SG11201912251XA - Memory cells having resistors and formation of the same - Google Patents
Memory cells having resistors and formation of the sameInfo
- Publication number
- SG11201912251XA SG11201912251XA SG11201912251XA SG11201912251XA SG11201912251XA SG 11201912251X A SG11201912251X A SG 11201912251XA SG 11201912251X A SG11201912251X A SG 11201912251XA SG 11201912251X A SG11201912251X A SG 11201912251XA SG 11201912251X A SG11201912251X A SG 11201912251XA
- Authority
- SG
- Singapore
- Prior art keywords
- resistors
- formation
- same
- memory cells
- cells
- Prior art date
Links
- 230000015572 biosynthetic process Effects 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/20—Resistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/20—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes
- H10B63/24—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having two electrodes, e.g. diodes of the Ovonic threshold switching type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8828—Tellurides, e.g. GeSbTe
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/882—Compounds of sulfur, selenium or tellurium, e.g. chalcogenides
- H10N70/8825—Selenides, e.g. GeSe
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Semiconductor Memories (AREA)
- Mram Or Spin Memory Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/632,536 US10263039B2 (en) | 2017-06-26 | 2017-06-26 | Memory cells having resistors and formation of the same |
PCT/US2018/036985 WO2019005468A1 (en) | 2017-06-26 | 2018-06-12 | MEMORY CELLS HAVING RESISTORS AND FORMATION OF THE SAME |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201912251XA true SG11201912251XA (en) | 2020-01-30 |
Family
ID=64692799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201912251XA SG11201912251XA (en) | 2017-06-26 | 2018-06-12 | Memory cells having resistors and formation of the same |
Country Status (7)
Country | Link |
---|---|
US (3) | US10263039B2 (zh) |
EP (1) | EP3646394B1 (zh) |
JP (1) | JP6912609B2 (zh) |
KR (1) | KR102277861B1 (zh) |
CN (1) | CN110800120B (zh) |
SG (1) | SG11201912251XA (zh) |
WO (1) | WO2019005468A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10263039B2 (en) * | 2017-06-26 | 2019-04-16 | Micron Technology, Inc. | Memory cells having resistors and formation of the same |
US10290348B1 (en) * | 2018-02-12 | 2019-05-14 | Sandisk Technologies Llc | Write-once read-many amorphous chalcogenide-based memory |
US10534840B1 (en) * | 2018-08-08 | 2020-01-14 | Sandisk Technologies Llc | Multiplication using non-volatile memory cells |
US11424118B2 (en) * | 2020-01-23 | 2022-08-23 | Micron Technology, Inc. | Electronic devices comprising silicon carbide materials |
US11373705B2 (en) * | 2020-11-23 | 2022-06-28 | Micron Technology, Inc. | Dynamically boosting read voltage for a memory device |
US11641788B2 (en) | 2020-12-09 | 2023-05-02 | Micron Technology, Inc. | Resistive interface material |
Family Cites Families (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5661325A (en) * | 1994-07-29 | 1997-08-26 | Nkk Corporation | SRAM structure |
KR100872880B1 (ko) * | 2006-09-11 | 2008-12-10 | 삼성전자주식회사 | 상변화 메모리 장치의 테스트 방법 및 상변화 메모리 장치 |
US20100308296A1 (en) | 2009-06-09 | 2010-12-09 | Agostino Pirovano | Phase change memory cell with self-aligned vertical heater |
US8477524B2 (en) * | 2009-12-25 | 2013-07-02 | Samsung Electronics Co., Ltd. | Nonvolatile memory devices and related methods and systems |
US8847186B2 (en) | 2009-12-31 | 2014-09-30 | Micron Technology, Inc. | Self-selecting PCM device not requiring a dedicated selector transistor |
US8422269B2 (en) * | 2010-02-25 | 2013-04-16 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
JP2011187144A (ja) * | 2010-03-11 | 2011-09-22 | Toshiba Corp | 半導体記憶装置 |
US8507353B2 (en) | 2010-08-11 | 2013-08-13 | Samsung Electronics Co., Ltd. | Method of forming semiconductor device having self-aligned plug |
