SG5388G - Stripping compositions and methods of stripping resists - Google Patents
Stripping compositions and methods of stripping resistsInfo
- Publication number
- SG5388G SG5388G SG53/88A SG5388A SG5388G SG 5388 G SG5388 G SG 5388G SG 53/88 A SG53/88 A SG 53/88A SG 5388 A SG5388 A SG 5388A SG 5388 G SG5388 G SG 5388G
- Authority
- SG
- Singapore
- Prior art keywords
- stripping
- compositions
- methods
- resists
- stripping compositions
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5013—Organic solvents containing nitrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/263—Ethers
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3281—Heterocyclic compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Wood Science & Technology (AREA)
- Organic Chemistry (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Epoxy Compounds (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/415,161 US4401748A (en) | 1982-09-07 | 1982-09-07 | Stripping compositions and methods of stripping resists |
Publications (1)
Publication Number | Publication Date |
---|---|
SG5388G true SG5388G (en) | 1988-06-17 |
Family
ID=23644603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG53/88A SG5388G (en) | 1982-09-07 | 1988-01-16 | Stripping compositions and methods of stripping resists |
Country Status (12)
Country | Link |
---|---|
US (1) | US4401748A (ja) |
EP (1) | EP0103808B1 (ja) |
JP (1) | JPS5960438A (ja) |
AT (1) | ATE25296T1 (ja) |
AU (1) | AU555867B2 (ja) |
CA (1) | CA1192119A (ja) |
DE (1) | DE3369577D1 (ja) |
HK (1) | HK51788A (ja) |
IE (1) | IE54417B1 (ja) |
IL (1) | IL69433A0 (ja) |
SG (1) | SG5388G (ja) |
ZA (1) | ZA835590B (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4737195A (en) * | 1983-11-18 | 1988-04-12 | Amchem Products | Activator-accelerator mixtures for alkaline paint stripper compositions |
US4791043A (en) * | 1983-12-20 | 1988-12-13 | Hmc Patents Holding Co., Inc. | Positive photoresist stripping composition |
DE3581659D1 (de) * | 1984-05-21 | 1991-03-14 | Shipley Co | Photolackentferner und verfahren zum entfernen von photolacken. |
US4617251A (en) * | 1985-04-11 | 1986-10-14 | Olin Hunt Specialty Products, Inc. | Stripping composition and method of using the same |
ZA87922B (en) * | 1986-02-28 | 1987-09-30 | Macdermid Inc | Photoresist stripper composition |
JPS6350838A (ja) * | 1986-08-21 | 1988-03-03 | Japan Synthetic Rubber Co Ltd | 剥離液 |
IE59971B1 (en) * | 1986-11-10 | 1994-05-04 | Baker J T Inc | Stripping compositions and their use for stripping resists from substrates |
EP0279089A1 (en) * | 1987-02-16 | 1988-08-24 | W.R. Grace & Co.-Conn. | Paper mill wire and felt cleaning |
WO1988008445A1 (en) * | 1987-04-29 | 1988-11-03 | Coroman Industries, Inc. | Graffiti removal composition and method |
SE462975B (sv) * | 1987-06-05 | 1990-09-24 | Chemie Consult Scandinavia Ab | Saett och rengoeringsmedel vid rengoering av foeremaal eller ytor med anvaendning av ett laettflytande, vaetskeformigt rengoeringsmedel innehaallande n-metyl-2-pyrrolidon genom neddoppning i ett bad innehaallande medlet |
US4824763A (en) * | 1987-07-30 | 1989-04-25 | Ekc Technology, Inc. | Triamine positive photoresist stripping composition and prebaking process |
EP0490726B1 (fr) * | 1990-12-07 | 1995-04-19 | Elf Atochem S.A. | Utilisation d'une composition pour le dépage de peintures |
US5259993A (en) * | 1992-01-21 | 1993-11-09 | Cook Composites And Polymers Co. | Aqueous cleaner |
FR2691713B1 (fr) * | 1992-06-02 | 1997-12-26 | Atochem Elf Sa | Composition pour decaper les peintures. |
US6001192A (en) * | 1992-06-02 | 1999-12-14 | Elf Atochem S.A. | Paint stripping composition |
US5308745A (en) * | 1992-11-06 | 1994-05-03 | J. T. Baker Inc. | Alkaline-containing photoresist stripping compositions producing reduced metal corrosion with cross-linked or hardened resist resins |
CA2123193A1 (en) * | 1993-05-18 | 1994-11-19 | Shinji Konishi | Cleaning solution for apparatuses used for production of photosensitizer, apparatuses used for preparation of positive resist solutions and spin coater line pipings, and cleaning method using the cleaning solution |
