SG79211A1 - Gas supply unit - Google Patents
Gas supply unitInfo
- Publication number
- SG79211A1 SG79211A1 SG9611698A SG1996011698A SG79211A1 SG 79211 A1 SG79211 A1 SG 79211A1 SG 9611698 A SG9611698 A SG 9611698A SG 1996011698 A SG1996011698 A SG 1996011698A SG 79211 A1 SG79211 A1 SG 79211A1
- Authority
- SG
- Singapore
- Prior art keywords
- supply unit
- gas supply
- gas
- unit
- supply
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0807—Manifolds
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0832—Modular valves
- F15B13/0835—Cartridge type valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0846—Electrical details
- F15B13/086—Sensing means, e.g. pressure sensors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0885—Assembly of modular units using valves combined with other components
- F15B13/0892—Valves combined with fluid components
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/06—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with two or more servomotors
- F15B13/08—Assemblies of units, each for the control of a single servomotor only
- F15B13/0803—Modular units
- F15B13/0878—Assembly of modular units
- F15B13/0896—Assembly of modular units using different types or sizes of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
- Y10T137/4245—Cleaning or steam sterilizing
- Y10T137/4259—With separate material addition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/5109—Convertible
- Y10T137/5283—Units interchangeable between alternate locations
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
- Y10T137/87885—Sectional block structure
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1715696A JP2922453B2 (ja) | 1996-01-05 | 1996-01-05 | ガス供給集積ユニット |
JP18038396A JP3355279B2 (ja) | 1996-07-10 | 1996-07-10 | ガス供給ユニット |
Publications (1)
Publication Number | Publication Date |
---|---|
SG79211A1 true SG79211A1 (en) | 2001-03-20 |
Family
ID=26353642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG9611698A SG79211A1 (en) | 1996-01-05 | 1996-12-12 | Gas supply unit |
Country Status (4)
Country | Link |
---|---|
US (1) | US5819782A (ko) |
KR (1) | KR100232112B1 (ko) |
MY (1) | MY114330A (ko) |
SG (1) | SG79211A1 (ko) |
Families Citing this family (76)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW397909B (en) * | 1996-09-30 | 2000-07-11 | Benkan Corp | Integration gas controller |
US5992463A (en) | 1996-10-30 | 1999-11-30 | Unit Instruments, Inc. | Gas panel |
US6394138B1 (en) * | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
US6293310B1 (en) * | 1996-10-30 | 2001-09-25 | Unit Instruments, Inc. | Gas panel |
JP3997338B2 (ja) * | 1997-02-14 | 2007-10-24 | 忠弘 大見 | 流体制御装置 |
JPH10300000A (ja) * | 1997-02-28 | 1998-11-13 | Benkan Corp | 集積化ガス制御装置 |
JP3814704B2 (ja) * | 1997-05-08 | 2006-08-30 | 忠弘 大見 | 流体制御器用継手 |
JP3737869B2 (ja) * | 1997-05-13 | 2006-01-25 | シーケーディ株式会社 | プロセスガス供給ユニット |
JP4378553B2 (ja) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | 流体制御装置 |
GB9724168D0 (en) | 1997-11-14 | 1998-01-14 | Air Prod & Chem | Gas control device and method of supplying gas |
