CA1035255A - Thin film coating apparatus - Google Patents
Thin film coating apparatusInfo
- Publication number
- CA1035255A CA1035255A CA213,557A CA213557A CA1035255A CA 1035255 A CA1035255 A CA 1035255A CA 213557 A CA213557 A CA 213557A CA 1035255 A CA1035255 A CA 1035255A
- Authority
- CA
- Canada
- Prior art keywords
- thin film
- coating apparatus
- film coating
- thin
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00421020A US3853091A (en) | 1973-12-03 | 1973-12-03 | Thin film coating apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1035255A true CA1035255A (en) | 1978-07-25 |
Family
ID=23668864
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA213,557A Expired CA1035255A (en) | 1973-12-03 | 1974-11-13 | Thin film coating apparatus |
Country Status (11)
Country | Link |
---|---|
US (1) | US3853091A (en) |
JP (1) | JPS5325718B2 (en) |
CA (1) | CA1035255A (en) |
CH (1) | CH606479A5 (en) |
DE (1) | DE2448023B2 (en) |
ES (1) | ES432508A1 (en) |
FR (1) | FR2253270B1 (en) |
GB (1) | GB1474927A (en) |
IT (1) | IT1022786B (en) |
NL (1) | NL7415450A (en) |
SE (1) | SE397435B (en) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH580990A5 (en) * | 1974-03-04 | 1976-10-29 | Ebauches Sa | |
US4010710A (en) * | 1974-09-20 | 1977-03-08 | Rockwell International Corporation | Apparatus for coating substrates |
JPS5266756U (en) * | 1975-11-13 | 1977-05-17 | ||
US4022939A (en) * | 1975-12-18 | 1977-05-10 | Western Electric Company, Inc. | Synchronous shielding in vacuum deposition system |
US3983838A (en) * | 1975-12-31 | 1976-10-05 | International Business Machines Corporation | Planetary evaporator |
US4222345A (en) * | 1978-11-30 | 1980-09-16 | Optical Coating Laboratory, Inc. | Vacuum coating apparatus with rotary motion assembly |
US4241698A (en) * | 1979-02-09 | 1980-12-30 | Mca Discovision, Inc. | Vacuum evaporation system for the deposition of a thin evaporated layer having a high degree of uniformity |
DE2917841A1 (en) * | 1979-05-03 | 1980-11-13 | Leybold Heraeus Gmbh & Co Kg | EVAPORATOR FOR VACUUM EVAPORATION SYSTEMS |
US4284033A (en) * | 1979-10-31 | 1981-08-18 | Rca Corporation | Means to orbit and rotate target wafers supported on planet member |
JPS5727032A (en) * | 1980-07-25 | 1982-02-13 | Hitachi Ltd | Plasma cvd device |
DE3306870A1 (en) * | 1983-02-26 | 1984-08-30 | Leybold-Heraeus GmbH, 5000 Köln | DEVICE FOR PRODUCING LAYERS WITH ROTATIONALLY SYMMETRIC THICK PROFILE BY CATODENSIONING |
DE3310044A1 (en) * | 1983-03-19 | 1984-09-20 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | METHOD AND ARRANGEMENT FOR COATING A SUBSTRATE |
DE3422718A1 (en) * | 1984-06-19 | 1986-01-09 | Plasmainvent AG, Zug | VACUUM PLASMA COATING SYSTEM |
US4640846A (en) * | 1984-09-25 | 1987-02-03 | Yue Kuo | Semiconductor spin coating method |
JPS61227165A (en) * | 1985-03-29 | 1986-10-09 | Mitsubishi Electric Corp | Vapor deposition device |
US4662310A (en) * | 1986-07-09 | 1987-05-05 | Deco Tools, Inc. | Robotic paint masking machine |
DE3702775A1 (en) * | 1987-01-30 | 1988-08-11 | Leybold Ag | DEVICE FOR QUASI-CONTINUOUS TREATMENT OF SUBSTRATES |
DE3705592A1 (en) * | 1987-02-21 | 1988-09-01 | Convac Gmbh Geraete Zur Halble | Device for the thin coating (lacquering) of disc-shaped substrates for electronic applications, for example circuit boards, Compact Discs, etc. |
DE3705946A1 (en) * | 1987-02-25 | 1988-09-08 | Krupp Corpoplast Masch | DEVICE FOR TREATING PLASTIC MOLDINGS |
DE3705945A1 (en) * | 1987-02-25 | 1988-09-08 | Krupp Corpoplast Masch | DEVICE FOR PRODUCING HOLLOW BODIES FROM THERMOPLASTIC PLASTIC |
US5002011A (en) * | 1987-04-14 | 1991-03-26 | Kabushiki Kaisha Toshiba | Vapor deposition apparatus |
JPH01143211A (en) * | 1987-11-27 | 1989-06-05 | Takatori Haitetsuku:Kk | Sticking and cutting of protective tape for wafer and device therefor |
EP0362418A1 (en) * | 1988-10-03 | 1990-04-11 | International Business Machines Corporation | Improved method and system for the angled exposition of a surface portion to an emission impinging obliquely thereon, and semiconductor wafers having facets exposed according to said method |
DE4025659A1 (en) * | 1990-08-14 | 1992-02-20 | Leybold Ag | CYCLING GEARBOXES WITH ONE WHEEL SET, ESPECIALLY FOR DEVICES FOR COATING SUBSTRATES |
