CS181870B1 - Process and device for layer coating on the worpieces by chemical depositing in vapour phase - Google Patents
Process and device for layer coating on the worpieces by chemical depositing in vapour phaseInfo
- Publication number
- CS181870B1 CS181870B1 CS760274A CS760274A CS181870B1 CS 181870 B1 CS181870 B1 CS 181870B1 CS 760274 A CS760274 A CS 760274A CS 760274 A CS760274 A CS 760274A CS 181870 B1 CS181870 B1 CS 181870B1
- Authority
- CS
- Czechoslovakia
- Prior art keywords
- worpieces
- layer coating
- vapour phase
- chemical depositing
- depositing
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD17504473A DD107723A1 (en) | 1973-12-03 | 1973-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
CS181870B1 true CS181870B1 (en) | 1978-03-31 |
Family
ID=5493694
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CS760274A CS181870B1 (en) | 1973-12-03 | 1974-11-07 | Process and device for layer coating on the worpieces by chemical depositing in vapour phase |
Country Status (4)
Country | Link |
---|---|
CS (1) | CS181870B1 (en) |
DD (1) | DD107723A1 (en) |
HU (1) | HU171878B (en) |
SU (1) | SU604879A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2490246A1 (en) * | 1980-09-17 | 1982-03-19 | Cit Alcatel | CHEMICAL DEPOSITION DEVICE ACTIVATED UNDER PLASMA |
CH640571A5 (en) * | 1981-03-06 | 1984-01-13 | Battelle Memorial Institute | METHOD AND DEVICE FOR DEPOSITING A LAYER OF MINERAL MATERIAL ONTO A SUBSTRATE. |
TW359943B (en) * | 1994-07-18 | 1999-06-01 | Silicon Valley Group Thermal | Single body injector and method for delivering gases to a surface |
-
1973
- 1973-12-03 DD DD17504473A patent/DD107723A1/xx unknown
-
1974
- 1974-11-05 HU HU74EE00002276A patent/HU171878B/en unknown
- 1974-11-07 CS CS760274A patent/CS181870B1/en unknown
-
1975
- 1975-10-27 SU SU7502183257A patent/SU604879A1/en active
Also Published As
Publication number | Publication date |
---|---|
HU171878B (en) | 1978-04-28 |
SU604879A1 (en) | 1978-04-30 |
DD107723A1 (en) | 1974-08-12 |
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