouth) ostna because M ()

produce strictly 11a) al .. | ыlyye plasiiiiHi) (without klponponidnosti) or with: i; i; iaiiii.iM wedge.

FORUMA and 3 ACCESSED

1. A device for one-sided finishing of parts and surfaces of parts fixed on the holder and pressed to the finishing disk and the mechanism of the lever, installed coaxially with the holder,

characterized in that, with a higher accuracy of processing, the clamping mechanism is made in the form of a disk and a diaphragm with a different diaphragm located between the holder and the disk and forming cavity

with at least two through holes, connected to autonomous sources of compressed air, and at the same time, a wave holder in the form of identically sectors, is fixed on the axis of its rotation with the possibility of axial displacement and connected to each other with the possibility of turning in radiali managment.

2. Device for and. 1, different

By the fact that the disk of the mechanism of nature is set on the basis of a h1, of the holder with HOMOHU IO sariir.

Sources of information taken into account

1. Nat United States No. 3631634, CL. 51-131, onlib. 1972.

Claims (2)

Claim 1. A device for one-sided refinement of flat surfaces of parts mounted on a holder and pressed to a finishing disk by means of a clamp mechanism mounted coaxially to the holder, characterized in that, in order to improve processing accuracy, the clamp mechanism is made in the form of a disk and is equipped with an elastic diaphragm located between the holder and the disk and the forming cavity with at least two through holes made in the disk connected to autonomous sources of compressed air, the holder being made in the form and entichnyh sectors, hinged at the axis of rotation with the possibility of axial movement and connected to one another pivotably in the radial direction. 2. The device according to π. 1, characterized in that the disk of the clamp mechanism is mounted on the axis of rotation of the holder using a hinge.