DE102020116637A1 - Substrate plate, coating table, system and process - Google Patents

Abstract

First of all, a substrate plate is disclosed with a sun wheel (2), a web (3) with bearing pins (19), on each of which a substrate holder (4) with a pressed-in support ball (17) is rotatably supported about the respective bearing pin (19), wherein the sun rim drives the substrate holders (4) about the respective bearing pin (19) when it rotates about a support shaft relative to the web (3). Also disclosed is a coating table with a support shaft that can rotate about a table axis and a drive for the support shaft and at least one such substrate plate, a coating system with a chamber floor on which a plurality of coating tables according to the aforementioned claim with support shafts running parallel are arranged rotationally symmetrically about an axis and can be driven by a common drive and a method for coating substrates which are isolated on a substrate plate with a sun wheel (2) and a web (3) with bearing pins (19) on substrate holders (4), each of the substrate holders (4) is supported on the respective bearing pin (19) with a pressed-in supporting ball (17) so that it can rotate about the bearing pin (19) and the sun gear (2) rotates about a support shaft in relation to the web (3) and the substrate holders (4) about the respective Bearing pin (19) drives. In order to reduce the friction on the support balls hit that the support balls (17) each rest on a loosely lying on the respective bearing pin (19) bearing ball (20).

Description

The invention initially relates to a substrate plate with a sun gear, a web with bearing pins, on each of which a substrate receptacle with a pressed-in support ball is rotatably supported around the respective bearing pin, the sun edge driving the substrate receptacles around the respective bearing pin when it is opposite the web by one Support shaft rotates. The invention further relates to a coating table with a support shaft rotatable about a table axis and a drive for the support shaft and at least one such substrate plate, a coating system with a chamber floor on which a plurality of coating tables according to the preceding claim with parallel support shafts are arranged rotationally symmetrically about an axis and can be driven by a common drive and a method for coating substrates that are isolated on a substrate plate with a sun gear and a web with bearing pins on substrate holders, each of the substrate holders on the respective bearing pin being supported rotatably around the bearing pin with a pressed-in support ball and the sun gear rotates around a support shaft with respect to the web and thereby drives the substrate receptacles around the respective bearing pin.

When coating small parts, the predominantly straight spread of the layer material starting from the source results in preferred directions with particularly high deposition rates. Conversely, substrate surfaces facing away from preferred directions are hardly coated. In order to achieve a homogeneous coating, the substrates in the coating chamber are rotated in a controlled manner around several axes.

Substrate plates, coating tables and systems as well as a method of the type mentioned in the introduction are for example from DE 198 03 278 A1 well known. In the known arrangements, the support ball only touches the bearing pin at one point in order to minimize wear.

In order to increase the number of substrates coated at the same time, the diameter of the substrate plate is increased. If the size of the substrate holders remains the same, the transmission ratio of the planetary gear increases and thus the speed of the substrate holders and the friction on the support balls.

task

The invention is based on the object of reducing the friction on the support balls.

solution

On the basis of the known substrate plate, it is proposed according to the invention that the support balls each rest on a bearing ball lying loosely on the respective bearing pin. This significantly reduces the wear on the support balls.

In a substrate plate according to the invention, the bearing pins are preferably made of tungsten carbide and / or the support balls are made of hardened steel. This minimizes the friction on the support balls.

In a substrate plate according to the invention, face gears on the sun gear and on the substrate receptacles preferably mesh with one another. The substrate receptacles and the substrates attached to them then perform a defined movement without slipping.

A coating table is also proposed with a support shaft rotatable about a table axis and a drive for the support shaft, with at least one substrate plate according to the invention being attached to the support shaft, as well as a coating system with a chamber floor on which a plurality of coating tables according to the invention with parallel support shafts are rotationally symmetrical an axis is arranged and can be driven by a common drive. On such coating tables and in such coating systems, the substrates are separated on adapted substrate holders. Up to 100 substrate holders are arranged on substrate plates, which rotate around a plate axis either individually or stacked on top of one another on a table. Well-known coating systems have a diameter of 30 to 150 cm and combine six to 18 tables on a chamber floor.

On the basis of the known method, it is finally proposed according to the invention that the support balls each rest on a bearing ball lying loosely on the respective bearing pin. The method according to the invention is carried out with a substrate plate according to the invention and is also distinguished by the advantages mentioned above.

According to DIN 8580, coating is a manufacturing process for applying a firmly adhering layer of shapeless material to the surface of a workpiece. A workpiece to be coated is called a “substrate” in coating technology. Many substrates (especially engine components such as nozzle needles or control pistons) are very small, but at the same time place high demands on the uniformity of the coating: Often requires that less than 0.3 ppm of the parts have a "twist".

