SG90146A1 - Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement - Google Patents
Real-time control of chemical-mechanical polishing processes using a shaft distortion measurementInfo
- Publication number
- SG90146A1 SG90146A1 SG200003553A SG200003553A SG90146A1 SG 90146 A1 SG90146 A1 SG 90146A1 SG 200003553 A SG200003553 A SG 200003553A SG 200003553 A SG200003553 A SG 200003553A SG 90146 A1 SG90146 A1 SG 90146A1
- Authority
- SG
- Singapore
- Prior art keywords
- real
- chemical
- mechanical polishing
- time control
- polishing processes
- Prior art date
Links
- 238000005259 measurement Methods 0.000 title 1
- 238000007517 polishing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/16—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the load
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/351,436 US6213846B1 (en) | 1999-07-12 | 1999-07-12 | Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement |
Publications (1)
Publication Number | Publication Date |
---|---|
SG90146A1 true SG90146A1 (en) | 2002-07-23 |
Family
ID=23380920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200003553A SG90146A1 (en) | 1999-07-12 | 2000-06-26 | Real-time control of chemical-mechanical polishing processes using a shaft distortion measurement |
Country Status (7)
Country | Link |
---|---|
US (1) | US6213846B1 (zh) |
JP (1) | JP2001044158A (zh) |
KR (1) | KR100370292B1 (zh) |
CN (1) | CN1125705C (zh) |
MY (1) | MY124028A (zh) |
SG (1) | SG90146A1 (zh) |
TW (1) | TW457170B (zh) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6492273B1 (en) | 1999-08-31 | 2002-12-10 | Micron Technology, Inc. | Methods and apparatuses for monitoring and controlling mechanical or chemical-mechanical planarization of microelectronic substrate assemblies |
US6306008B1 (en) * | 1999-08-31 | 2001-10-23 | Micron Technology, Inc. | Apparatus and method for conditioning and monitoring media used for chemical-mechanical planarization |
US6494765B2 (en) * | 2000-09-25 | 2002-12-17 | Center For Tribology, Inc. | Method and apparatus for controlled polishing |
US6741913B2 (en) | 2001-12-11 | 2004-05-25 | International Business Machines Corporation | Technique for noise reduction in a torque-based chemical-mechanical polishing endpoint detection system |
JP2003318140A (ja) * | 2002-04-26 | 2003-11-07 | Applied Materials Inc | 研磨方法及び装置 |
CN1302522C (zh) * | 2002-05-15 | 2007-02-28 | 旺宏电子股份有限公司 | 一种化学机械抛光装置的终点侦测系统 |
WO2005004258A2 (en) * | 2003-06-27 | 2005-01-13 | Ultracell Corporation | Portable fuel cartridge for fuel cells |
KR100536611B1 (ko) | 2003-09-08 | 2005-12-14 | 삼성전자주식회사 | 화학적 기계적 연마 방법 |
US20050197048A1 (en) * | 2004-03-04 | 2005-09-08 | Leping Li | Method for manufacturing a workpiece and torque transducer module |
ATE523759T1 (de) * | 2007-06-11 | 2011-09-15 | Basf Se | Verfahren zur vermeidung von überbeanspruchungen einer welle |
JP5245319B2 (ja) * | 2007-08-09 | 2013-07-24 | 富士通株式会社 | 研磨装置及び研磨方法、基板及び電子機器の製造方法 |
CN101515537B (zh) * | 2008-02-22 | 2011-02-02 | 中芯国际集成电路制造(上海)有限公司 | 一种可提高检测精准度的抛光终点检测方法 |
US9176024B2 (en) * | 2013-10-23 | 2015-11-03 | General Electric Company | Systems and methods for monitoring rotary equipment |
JP6327958B2 (ja) * | 2014-06-03 | 2018-05-23 | 株式会社荏原製作所 | 研磨装置 |
JP6357260B2 (ja) * | 2016-09-30 | 2018-07-11 | 株式会社荏原製作所 | 研磨装置、及び研磨方法 |
CN106514438A (zh) * | 2016-11-11 | 2017-03-22 | 武汉新芯集成电路制造有限公司 | 化学机械研磨装置及其研磨方法 |
CN106475895A (zh) * | 2016-12-16 | 2017-03-08 | 武汉新芯集成电路制造有限公司 | 一种晶圆研磨系统以及晶圆研磨终点的控制方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4910155A (en) * | 1988-10-28 | 1990-03-20 | International Business Machines Corporation | Wafer flood polishing |
