SU1462098A1 - Differential interferometer for measuring angular displacements - Google Patents

Abstract

The invention relates to a measurement technique and can be used to control the angular movements of objects. The aim of the invention is to increase the accuracy of control due to the automatic adjustment of the differential interferometer during the measurement process. Ray beams

Description

one

The invention relates to a measurement technique and can be used to control the angular movements of objects. ,

The purpose of the invention is to improve the accuracy of control due to automatic adjustment of the differential interferometer during the measurement process.

The drawing shows the functional scheme of the proposed interferometer.

The interferometer contains a base (not shown in the drawing), rigidly coupled laser 1 with a base C10, two beam splitters 2 and 3, three mirrors 4.5 and 6 ::: two photodetectors 7 and 8, a position-sensitive photodetector 9, a reversible counter 10, the inputs of which are connected to the photodetectors 7 and 8, the driver of 11 pulses, the input of which is connected to the output of the position-sensitive photodetector 9; analyzer 12p, the first input of which is under the first output of the pulse former 11 pulses, and the second input to the output of the reversible counter 10, the second output of the pulse former 11 is connected to the Reset input of the reversible counter 10; two prism reflectors 13 and 14 and a mirror 15 for bonding to a controlled object 16; and mirror 17, rigidly bonded to the base.

The entrance face of the prism reflector 13 is optically coupled to the laser 1 and the photodetectors 7 and 8 via the beam splitters 2 and 3.

The entrance face of the prism reflector is optically coupled through mirror 4 and beam splitters 2 and 3 with laser 1, through the mirror with photoreceivers 7 and 8.

The input faces of prism reflectors 13 and 14 are optically coupled to mirrors 5 and 6, respectively. A mirror 17 is installed between the beam splitter 3 and the mirror 15. The position-sensitive photodetector 9 is optically coupled through the mirrors 15 and 17 and the beam splitter 3 with laser 1 and at the initial (zero) position of the object 16, the beam of laser beam 1 is located symmetrically on the platform positionally - sensitive photodetector 9.

Differential interferometer works as follows.

The beams of laser beam 1 pass a beam splitter 3 and are separated by beam splitter 2 into two beam beams, one of which passes through a prism reflector 13, reflects from mirror 5 and returns to beam splitter 2. A second beam of rays reflected from mirror 4 passes through a prism The reflector 14 is reflected from the mirror 6 and returned to the beam splitter 2.

 1462098

Claims (1)

The occurring interference of the cardarometer during the measurement of permits is recorded by the photodetector 7et to increase accuracy and reliability and through the beam splitter 3 - the photoreception control of the angular displacements of objects. NIC 8, The electric pulses from the photodetectors 7 and 8 are fed to the input Formula of the inverse counter 10, according to the indications of which the value of the yy-differential interferometer for fishing motions is judged. With the passage of the measurement of the angular displacements, containing the zero controlled object 16, the base of the laser beam 1, the beam of the laser 1 rigidly fastened, the laser beam, two beam splitters, three mirrors from the beam splitter 3, mirror mirrors, two photodetectors, reversing 17 and 15 , a different counter crosses the border, the inputs of which are connected (axis of symmetry) sensitive to the corresponding photodetectors, position-sensitive sites 15 are two prism reflectors intended for the photodetector 9. Shaper 11 has a name for sticking controlled from pulses by signals with a positional object so that the input face of the sensitive photodetector is 9 for-. one of the reflectors optically mirrored two signals Reset and Record, connected via beam splitters with a laser, the Reset signal being formed 20 Rom. and two photoreceivers, with some delay on the other side of the other Signal signal. Signal Record cut the first mirror and a beam splitter from the first output of the imaging unit by the II laser and photodetectors, and two other pulses are fed to the first input mirror optically connected to the input analyzer 12, in accordance with the number of the corresponding prism, written in reversible reflectors, a distinctive counter 10, is rewritten in -pas. By the fact that, in order to increase the point of the analyzer 12. The Discharge Control signal, it is equipped with the fourth from the second output of the imaging unit 11, the mirror intended for the scramble pulses is fed to the Reset ash input with the object to be monitored, the p - reversible counter 10 and a rearranged mirror mounted between its zero position. Resetting the reversal counter 10 in the field and the fourth mirror along the beam splitting, the measurement positioning allows eliminating the sensitive sensor, the accumulated measurement error optically coupled through the fourth angle of rotation of the object due to false and fifth mirrors. and the first beam-measuring devices of the reversible counter with a laser, driver 10 and thereby increase the accuracy of pulses, the input of which is connected to the control. By. readings of the analyzer. The output of the position-sensitive photo-12 can be judged on the reliability of the source, and the analyzer, the first measurement. If the analyzer's input is connected to the first pa 12 and exceeds the threshold output of the pulse former, the second value is the result of the measurement, the output of the rhenium pulse former will be unreliable. Connected to the Reset Reversal input. In this way, an automatic counter, whose output is connected differential interface to the second input of the analyzer.