SG113498A1 - Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry - Google Patents

Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry

Info

Publication number
SG113498A1
SG113498A1 SG200400652A SG200400652A SG113498A1 SG 113498 A1 SG113498 A1 SG 113498A1 SG 200400652 A SG200400652 A SG 200400652A SG 200400652 A SG200400652 A SG 200400652A SG 113498 A1 SG113498 A1 SG 113498A1
Authority
SG
Singapore
Prior art keywords
movable portion
electrically isolated
drive circuitry
associated drive
electrostatic microactuator
Prior art date
Application number
SG200400652A
Other languages
English (en)
Inventor
Hirano Toshiki
Hung Yang Henry
Original Assignee
Hitachi Global Storage Tech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Global Storage Tech filed Critical Hitachi Global Storage Tech
Publication of SG113498A1 publication Critical patent/SG113498A1/en

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B21/00—Head arrangements not specific to the method of recording or reproducing
    • G11B21/02—Driving or moving of heads
    • G11B21/08—Track changing or selecting during transducing operation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/54—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed with provision for moving the head into or out of its operative position or across tracks
    • G11B5/55—Track change, selection or acquisition by displacement of the head
    • G11B5/5521—Track change, selection or acquisition by displacement of the head across disk tracks
    • G11B5/5552—Track change, selection or acquisition by displacement of the head across disk tracks using fine positioning means for track acquisition separate from the coarse (e.g. track changing) positioning means
SG200400652A 2003-02-13 2004-02-12 Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry SG113498A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/367,022 US6853517B2 (en) 2003-02-13 2003-02-13 Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry

Publications (1)

Publication Number Publication Date
SG113498A1 true SG113498A1 (en) 2005-08-29

Family

ID=32849870

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200400652A SG113498A1 (en) 2003-02-13 2004-02-12 Electrostatic microactuator with electrically isolated movable portion and associated drive circuitry

Country Status (7)

Country Link
US (1) US6853517B2 (zh)
EP (1) EP1391882A1 (zh)
JP (1) JP2004247027A (zh)
KR (1) KR20040073326A (zh)
CN (1) CN1305031C (zh)
SG (1) SG113498A1 (zh)
TW (1) TW200415578A (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60133586T2 (de) * 2001-02-20 2009-04-30 Fujitsu Ltd., Kawasaki Kopfschieber und verfahren zu seiner herstellung
US20030076121A1 (en) * 2001-10-23 2003-04-24 Wei Guo Peizoelectric microactuator and sensor failure detection in disk drives
US7149060B2 (en) * 2002-10-01 2006-12-12 Magnecomp Corporation Actuation device and method for high density hard disk drive head
US7369369B1 (en) 2003-04-03 2008-05-06 Meyer Dallas W Bidirectional micropositioning recording head for a magnetic storage device
US7538983B1 (en) * 2003-07-29 2009-05-26 Meyer Dallas W Micropositioner recording head for a magnetic storage device
US7369358B2 (en) * 2004-02-05 2008-05-06 Seagate Technology Llc Grounded writer core
US7345851B2 (en) * 2004-08-26 2008-03-18 Hitachi Global Storage Technologies Netherlands B.V. Disk drive with rotary piezoelectric microactuator
US7382583B2 (en) * 2004-08-26 2008-06-03 Hitachi Global Storage Technologies Netherlands B.V. Rotary piezoelectric microactuator and disk drive head-suspension assembly
US7248443B2 (en) * 2004-11-10 2007-07-24 Samsung Electronics Co., Ltd. Method and apparatus for a MEMS micro-actuator assembly in a hard disk drive
JP4124223B2 (ja) * 2005-03-23 2008-07-23 セイコーエプソン株式会社 アクチュエータおよびアクチュエータを有する光学装置及び当該アクチュエータの製造方法
CN100381862C (zh) * 2005-03-23 2008-04-16 精工爱普生株式会社 驱动器和具有驱动器的光学装置以及该驱动器的制造方法
JP4621577B2 (ja) * 2005-10-27 2011-01-26 アルプス電気株式会社 静電アクチュエータ及びその駆動方法
CA2551194A1 (en) * 2006-06-23 2007-12-23 Xinyu Liu Mems-based nanomanipulators/nanopositioners
JP5032949B2 (ja) * 2007-11-14 2012-09-26 エイチジーエスティーネザーランドビーブイ マイクロアクチュエータ、ヘッド・ジンバル・アセンブリ及びディスク・ドライブ装置
US8085508B2 (en) 2008-03-28 2011-12-27 Hitachi Global Storage Technologies Netherlands B.V. System, method and apparatus for flexure-integrated microactuator
JP2010097637A (ja) * 2008-10-14 2010-04-30 Sharp Corp 磁気記録再生ヘッド及びこれを含む磁気記録再生装置
US8279559B1 (en) 2009-01-02 2012-10-02 Meyer Dallas W Process for creating discrete track magnetic recording media including an apparatus having a stylus selectively applying stress to a surface of the recording media

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4882245A (en) 1985-10-28 1989-11-21 International Business Machines Corporation Photoresist composition and printed circuit boards and packages made therewith
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
GB2320571B (en) * 1996-12-20 2000-09-27 Aisin Seiki Semiconductor micromachine and manufacturing method thereof
US5959808A (en) 1997-12-30 1999-09-28 International Business Machines Corporation Shielded electrostatic microactuators for magnetic-head positioning such devices
US5995334A (en) 1997-12-30 1999-11-30 International Business Machines Corporation Rotary electrostatic microactuator with area-efficient comb electrode arrangement
JP4017237B2 (ja) * 1998-03-12 2007-12-05 富士通株式会社 磁気ヘッドスライダ
JP2000011556A (ja) 1998-06-16 2000-01-14 Alps Electric Co Ltd マイクロアクチュエータ及び磁気ヘッド装置並びに磁気記録装置
KR100459887B1 (ko) 1999-01-11 2004-12-03 삼성전자주식회사 삼차원 빗살 가진 구조물 및 이를 채용한 관성 감지 센서와 액츄
JP2003123416A (ja) 2001-10-17 2003-04-25 Fujitsu Ltd ヘッドアセンブリおよび記録媒体駆動装置
DE60223136D1 (de) * 2002-06-20 2007-12-06 St Microelectronics Srl Mikroelektromechanisches Bauelement, insbesondere Mikroaktor für Festplatteneinheiten, und Verfahren zu dessen Herstellung

Also Published As

Publication number Publication date
JP2004247027A (ja) 2004-09-02
CN1534610A (zh) 2004-10-06
KR20040073326A (ko) 2004-08-19
EP1391882A1 (en) 2004-02-25
CN1305031C (zh) 2007-03-14
US6853517B2 (en) 2005-02-08
US20040160702A1 (en) 2004-08-19
TW200415578A (en) 2004-08-16

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