JP4042190B2 (ja) * | 1997-12-11 | 2008-02-06 | Smc株式会社 | 流量調節弁付き流量検出器 |
JP4042191B2 (ja) * | 1997-12-11 | 2008-02-06 | Smc株式会社 | マニホールド形流量検出器組立体 |
US6158454A (en) * | 1998-04-14 | 2000-12-12 | Insync Systems, Inc. | Sieve like structure for fluid flow through structural arrangement |
JP3780096B2 (ja) * | 1998-04-27 | 2006-05-31 | シーケーディ株式会社 | プロセスガス供給ユニット |
GB2338033A (en) * | 1998-06-02 | 1999-12-08 | Huntleigh Technology Plc | Pressure control system |
US6260581B1 (en) | 1998-06-12 | 2001-07-17 | J. Gregory Hollingshead | Apparatus for assembling modular chemical distribution substrate blocks |
JP2002517698A (ja) | 1998-06-12 | 2002-06-18 | ジェイ. グレゴリー ホーリングスヘッド, | モジュラー化学送達ブロック |
JP4110304B2 (ja) * | 1998-06-30 | 2008-07-02 | 株式会社フジキン | 流体制御装置および流体制御装置組立て方法 |
JP3921565B2 (ja) * | 1998-07-10 | 2007-05-30 | 株式会社フジキン | 流体制御装置 |
JP3360133B2 (ja) | 1998-11-11 | 2002-12-24 | 株式会社フジキン | 流体制御装置用継手部材およびその製造方法 |
WO2000031462A1 (en) | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | System and method for integrating gas components |
US6345642B1 (en) * | 1999-02-19 | 2002-02-12 | Applied Materials, Inc. | Method and apparatus for removing processing liquid from a processing liquid path |
JP2000271471A (ja) | 1999-03-24 | 2000-10-03 | Nippon M K S Kk | 液体ソース供給システム及びその洗浄方法、気化器 |
JP4244254B2 (ja) * | 1999-04-30 | 2009-03-25 | 株式会社キッツエスシーティー | 集積化ガス制御装置 |
FR2794844B1 (fr) * | 1999-06-08 | 2001-08-03 | Air Liquide | Procede et dispositif de mise en gaz d'une ligne de distribution de gaz corrosif |
US6186177B1 (en) | 1999-06-23 | 2001-02-13 | Mks Instruments, Inc. | Integrated gas delivery system |
US6302139B1 (en) * | 1999-07-16 | 2001-10-16 | Advanced Technology Materials, Inc. | Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
US6817381B2 (en) * | 1999-08-24 | 2004-11-16 | Tokyo Electron Limited | Gas processing apparatus, gas processing method and integrated valve unit for gas processing apparatus |
US6729353B2 (en) | 1999-09-01 | 2004-05-04 | Asml Us, Inc. | Modular fluid delivery apparatus |
US6125887A (en) * | 1999-09-20 | 2000-10-03 | Pinto; James V. | Welded interconnection modules for high purity fluid flow control applications |
US6418960B1 (en) * | 1999-10-06 | 2002-07-16 | Applied Materials, Inc. | Ultrasonic enhancement for solvent purge of a liquid delivery system |
JP2002089798A (ja) | 2000-09-11 | 2002-03-27 | Ulvac Japan Ltd | 流体制御装置およびこれを用いたガス処理装置 |
US6349744B1 (en) | 2000-10-13 | 2002-02-26 | Mks Instruments, Inc. | Manifold for modular gas box system |
US6769463B2 (en) | 2001-05-16 | 2004-08-03 | Celerity Group, Inc. | Fluid flow system |
JP2002349797A (ja) * | 2001-05-23 | 2002-12-04 | Fujikin Inc | 流体制御装置 |
JP2005539375A (ja) * | 2002-08-27 | 2005-12-22 | セレリティ・インコーポレイテッド | 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル |
JP4314425B2 (ja) * | 2002-12-02 | 2009-08-19 | 株式会社フジキン | 流体制御装置 |
JP2004183771A (ja) * | 2002-12-03 | 2004-07-02 | Fujikin Inc | 流体制御装置 |
US6907904B2 (en) * | 2003-03-03 | 2005-06-21 | Redwood Microsystems, Inc. | Fluid delivery system and mounting panel therefor |
