JPH0632916B2 - A method of suspending and floating a plate-shaped body in a non-contact state with a fluid - Google Patents
A method of suspending and floating a plate-shaped body in a non-contact state with a fluidInfo
- Publication number
- JPH0632916B2 JPH0632916B2 JP60156817A JP15681785A JPH0632916B2 JP H0632916 B2 JPH0632916 B2 JP H0632916B2 JP 60156817 A JP60156817 A JP 60156817A JP 15681785 A JP15681785 A JP 15681785A JP H0632916 B2 JPH0632916 B2 JP H0632916B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- flat portion
- plate
- suspending
- shaped body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は板状体特にその表面における微小な傷または汚
染の発生あるいは塵埃の付着も許されないような板状体
たとえばシリコンウエーフアー、フロツピーデイスク等
を無接触状態で流体中例えば空中に懸垂浮遊させ、更に
懸垂の状態で搬送させる、流体によつて板状体を無接触
状態で懸垂浮遊搬送させる方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a plate-like body, in particular, a plate-like body such as a silicon wafer, a floppy disc, etc., in which minute scratches or contamination on the surface thereof or dust adhesion is not allowed. The present invention relates to a method for suspending and floating a plate-like body in a contactless state in a fluid, for example, in the air, and further transporting the suspended plate in a suspended state by a fluid.
従来の技術 本願の発明者は昭和６０年特許願第９５７４３号(特公
平4-11342)「流体によつて板状体を無接触状態で懸垂浮
遊させる方法」において第５〜６図に例示する如く吐出
管１の開口部２突端に該吐出管内の流体３の流れ方向に
ほぼ垂直に平坦部４を連設し、該平坦部の周縁に環状の
流体吸込口５を設け、吐出管１より流体３を流出させ該
流体を流体吸込口５より吸込ませ、あるいは流体を第５
図矢印図と逆方向に流すことにより周囲の流体を擾乱す
ることなく該平坦部４に近接して板状体６を定距離ｈに
無接触状態で懸垂浮遊させる方法を提案した。2. Description of the Related Art The inventor of the present application exemplifies the method of suspending and floating a plate-like body in a non-contact state with a fluid in FIG. As described above, the flat portion 4 is continuously provided at the tip of the opening 2 of the discharge pipe 1 substantially perpendicular to the flow direction of the fluid 3 in the discharge pipe, and the annular fluid suction port 5 is provided at the periphery of the flat portion. The fluid 3 is caused to flow out and the fluid is sucked through the fluid suction port 5, or
A method has been proposed in which the plate-like body 6 is suspended and floated in a non-contact state at a constant distance h close to the flat portion 4 without disturbing the surrounding fluid by flowing in the direction opposite to the direction of the arrow in the figure.
発明が解決しようとする問題点 上記先願において板状体６を平坦部４の下面と定距離に
無接触状態で懸垂浮遊させ搬送する場合に流体の流動状
態、板状体の搬送速度の僅かな揺ぎにより板状体が上下
方向に振動して浮遊状態が不安定になり、また平坦部４
がごく僅か傾きあるいは搬送の始めまたは停止の際の慣
性により板状６が滑り出し、吸込流体、吐出流体の作用
範囲より外れ、空中に浮遊し得ず落下するおそれがあ
り、本装置自体を懸垂浮遊せしめた板状体とともに９０
゜回転して平坦部４および板状体６を垂直にし、あるい
は反転して平坦部４の上方に板状体６を浮遊させる場合
に、懸垂浮遊している板状体が動揺することにより平坦
部４と板状体６との間の間隔ｈが変動し該部において流
体３が一様に流れなくなり空隙内の静圧が変動し板状体
６が平坦部４と接触するおそれが生ずる。DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention In the above-mentioned prior application, when the plate-shaped body 6 is suspended and floated at a constant distance in a non-contact state with the lower surface of the flat part 4 and conveyed, the fluid flow state of the plate-shaped body and the conveyance speed of the plate-shaped body are small. The rocking of the plate causes the plate to vibrate up and down, making the floating state unstable.
