SG117607A1 - Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby - Google Patents

Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby

Info

Publication number
SG117607A1
SG117607A1 SG200503330A SG200503330A SG117607A1 SG 117607 A1 SG117607 A1 SG 117607A1 SG 200503330 A SG200503330 A SG 200503330A SG 200503330 A SG200503330 A SG 200503330A SG 117607 A1 SG117607 A1 SG 117607A1
Authority
SG
Singapore
Prior art keywords
lamp
protective cover
installing
source
lithographic apparatus
Prior art date
Application number
SG200503330A
Other languages
English (en)
Inventor
Stephan Silvester Sal Koenraad
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of SG117607A1 publication Critical patent/SG117607A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70983—Optical system protection, e.g. pellicles or removable covers for protection of mask
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V15/00—Protecting lighting devices from damage
    • F21V15/01—Housings, e.g. material or assembling of housing parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V15/00—Protecting lighting devices from damage
    • F21V15/02—Cages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70975—Assembly, maintenance, transport or storage of apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Plasma & Fusion (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
SG200503330A 2004-06-04 2005-05-26 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby SG117607A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/860,655 US20050269934A1 (en) 2004-06-04 2004-06-04 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby

Publications (1)

Publication Number Publication Date
SG117607A1 true SG117607A1 (en) 2005-12-29

Family

ID=34939920

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200503330A SG117607A1 (en) 2004-06-04 2005-05-26 Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby

Country Status (7)

Country Link
US (1) US20050269934A1 (zh)
EP (1) EP1602980A3 (zh)
JP (1) JP2005347268A (zh)
KR (1) KR100609111B1 (zh)
CN (1) CN1707156A (zh)
SG (1) SG117607A1 (zh)
TW (1) TWI279652B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006127866A2 (en) * 2005-05-23 2006-11-30 Karlheinz Strobl Delivery system for removable lamp
DE102006030275A1 (de) * 2006-06-30 2008-01-03 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Schutzhülle für Lampen und zugehörige Baueinheit
CN101440927B (zh) * 2007-11-23 2010-12-15 鸿富锦精密工业（深圳）有限公司 发光装置
TWI413872B (zh) * 2010-08-30 2013-11-01 Zhen Ding Technology Co Ltd 電路板標記系統及其使用方法
CN103543860A (zh) * 2012-07-12 2014-01-29 云辉科技股份有限公司 触控模块信号端的制造方法及其结构
GB2596574A (en) * 2020-07-01 2022-01-05 Ceravision Ltd Lamp for emitting UV-B radiation & luminaire

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB861881A (en) * 1957-12-16 1961-03-01 Ass Elect Ind Improvements relating to protective covers for electric lamps
US4737401A (en) * 1985-03-11 1988-04-12 Allied Corporation Ballistic-resistant fine weave fabric article
NO870539L (no) * 1986-02-21 1987-08-24 Rohrmoser Alois Skifabrik Forsterkningselement for inkorporering i en harpiks og anvendelse av dette elementet.
US5119512A (en) * 1986-06-12 1992-06-09 Allied-Signal Inc. Cut resistant yarn, fabric and gloves
US4888517A (en) * 1987-08-28 1989-12-19 Gte Products Corporation Double-enveloped lamp having a shield surrounding a light-source capsule within a thick-walled outer envelope
DE4317252C1 (de) * 1993-05-24 1994-05-05 Blv Licht & Vakuumtechnik Gasentladungslampe
US5565264A (en) * 1994-08-29 1996-10-15 Warwick Mills, Inc. Protective fabric having high penetration resistance
US6233978B1 (en) * 1998-04-09 2001-05-22 Gehring Textiles, Inc. Pointed thrust weapons protective fabric system
JP4578014B2 (ja) * 2001-04-05 2010-11-10 株式会社オーク製作所 放電灯の安全カバー
JP2003160185A (ja) * 2001-11-21 2003-06-03 Ushio Inc 放電ランプ用保護カバー

Also Published As

Publication number Publication date
EP1602980A3 (en) 2007-09-26
KR100609111B1 (ko) 2006-08-08
TW200608151A (en) 2006-03-01
EP1602980A2 (en) 2005-12-07
JP2005347268A (ja) 2005-12-15
KR20060049541A (ko) 2006-05-19
CN1707156A (zh) 2005-12-14
TWI279652B (en) 2007-04-21
US20050269934A1 (en) 2005-12-08

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