HU171878B - Sposob i ustanovka dlja sloistogo pokrytija izdelij posredstvom khimicheskoj osadki iz parovoj fazy - Google Patents

Sposob i ustanovka dlja sloistogo pokrytija izdelij posredstvom khimicheskoj osadki iz parovoj fazy

Info

Publication number
HU171878B
HU171878B HU74EE00002276A HUEE002276A HU171878B HU 171878 B HU171878 B HU 171878B HU 74EE00002276 A HU74EE00002276 A HU 74EE00002276A HU EE002276 A HUEE002276 A HU EE002276A HU 171878 B HU171878 B HU 171878B
Authority
HU
Hungary
Prior art keywords
vapor
phase
coating workpieces
chemical separating
laminar coating
Prior art date
Application number
HU74EE00002276A
Other languages
English (en)
Hungarian (hu)
Inventor
Klaus Petermann
Rainer Moeller
Original Assignee
Elektromat Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektromat Veb filed Critical Elektromat Veb
Publication of HU171878B publication Critical patent/HU171878B/hu

Links

HU74EE00002276A 1973-12-03 1974-11-05 Sposob i ustanovka dlja sloistogo pokrytija izdelij posredstvom khimicheskoj osadki iz parovoj fazy HU171878B (hu)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17504473A DD107723A1 (enrdf_load_stackoverflow) 1973-12-03 1973-12-03

Publications (1)

Publication Number Publication Date
HU171878B true HU171878B (hu) 1978-04-28

Family

ID=5493694

Family Applications (1)

Application Number Title Priority Date Filing Date
HU74EE00002276A HU171878B (hu) 1973-12-03 1974-11-05 Sposob i ustanovka dlja sloistogo pokrytija izdelij posredstvom khimicheskoj osadki iz parovoj fazy

Country Status (4)

Country Link
CS (1) CS181870B1 (enrdf_load_stackoverflow)
DD (1) DD107723A1 (enrdf_load_stackoverflow)
HU (1) HU171878B (enrdf_load_stackoverflow)
SU (1) SU604879A1 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490246A1 (fr) * 1980-09-17 1982-03-19 Cit Alcatel Dispositif de deposition chimique activee sous plasma
CH640571A5 (fr) * 1981-03-06 1984-01-13 Battelle Memorial Institute Procede et dispositif pour deposer sur un substrat une couche de matiere minerale.
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface

Also Published As

Publication number Publication date
SU604879A1 (ru) 1978-04-30
DD107723A1 (enrdf_load_stackoverflow) 1974-08-12
CS181870B1 (en) 1978-03-31

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