SG64461A1 - Shutoff-opening device - Google Patents

Shutoff-opening device

Info

Publication number
SG64461A1
SG64461A1 SG1997004095A SG1997004095A SG64461A1 SG 64461 A1 SG64461 A1 SG 64461A1 SG 1997004095 A SG1997004095 A SG 1997004095A SG 1997004095 A SG1997004095 A SG 1997004095A SG 64461 A1 SG64461 A1 SG 64461A1
Authority
SG
Singapore
Prior art keywords
shutoff
opening device
opening
Prior art date
Application number
SG1997004095A
Other languages
English (en)
Inventor
Tadahiro Ohmi
Keiji Hirao
Shigeaki Tanaka
Michio Yamaji
Hiroshi Morokoshi
Nobikazu Ikeda
Original Assignee
Fujikin Kk
Tadahiro Ohmi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk, Tadahiro Ohmi filed Critical Fujikin Kk
Publication of SG64461A1 publication Critical patent/SG64461A1/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/003Housing formed from a plurality of the same valve elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/7722Line condition change responsive valves
    • Y10T137/7781With separate connected fluid reactor surface
    • Y10T137/7783Valve closes in responses to reverse flow
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/87917Flow path with serial valves and/or closures
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8593Systems
    • Y10T137/87917Flow path with serial valves and/or closures
    • Y10T137/88054Direct response normally closed valve limits direction of flow

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Check Valves (AREA)
  • Multiple-Way Valves (AREA)
  • Safety Valves (AREA)
SG1997004095A 1996-11-20 1997-11-19 Shutoff-opening device SG64461A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30886596A JP3997337B2 (ja) 1996-11-20 1996-11-20 流体制御装置

Publications (1)

Publication Number Publication Date
SG64461A1 true SG64461A1 (en) 1999-04-27

Family

ID=17986197

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1997004095A SG64461A1 (en) 1996-11-20 1997-11-19 Shutoff-opening device

Country Status (9)

Country Link
US (1) US5988217A (ja)
EP (1) EP0844424B1 (ja)
JP (1) JP3997337B2 (ja)
KR (1) KR100481773B1 (ja)
CA (1) CA2221528C (ja)
DE (1) DE69722746T2 (ja)
IL (1) IL122205A (ja)
SG (1) SG64461A1 (ja)
TW (1) TW337545B (ja)

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* Cited by examiner, † Cited by third party
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WO1999045302A1 (en) 1998-03-05 1999-09-10 The Swagelok Company Modular surface mount manifold
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
US7048007B2 (en) 1998-03-05 2006-05-23 Swagelok Company Modular surface mount manifold assemblies
US7036528B2 (en) 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
US6260581B1 (en) 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
EP1084359B1 (en) * 1998-06-12 2003-03-19 J. Gregory Hollingshead Modular chemical delivery blocks
JP4110304B2 (ja) * 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP3921565B2 (ja) * 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
US6186177B1 (en) * 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
US6640835B1 (en) * 2000-03-03 2003-11-04 Creative Pathways, Inc. Micromount™ system
EP1132669B1 (en) * 2000-03-10 2004-10-13 Tokyo Electron Limited Fluid control apparatus
JP4156184B2 (ja) * 2000-08-01 2008-09-24 株式会社キッツエスシーティー 集積化ガス制御装置
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
EP1384121A2 (en) * 2001-04-24 2004-01-28 Unit Instruments, Inc. System and method for a mass flow controller
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
JP2003280745A (ja) * 2002-03-25 2003-10-02 Stec Inc マスフローコントローラ
US7073392B2 (en) * 2002-07-19 2006-07-11 Celerity, Inc. Methods and apparatus for pressure compensation in a mass flow controller
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
GB2411696B (en) 2002-11-26 2007-05-30 Swagelok Co Modular surface mount fluid system
JP2004183771A (ja) * 2002-12-03 2004-07-02 Fujikin Inc 流体制御装置
JP2004340199A (ja) * 2003-05-14 2004-12-02 Fujikin Inc 加熱装置付き流体制御装置
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2007046697A (ja) * 2005-08-10 2007-02-22 Fujikin Inc 継手付き流体制御器
JP5096696B2 (ja) * 2006-03-02 2012-12-12 サーパス工業株式会社 流体機器ユニット構造
JP2007327542A (ja) * 2006-06-07 2007-12-20 Surpass Kogyo Kk 流体機器ユニット構造
US20080029170A1 (en) * 2006-08-02 2008-02-07 O'reilly Edward Three-in-one valve and control system
US8434522B2 (en) 2007-05-31 2013-05-07 Tokyo Electron Limited Fluid control apparatus
US20080302426A1 (en) * 2007-06-06 2008-12-11 Greg Patrick Mulligan System and method of securing removable components for distribution of fluids
US8317493B2 (en) 2007-07-13 2012-11-27 Integrated Designs L.P. Precision pump having multiple heads and using an actuation fluid to pump one or more different process fluids
US8047815B2 (en) 2007-07-13 2011-11-01 Integrated Designs L.P. Precision pump with multiple heads
US8307854B1 (en) * 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8327871B1 (en) * 2009-06-12 2012-12-11 Reliance Worldwide Corporation Multi-valve cartridge pressure regulator
US10107407B2 (en) * 2010-09-28 2018-10-23 Parker-Hannifin Corporation Modular valve manifold system
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9632065B2 (en) 2013-03-11 2017-04-25 Mécanique Analytique Inc. Diaphragm valve with sealing assembly, chromatographic system including same and method of operation thereof
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN108351655B (zh) * 2015-08-26 2021-06-15 株式会社富士金 分流系统
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US11067184B2 (en) * 2017-06-05 2021-07-20 Robertshaw Controls Company Triple icemaker valve with multiple configurations
TW202117217A (zh) 2019-09-19 2021-05-01 美商應用材料股份有限公司 清潔減少滯留區的隔離閥
KR102643448B1 (ko) * 2019-09-27 2024-03-06 가부시키가이샤 후지킨 밸브

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4182355A (en) * 1977-09-01 1980-01-08 Briel Adriaan Z A Reflux valve
US5161571A (en) * 1990-08-09 1992-11-10 Masako Kiyohara Check valve
US5107885A (en) * 1990-08-09 1992-04-28 Masako Kiyohara Check valve
US5139225A (en) * 1990-11-05 1992-08-18 Micron Technology, Inc. Pneumatically controlled multiple valve system for fluid transfer
JP2731080B2 (ja) * 1991-05-31 1998-03-25 株式会社本山製作所 ガス制御装置
US5749389A (en) * 1993-12-22 1998-05-12 Liquid Air Corporation Purgeable connection for gas supply cabinet
US5762086A (en) * 1995-12-19 1998-06-09 Veriflo Corporation Apparatus for delivering process gas for making semiconductors and method of using same

Also Published As

Publication number Publication date
EP0844424B1 (en) 2003-06-11
CA2221528C (en) 2006-06-06
KR19980042522A (ko) 1998-08-17
JPH10148272A (ja) 1998-06-02
TW337545B (en) 1998-08-01
EP0844424A3 (en) 1998-06-03
JP3997337B2 (ja) 2007-10-24
EP0844424A2 (en) 1998-05-27
DE69722746T2 (de) 2004-04-22
IL122205A (en) 2000-10-31
US5988217A (en) 1999-11-23
CA2221528A1 (en) 1998-05-20
IL122205A0 (en) 1998-04-05
DE69722746D1 (de) 2003-07-17
KR100481773B1 (ko) 2005-07-12

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