There is a risk that the plate 6 will slip out due to the slight inclination or inertia at the start or stop of conveyance, which will fall out of the working range of the suction fluid and discharge fluid, and will not be able to float in the air and fall. 90 with the plate
When the flat portion 4 and the plate-shaped body 6 are rotated vertically by ∘ to rotate or the plate-shaped body 6 is floated above the flat portion 4 by reversing, the plate-like body that is suspended and suspended oscillates to be flat. The distance h between the portion 4 and the plate-like body 6 fluctuates, the fluid 3 does not flow uniformly in the portion, and the static pressure in the gap fluctuates, so that the plate-like body 6 may come into contact with the flat portion 4.
問題点を解決するための手段 本発明は上記の欠点を除去し、浮遊搬送時における板状
体の不安定な上下振動を防止し、板状体６を平坦部４に
近接した無接触状態で安定して懸垂浮遊搬送させ、ある
いは水平状態から直立させあるいは反転させて搬送する
ことを目的とするもので、この目的は本発明により上記
先願における平坦部４の下面に放射状にかつ平坦部の半
径方向に対し傾斜して溝を穿設することにより達成され
る。Means for Solving Problems The present invention eliminates the above-mentioned drawbacks, prevents unstable vertical vibration of the plate-like body during floating conveyance, and makes the plate-like body 6 close to the flat portion 4 in a non-contact state. The purpose of the present invention is to stably suspend and float the carrier, or to carry it upright or upside down from a horizontal state, and the purpose of the present invention is to radially and flatly convey the lower surface of the flat part 4 in the above-mentioned prior application. This is achieved by forming a groove inclined with respect to the radial direction.
以下実施例を図面について詳細に説明する。Hereinafter, embodiments will be described in detail with reference to the drawings.
実施例１ 第１図および第２図に示す如く、断面円形の吐出管１の
開口部２の周縁に該吐出管内の空気３の流れ方向にほぼ
垂直に平坦部４を連設し、該平坦部４の下面に開口部２
から平坦部４の周縁に亘り放射状にかつ平坦部の半径方
向に対し傾斜して多数の溝９，９，９．．．を設け、該
吐出管１の下方部外周に断面円環状の吸込管７を一体に
設けて吸込口５を形成し、該吸込管７の下端外縁は平坦
部４より数ｍｍ乃至十数ｍｍ程度延長してストツパー８
を形成し、吐出管１は送風機の吐出口（図示せず）に、
吸込管７は送風機の吸込口（図示せず）に夫々連結す
る。Embodiment 1 As shown in FIGS. 1 and 2, a flat portion 4 is continuously provided on the periphery of an opening 2 of a discharge pipe 1 having a circular cross section so as to be substantially perpendicular to the flow direction of air 3 in the discharge pipe. Opening 2 on the bottom of part 4
To a large number of grooves 9, 9, 9 ,. ． ． And a suction pipe 7 having an annular cross-section is integrally provided on the outer periphery of the lower portion of the discharge pipe 1 to form a suction port 5, and the lower end outer edge of the suction pipe 7 is several mm to several tens of mm from the flat portion 4. Extend Stopper 8
And the discharge pipe 1 is connected to the discharge port (not shown) of the blower,
The suction pipes 7 are respectively connected to suction ports (not shown) of the blower.
