SG114756A1 - Lithographic apparatus and device manufacturing method - Google Patents

Lithographic apparatus and device manufacturing method

Info

Publication number
SG114756A1
SG114756A1 SG200501102A SG200501102A SG114756A1 SG 114756 A1 SG114756 A1 SG 114756A1 SG 200501102 A SG200501102 A SG 200501102A SG 200501102 A SG200501102 A SG 200501102A SG 114756 A1 SG114756 A1 SG 114756A1
Authority
SG
Singapore
Prior art keywords
device manufacturing
lithographic apparatus
lithographic
manufacturing
Prior art date
Application number
SG200501102A
Other languages
English (en)
Inventor
Jager Pieter Willem Herman De
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of SG114756A1 publication Critical patent/SG114756A1/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03F—SEWERS; CESSPOOLS
    • E03F1/00—Methods, systems, or installations for draining-off sewage or storm water
    • E03F1/002—Methods, systems, or installations for draining-off sewage or storm water with disposal into the ground, e.g. via dry wells
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03F—SEWERS; CESSPOOLS
    • E03F3/00—Sewer pipe-line systems
    • E03F3/04—Pipes or fittings specially adapted to sewers
    • E—FIXED CONSTRUCTIONS
    • E03—WATER SUPPLY; SEWERAGE
    • E03F—SEWERS; CESSPOOLS
    • E03F5/00—Sewerage structures
    • E03F5/14—Devices for separating liquid or solid substances from sewage, e.g. sand or sludge traps, rakes or grates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Hydrology & Water Resources (AREA)
  • Public Health (AREA)
  • Water Supply & Treatment (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SG200501102A 2004-02-27 2005-02-24 Lithographic apparatus and device manufacturing method SG114756A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/788,256 US7016014B2 (en) 2004-02-27 2004-02-27 Lithographic apparatus and device manufacturing method

Publications (1)

Publication Number Publication Date
SG114756A1 true SG114756A1 (en) 2005-09-28

Family

ID=34750527

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200501102A SG114756A1 (en) 2004-02-27 2005-02-24 Lithographic apparatus and device manufacturing method

Country Status (7)

Country Link
US (1) US7016014B2 (zh)
EP (1) EP1569034A1 (zh)
JP (1) JP4499582B2 (zh)
KR (1) KR100598636B1 (zh)
CN (1) CN100498535C (zh)
SG (1) SG114756A1 (zh)
TW (1) TWI278003B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005074895A1 (en) * 2004-02-04 2005-08-18 Alembic Limited Extended release coated microtablets of venlafaxine hydrochloride
US7145640B2 (en) * 2004-03-22 2006-12-05 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and variable attenuator
JP2006119601A (ja) * 2004-09-24 2006-05-11 Canon Inc 光変調素子及びそれを利用した光学装置
JP5722136B2 (ja) * 2011-06-30 2015-05-20 株式会社Ｓｃｒｅｅｎホールディングス パターン描画装置およびパターン描画方法
DE102011082065A1 (de) * 2011-09-02 2012-09-27 Carl Zeiss Smt Gmbh Spiegel-Array
WO2013108560A1 (ja) * 2012-01-18 2013-07-25 株式会社ニコン 空間光変調器の駆動方法、露光用パターンの生成方法、並びに露光方法及び装置
KR20220065875A (ko) 2019-10-29 2022-05-20 에이에스엠엘 홀딩 엔.브이. 가변 회절 격자

