SG60008A1 - Liquid ejecting printing head production method thereof and production method for base body employed for liquid ejecting printing head - Google Patents

Liquid ejecting printing head production method thereof and production method for base body employed for liquid ejecting printing head

Info

Publication number
SG60008A1
SG60008A1 SG1996010178A SG1996010178A SG60008A1 SG 60008 A1 SG60008 A1 SG 60008A1 SG 1996010178 A SG1996010178 A SG 1996010178A SG 1996010178 A SG1996010178 A SG 1996010178A SG 60008 A1 SG60008 A1 SG 60008A1
Authority
SG
Singapore
Prior art keywords
production method
liquid ejecting
printing head
ejecting printing
base body
Prior art date
Application number
SG1996010178A
Other languages
English (en)
Inventor
Hiroshi Sugitani
Kenji Makino
Masaaki Izumida
Masahiko Kubota
Masami Ikeda
Seiichi Tamura
Shigeyuki Matsumoto
Teruo Ozaki
Yasuhiro Naruse
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Publication of SG60008A1 publication Critical patent/SG60008A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
SG1996010178A 1995-06-28 1996-06-28 Liquid ejecting printing head production method thereof and production method for base body employed for liquid ejecting printing head SG60008A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP16246595 1995-06-28
JP8167657A JPH0970973A (ja) 1995-06-28 1996-06-27 液体噴射記録ヘッド、その製造方法および液体噴射記録ヘッドに用いる基体の製造方法

Publications (1)

Publication Number Publication Date
SG60008A1 true SG60008A1 (en) 1999-02-22

Family

ID=26488252

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996010178A SG60008A1 (en) 1995-06-28 1996-06-28 Liquid ejecting printing head production method thereof and production method for base body employed for liquid ejecting printing head

Country Status (4)

Country Link
US (2) US6382775B1 (de)
EP (1) EP0750990A3 (de)
JP (1) JPH0970973A (de)
SG (1) SG60008A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6527813B1 (en) 1996-08-22 2003-03-04 Canon Kabushiki Kaisha Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
CA2250788C (en) * 1997-10-21 2003-05-20 Tse-Chi Mou Manufacturing process and structure of ink jet printhead
US6293654B1 (en) 1998-04-22 2001-09-25 Hewlett-Packard Company Printhead apparatus
US6331049B1 (en) 1999-03-12 2001-12-18 Hewlett-Packard Company Printhead having varied thickness passivation layer and method of making same
JP4587417B2 (ja) * 1999-06-04 2010-11-24 キヤノン株式会社 液体吐出ヘッド用基板、液体吐出ヘッド、及び前記液体吐出ヘッドの駆動方法
US7025894B2 (en) 2001-10-16 2006-04-11 Hewlett-Packard Development Company, L.P. Fluid-ejection devices and a deposition method for layers thereof
JP3734246B2 (ja) 2001-10-30 2006-01-11 キヤノン株式会社 液体吐出ヘッド及び構造体の製造方法、液体吐出ヘッド並びに液体吐出装置
JP3726909B2 (ja) * 2002-07-10 2005-12-14 セイコーエプソン株式会社 液体噴射ヘッドの製造方法
JP3971279B2 (ja) * 2002-09-20 2007-09-05 キヤノン株式会社 圧電体素子の製造方法
TWI230477B (en) * 2002-09-20 2005-04-01 Canon Kk Composition for forming piezoelectric film, producing method for piezoelectric film, piezoelectric element and ink jet recording head
JP2004107181A (ja) * 2002-09-20 2004-04-08 Canon Inc 圧電体素子形成用組成物、圧電体膜の製造方法、圧電体素子及びインクジェット記録ヘッド
JP2004107179A (ja) 2002-09-20 2004-04-08 Canon Inc 圧電体前駆体ゾル、圧電体膜の製造方法、圧電体素子およびインクジェット記録ヘッド
US6838351B2 (en) * 2003-03-31 2005-01-04 Canon Kabushiki Kaisha Manufacturing method of circuit board, circuit board, and liquid discharging apparatus
JP4847360B2 (ja) * 2006-02-02 2011-12-28 キヤノン株式会社 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法
KR100850648B1 (ko) 2007-01-03 2008-08-07 한국과학기술원 산화물을 이용한 고효율 열발생 저항기, 액체 분사 헤드 및장치, 및 액체 분사 헤드용 기판
JP5501167B2 (ja) 2010-09-08 2014-05-21 キヤノン株式会社 インクジェットヘッドの製造方法
JP2016198908A (ja) * 2015-04-08 2016-12-01 キヤノン株式会社 液体吐出ヘッド
CN105070751B (zh) * 2015-08-18 2017-11-10 成都海威华芯科技有限公司 GaAs HBT器件

