SG44487A1 - Suspended diaphragm pressure sensor - Google Patents

Suspended diaphragm pressure sensor

Info

Publication number
SG44487A1
SG44487A1 SG1996000852A SG1996000852A SG44487A1 SG 44487 A1 SG44487 A1 SG 44487A1 SG 1996000852 A SG1996000852 A SG 1996000852A SG 1996000852 A SG1996000852 A SG 1996000852A SG 44487 A1 SG44487 A1 SG 44487A1
Authority
SG
Singapore
Prior art keywords
pressure sensor
diaphragm pressure
suspended diaphragm
suspended
sensor
Prior art date
Application number
SG1996000852A
Other languages
English (en)
Inventor
Roger L Frick
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of SG44487A1 publication Critical patent/SG44487A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
SG1996000852A 1993-09-20 1994-07-22 Suspended diaphragm pressure sensor SG44487A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/123,729 US5483834A (en) 1993-09-20 1993-09-20 Suspended diaphragm pressure sensor

Publications (1)

Publication Number Publication Date
SG44487A1 true SG44487A1 (en) 1997-12-19

Family

ID=22410513

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996000852A SG44487A1 (en) 1993-09-20 1994-07-22 Suspended diaphragm pressure sensor

Country Status (8)

Country Link
US (1) US5483834A (de)
EP (1) EP0720731B1 (de)
JP (1) JP3447295B2 (de)
CN (1) CN1131460A (de)
CA (1) CA2169723A1 (de)
DE (1) DE69424557T2 (de)
SG (1) SG44487A1 (de)
WO (1) WO1995008757A1 (de)

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DE102011006431A1 (de) * 2011-03-30 2012-10-04 Endress + Hauser Gmbh + Co. Kg Keramische Druckmesszelle und Drucksensor mit einer solchen Druckmesszelle
US9010190B2 (en) 2012-04-20 2015-04-21 Rosemount Aerospace Inc. Stress isolated MEMS structures and methods of manufacture
US8984950B2 (en) * 2012-04-20 2015-03-24 Rosemount Aerospace Inc. Separation mode capacitors for sensors
CN102944352B (zh) * 2012-11-12 2014-05-28 中国航天科技集团公司第五研究院第五一〇研究所 可增强电极板稳定性的电容薄膜式压力传感器
JP2015175833A (ja) * 2014-03-18 2015-10-05 セイコーエプソン株式会社 物理量センサー、高度計、電子機器および移動体
CN106168514A (zh) * 2016-08-28 2016-11-30 桂林市晶准测控技术有限公司 一种压力传感装置
JP2018159593A (ja) * 2017-03-22 2018-10-11 アズビル株式会社 差圧センサチップ、差圧発信器、および差圧センサチップの製造方法
US11371899B2 (en) 2018-05-17 2022-06-28 Rosemount Inc. Measuring element with an extended permeation resistant layer
US11181403B2 (en) * 2019-09-24 2021-11-23 Rosemount Inc. Process variable sensor testing

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Also Published As

Publication number Publication date
JP3447295B2 (ja) 2003-09-16
JPH09503056A (ja) 1997-03-25
CN1131460A (zh) 1996-09-18
WO1995008757A1 (en) 1995-03-30
CA2169723A1 (en) 1995-03-30
EP0720731A1 (de) 1996-07-10
DE69424557T2 (de) 2001-01-18
DE69424557D1 (de) 2000-06-21
US5483834A (en) 1996-01-16
EP0720731B1 (de) 2000-05-17

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