KR100517405B1 (ko) | 2003-06-27 | 2005-09-27 | 삼성전자주식회사 | 질량 유량 제어기 및 이를 갖는 가스 공급 장치 |
US7048008B2 (en) * | 2004-04-13 | 2006-05-23 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
JP2006083959A (ja) * | 2004-09-16 | 2006-03-30 | Fujikin Inc | センサ付き継手部材 |
US7320339B2 (en) * | 2005-06-02 | 2008-01-22 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
JP2007034667A (ja) * | 2005-07-27 | 2007-02-08 | Surpass Kogyo Kk | 流量コントローラ、これに用いるレギュレータユニット、バルブユニット |
US7410519B1 (en) * | 2005-08-16 | 2008-08-12 | Ewald Dieter H | Sandwich filter block |
CN100416756C (zh) * | 2005-12-05 | 2008-09-03 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 等离子体刻蚀装置 |
US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
JP5096696B2 (ja) * | 2006-03-02 | 2012-12-12 | サーパス工業株式会社 | 流体機器ユニット構造 |
JP2007327542A (ja) * | 2006-06-07 | 2007-12-20 | Surpass Kogyo Kk | 流体機器ユニット構造 |
JP4256884B2 (ja) * | 2006-06-23 | 2009-04-22 | 東京エレクトロン株式会社 | 気化器への原料液供給ユニット |
US20080009977A1 (en) * | 2006-07-10 | 2008-01-10 | Ultra Clean Holdings | Apparatus and Method for Monitoring a Chemical-Supply System |
JP4221425B2 (ja) * | 2006-08-11 | 2009-02-12 | シーケーディ株式会社 | パージガスユニット及びパージガス供給集積ユニット |
JP2010501336A (ja) * | 2006-08-25 | 2010-01-21 | ポール・コーポレーション | 浄化要素を備える流体アセンブリ |
KR101574743B1 (ko) * | 2006-08-25 | 2015-12-04 | 폴 코포레이션 | 정화 조립체, 및 정화 조립체의 조립 방법 |
US20100112814A1 (en) * | 2006-09-06 | 2010-05-06 | Sowmya Krishnan | Pre-certified process chamber and method |
KR100850275B1 (ko) * | 2006-12-20 | 2008-08-04 | 삼성전자주식회사 | 반도체 디바이스 제조설비의 가스 박스 모듈 |
US7841363B1 (en) * | 2007-04-03 | 2010-11-30 | Spx Corporation | Modular upgradeable pneumatic/hydraulic manifold |
JP2008291941A (ja) * | 2007-05-25 | 2008-12-04 | Surpass Kogyo Kk | 流体機器ユニット構造 |
US8434522B2 (en) * | 2007-05-31 | 2013-05-07 | Tokyo Electron Limited | Fluid control apparatus |
US7806143B2 (en) * | 2007-06-11 | 2010-10-05 | Lam Research Corporation | Flexible manifold for integrated gas system gas panels |
US7784497B2 (en) * | 2007-07-12 | 2010-08-31 | Eriksson Mark L | MSM component and associated gas panel assembly |
US20090078324A1 (en) * | 2007-09-21 | 2009-03-26 | Ultra Clean Technology, Inc. | Gas-panel system |
US20090114295A1 (en) * | 2007-11-06 | 2009-05-07 | Ultra Clean Holdings, Inc. | Gas-panel assembly |
US8307854B1 (en) | 2009-05-14 | 2012-11-13 | Vistadeltek, Inc. | Fluid delivery substrates for building removable standard fluid delivery sticks |
US8496029B2 (en) | 2009-06-10 | 2013-07-30 | Vistadeltek, Llc | Extreme flow rate and/or high temperature fluid delivery substrates |
TWI452946B (zh) * | 2009-12-29 | 2014-09-11 | Univ Nat Yunlin Sci & Tech | Plasma reaction device |
WO2012151292A2 (en) | 2011-05-02 | 2012-11-08 | Advantage Group International Inc. | Manifold system for gas and fluid delivery |
US9188990B2 (en) * | 2011-10-05 | 2015-11-17 | Horiba Stec, Co., Ltd. | Fluid mechanism, support member constituting fluid mechanism and fluid control system |
KR101285562B1 (ko) * | 2011-12-15 | 2013-07-12 | 주식회사 플로웰 | 반도체 제조 공정용 블록형 가스 케비넷 |
JP5887188B2 (ja) * | 2012-04-12 | 2016-03-16 | 株式会社堀場エステック | 流体制御用機器 |