In a method according to the invention, the substrates are preferably coated from a gas phase. In particular, physical vapor deposition (“PVD”) and plasma-assisted chemical vapor deposition (“plasma enhanced chemical vapor deposition” / “PECVD”) are used to coat small, high-precision substrates. In the PVD process, the “target” is the plate that is bombarded with charged particles. As a result, target material is evaporated and deposited in a vacuum, typically between 10 mPa and 3000 mPa, as a layer on the relatively cold substrates. Often the evaporation is brought about by an electrical discharge. A distinction is made here between electron beam evaporation (EBPVD electron beam), arc evaporation (AIP arc ion plating) and sputtering (MSIP magnetron sputter ion plating).

Embodiment

• 1 einen Ausschnitt eines erfindungsgemäßen Substrattellers und
• 2 ein Detail des erfindungsgemäßen Substrattellers.

The invention is explained below using an exemplary embodiment. Show it

• 1 a section of a substrate plate according to the invention and
• 2 a detail of the substrate plate according to the invention.

The substrate plate according to the invention shown in the figures 1 has a sun gear 2 and a jetty 3 with 14 substrate holders 4th on. The bridge 3 comes with a central, rectangular mounting hole 5 attached to a support shaft with a correspondingly rectangular cross section in a non-rotating manner in a coating system (not shown). The sun gear 2 has a spur toothing 6th and is in the coating system with a radially protruding support lever 7th supported on a support rod running laterally next to the substructure plate parallel to the support shaft.

The substrate recordings 4th consist of a bearing pin 8th and a gearwheel which is connected coaxially with this rotationally fixed 9 with a spur toothing 10 . The bearing pins 8th run at the top 11th conically and assign one from the foot 12th outgoing axial blind hole 13th with a diameter 14th from initially 4.2 mm to that at the end 15th on a diameter 16 springs back from 3.95 mm. In the end of the blind hole 13th is a support ball 17th made of hardened steel with a diameter 18th pressed in by 4 mm.

In the jetty 3 are outside the sun gear 2 bearing pins running parallel to the support shaft 19th pressed in from tungsten carbide. On the bearing pins 19th are the substrate recordings 4th each with the blind hole 13th placed in such a way that the spur teeth 10 in the sun gear 2 intervenes. In the blind hole 13th is a bearing ball each 20th made of hardened steel with a diameter 21 4 mm loosely inserted.

Compared to the known substrate plate without bearing ball 20th exhibits the substrate plate according to the invention 1 four times the mileage without maintenance.

1

Substratteller

2

Sonnenrad

3

Steg

4

Substrataufnahme

5

Aufnahmebohrung

6

Stirnverzahnung

7

Stützhebel

8

Lagerbolzen

9

Zahnrad

10

Stirnverzahnung

11

Spitze

12

Fuß

13

Sackbohrung

14

Durchmesser

15

Ende

16

Durchmesser

17

Stützkugel

18

Durchmesser

19

Lagerstift

20

Lagerkugel

21

Durchmesser

In the figures are

1

Substrate plate

2

Sun gear

3

web

4th

Substrate uptake

5

Mounting hole

6th

Spur gearing

7th

Support lever

8th

Bearing pin

9

gear

10

Spur gearing

11th

top

12th

foot

13th

Blind hole

14th

diameter

15th

end

16

diameter

17th

Support ball

18th

diameter

19th

Bearing pin

20th

Bearing ball

21

diameter

QUOTES INCLUDED IN THE DESCRIPTION

This list of the documents listed by the applicant was generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Patent literature cited

• DE 19803278 A1 [0003]

Claims (8)

Substrate plate (1) with a sun gear (2), a web (3) with bearing pins (19), on each of which a substrate holder (4) with a pressed-in support ball (17) is rotatably supported around the respective bearing pin (19) Sonnenrand drives the substrate receptacles (4) around the respective bearing pin (19) when it rotates around a support shaft relative to the web (3), characterized in that the support balls (17) each rest on a bearing ball loosely on the respective bearing pin (19) (20) rest. Substrate plate (1) according to the preceding claim, characterized in that the bearing pins (19) consist of tungsten carbide. Substrate plate (1) according to one of the preceding claims, characterized in that the support balls (17) consist of hardened steel. Substrate plate (1) according to one of the preceding claims, characterized by intermeshing face teeth (6, 10) on the sun gear (2) and on the substrate receptacles (4). Coating table with a support shaft rotatable about a table axis and a drive for the support shaft, at least one substrate plate (1) according to one of the preceding claims being attached to the support shaft. Coating system with a chamber floor on which a plurality of coating tables according to the preceding claim with parallel supporting shafts are arranged rotationally symmetrical about an axis and can be driven by a common drive. Method for coating substrates which are isolated on a substrate plate (1) with a sun gear (2) and a web (3) with bearing pins (19) on substrate receptacles (4), each of the substrate receptacles (4) on the respective bearing pin ( 19) is supported rotatably around the bearing pin (19) with a pressed-in support ball (17) and the sun gear (2) rotates around a support shaft relative to the web (3) and thereby drives the substrate receptacles (4) around the respective bearing pin (19) , characterized in that the support balls (17) each rest on a bearing ball (20) lying loosely on the respective bearing pin (19). Method according to the preceding claim, characterized in that the substrates are coated from a gas phase.

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