SG184080A1 - Systems and method for target material delivery protection in a laser produced plasma euv light source - Google Patents

Systems and method for target material delivery protection in a laser produced plasma euv light source Download PDF

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Publication number
SG184080A1
SG184080A1 SG2012068359A SG2012068359A SG184080A1 SG 184080 A1 SG184080 A1 SG 184080A1 SG 2012068359 A SG2012068359 A SG 2012068359A SG 2012068359 A SG2012068359 A SG 2012068359A SG 184080 A1 SG184080 A1 SG 184080A1
Authority
SG
Singapore
Prior art keywords
shroud
target material
stream
recited
path
Prior art date
Application number
SG2012068359A
Other languages
English (en)
Inventor
Igor V Fomenkov
William N Partlo
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of SG184080A1 publication Critical patent/SG184080A1/en

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Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21G—CONVERSION OF CHEMICAL ELEMENTS; RADIOACTIVE SOURCES
    • G21G5/00—Alleged conversion of chemical elements by chemical reaction
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/002—Supply of the plasma generating material
    • H05G2/0025—Systems for collecting the plasma generating material after the plasma generation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/009—Auxiliary arrangements not involved in the plasma generation
    • H05G2/0094—Reduction, prevention or protection from contamination; Cleaning

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SG2012068359A 2010-04-09 2011-04-01 Systems and method for target material delivery protection in a laser produced plasma euv light source SG184080A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US34217910P 2010-04-09 2010-04-09
US13/075,500 US8263953B2 (en) 2010-04-09 2011-03-30 Systems and methods for target material delivery protection in a laser produced plasma EUV light source
PCT/US2011/030981 WO2011126949A1 (en) 2010-04-09 2011-04-01 Systems and method for target material delivery protection in a laser produced plasma euv light source

Publications (1)

Publication Number Publication Date
SG184080A1 true SG184080A1 (en) 2012-10-30

Family

ID=44760255

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2012068359A SG184080A1 (en) 2010-04-09 2011-04-01 Systems and method for target material delivery protection in a laser produced plasma euv light source

Country Status (8)

Country Link
US (1) US8263953B2 (enExample)
EP (1) EP2556514A4 (enExample)
JP (1) JP5828887B2 (enExample)
KR (1) KR101726281B1 (enExample)
CN (1) CN102822903B (enExample)
SG (1) SG184080A1 (enExample)
TW (1) TWI507089B (enExample)
WO (1) WO2011126949A1 (enExample)

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Also Published As

Publication number Publication date
US20110248191A1 (en) 2011-10-13
KR20130042488A (ko) 2013-04-26
CN102822903A (zh) 2012-12-12
US8263953B2 (en) 2012-09-11
WO2011126949A1 (en) 2011-10-13
CN102822903B (zh) 2016-04-27
KR101726281B1 (ko) 2017-04-12
JP5828887B2 (ja) 2015-12-09
TW201143540A (en) 2011-12-01
TWI507089B (zh) 2015-11-01
JP2013524464A (ja) 2013-06-17
EP2556514A1 (en) 2013-02-13
EP2556514A4 (en) 2014-07-02

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