ATE199929T1 (de) * | 1996-05-31 | 2001-04-15 | Atofina | Abbeizmittelzusammensetzung auf basis von einem polaren, aprotischen lösungsmittel, einem ether und wasser |
US5759973A (en) * | 1996-09-06 | 1998-06-02 | Olin Microelectronic Chemicals, Inc. | Photoresist stripping and cleaning compositions |
US5780406A (en) * | 1996-09-06 | 1998-07-14 | Honda; Kenji | Non-corrosive cleaning composition for removing plasma etching residues |
US5817610A (en) * | 1996-09-06 | 1998-10-06 | Olin Microelectronic Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
US6030932A (en) * | 1996-09-06 | 2000-02-29 | Olin Microelectronic Chemicals | Cleaning composition and method for removing residues |
US6413923B2 (en) * | 1999-11-15 | 2002-07-02 | Arch Specialty Chemicals, Inc. | Non-corrosive cleaning composition for removing plasma etching residues |
GB0105718D0 (en) * | 2001-03-08 | 2001-04-25 | Shipley Co Llc | Compositions containing heterocyclic nitrogen compounds and glycols for texturing resinous material and desmearing and removing resinous material |
US6677292B2 (en) * | 2002-01-11 | 2004-01-13 | Illinois Tool Works, Inc. | Cleaning solvent and dispenser |
TW200404829A (en) * | 2002-08-19 | 2004-04-01 | Rohm & Haas | Resin cleaning method |
US20070000871A1 (en) * | 2005-07-01 | 2007-01-04 | Harris Research, Inc. | Floor-etching solution |
US8288330B2 (en) * | 2006-05-26 | 2012-10-16 | Air Products And Chemicals, Inc. | Composition and method for photoresist removal |
US8026201B2 (en) | 2007-01-03 | 2011-09-27 | Az Electronic Materials Usa Corp. | Stripper for coating layer |
FR2912151B1 (fr) * | 2007-02-05 | 2009-05-08 | Arkema France | Formulation de dimethylsulfoxyde en melange avec un additif permettant d'abaisser le point de cristallisation de ce dernier, et applications de ce melange |
US8518865B2 (en) | 2009-08-31 | 2013-08-27 | Air Products And Chemicals, Inc. | Water-rich stripping and cleaning formulation and method for using same |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1519393A1 (de) * | 1964-03-03 | 1970-12-23 | Telefunken Patent | Verfahren zum Abloesen eines Photolackes |
NL6800538A (ja) * | 1968-01-12 | 1969-07-15 | ||
US3673099A (en) * | 1970-10-19 | 1972-06-27 | Bell Telephone Labor Inc | Process and composition for stripping cured resins from substrates |
US4055515A (en) * | 1975-12-31 | 1977-10-25 | Borden, Inc. | Developer for printing plates |
US4171240A (en) * | 1978-04-26 | 1979-10-16 | Western Electric Company, Inc. | Method of removing a cured epoxy from a metal surface |
US4276186A (en) * | 1979-06-26 | 1981-06-30 | International Business Machines Corporation | Cleaning composition and use thereof |
US4428871A (en) * | 1981-09-23 | 1984-01-31 | J. T. Baker Chemical Company | Stripping compositions and methods of stripping resists |
-
1982
- 1982-09-07 US US06/415,161 patent/US4401748A/en not_active Expired - Lifetime
-
1983
- 1983-07-20 IE IE1701/83A patent/IE54417B1/en not_active IP Right Cessation
- 1983-07-20 CA CA000432805A patent/CA1192119A/en not_active Expired
- 1983-07-29 AU AU17439/83A patent/AU555867B2/en not_active Ceased
- 1983-07-29 ZA ZA835590A patent/ZA835590B/xx unknown
- 1983-08-04 IL IL69433A patent/IL69433A0/xx unknown
- 1983-08-18 JP JP58149715A patent/JPS5960438A/ja active Granted
- 1983-09-06 EP EP83108772A patent/EP0103808B1/en not_active Expired
- 1983-09-06 DE DE8383108772T patent/DE3369577D1/de not_active Expired
- 1983-09-06 AT AT83108772T patent/ATE25296T1/de not_active IP Right Cessation
-
1988
- 1988-01-16 SG SG53/88A patent/SG5388G/en unknown
- 1988-07-07 HK HK517/88A patent/HK51788A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
EP0103808B1 (en) | 1987-01-28 |
AU1743983A (en) | 1984-03-15 |
JPH0143949B2 (ja) | 1989-09-25 |
JPS5960438A (ja) | 1984-04-06 |
ATE25296T1 (de) | 1987-02-15 |
AU555867B2 (en) | 1986-10-09 |
ZA835590B (en) | 1984-04-25 |
US4401748A (en) | 1983-08-30 |
IE54417B1 (en) | 1989-09-27 |
HK51788A (en) | 1988-07-15 |
EP0103808A1 (en) | 1984-03-28 |
DE3369577D1 (en) | 1987-03-05 |
IL69433A0 (en) | 1983-11-30 |
IE831701L (en) | 1984-03-07 |
CA1192119A (en) | 1985-08-20 |
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