SG157992A1 - Improvements in and relating to mram - Google Patents

Improvements in and relating to mram

Info

Publication number
SG157992A1
SG157992A1 SG200805077-5A SG2008050775A SG157992A1 SG 157992 A1 SG157992 A1 SG 157992A1 SG 2008050775 A SG2008050775 A SG 2008050775A SG 157992 A1 SG157992 A1 SG 157992A1
Authority
SG
Singapore
Prior art keywords
cell
substrate
layer
mram
low resistance
Prior art date
Application number
SG200805077-5A
Other languages
English (en)
Inventor
Ang Kor Seng
Original Assignee
Showa Denko Hd Singapore Pte L
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Hd Singapore Pte L filed Critical Showa Denko Hd Singapore Pte L
Priority to SG200805077-5A priority Critical patent/SG157992A1/en
Priority to US12/493,612 priority patent/US7919334B2/en
Priority to JP2009155857A priority patent/JP2010016379A/ja
Publication of SG157992A1 publication Critical patent/SG157992A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Hall/Mr Elements (AREA)
  • Semiconductor Memories (AREA)
  • Mram Or Spin Memory Techniques (AREA)
SG200805077-5A 2008-07-01 2008-07-01 Improvements in and relating to mram SG157992A1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
SG200805077-5A SG157992A1 (en) 2008-07-01 2008-07-01 Improvements in and relating to mram
US12/493,612 US7919334B2 (en) 2008-07-01 2009-06-29 Mram
JP2009155857A JP2010016379A (ja) 2008-07-01 2009-06-30 Ｍｒａｍ及びその改良

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SG200805077-5A SG157992A1 (en) 2008-07-01 2008-07-01 Improvements in and relating to mram

Publications (1)

Publication Number Publication Date
SG157992A1 true SG157992A1 (en) 2010-01-29

Family

ID=41464717

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200805077-5A SG157992A1 (en) 2008-07-01 2008-07-01 Improvements in and relating to mram

Country Status (3)

Country Link
US (1) US7919334B2 (ja)
JP (1) JP2010016379A (ja)
SG (1) SG157992A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5470839B2 (ja) * 2008-12-25 2014-04-16 株式会社Ｓｕｍｃｏ 貼り合わせシリコンウェーハの製造方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0973612A (ja) * 1995-09-06 1997-03-18 Sanyo Electric Co Ltd 磁気抵抗効果ヘッド及びその製造方法
US6400600B1 (en) * 2000-09-30 2002-06-04 Hewlett-Packard Company Method of repairing defective tunnel junctions
US6347049B1 (en) * 2001-07-25 2002-02-12 International Business Machines Corporation Low resistance magnetic tunnel junction device with bilayer or multilayer tunnel barrier
JP2003324187A (ja) * 2002-05-01 2003-11-14 Sony Corp 磁気メモリ装置の製造方法および磁気メモリ装置
US20040082081A1 (en) * 2002-10-29 2004-04-29 Manish Sharma Ultra-violet treatment for a tunnel barrier layer in a tunnel junction device
US6828260B2 (en) * 2002-10-29 2004-12-07 Hewlett-Packard Development Company, L.P. Ultra-violet treatment of a tunnel barrier layer through an overlayer a tunnel junction device
JP4863151B2 (ja) * 2003-06-23 2012-01-25 日本電気株式会社 磁気ランダム・アクセス・メモリとその製造方法
KR100500455B1 (ko) * 2003-08-11 2005-07-18 삼성전자주식회사 산화된 버퍼층을 갖는 자기터널 접합 구조체 및 그 제조방법
US7252852B1 (en) * 2003-12-12 2007-08-07 International Business Machines Corporation Mg-Zn oxide tunnel barriers and method of formation
US7264974B2 (en) * 2004-01-30 2007-09-04 Headway Technologies, Inc. Method for fabricating a low resistance TMR read head
US6960480B1 (en) * 2004-05-19 2005-11-01 Headway Technologies, Inc. Method of forming a magnetic tunneling junction (MTJ) MRAM device and a tunneling magnetoresistive (TMR) read head
US7645618B2 (en) * 2004-09-09 2010-01-12 Tegal Corporation Dry etch stop process for eliminating electrical shorting in MRAM device structures
KR100601981B1 (ko) * 2005-01-14 2006-07-18 삼성전자주식회사 활동패턴 감시 방법 및 장치
KR100622268B1 (ko) * 2005-07-04 2006-09-11 한양대학교 산학협력단 ＲｅＲＡＭ 소자용 다층 이원산화박막의 형성방법
JP5109395B2 (ja) * 2007-02-14 2012-12-26 富士通セミコンダクター株式会社 半導体装置及びその製造方法

Also Published As

Publication number Publication date
US7919334B2 (en) 2011-04-05
JP2010016379A (ja) 2010-01-21
US20100003834A1 (en) 2010-01-07

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