SU604879A1 - Устройство дл нанесени покрыти из паровой фазы - Google Patents
Устройство дл нанесени покрыти из паровой фазыInfo
- Publication number
- SU604879A1 SU604879A1 SU7502183257A SU2183257A SU604879A1 SU 604879 A1 SU604879 A1 SU 604879A1 SU 7502183257 A SU7502183257 A SU 7502183257A SU 2183257 A SU2183257 A SU 2183257A SU 604879 A1 SU604879 A1 SU 604879A1
- Authority
- SU
- USSR - Soviet Union
- Prior art keywords
- gas
- vortex
- carrier
- reaction chamber
- applying
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 4
- 238000005192 partition Methods 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 239000000499 gel Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 28
- 239000012495 reaction gas Substances 0.000 description 4
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004326 stimulated echo acquisition mode for imaging Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DD17504473A DD107723A1 (enrdf_load_stackoverflow) | 1973-12-03 | 1973-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SU604879A1 true SU604879A1 (ru) | 1978-04-30 |
Family
ID=5493694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SU7502183257A SU604879A1 (ru) | 1973-12-03 | 1975-10-27 | Устройство дл нанесени покрыти из паровой фазы |
Country Status (4)
| Country | Link |
|---|---|
| CS (1) | CS181870B1 (enrdf_load_stackoverflow) |
| DD (1) | DD107723A1 (enrdf_load_stackoverflow) |
| HU (1) | HU171878B (enrdf_load_stackoverflow) |
| SU (1) | SU604879A1 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2490246A1 (fr) * | 1980-09-17 | 1982-03-19 | Cit Alcatel | Dispositif de deposition chimique activee sous plasma |
| CH640571A5 (fr) * | 1981-03-06 | 1984-01-13 | Battelle Memorial Institute | Procede et dispositif pour deposer sur un substrat une couche de matiere minerale. |
| TW359943B (en) * | 1994-07-18 | 1999-06-01 | Silicon Valley Group Thermal | Single body injector and method for delivering gases to a surface |
-
1973
- 1973-12-03 DD DD17504473A patent/DD107723A1/xx unknown
-
1974
- 1974-11-05 HU HU74EE00002276A patent/HU171878B/hu unknown
- 1974-11-07 CS CS760274A patent/CS181870B1/cs unknown
-
1975
- 1975-10-27 SU SU7502183257A patent/SU604879A1/ru active
Also Published As
| Publication number | Publication date |
|---|---|
| DD107723A1 (enrdf_load_stackoverflow) | 1974-08-12 |
| HU171878B (hu) | 1978-04-28 |
| CS181870B1 (en) | 1978-03-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1066880A (en) | Apparatus for distributing flowing media from one flow cross section to a flow cross section different therefrom | |
| SU604879A1 (ru) | Устройство дл нанесени покрыти из паровой фазы | |
| US3957446A (en) | Swirl reactor for exhaust gases | |
| RU98102924A (ru) | Роторный двигатель внутреннего сгорания | |
| CZ81498A3 (cs) | Filtrační a katalyzátorové zařízení | |
| JPH01291011A (ja) | 焼却装置 | |
| US3810736A (en) | Curing oven for enameled wire | |
| US4346054A (en) | Fluidizable bed apparatus | |
| US7691203B2 (en) | Film forming apparatus | |
| US4721395A (en) | Method and apparatus for increasing the turbulence in a gas exposed to low frequency sound | |
| GB1558952A (en) | Others rotary film apparatus | |
| CA2316211C (en) | Catalytic gas treatment device | |
| SU1576190A1 (ru) | Смесительно-распределительное устройство дл перемешивани газов в каталитическом реакторе | |
| EP0207943B1 (en) | Apparatus for treating smoke gases, especially exhaust gases | |
| SU1247077A1 (ru) | Аппарат дл проведени химических реакций | |
| SU1645798A1 (ru) | Теплогенератор | |
| SU1038711A2 (ru) | Ротационна форсунка | |
| CN214234043U (zh) | 一种聚丙烯酰胺聚合反应釜 | |
| SU571279A1 (ru) | Массо-теплообменна тарелка дл колонных аппаратов | |
| CA1100816A (en) | Incinerator | |
| SU597409A1 (ru) | Аппарат дл обработки сыпучего материала газом | |
| SU1493710A2 (ru) | Устройство дл нагрева и сушки минеральных материалов | |
| SU1749667A1 (ru) | Печь дл термической обработки сыпучего материала | |
| RU1815052C (ru) | Устройство дл газопламенной обработки материалов | |
| SU1105219A1 (ru) | Камера смешени |