SG136127A1 - Ruthenium alloy magnetic media and sputter targets - Google Patents

Ruthenium alloy magnetic media and sputter targets

Info

Publication number
SG136127A1
SG136127A1 SG200706571-7A SG2007065717A SG136127A1 SG 136127 A1 SG136127 A1 SG 136127A1 SG 2007065717 A SG2007065717 A SG 2007065717A SG 136127 A1 SG136127 A1 SG 136127A1
Authority
SG
Singapore
Prior art keywords
magnetic media
alloy magnetic
ruthenium alloy
sputter targets
sputter
Prior art date
Application number
SG200706571-7A
Other languages
English (en)
Inventor
Anirban Das
Michael Gene Racine
Original Assignee
Heraeus Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Inc filed Critical Heraeus Inc
Publication of SG136127A1 publication Critical patent/SG136127A1/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C28/00Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • G11B5/73Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
    • G11B5/7368Non-polymeric layer under the lowermost magnetic recording layer
    • G11B5/7369Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
    • G11B5/737Physical structure of underlayer, e.g. texture
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851Coating a support with a magnetic layer by sputtering
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
SG200706571-7A 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets SG136127A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/353,141 US20070190364A1 (en) 2006-02-14 2006-02-14 Ruthenium alloy magnetic media and sputter targets

Publications (1)

Publication Number Publication Date
SG136127A1 true SG136127A1 (en) 2007-10-29

Family

ID=36910806

Family Applications (6)

Application Number Title Priority Date Filing Date
SG200706573-3A SG136129A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200706575-8A SG136131A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200706571-7A SG136127A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200708817-2A SG136142A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200604128-9A SG135085A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200706572-5A SG136128A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets

Family Applications Before (2)

Application Number Title Priority Date Filing Date
SG200706573-3A SG136129A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200706575-8A SG136131A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets

Family Applications After (3)

Application Number Title Priority Date Filing Date
SG200708817-2A SG136142A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200604128-9A SG135085A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets
SG200706572-5A SG136128A1 (en) 2006-02-14 2006-06-16 Ruthenium alloy magnetic media and sputter targets

Country Status (8)

Country Link
US (1) US20070190364A1 (cs)
EP (1) EP1818917A1 (cs)
JP (1) JP2007220267A (cs)
KR (1) KR20070082005A (cs)
CN (1) CN101022014A (cs)
CZ (1) CZ2006383A3 (cs)
SG (6) SG136129A1 (cs)
TW (1) TW200731300A (cs)

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WO2009051090A1 (ja) * 2007-10-15 2009-04-23 Hoya Corporation 垂直磁気記録媒体
JP2013535786A (ja) 2010-07-29 2013-09-12 フェデラル−モーグル・イグニション・カンパニー 点火プラグで使用するための電極材料
US8471451B2 (en) 2011-01-05 2013-06-25 Federal-Mogul Ignition Company Ruthenium-based electrode material for a spark plug
WO2012102994A2 (en) 2011-01-27 2012-08-02 Federal-Mogul Ignition Company Electrode material for a spark plug
DE112012000947B4 (de) 2011-02-22 2018-03-22 Federal-Mogul Ignition Company Verfahren zum Herstellen eines Elektrodenmaterials für einen Zündkerze
JP5699016B2 (ja) * 2011-03-30 2015-04-08 田中貴金属工業株式会社 Ru−Pd系スパッタリングターゲット及びその製造方法
WO2013003325A2 (en) 2011-06-28 2013-01-03 Federal-Mogul Ignition Company Electrode material for a spark plug
US10044172B2 (en) 2012-04-27 2018-08-07 Federal-Mogul Ignition Company Electrode for spark plug comprising ruthenium-based material
DE112013002619B4 (de) 2012-05-22 2018-12-27 Federal-Mogul Ignition Company Verfahren zum Herstellen eines Elektrodenmaterials
US8979606B2 (en) 2012-06-26 2015-03-17 Federal-Mogul Ignition Company Method of manufacturing a ruthenium-based spark plug electrode material into a desired form and a ruthenium-based material for use in a spark plug
CN104032270B (zh) * 2014-06-12 2016-05-04 贵研铂业股份有限公司 一种大尺寸钌基合金溅射靶材及其制备方法
US20160125903A1 (en) * 2014-10-31 2016-05-05 HGST Netherlands B.V. Perpendicular magnetic recording medium having an oxide seed layer and ru alloy intermediate layer
JP7258275B2 (ja) * 2019-05-09 2023-04-17 株式会社レゾナック 磁気記録媒体および磁気記録再生装置

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Also Published As

Publication number Publication date
CN101022014A (zh) 2007-08-22
KR20070082005A (ko) 2007-08-20
JP2007220267A (ja) 2007-08-30
EP1818917A1 (en) 2007-08-15
SG136129A1 (en) 2007-10-29
SG136128A1 (en) 2007-10-29
US20070190364A1 (en) 2007-08-16
SG136142A1 (en) 2007-10-29
SG136131A1 (en) 2007-10-29
CZ2006383A3 (cs) 2007-09-05
SG135085A1 (en) 2007-09-28
TW200731300A (en) 2007-08-16

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