SG11201911488UA - Suction device - Google Patents

Suction device

Info

Publication number
SG11201911488UA
SG11201911488UA SG11201911488UA SG11201911488UA SG11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA SG 11201911488U A SG11201911488U A SG 11201911488UA
Authority
SG
Singapore
Prior art keywords
suction device
suction
Prior art date
Application number
SG11201911488UA
Inventor
Hitoshi Iwasaka
Hideyuki Tokunaga
Yuji Kasai
Katsuhiro KOSHIISHI
Hidemitsu Tanaka
Hirohiko Ono
Katsutoshi Minoura
Naonari IWASAKA
Original Assignee
Harmotec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harmotec Co Ltd filed Critical Harmotec Co Ltd
Publication of SG11201911488UA publication Critical patent/SG11201911488UA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0675—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum of the ejector type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B25B11/007—Vacuum work holders portable, e.g. handheld
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
SG11201911488UA 2017-09-20 2018-09-06 Suction device SG11201911488UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017180384A JP7148105B2 (en) 2017-09-20 2017-09-20 suction device
PCT/JP2018/033086 WO2019058989A1 (en) 2017-09-20 2018-09-06 Suction device

Publications (1)

Publication Number Publication Date
SG11201911488UA true SG11201911488UA (en) 2020-04-29

Family

ID=65810338

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201911488UA SG11201911488UA (en) 2017-09-20 2018-09-06 Suction device

Country Status (8)

Country Link
US (1) US11642794B2 (en)
EP (1) EP3685971A4 (en)
JP (1) JP7148105B2 (en)
KR (1) KR102345434B1 (en)
CN (1) CN110785270B (en)
SG (1) SG11201911488UA (en)
TW (1) TWI683390B (en)
WO (1) WO2019058989A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220289500A1 (en) * 2019-09-10 2022-09-15 A O Formaflon Swiss AG Suction unit and suction device
CN111775174B (en) * 2020-07-23 2021-09-14 天津工业大学 Non-contact sucker based on wall attachment effect
CN114524270A (en) * 2022-02-24 2022-05-24 南京理工大学 Single-inlet double-vortex non-contact vacuum sucker with needle valve

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS572477B2 (en) * 1974-03-01 1982-01-16
EP0201240B1 (en) * 1985-05-04 1992-09-23 Kabushiki Kaisha Seibu Giken Apparatus for supporting and/or conveying a plate with fluid without physical contact
JPH0632916B2 (en) * 1985-07-15 1994-05-02 株式会社西部技研 A method of suspending and floating a plate-shaped body in a non-contact state with a fluid
US5169196A (en) * 1991-06-17 1992-12-08 Safabakhsh Ali R Non-contact pick-up head
JP4669252B2 (en) 2000-06-09 2011-04-13 株式会社ハーモテック Swirl flow forming body and non-contact transfer device
EP1233442B1 (en) 2001-02-20 2009-10-14 Harmotec Corporation Non-contacting conveyance equipment
US6601888B2 (en) * 2001-03-19 2003-08-05 Creo Inc. Contactless handling of objects
JP4437415B2 (en) 2004-03-03 2010-03-24 リンク・パワー株式会社 Non-contact holding device and non-contact holding and conveying device
GB0522552D0 (en) * 2005-11-04 2005-12-14 Univ Salford The Handling device
JP4243766B2 (en) * 2006-10-02 2009-03-25 Ｓｍｃ株式会社 Non-contact transfer device
JP5239564B2 (en) 2008-07-04 2013-07-17 セイコーエプソン株式会社 Chuck device and suction holding hand
JP2011138877A (en) * 2009-12-28 2011-07-14 Seiko Epson Corp Non-contact holder and non-contact holding hand
JP2011161529A (en) 2010-02-05 2011-08-25 Seiko Epson Corp Noncontact holding device
KR101814096B1 (en) 2010-02-23 2018-01-02 아사히 유키자이 가부시키가이샤 In-line Fluid Mixing Device
KR20110105635A (en) * 2010-03-19 2011-09-27 서울과학기술대학교 산학협력단 Hand device and multi-hand device for wafer transportation
KR102043656B1 (en) * 2010-06-07 2019-11-12 니폰 덴키 가라스 가부시키가이샤 Transfer device for plate-like member, and suction pad
KR101187684B1 (en) * 2010-10-25 2012-10-04 서울과학기술대학교 산학협력단 Non-contact air pads for chucking a substrate by using the radial flow
JP2013013992A (en) 2011-07-06 2013-01-24 Link Power Kk Apparatus for holding and conveying small-sized workpiece
US8904629B2 (en) * 2012-03-09 2014-12-09 LG CNS Co. Ltd. Light-emitting diode (LED) wafer picker
JP5921323B2 (en) * 2012-05-11 2016-05-24 株式会社妙徳 Transport holding tool and transport holding device
DE102012215513A1 (en) 2012-08-31 2014-03-06 J. Schmalz Gmbh gripping device
JP6292842B2 (en) 2013-11-25 2018-03-14 株式会社ジェーイーエル Substrate holding device
TWI526380B (en) * 2013-11-27 2016-03-21 財團法人工業技術研究院 Contact holding device using vortex
EP3078462A1 (en) * 2013-12-03 2016-10-12 Harmotec Co., Ltd. Holding device, holding system, control method, and conveyance device
JP5908136B1 (en) * 2015-03-03 2016-04-26 株式会社ハーモテック Suction device

Also Published As

Publication number Publication date
CN110785270B (en) 2023-09-08
WO2019058989A1 (en) 2019-03-28
US20200164527A1 (en) 2020-05-28
JP7148105B2 (en) 2022-10-05
US11642794B2 (en) 2023-05-09
TW201921576A (en) 2019-06-01
KR102345434B1 (en) 2021-12-29
TWI683390B (en) 2020-01-21
EP3685971A1 (en) 2020-07-29
KR20200013696A (en) 2020-02-07
CN110785270A (en) 2020-02-11
JP2019055439A (en) 2019-04-11
EP3685971A4 (en) 2021-06-09

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