SG11202106551XA - Storage system - Google Patents

Storage system

Info

Publication number
SG11202106551XA
SG11202106551XA SG11202106551XA SG11202106551XA SG11202106551XA SG 11202106551X A SG11202106551X A SG 11202106551XA SG 11202106551X A SG11202106551X A SG 11202106551XA SG 11202106551X A SG11202106551X A SG 11202106551XA SG 11202106551X A SG11202106551X A SG 11202106551XA
Authority
SG
Singapore
Prior art keywords
storage system
storage
Prior art date
Application number
SG11202106551XA
Other languages
English (en)
Inventor
Eiji Wada
Yoshiki Yuasa
Kosuke Irino
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11202106551XA publication Critical patent/SG11202106551XA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes
    • B65G1/0414—Storage devices mechanical using stacker cranes provided with satellite cars adapted to travel in storage racks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0485—Check-in, check-out devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/06—Storage devices mechanical with means for presenting articles for removal at predetermined position or level
    • B65G1/065—Storage devices mechanical with means for presenting articles for removal at predetermined position or level with self propelled cars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette
SG11202106551XA 2018-12-26 2019-11-14 Storage system SG11202106551XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018242936 2018-12-26
PCT/JP2019/044683 WO2020137225A1 (ja) 2018-12-26 2019-11-14 保管システム

Publications (1)

Publication Number Publication Date
SG11202106551XA true SG11202106551XA (en) 2021-07-29

Family

ID=71128998

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202106551XA SG11202106551XA (en) 2018-12-26 2019-11-14 Storage system

Country Status (8)

Country Link
US (1) US11942347B2 (zh)
EP (1) EP3882181A4 (zh)
JP (1) JP7140210B2 (zh)
KR (1) KR102530860B1 (zh)
CN (1) CN113195379B (zh)
SG (1) SG11202106551XA (zh)
TW (1) TWI818135B (zh)
WO (1) WO2020137225A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102661744B1 (ko) * 2020-11-05 2024-04-26 세메스 주식회사 컨테이너 반송 장치 및 이를 구비하는 컨테이너 저장 시스템
TWI813393B (zh) * 2022-02-17 2023-08-21 盟立自動化股份有限公司 高空走行式無人搬運車的搬運系統及無人搬運車

Family Cites Families (30)

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JP3057945B2 (ja) * 1993-01-18 2000-07-04 東京エレクトロン株式会社 基板支持装置
JPH11121582A (ja) * 1997-10-15 1999-04-30 Mitsubishi Electric Corp 半導体ウェハ製造設備制御方法および半導体ウェハ製造設備
JPH11191582A (ja) * 1997-12-26 1999-07-13 Mitsubishi Electric Corp カセット搬送システム
JP2000124284A (ja) 1998-10-13 2000-04-28 Hitachi Kiden Kogyo Ltd 搬送装置
JP2000142909A (ja) * 1998-11-16 2000-05-23 Murata Mach Ltd 自動倉庫
JP2001031213A (ja) * 1999-07-26 2001-02-06 Murata Mach Ltd 自動倉庫とそれを用いた搬送システム
CN100520706C (zh) 2002-06-19 2009-07-29 布鲁克斯自动技术公司 半导体制造用竖直传送带与空中升降机组合式自动物料搬运系统
JP2007022677A (ja) * 2005-07-12 2007-02-01 Asyst Shinko Inc ストッカ装置
US7661919B2 (en) * 2005-09-28 2010-02-16 Muratec Automation Co., Ltd. Discontinuous conveyor system
TW200827264A (en) 2006-12-25 2008-07-01 Powerchip Semiconductor Corp Method and system for sharing overhead external buffers in semiconductor manufacturing
US20090022575A1 (en) * 2007-07-19 2009-01-22 Asyst Shinko. Inc. Article storing apparatus
DE102009025052A1 (de) * 2009-06-10 2011-04-28 Gottwald Port Technology Gmbh System zum Wechseln einer Batterie eines flurgebundenen Tranportfahrzeuges, insbesondere eines fahrerlosen Schwerlast-Transportfahrzeuges für ISO-Container
JP5515443B2 (ja) * 2009-06-17 2014-06-11 村田機械株式会社 保管庫
SG178103A1 (en) * 2009-11-27 2012-03-29 Daifuku Kk Ceiling conveyor car
JP5429570B2 (ja) * 2010-03-08 2014-02-26 株式会社ダイフク 物品搬送設備
JP5382470B2 (ja) * 2010-11-04 2014-01-08 村田機械株式会社 搬送システム及び搬送方法
SG194439A1 (en) * 2011-05-25 2013-12-30 Murata Machinery Ltd Load port apparatus, carrier system, and container conveyance method
JP5700255B2 (ja) 2012-03-27 2015-04-15 株式会社ダイフク 物品保管設備及び物品搬送設備
CN102616518B (zh) * 2012-03-29 2013-12-11 缪慰时 用于高密度自动仓库中的遥控穿梭车
EP2860136B1 (en) * 2012-06-08 2020-08-05 Murata Machinery, Ltd. Conveyance system and temporary storage method of articles in conveyance system
JP6044467B2 (ja) * 2013-06-26 2016-12-14 株式会社ダイフク 保管システム
US10325794B2 (en) * 2014-04-28 2019-06-18 Murata Machinery, Ltd. Purge device and purge method
CN106796908B (zh) * 2014-09-25 2019-11-26 村田机械株式会社 清洗装置以及清洗方法
KR101993402B1 (ko) * 2015-05-01 2019-06-26 무라다기카이가부시끼가이샤 자동 창고 및 현수식(懸垂式) 스태커 크레인
JP2017030944A (ja) 2015-08-04 2017-02-09 村田機械株式会社 搬送システム
US10043699B2 (en) * 2015-11-13 2018-08-07 Taiwan Semiconductor Manufacturing Co., Ltd. High capacity overhead transport (OHT) rail system with multiple levels
JP6766584B2 (ja) 2016-10-19 2020-10-14 株式会社ダイフク 物品搬送設備
EP3539903B1 (en) * 2016-11-14 2022-04-27 Murata Machinery, Ltd. Ceiling conveyance system, and relay conveyance apparatus and conveyance method used therefor
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SG11202009270XA (en) * 2018-03-22 2020-10-29 Murata Machinery Ltd Stocker system

Also Published As

Publication number Publication date
WO2020137225A1 (ja) 2020-07-02
TWI818135B (zh) 2023-10-11
KR102530860B1 (ko) 2023-05-10
JP7140210B2 (ja) 2022-09-21
TW202026216A (zh) 2020-07-16
CN113195379B (zh) 2022-12-30
KR20210092269A (ko) 2021-07-23
US20220073275A1 (en) 2022-03-10
CN113195379A (zh) 2021-07-30
EP3882181A1 (en) 2021-09-22
JPWO2020137225A1 (ja) 2021-11-04
US11942347B2 (en) 2024-03-26
EP3882181A4 (en) 2022-08-10

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