SG11202104083YA - Workpiece carrier device and coating arrangement - Google Patents

Workpiece carrier device and coating arrangement

Info

Publication number
SG11202104083YA
SG11202104083YA SG11202104083YA SG11202104083YA SG11202104083YA SG 11202104083Y A SG11202104083Y A SG 11202104083YA SG 11202104083Y A SG11202104083Y A SG 11202104083YA SG 11202104083Y A SG11202104083Y A SG 11202104083YA SG 11202104083Y A SG11202104083Y A SG 11202104083YA
Authority
SG
Singapore
Prior art keywords
carrier device
workpiece carrier
coating arrangement
coating
arrangement
Prior art date
Application number
SG11202104083YA
Inventor
Rudolf Meiler
Original Assignee
Oerlikon Surface Solutions Ag Pfaeffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag Pfaeffikon filed Critical Oerlikon Surface Solutions Ag Pfaeffikon
Publication of SG11202104083YA publication Critical patent/SG11202104083YA/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0228Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the movement of the objects being rotative
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0207Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work the work being an elongated body, e.g. wire or pipe
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0221Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts
    • B05B13/0242Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work characterised by the means for moving or conveying the objects or other work, e.g. conveyor belts the objects being individually presented to the spray heads by a rotating element, e.g. turntable
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0292Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work devices for holding several workpieces to be sprayed in a spaced relationship, e.g. vehicle doors spacers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H1/00Toothed gearings for conveying rotary motion
    • F16H1/02Toothed gearings for conveying rotary motion without gears having orbital motion
    • F16H1/04Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members
    • F16H1/06Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members with parallel axes
    • F16H1/10Toothed gearings for conveying rotary motion without gears having orbital motion involving only two intermeshing members with parallel axes one of the members being internally toothed
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H1/00Toothed gearings for conveying rotary motion
    • F16H1/02Toothed gearings for conveying rotary motion without gears having orbital motion
    • F16H1/20Toothed gearings for conveying rotary motion without gears having orbital motion involving more than two intermeshing members
    • F16H1/22Toothed gearings for conveying rotary motion without gears having orbital motion involving more than two intermeshing members with a plurality of driving or driven shafts; with arrangements for dividing torque between two or more intermediate shafts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H1/00Toothed gearings for conveying rotary motion
    • F16H1/28Toothed gearings for conveying rotary motion with gears having orbital motion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Gears, Cams (AREA)
  • General Engineering & Computer Science (AREA)
  • Gear Transmission (AREA)
  • Spray Control Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)
SG11202104083YA 2018-10-26 2019-10-28 Workpiece carrier device and coating arrangement SG11202104083YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102018126862.9A DE102018126862A1 (en) 2018-10-26 2018-10-26 Workpiece carrier device and coating arrangement
PCT/EP2019/079376 WO2020084164A1 (en) 2018-10-26 2019-10-28 Workpiece carrier device and coating arrangement

Publications (1)

Publication Number Publication Date
SG11202104083YA true SG11202104083YA (en) 2021-05-28

Family

ID=68387329

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202104083YA SG11202104083YA (en) 2018-10-26 2019-10-28 Workpiece carrier device and coating arrangement

Country Status (13)

Country Link
US (1) US11806737B2 (en)
EP (1) EP3870736B1 (en)
JP (1) JP7473541B2 (en)
KR (1) KR20210080477A (en)
CN (1) CN112912537B (en)
BR (1) BR112021006469A2 (en)
CA (1) CA3116811A1 (en)
DE (1) DE102018126862A1 (en)
HU (1) HUE064618T2 (en)
MX (1) MX2021004523A (en)
PL (1) PL3870736T3 (en)
SG (1) SG11202104083YA (en)
WO (1) WO2020084164A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020116637A1 (en) 2020-06-24 2021-12-30 Stefan Esser Substrate plate, coating table, system and process
CN111992408B (en) * 2020-09-02 2022-01-07 中国通信建设第四工程局有限公司 Communication cable protection tube surface protection spraying equipment
CN112317175B (en) * 2020-10-22 2021-06-29 安徽星露科技发展有限公司 Paint spraying device for monitoring vertical rod
CN114472055B (en) * 2022-01-13 2024-06-07 世纪易联(北京)科技有限公司 Fruit tree disease-preventing clamping type paint brushing equipment based on intelligent agriculture

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3853091A (en) * 1973-12-03 1974-12-10 Ibm Thin film coating apparatus
JPS51112263A (en) * 1975-03-28 1976-10-04 Hitachi Ltd Semiconductor surface processor base
US4151059A (en) 1977-12-27 1979-04-24 Coulter Stork U.S.A., Inc. Method and apparatus for sputtering multiple cylinders simultaneously
DE19803278C2 (en) * 1998-01-29 2001-02-01 Bosch Gmbh Robert Workpiece carrier and its use for the treatment and coating of workpieces
JP4614538B2 (en) * 1998-12-15 2011-01-19 エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ Vacuum processing planetary system workpiece carrier
US7150792B2 (en) 2002-10-15 2006-12-19 Kobe Steel, Ltd. Film deposition system and film deposition method using the same
JP4413567B2 (en) 2002-10-15 2010-02-10 株式会社神戸製鋼所 Film forming apparatus and film forming method
DE102004027989B4 (en) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Workpiece carrier device for holding workpieces
WO2007025397A1 (en) 2005-08-29 2007-03-08 Oerlikon Trading Ag, Trübbach Workpiece support system
EP2048263B1 (en) 2007-10-08 2011-03-30 Oerlikon Trading AG, Trübbach Workpiece mount device
JP2009280881A (en) 2008-05-26 2009-12-03 Nissin Electric Co Ltd Film deposition objective article support apparatus, and film depositing apparatus
CA2724917C (en) * 2008-06-11 2016-03-29 Oerlikon Trading Ag, Truebbach Workpiece carrier
KR101650839B1 (en) * 2009-06-19 2016-08-24 다이요 닛산 가부시키가이샤 Vapor deposition device
JP6147168B2 (en) * 2013-11-18 2017-06-14 株式会社神戸製鋼所 Deposition equipment
KR101646698B1 (en) * 2015-02-25 2016-08-08 (주)보림시스템 Zig System for Revolving and Rotating in PVD coating machine
CN105586577B (en) * 2015-12-21 2019-02-15 上海应用技术学院 A kind of flexible rotating workbench preparing PVD coating for cutter
JP2018141522A (en) 2017-02-28 2018-09-13 株式会社大阪タイユー Turn table

Also Published As

Publication number Publication date
HUE064618T2 (en) 2024-04-28
PL3870736T3 (en) 2024-03-11
JP7473541B2 (en) 2024-04-23
WO2020084164A1 (en) 2020-04-30
US11806737B2 (en) 2023-11-07
CN112912537A (en) 2021-06-04
EP3870736A1 (en) 2021-09-01
MX2021004523A (en) 2021-06-15
JP2022504759A (en) 2022-01-13
KR20210080477A (en) 2021-06-30
US20210394216A1 (en) 2021-12-23
CA3116811A1 (en) 2020-04-30
DE102018126862A1 (en) 2020-04-30
CN112912537B (en) 2023-03-28
EP3870736B1 (en) 2023-11-22
BR112021006469A2 (en) 2021-07-13

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