CS181870B1 - Process and device for layer coating on the worpieces by chemical depositing in vapour phase - Google Patents

Process and device for layer coating on the worpieces by chemical depositing in vapour phase

Info

Publication number
CS181870B1
CS181870B1 CS760274A CS760274A CS181870B1 CS 181870 B1 CS181870 B1 CS 181870B1 CS 760274 A CS760274 A CS 760274A CS 760274 A CS760274 A CS 760274A CS 181870 B1 CS181870 B1 CS 181870B1
Authority
CS
Czechoslovakia
Prior art keywords
worpieces
layer coating
vapour phase
chemical depositing
depositing
Prior art date
Application number
CS760274A
Other languages
English (en)
Inventor
Klaus Petermann
Rainer Moeller
Original Assignee
Klaus Petermann
Rainer Moeller
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Klaus Petermann, Rainer Moeller filed Critical Klaus Petermann
Publication of CS181870B1 publication Critical patent/CS181870B1/cs

Links

CS760274A 1973-12-03 1974-11-07 Process and device for layer coating on the worpieces by chemical depositing in vapour phase CS181870B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD17504473A DD107723A1 (cs) 1973-12-03 1973-12-03

Publications (1)

Publication Number Publication Date
CS181870B1 true CS181870B1 (en) 1978-03-31

Family

ID=5493694

Family Applications (1)

Application Number Title Priority Date Filing Date
CS760274A CS181870B1 (en) 1973-12-03 1974-11-07 Process and device for layer coating on the worpieces by chemical depositing in vapour phase

Country Status (4)

Country Link
CS (1) CS181870B1 (cs)
DD (1) DD107723A1 (cs)
HU (1) HU171878B (cs)
SU (1) SU604879A1 (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490246A1 (fr) * 1980-09-17 1982-03-19 Cit Alcatel Dispositif de deposition chimique activee sous plasma
CH640571A5 (fr) * 1981-03-06 1984-01-13 Battelle Memorial Institute Procede et dispositif pour deposer sur un substrat une couche de matiere minerale.
TW359943B (en) * 1994-07-18 1999-06-01 Silicon Valley Group Thermal Single body injector and method for delivering gases to a surface

Also Published As

Publication number Publication date
HU171878B (hu) 1978-04-28
SU604879A1 (ru) 1978-04-30
DD107723A1 (cs) 1974-08-12

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