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1127227A (en) 1977-10-03 1982-07-06 Ichiro Endo Liquid jet recording process and apparatus therefor
JPS5936879B2 (ja) 1977-10-14 1984-09-06 キヤノン株式会社 熱転写記録用媒体
US4330787A (en) 1978-10-31 1982-05-18 Canon Kabushiki Kaisha Liquid jet recording device
US4345262A (en) 1979-02-19 1982-08-17 Canon Kabushiki Kaisha Ink jet recording method
US4463359A (en) 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4313124A (en) 1979-05-18 1982-01-26 Canon Kabushiki Kaisha Liquid jet recording process and liquid jet recording head
DE3170016D1 (en) * 1980-10-15 1985-05-23 Hitachi Ltd Ink jet printing apparatus
JPS5772867A (en) 1980-10-23 1982-05-07 Canon Inc Liquid injecting recording apparatus
US4558333A (en) 1981-07-09 1985-12-10 Canon Kabushiki Kaisha Liquid jet recording head
JPS59123670A (ja) 1982-12-28 1984-07-17 Canon Inc インクジエツトヘツド
JPS59138461A (ja) 1983-01-28 1984-08-08 Canon Inc 液体噴射記録装置
JPS6071260A (ja) 1983-09-28 1985-04-23 Erumu:Kk 記録装置
US4663640A (en) 1984-07-20 1987-05-05 Canon Kabushiki Kaisha Recording head
JP2871712B2 (ja) * 1988-04-04 1999-03-17 ゼロックス コーポレーション 光支援ｍｏｃｖｄ法
JP2614265B2 (ja) * 1988-04-12 1997-05-28 株式会社リコー 液体噴射記録ヘッド
JP2662446B2 (ja) * 1989-12-11 1997-10-15 キヤノン株式会社 記録ヘッド及び記録ヘッド用素子基板
US5045870A (en) * 1990-04-02 1991-09-03 International Business Machines Corporation Thermal ink drop on demand devices on a single chip with vertical integration of driver device
US5169806A (en) * 1990-09-26 1992-12-08 Xerox Corporation Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers
EP0925933B1 (de) * 1991-04-20 2002-12-11 Canon Kabushiki Kaisha Trägerschicht für Aufzeichnungskopf, Aufzeichnungskopf und Herstellungsverfahren dafür
US5268208A (en) * 1991-07-01 1993-12-07 Ford Motor Company Plasma enhanced chemical vapor deposition of oxide film stack
JP3231096B2 (ja) * 1991-10-15 2001-11-19 キヤノン株式会社 液体噴射記録ヘッド用基体、その製造方法および液体噴射記録ヘッドならびに液体噴射記録装置
JP3402618B2 (ja) * 1991-11-12 2003-05-06 キヤノン株式会社 インクジェット記録ヘッドの製造方法および記録装置
JP3305415B2 (ja) * 1992-06-18 2002-07-22 キヤノン株式会社 半導体装置、インクジェットヘッド、および画像形成装置
JP3423412B2 (ja) 1993-06-23 2003-07-07 キヤノン株式会社 インクジェット記録方法及び記録装置
DE69415408T2 (de) * 1993-06-28 1999-06-10 Canon K.K., Tokio/Tokyo Wärmeerzeugender, TaNO.8 enthaltender Widerstand, Substrat mit diesem wärmeerzeugenden Widerstand für Flüssigkeitsstrahlkopf, Flüssigkeitsstrahlkopf mit diesem Substrat, und Gerät für einen Flüssigkeitsstrahl mit diesem Flüssigkeitsstrahlkopf
JPH0776080A (ja) * 1993-09-08 1995-03-20 Canon Inc 記録ヘッド用基体、記録ヘッド、記録ヘッドカートリッジおよび記録装置と、記録ヘッド用基体の製造方法
DE4445427C2 (de) * 1994-12-20 1997-04-30 Schott Glaswerke Plasma-CVD-Verfahren zur Herstellung einer Gradientenschicht

Also Published As

Publication number Publication date
EP0750990A2 (de) 1997-01-02
JPH0970973A (ja) 1997-03-18
US20020063753A1 (en) 2002-05-30
EP0750990A3 (de) 1998-04-01
US6382775B1 (en) 2002-05-07

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