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US5523193A (en) * 1988-05-31 1996-06-04 Texas Instruments Incorporated Method and apparatus for patterning and imaging member
US6219015B1 (en) * 1992-04-28 2001-04-17 The Board Of Directors Of The Leland Stanford, Junior University Method and apparatus for using an array of grating light valves to produce multicolor optical images
US5311360A (en) * 1992-04-28 1994-05-10 The Board Of Trustees Of The Leland Stanford, Junior University Method and apparatus for modulating a light beam
JP3224041B2 (ja) * 1992-07-29 2001-10-29 株式会社ニコン 露光方法及び装置
US5729331A (en) * 1993-06-30 1998-03-17 Nikon Corporation Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus
JP3339149B2 (ja) * 1993-12-08 2002-10-28 株式会社ニコン 走査型露光装置ならびに露光方法
US5539567A (en) * 1994-06-16 1996-07-23 Texas Instruments Incorporated Photolithographic technique and illuminator using real-time addressable phase shift light shift
US5677703A (en) * 1995-01-06 1997-10-14 Texas Instruments Incorporated Data loading circuit for digital micro-mirror device
US5530482A (en) * 1995-03-21 1996-06-25 Texas Instruments Incorporated Pixel data processing for spatial light modulator having staggered pixels
US5841579A (en) * 1995-06-07 1998-11-24 Silicon Light Machines Flat diffraction grating light valve
EP0991959B1 (en) * 1996-02-28 2004-06-23 Kenneth C. Johnson Microlens scanner for microlithography and wide-field confocal microscopy
US6177980B1 (en) * 1997-02-20 2001-01-23 Kenneth C. Johnson High-throughput, maskless lithography system
US5982553A (en) * 1997-03-20 1999-11-09 Silicon Light Machines Display device incorporating one-dimensional grating light-valve array
SE9800665D0 (sv) * 1998-03-02 1998-03-02 Micronic Laser Systems Ab Improved method for projection printing using a micromirror SLM
US6271957B1 (en) * 1998-05-29 2001-08-07 Affymetrix, Inc. Methods involving direct write optical lithography
JP2001004932A (ja) * 1999-06-21 2001-01-12 Seiko Epson Corp 光変調デバイス及び表示装置
JP3800287B2 (ja) * 1999-08-05 2006-07-26 セイコーエプソン株式会社 光変調デバイス及びその製造方法並びに表示装置
JP3800288B2 (ja) * 1999-08-05 2006-07-26 セイコーエプソン株式会社 光変調デバイス及び表示装置
KR100827874B1 (ko) * 2000-05-22 2008-05-07 가부시키가이샤 니콘 노광 장치, 노광 장치의 제조 방법, 노광 방법, 마이크로 장치의 제조 방법, 및 디바이스의 제조 방법
US6433917B1 (en) * 2000-11-22 2002-08-13 Ball Semiconductor, Inc. Light modulation device and system
US7177081B2 (en) 2001-03-08 2007-02-13 Silicon Light Machines Corporation High contrast grating light valve type device
JP3563384B2 (ja) * 2001-11-08 2004-09-08 大日本スクリーン製造株式会社 画像記録装置
WO2003060597A2 (en) * 2001-12-21 2003-07-24 Polychromix Corporation Method and apparatus providing reduced polarization-dependent loss
JP2004004601A (ja) * 2002-04-04 2004-01-08 Sony Corp 光スイッチング素子、光スイッチング素子アレイ、及び画像表示装置
US6707534B2 (en) * 2002-05-10 2004-03-16 Anvik Corporation Maskless conformable lithography
JP4338434B2 (ja) * 2002-06-07 2009-10-07 富士フイルム株式会社 透過型２次元光変調素子及びそれを用いた露光装置
CN1332267C (zh) * 2002-06-12 2007-08-15 Asml荷兰有限公司 光刻装置和器件的制造方法
US6870554B2 (en) * 2003-01-07 2005-03-22 Anvik Corporation Maskless lithography with multiplexed spatial light modulators
CN1472036A (zh) 2003-05-22 2004-02-04 上海交通大学 三轴孔装配机
US7061591B2 (en) * 2003-05-30 2006-06-13 Asml Holding N.V. Maskless lithography systems and methods utilizing spatial light modulator arrays
EP1482375B1 (en) 2003-05-30 2014-09-17 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JP4499582B2 (ja) 2010-07-07
EP1569034A1 (en) 2005-08-31
KR100598636B1 (ko) 2006-07-10
KR20060045332A (ko) 2006-05-17
CN1661481A (zh) 2005-08-31
TWI278003B (en) 2007-04-01
TW200539238A (en) 2005-12-01
CN100498535C (zh) 2009-06-10
JP2005244239A (ja) 2005-09-08
US20050190354A1 (en) 2005-09-01
US7016014B2 (en) 2006-03-21

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