US4975569A (en) * | 1983-10-03 | 1990-12-04 | Sharp Kabushiki Kaisha | Optical rotary encoder employing plural photosensors disposed in a specific arrangement |
US5036015A (en) * | 1990-09-24 | 1991-07-30 | Micron Technology, Inc. | Method of endpoint detection during chemical/mechanical planarization of semiconductor wafers |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5069002A (en) | 1991-04-17 | 1991-12-03 | Micron Technology, Inc. | Apparatus for endpoint detection during mechanical planarization of semiconductor wafers |
US5308438A (en) | 1992-01-30 | 1994-05-03 | International Business Machines Corporation | Endpoint detection apparatus and method for chemical/mechanical polishing |
US5474813A (en) * | 1992-04-10 | 1995-12-12 | Walker; Dana A. | Systems and methods for applying grid lines to a shaft and sensing movement thereof |
US5734108A (en) * | 1992-04-10 | 1998-03-31 | Walker; Dana A. | System for sensing shaft displacement and strain |
JP3321894B2 (ja) | 1993-05-07 | 2002-09-09 | 日本電信電話株式会社 | 研磨終点検出装置 |
US5337015A (en) * | 1993-06-14 | 1994-08-09 | International Business Machines Corporation | In-situ endpoint detection method and apparatus for chemical-mechanical polishing using low amplitude input voltage |
US5658183A (en) * | 1993-08-25 | 1997-08-19 | Micron Technology, Inc. | System for real-time control of semiconductor wafer polishing including optical monitoring |
JP3209641B2 (ja) * | 1994-06-02 | 2001-09-17 | 三菱電機株式会社 | 光加工装置及び方法 |
US5643044A (en) | 1994-11-01 | 1997-07-01 | Lund; Douglas E. | Automatic chemical and mechanical polishing system for semiconductor wafers |
US5595526A (en) | 1994-11-30 | 1997-01-21 | Intel Corporation | Method and apparatus for endpoint detection in a chemical/mechanical process for polishing a substrate |
JP3637977B2 (ja) | 1995-01-19 | 2005-04-13 | 株式会社荏原製作所 | ポリッシングの終点検知方法 |
US5964643A (en) * | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
JPH0970751A (ja) | 1995-09-06 | 1997-03-18 | Ebara Corp | ポリッシング装置 |
US5644221A (en) * | 1996-03-19 | 1997-07-01 | International Business Machines Corporation | Endpoint detection for chemical mechanical polishing using frequency or amplitude mode |
JPH1076464A (ja) * | 1996-08-30 | 1998-03-24 | Canon Inc | 研磨方法及びそれを用いた研磨装置 |
-
1999
- 1999-07-12 US US09/351,436 patent/US6213846B1/en not_active Expired - Fee Related
-
2000
- 2000-06-15 JP JP2000179330A patent/JP2001044158A/ja active Pending
- 2000-06-26 SG SG200003553A patent/SG90146A1/en unknown
- 2000-07-03 MY MYPI20003025 patent/MY124028A/en unknown
- 2000-07-03 KR KR10-2000-0037775A patent/KR100370292B1/ko not_active IP Right Cessation
- 2000-07-11 TW TW089113762A patent/TW457170B/zh not_active IP Right Cessation
- 2000-07-11 CN CN00120454A patent/CN1125705C/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4975569A (en) * | 1983-10-03 | 1990-12-04 | Sharp Kabushiki Kaisha | Optical rotary encoder employing plural photosensors disposed in a specific arrangement |
US4910155A (en) * | 1988-10-28 | 1990-03-20 | International Business Machines Corporation | Wafer flood polishing |
US5036015A (en) * | 1990-09-24 | 1991-07-30 | Micron Technology, Inc. | Method of endpoint detection during chemical/mechanical planarization of semiconductor wafers |
Also Published As
Publication number | Publication date |
---|---|
CN1125705C (zh) | 2003-10-29 |
JP2001044158A (ja) | 2001-02-16 |
CN1280049A (zh) | 2001-01-17 |
KR100370292B1 (ko) | 2003-01-29 |
MY124028A (en) | 2006-06-30 |
US6213846B1 (en) | 2001-04-10 |
KR20010015147A (ko) | 2001-02-26 |
TW457170B (en) | 2001-10-01 |
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