JPH0828333B2 (en) * | 1992-11-30 | 1996-03-21 | 株式会社半導体プロセス研究所 | Semiconductor device manufacturing equipment |
AU7403694A (en) * | 1994-07-19 | 1996-02-16 | American Plating Systems, Inc. | Electrolytic plating apparatus and method |
GB2291889B (en) * | 1994-07-27 | 1998-02-25 | Gec Marconi Avionics Holdings | Depositing coatings of materials on a substrate |
FR2733253B1 (en) * | 1995-04-24 | 1997-06-13 | Commissariat Energie Atomique | DEVICE FOR DEPOSITING MATERIAL BY EVAPORATION ON LARGE SURFACE SUBSTRATES |
US5702532A (en) * | 1995-05-31 | 1997-12-30 | Hughes Aircraft Company | MOCVD reactor system for indium antimonide epitaxial material |
US5776256A (en) * | 1996-10-01 | 1998-07-07 | The United States Of America As Represented By The Secretary Of The Air Force | Coating chamber planetary gear mirror rotating system |
DE19738234C1 (en) | 1997-09-02 | 1998-10-22 | Fraunhofer Ges Forschung | Apparatus for producing sputtered coatings consisting of hard substances |
JPH11200017A (en) * | 1998-01-20 | 1999-07-27 | Nikon Corp | Optical thin film deposition apparatus and optical element deposited by the optical thin film deposition apparatus |
US6203619B1 (en) | 1998-10-26 | 2001-03-20 | Symetrix Corporation | Multiple station apparatus for liquid source fabrication of thin films |
JP4614538B2 (en) * | 1998-12-15 | 2011-01-19 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | Vacuum processing planetary system workpiece carrier |
US7081166B2 (en) | 1999-12-15 | 2006-07-25 | Unaxis Balzers Aktiengesellschaft | Planetary system workpiece support and method for surface treatment of workpieces |
US6749764B1 (en) | 2000-11-14 | 2004-06-15 | Tru-Si Technologies, Inc. | Plasma processing comprising three rotational motions of an article being processed |
DE102004027989B4 (en) * | 2004-06-09 | 2007-05-10 | Esser, Stefan, Dr.-Ing. | Workpiece carrier device for holding workpieces |
WO2013189935A1 (en) * | 2012-06-18 | 2013-12-27 | Oc Oerlikon Balzers Ag | Pvd apparatus for directional material deposition, methods and workpiece |
JP6019310B1 (en) * | 2015-04-16 | 2016-11-02 | ナルックス株式会社 | Vapor deposition apparatus and manufacturing method including film forming process by vapor deposition apparatus |
DE102018126862A1 (en) * | 2018-10-26 | 2020-04-30 | Oerlikon Surface Solutions Ag, Pfäffikon | Workpiece carrier device and coating arrangement |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2351537A (en) * | 1942-03-05 | 1944-06-13 | Spencer Lens Co | Apparatus for treating surfaces |
US3023727A (en) * | 1959-09-10 | 1962-03-06 | Ibm | Substrate processing apparatus |
US3352282A (en) * | 1965-07-23 | 1967-11-14 | Bendix Corp | Vacuum deposit device including means to register and manipulate mask and substrate elements |
US3598083A (en) * | 1969-10-27 | 1971-08-10 | Varian Associates | Complex motion mechanism for thin film coating apparatuses |
-
1973
- 1973-12-03 US US00421020A patent/US3853091A/en not_active Expired - Lifetime
-
1974
- 1974-10-09 DE DE19742448023 patent/DE2448023B2/en active Granted
- 1974-10-09 FR FR7434706A patent/FR2253270B1/fr not_active Expired
- 1974-10-11 IT IT28314/74A patent/IT1022786B/en active
- 1974-11-11 GB GB4863074A patent/GB1474927A/en not_active Expired
- 1974-11-13 CA CA213,557A patent/CA1035255A/en not_active Expired
- 1974-11-18 SE SE7414445A patent/SE397435B/en unknown
- 1974-11-20 CH CH1543174A patent/CH606479A5/xx not_active IP Right Cessation
- 1974-11-27 JP JP13564174A patent/JPS5325718B2/ja not_active Expired
- 1974-11-27 NL NL7415450A patent/NL7415450A/en not_active Application Discontinuation
- 1974-12-02 ES ES432508A patent/ES432508A1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL7415450A (en) | 1975-06-05 |
GB1474927A (en) | 1977-05-25 |
US3853091A (en) | 1974-12-10 |
JPS5087576A (en) | 1975-07-14 |
ES432508A1 (en) | 1977-03-01 |
SE7414445L (en) | 1975-06-04 |
SE397435B (en) | 1977-10-31 |
FR2253270B1 (en) | 1977-03-25 |
IT1022786B (en) | 1978-04-20 |
DE2448023A1 (en) | 1975-06-05 |
FR2253270A1 (en) | 1975-06-27 |
JPS5325718B2 (en) | 1978-07-28 |
DE2448023B2 (en) | 1976-11-04 |
CH606479A5 (en) | 1978-10-31 |
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