US9639094B2 (en) * | 2014-11-12 | 2017-05-02 | Michael D. Palmer | Electronic pneumatic pressure controller |
TW202117217A (zh) * | 2019-09-19 | 2021-05-01 | 美商應用材料股份有限公司 | 清潔減少滯留區的隔離閥 |
US11274764B2 (en) * | 2020-06-26 | 2022-03-15 | American Axle & Manufacturing, Inc. | Valve body element having geometry configured to be formed via powder metal compaction |
US11899477B2 (en) | 2021-03-03 | 2024-02-13 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
US20220372997A1 (en) * | 2021-05-24 | 2022-11-24 | Festo Se & Co. Kg | Fluid control system |
KR102637574B1 (ko) * | 2022-04-26 | 2024-02-19 | 주식회사 제이앤미 | 퍼지 핀 실린더 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05172265A (ja) * | 1991-05-31 | 1993-07-09 | Motoyama Seisakusho:Kk | ガス制御装置 |
JPH06241400A (ja) * | 1993-02-10 | 1994-08-30 | Toshiba Corp | ガス供給装置 |
JPH06281026A (ja) * | 1993-03-22 | 1994-10-07 | Fujikin:Kk | ブロック弁 |
Family Cites Families (14)
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US1797591A (en) * | 1927-05-23 | 1931-03-24 | Wayne Pump Co | Battery of valves |
US2834368A (en) * | 1955-08-01 | 1958-05-13 | Landon R Gray | Multiple valve assembly |
US3234964A (en) * | 1963-09-23 | 1966-02-15 | Cleere B Tinsley | Manifold |
US3513876A (en) * | 1968-04-09 | 1970-05-26 | Akro Tec Inc | Valve manifold module and system |
US3817269A (en) * | 1969-08-22 | 1974-06-18 | Int Basic Economy Corp | Integrated manifold circuits |
US3654960A (en) * | 1969-12-31 | 1972-04-11 | Hydro Stack Mfg Corp | Modular hydraulic system |
US4142860A (en) * | 1976-06-23 | 1979-03-06 | Mayeaux Donald P | Apparatus for producing a calibration sample for analytical instrumentation |
US4082108A (en) * | 1976-07-19 | 1978-04-04 | Maul Technology Corporation | Valve block |
GB2076116B (en) * | 1980-05-20 | 1983-10-12 | Apv Co Ltd | Flow control valve |
US4383547A (en) * | 1981-03-27 | 1983-05-17 | Valin Corporation | Purging apparatus |
US4558845A (en) * | 1982-09-22 | 1985-12-17 | Hunkapiller Michael W | Zero dead volume valve |
US4714091A (en) * | 1985-06-10 | 1987-12-22 | Emcore, Inc. | Modular gas handling apparatus |
US4741354A (en) * | 1987-04-06 | 1988-05-03 | Spire Corporation | Radial gas manifold |
US5368062A (en) * | 1992-01-29 | 1994-11-29 | Kabushiki Kaisha Toshiba | Gas supplying system and gas supplying apparatus |
-
1996
- 1996-11-15 KR KR1019960054576A patent/KR100232112B1/ko not_active IP Right Cessation
- 1996-12-12 SG SG9611698A patent/SG79211A1/en unknown
- 1996-12-30 US US08/777,046 patent/US5819782A/en not_active Expired - Fee Related
- 1996-12-31 MY MYPI96005561A patent/MY114330A/en unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05172265A (ja) * | 1991-05-31 | 1993-07-09 | Motoyama Seisakusho:Kk | ガス制御装置 |
JPH06241400A (ja) * | 1993-02-10 | 1994-08-30 | Toshiba Corp | ガス供給装置 |
JPH06281026A (ja) * | 1993-03-22 | 1994-10-07 | Fujikin:Kk | ブロック弁 |
Also Published As
Publication number | Publication date |
---|---|
MY114330A (en) | 2002-09-30 |
KR100232112B1 (ko) | 1999-12-01 |
US5819782A (en) | 1998-10-13 |
KR980011819A (ko) | 1998-04-30 |
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