SG83159A1 - Process for the wet chemical treatment of semiconductor wafers - Google Patents

Process for the wet chemical treatment of semiconductor wafers

Info

Publication number
SG83159A1
SG83159A1 SG9905190A SG1999005190A SG83159A1 SG 83159 A1 SG83159 A1 SG 83159A1 SG 9905190 A SG9905190 A SG 9905190A SG 1999005190 A SG1999005190 A SG 1999005190A SG 83159 A1 SG83159 A1 SG 83159A1
Authority
SG
Singapore
Prior art keywords
chemical treatment
semiconductor wafers
wet chemical
wet
wafers
Prior art date
Application number
SG9905190A
Other languages
English (en)
Inventor
Brunner Roland
Schwenk Helmut
Zach Johann
Original Assignee
Wacker Siltronic Halbleitermat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Siltronic Halbleitermat filed Critical Wacker Siltronic Halbleitermat
Publication of SG83159A1 publication Critical patent/SG83159A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H01L21/02052—Wet cleaning only

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Weting (AREA)
SG9905190A 1998-11-19 1999-10-18 Process for the wet chemical treatment of semiconductor wafers SG83159A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19853486A DE19853486A1 (de) 1998-11-19 1998-11-19 Verfahren zur naßchemischen Behandlung von Halbleiterscheiben

Publications (1)

Publication Number Publication Date
SG83159A1 true SG83159A1 (en) 2001-09-18

Family

ID=7888395

Family Applications (1)

Application Number Title Priority Date Filing Date
SG9905190A SG83159A1 (en) 1998-11-19 1999-10-18 Process for the wet chemical treatment of semiconductor wafers

Country Status (7)

Country Link
US (1) US7172975B2 (ja)
EP (1) EP1005072B1 (ja)
JP (1) JP3181900B2 (ja)
KR (1) KR100351229B1 (ja)
DE (2) DE19853486A1 (ja)
SG (1) SG83159A1 (ja)
TW (1) TW444292B (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1132951A1 (en) * 2000-03-10 2001-09-12 Lucent Technologies Inc. Process of cleaning silicon prior to formation of the gate oxide
DE10036691A1 (de) * 2000-07-27 2002-02-14 Wacker Siltronic Halbleitermat Verfahren zur chemischen Behandlung von Halbleiterscheiben
TW554258B (en) 2000-11-30 2003-09-21 Tosoh Corp Resist stripper
JP2003086554A (ja) * 2001-09-11 2003-03-20 Mitsubishi Heavy Ind Ltd 半導体基板の製造装置、及び、その製造方法
DE10239773B3 (de) * 2002-08-29 2004-02-26 Wacker Siltronic Ag Halbleiterscheibe und Verfahren zur Reinigung einer Halbleiterscheibe
ATE353475T1 (de) * 2002-10-11 2007-02-15 Soitec Silicon On Insulator Verfahren und vorrichtung zur herstellung einer haftenden substratoberfläche
FR2864457B1 (fr) * 2003-12-31 2006-12-08 Commissariat Energie Atomique Procede de nettoyage par voie humide d'une surface notamment en un materiau de type silicium germanium.

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831837A (ja) * 1994-07-12 1996-02-02 Mitsubishi Materials Shilicon Corp Ｅｇ用ポリシリコン膜の被着方法
EP0701275A2 (en) * 1994-08-26 1996-03-13 MEMC Electronic Materials, Inc. Pre-thermal treatment cleaning process
EP0731495A2 (de) * 1995-03-10 1996-09-11 ASTEC Halbleitertechnologie GmbH Verfahren und Vorrichtung zum Reinigen von Siliziumscheiben
EP0731498A2 (en) * 1995-03-10 1996-09-11 Kabushiki Kaisha Toshiba Surface processing method and surface processing device for silicone substrates
EP0844650A2 (en) * 1996-11-15 1998-05-27 MEMC Electronic Materials, Inc. Method of etching SiO2 and process of cleaning silicon wafers using dilute chemical etchants and a megasonic field
EP0859404A2 (en) * 1997-01-16 1998-08-19 Mitsubishi Materials Silicon Corporation Washing solution of semiconductor substrate and washing method using the same
US5803980A (en) * 1996-10-04 1998-09-08 Texas Instruments Incorporated De-ionized water/ozone rinse post-hydrofluoric processing for the prevention of silicic acid residue

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5014737A (en) * 1989-11-13 1991-05-14 Allan Berman Quartz integrated trough/sump recirculating filtered high-purity chemical bath
US5593538A (en) * 1995-09-29 1997-01-14 Motorola, Inc. Method for etching a dielectric layer on a semiconductor
US6132522A (en) * 1996-07-19 2000-10-17 Cfmt, Inc. Wet processing methods for the manufacture of electronic components using sequential chemical processing
US6273098B1 (en) * 1997-11-24 2001-08-14 Cypress Semiconductor Corporation Extension of the useful life of a chemical bath used to process a substrate

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0831837A (ja) * 1994-07-12 1996-02-02 Mitsubishi Materials Shilicon Corp Ｅｇ用ポリシリコン膜の被着方法
EP0701275A2 (en) * 1994-08-26 1996-03-13 MEMC Electronic Materials, Inc. Pre-thermal treatment cleaning process
EP0731495A2 (de) * 1995-03-10 1996-09-11 ASTEC Halbleitertechnologie GmbH Verfahren und Vorrichtung zum Reinigen von Siliziumscheiben
EP0731498A2 (en) * 1995-03-10 1996-09-11 Kabushiki Kaisha Toshiba Surface processing method and surface processing device for silicone substrates
US5803980A (en) * 1996-10-04 1998-09-08 Texas Instruments Incorporated De-ionized water/ozone rinse post-hydrofluoric processing for the prevention of silicic acid residue
EP0844650A2 (en) * 1996-11-15 1998-05-27 MEMC Electronic Materials, Inc. Method of etching SiO2 and process of cleaning silicon wafers using dilute chemical etchants and a megasonic field
EP0859404A2 (en) * 1997-01-16 1998-08-19 Mitsubishi Materials Silicon Corporation Washing solution of semiconductor substrate and washing method using the same

Also Published As

Publication number Publication date
TW444292B (en) 2001-07-01
DE59900712D1 (de) 2002-02-28
KR20000035475A (ko) 2000-06-26
EP1005072B1 (de) 2002-01-02
DE19853486A1 (de) 2000-05-31
US20010003680A1 (en) 2001-06-14
JP3181900B2 (ja) 2001-07-03
US7172975B2 (en) 2007-02-06
JP2000164560A (ja) 2000-06-16
EP1005072A1 (de) 2000-05-31
KR100351229B1 (ko) 2002-09-09

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