SU1487514A1 - Подставка под кварцевый тигель ; - Google Patents

Подставка под кварцевый тигель ; Download PDF

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Publication number
SU1487514A1
SU1487514A1 SU874330853A SU4330853A SU1487514A1 SU 1487514 A1 SU1487514 A1 SU 1487514A1 SU 874330853 A SU874330853 A SU 874330853A SU 4330853 A SU4330853 A SU 4330853A SU 1487514 A1 SU1487514 A1 SU 1487514A1
Authority
SU
USSR - Soviet Union
Prior art keywords
crucible
stand
quartz
cord
crusible
Prior art date
Application number
SU874330853A
Other languages
English (en)
Russian (ru)
Inventor
A S Bulaev
M G Bushuev
V V Kostin
A I Ogurtsov
Original Assignee
Gnii Pi Redkometa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gnii Pi Redkometa filed Critical Gnii Pi Redkometa
Priority to SU874330853A priority Critical patent/SU1487514A1/ru
Priority to DD88320868A priority patent/DD275709A5/de
Priority to DE3835646A priority patent/DE3835646A1/de
Application granted granted Critical
Publication of SU1487514A1 publication Critical patent/SU1487514A1/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
SU874330853A 1987-10-19 1987-10-19 Подставка под кварцевый тигель ; SU1487514A1 (ru)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SU874330853A SU1487514A1 (ru) 1987-10-19 1987-10-19 Подставка под кварцевый тигель ;
DD88320868A DD275709A5 (de) 1987-10-19 1988-10-18 Schale zur bewehrung eines quarztiegels
DE3835646A DE3835646A1 (de) 1987-10-19 1988-10-19 Schale zur bewehrung eines quarztiegels

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SU874330853A SU1487514A1 (ru) 1987-10-19 1987-10-19 Подставка под кварцевый тигель ;
DE3835646A DE3835646A1 (de) 1987-10-19 1988-10-19 Schale zur bewehrung eines quarztiegels

Publications (1)

Publication Number Publication Date
SU1487514A1 true SU1487514A1 (ru) 1990-10-15

Family

ID=39365791

Family Applications (1)

Application Number Title Priority Date Filing Date
SU874330853A SU1487514A1 (ru) 1987-10-19 1987-10-19 Подставка под кварцевый тигель ;

Country Status (3)

Country Link
DD (1) DD275709A5 (enrdf_load_stackoverflow)
DE (1) DE3835646A1 (enrdf_load_stackoverflow)
SU (1) SU1487514A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112624782A (zh) * 2020-12-11 2021-04-09 包头美科硅能源有限公司 一种埚帮涂层的使用方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3830929A1 (de) * 1988-09-12 1990-03-15 Kernforschungsanlage Juelich Drehdurchfuehrung fuer rezipienten mit heisser wandung
EP0529594A1 (en) * 1991-08-29 1993-03-03 Ucar Carbon Technology Corporation A glassy carbon coated graphite component for use in the production of silicon crystal growth
DE4130253C2 (de) * 1991-09-12 2001-10-04 Sgl Carbon Ag Mehrteiliger Stütztiegel und Verfahren zu seiner Herstellung
DE4325522C1 (de) * 1993-07-30 1994-11-17 Schunk Kohlenstofftechnik Gmbh Tiegel, insbesondere Stütztiegel
DE69739830D1 (de) * 1996-06-27 2010-05-20 Toyo Tanso Co Tiegel für kristallziehung und verfahren zu dessen herstellung
DE19652171A1 (de) * 1996-12-14 1998-06-18 Eric Mix Verfahren zur thermischen Isolation induktiv geheizter Tiegel und Schmelzen in der Kristallzucht mit kohlenstoffgebundenen Kohlenstofffasern
JP4217844B2 (ja) 1998-06-18 2009-02-04 ジャパンスーパークォーツ株式会社 複合ルツボとその製造方法および再生方法
JP5286589B2 (ja) * 2008-05-01 2013-09-11 イビデン株式会社 ルツボ保持部材およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58140392A (ja) * 1982-02-16 1983-08-20 Komatsu Denshi Kinzoku Kk シリコン単結晶引上方法およびその装置
JPS63166790A (ja) * 1986-12-26 1988-07-09 Toshiba Ceramics Co Ltd シリコン単結晶引上装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112624782A (zh) * 2020-12-11 2021-04-09 包头美科硅能源有限公司 一种埚帮涂层的使用方法

Also Published As

Publication number Publication date
DE3835646A1 (de) 1989-06-08
DE3835646C2 (enrdf_load_stackoverflow) 1992-05-07
DD275709A5 (de) 1990-01-31

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