US8391049B2 (en) | 2010-09-29 | 2013-03-05 | Crossbar, Inc. | Resistor structure for a non-volatile memory device and method |
US8605525B2 (en) * | 2010-11-23 | 2013-12-10 | Macronix International Co., Ltd. | System and method for testing for defects in a semiconductor memory array |
US8467226B2 (en) * | 2011-01-14 | 2013-06-18 | Micron Technology, Inc. | Programming an array of resistance random access memory cells using unipolar pulses |
US8879299B2 (en) * | 2011-10-17 | 2014-11-04 | Sandisk 3D Llc | Non-volatile memory cell containing an in-cell resistor |
US20130148404A1 (en) * | 2011-12-08 | 2013-06-13 | Abhijit Bandyopadhyay | Antifuse-based memory cells having multiple memory states and methods of forming the same |
US8710481B2 (en) | 2012-01-23 | 2014-04-29 | Sandisk 3D Llc | Non-volatile memory cell containing a nano-rail electrode |
US9136307B2 (en) * | 2012-02-09 | 2015-09-15 | Micron Technology, Inc. | Memory cells and memory cell formation methods using sealing material |
US8803118B2 (en) | 2012-05-29 | 2014-08-12 | Micron Technology, Inc. | Semiconductor constructions and memory arrays |
US8729523B2 (en) | 2012-08-31 | 2014-05-20 | Micron Technology, Inc. | Three dimensional memory array architecture |
US8841649B2 (en) | 2012-08-31 | 2014-09-23 | Micron Technology, Inc. | Three dimensional memory array architecture |
US10546998B2 (en) | 2013-02-05 | 2020-01-28 | Micron Technology, Inc. | Methods of forming memory and methods of forming vertically-stacked structures |
US9166158B2 (en) | 2013-02-25 | 2015-10-20 | Micron Technology, Inc. | Apparatuses including electrodes having a conductive barrier material and methods of forming same |
US9042158B2 (en) * | 2013-05-21 | 2015-05-26 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device with protective resistance film |
US9257431B2 (en) * | 2013-09-25 | 2016-02-09 | Micron Technology, Inc. | Memory cell with independently-sized electrode |
US9881971B2 (en) * | 2014-04-01 | 2018-01-30 | Micron Technology, Inc. | Memory arrays |
KR20150135804A (ko) | 2014-05-26 | 2015-12-04 | 삼성전자주식회사 | 가변 저항 메모리 장치 및 그 제조 방법 |
KR102225782B1 (ko) | 2014-07-28 | 2021-03-10 | 삼성전자주식회사 | 가변 저항 메모리 장치 및 그 제조 방법 |
US9978810B2 (en) | 2015-11-04 | 2018-05-22 | Micron Technology, Inc. | Three-dimensional memory apparatuses and methods of use |
US10134470B2 (en) | 2015-11-04 | 2018-11-20 | Micron Technology, Inc. | Apparatuses and methods including memory and operation of same |
US10263039B2 (en) * | 2017-06-26 | 2019-04-16 | Micron Technology, Inc. | Memory cells having resistors and formation of the same |
-
2017
- 2017-06-26 US US15/632,536 patent/US10263039B2/en active Active
-
2018
- 2018-06-12 SG SG11201912251XA patent/SG11201912251XA/en unknown
- 2018-06-12 CN CN201880042493.1A patent/CN110800120B/zh active Active
- 2018-06-12 JP JP2019571279A patent/JP6912609B2/ja active Active
- 2018-06-12 WO PCT/US2018/036985 patent/WO2019005468A1/en unknown
- 2018-06-12 KR KR1020197037425A patent/KR102277861B1/ko active IP Right Grant
- 2018-06-12 EP EP18823863.8A patent/EP3646394B1/en active Active
- 2018-12-11 US US16/216,100 patent/US10707271B2/en active Active
-
2020
- 2020-06-04 US US16/892,459 patent/US11374059B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3646394A1 (en) | 2020-05-06 |
CN110800120B (zh) | 2023-12-05 |
EP3646394B1 (en) | 2023-10-25 |
EP3646394A4 (en) | 2021-03-24 |
CN110800120A (zh) | 2020-02-14 |
KR20200001599A (ko) | 2020-01-06 |
US20190123105A1 (en) | 2019-04-25 |
WO2019005468A1 (en) | 2019-01-03 |
JP6912609B2 (ja) | 2021-08-04 |
JP2020526015A (ja) | 2020-08-27 |
US20200303462A1 (en) | 2020-09-24 |
US10263039B2 (en) | 2019-04-16 |
US10707271B2 (en) | 2020-07-07 |
US11374059B2 (en) | 2022-06-28 |
US20180374900A1 (en) | 2018-12-27 |
KR102277861B1 (ko) | 2021-07-19 |
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