SG149809A1 - Patterned wafer defect inspection system and method - Google Patents

Patterned wafer defect inspection system and method

Info

Publication number
SG149809A1
SG149809A1 SG200805697-0A SG2008056970A SG149809A1 SG 149809 A1 SG149809 A1 SG 149809A1 SG 2008056970 A SG2008056970 A SG 2008056970A SG 149809 A1 SG149809 A1 SG 149809A1
Authority
SG
Singapore
Prior art keywords
golden
region
defect inspection
templates
inspection system
Prior art date
Application number
SG200805697-0A
Other languages
English (en)
Inventor
Ajharali Amanullah
Lin Jing
Chunlin Luke Zeng
Original Assignee
Semiconductor Tech & Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Tech & Instr Inc filed Critical Semiconductor Tech & Instr Inc
Publication of SG149809A1 publication Critical patent/SG149809A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers

Landscapes

  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
SG200805697-0A 2007-08-02 2008-07-31 Patterned wafer defect inspection system and method SG149809A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/888,827 US8401272B2 (en) 2007-08-02 2007-08-02 Patterned wafer defect inspection system and method

Publications (1)

Publication Number Publication Date
SG149809A1 true SG149809A1 (en) 2009-02-27

Family

ID=40305081

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200805697-0A SG149809A1 (en) 2007-08-02 2008-07-31 Patterned wafer defect inspection system and method

Country Status (11)

Country Link
US (1) US8401272B2 (zh)
EP (1) EP2212909B1 (zh)
KR (1) KR101591374B1 (zh)
CN (2) CN101358935B (zh)
CA (1) CA2638415C (zh)
HK (1) HK1199145A1 (zh)
MY (1) MY160426A (zh)
PT (1) PT2212909T (zh)
SG (1) SG149809A1 (zh)
TW (1) TWI477790B (zh)
WO (1) WO2009017465A2 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8682056B2 (en) * 2008-06-30 2014-03-25 Ncr Corporation Media identification
US8571299B2 (en) 2010-08-30 2013-10-29 International Business Machines Corporation Identifying defects
WO2012148848A2 (en) * 2011-04-26 2012-11-01 Kla-Tencor Corporation Method and system for hybrid reticle inspection
MY179130A (en) * 2013-06-07 2020-10-28 Semiconductor Tech & Instruments Pte Ltd Systems and methods for automatically verifying correct die removal from film frames
US10127652B2 (en) * 2014-02-06 2018-11-13 Kla-Tencor Corp. Defect detection and classification based on attributes determined from a standard reference image
US10475178B1 (en) * 2017-01-30 2019-11-12 Kla-Tencor Corporation System, method and computer program product for inspecting a wafer using a film thickness map generated for the wafer
CN107729635B (zh) * 2017-09-30 2018-12-21 英特尔产品（成都）有限公司 半导体芯片合格性检查方法及装置
US20230237762A1 (en) * 2022-01-10 2023-07-27 Applied Materials, Inc. Template-based image processing for target segmentation and metrology
CN116609342A (zh) * 2023-01-31 2023-08-18 眉山博雅新材料股份有限公司 一种工件缺陷检测方法和系统

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5640200A (en) * 1994-08-31 1997-06-17 Cognex Corporation Golden template comparison using efficient image registration
US5850466A (en) * 1995-02-22 1998-12-15 Cognex Corporation Golden template comparison for rotated and/or scaled images
JP2002516032A (ja) * 1997-01-21 2002-05-28 セキデンコ インコーポレイテッド 成長する半導体層の温度を制御する方法
US6330354B1 (en) * 1997-05-01 2001-12-11 International Business Machines Corporation Method of analyzing visual inspection image data to find defects on a device
JP3534582B2 (ja) * 1997-10-02 2004-06-07 株式会社日立製作所 パターン欠陥検査方法および検査装置
JP2002100660A (ja) * 2000-07-18 2002-04-05 Hitachi Ltd 欠陥検出方法と欠陥観察方法及び欠陥検出装置
US6920241B1 (en) * 2000-09-29 2005-07-19 Cognex Corporation System and method for bundled location and regional inspection
US6627863B2 (en) * 2000-12-15 2003-09-30 Mitutoyo Corporation System and methods to determine the settings of multiple light sources in a vision system
JP4014379B2 (ja) 2001-02-21 2007-11-28 株式会社日立製作所 欠陥レビュー装置及び方法
SE0101486D0 (sv) * 2001-04-27 2001-04-27 Smart Eye Ab Method for automatic tracking of a moving body
JP4122735B2 (ja) 2001-07-24 2008-07-23 株式会社日立製作所 半導体デバイスの検査方法および検査条件設定方法
US7265382B2 (en) * 2002-11-12 2007-09-04 Applied Materials, Inc. Method and apparatus employing integrated metrology for improved dielectric etch efficiency
JP4334927B2 (ja) * 2003-06-27 2009-09-30 キヤノン株式会社 半導体レーザーダイオードチップの検査方法および検査装置
US7366321B2 (en) * 2004-06-18 2008-04-29 Agilent Technologies, Inc. System and method for performing automated optical inspection of objects
US7813541B2 (en) * 2005-02-28 2010-10-12 Applied Materials South East Asia Pte. Ltd. Method and apparatus for detecting defects in wafers

Also Published As

Publication number Publication date
CA2638415A1 (en) 2009-02-02
MY160426A (en) 2017-03-15
EP2212909A2 (en) 2010-08-04
EP2212909A4 (en) 2016-05-11
CN103972124B (zh) 2021-10-22
CA2638415C (en) 2016-07-19
EP2212909B1 (en) 2019-12-25
HK1199145A1 (zh) 2015-06-19
WO2009017465A2 (en) 2009-02-05
US20090034831A1 (en) 2009-02-05
PT2212909T (pt) 2020-03-31
TW200921120A (en) 2009-05-16
KR101591374B1 (ko) 2016-02-04
WO2009017465A3 (en) 2009-04-09
CN101358935A (zh) 2009-02-04
KR20090013730A (ko) 2009-02-05
US8401272B2 (en) 2013-03-19
CN101358935B (zh) 2014-05-07
TWI477790B (zh) 2015-03-21
CN103972124A (zh) 2014-08-06

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