吐出管１の平坦部４に板状体６を近づけ吐出管１より空
気３を吐出すとともに吸込管７より空気を吸込むと、平
坦部４の下面に穿設した溝９，９，９・・・の働きによ
り平坦部４の下面と板状体６の上面との間隙を放射状に
流れる空気は整流され平坦部４の全周に向つて均等に流
れ、かつ流れの方向が安定になり、減速流の場合におけ
る流れの不安定あるいは乱流渦の発生を防止し、板状体
６は放射状かつ平坦部の半径方向に対し傾斜している多
数の溝９，９，９・・・により旋回しながら流れる空気
によつて自転するため上下に振動することなく安定した
状態で開口部２および平坦部４に接触することなく該部
と一定の距離ｈを保つて空中に安定に浮遊し、装置全体
を移動することにより板状体６を共に搬送することがで
き、また装置全体を板状体６とともに９０゜回転して平
坦部４および板状体６を垂直にしてストツパー８で支持
し、あるいは反転して平坦部４の上方に板状体６を浮遊
させることもできる。なお空気３の流れ方向を第１図矢
印と逆方向にしても全く同様に実施することができる。When the plate-like body 6 is brought close to the flat portion 4 of the discharge pipe 1 and the air 3 is discharged from the discharge pipe 1 and the air is sucked from the suction pipe 7, the grooves 9, 9, 9 ... By the action of, the air radially flowing through the gap between the lower surface of the flat portion 4 and the upper surface of the plate-like body 6 is rectified and uniformly flows along the entire circumference of the flat portion 4, and the flow direction becomes stable, and the speed is reduced. In order to prevent instability of the flow or the generation of turbulent vortices in the case of flow, the plate-like body 6 is swirled by a large number of grooves 9, 9, 9 ... Which are radial and are inclined with respect to the radial direction of the flat portion. While rotating by the flowing air, it does not vibrate up and down in a stable state and does not contact the opening 2 and the flat portion 4 and keeps a certain distance h from the opening 2 and the flat portion 4 and floats in the air in a stable manner. The plate-like body 6 can be conveyed together by moving the May also be suspended along with the plate-like body 6 is rotated 90 ° and supported by Sutotsupa 8 and the flat portion 4 and the plate-like body 6 in a vertical, or a plate-like member 6 above the flat portion 4 is inverted. The same operation can be performed even if the flow direction of the air 3 is opposite to the arrow in FIG.
実施例２ 第３図および第４図に示す如く吸込管７の開口部５の周
縁に、該吸込管内の流体３の流れ方向にほぼ垂直に平坦
部４を連設し、該平坦部４の下面に開口部５から平坦部
４の周縁の亘り放射状にかつ平坦部４の半径方向に対し
傾斜湾曲して多数の溝９，９，９・・・を穿設し、平坦
部４の周縁近くには好ましくは溝９，９，９・・・に連
接して適宜数の吐出孔２，２，２，２を穿設し、吸込管
７と平坦部４とを包囲して吐出管１を形成し、吐出管１
の外壁下端部は平坦部４より数ｍｍ乃至十数ｍｍ程度延
長してストツパー８を形成し、吐出管１は送風機の吐出
口（図示せず）に、吸込管７は送風機の吸込口（図示せ
ず）に夫々連結する。Embodiment 2 As shown in FIGS. 3 and 4, a flat portion 4 is continuously provided on the periphery of the opening 5 of the suction pipe 7 so as to be substantially perpendicular to the flow direction of the fluid 3 in the suction pipe. A large number of grooves 9, 9, 9, ... Are radially formed on the lower surface from the opening 5 to the peripheral edge of the flat portion 4 and are inclined and curved with respect to the radial direction of the flat portion 4, near the peripheral edge of the flat portion 4. Preferably, a proper number of discharge holes 2, 2, 2, 2 are bored so as to be connected to the grooves 9, 9, 9 ... And the discharge pipe 1 is surrounded by the suction pipe 7 and the flat portion 4. Form and discharge pipe 1
The lower end of the outer wall of the fan extends from the flat part 4 by several mm to several tens of mm to form a stopper 8. The discharge pipe 1 is a discharge port (not shown) of the blower, and the suction pipe 7 is a suction port of the blower (see FIG. (Not shown), respectively.
平坦部４を板状体６に近づけ吐出管１，吐出孔２，２，
２，２より空気３を吐出しその吐出空気３を吸込管７よ
り吸込むと、板状体６は平坦部４に接触することなく該
部と一定の距離ｈを保つて空中に上下動することなく安
定に浮遊し、かつ放射湾曲状溝９，９，９・・・により
旋回しながら流れる空気によつて板状体は自転するため
振動することなく平坦部４との相対位置を安定に保持
し、装置全体を移動することにより板状体を共に搬送す
ることができ、また装置全体を板状体６とともに９０゜
回転して平坦部４および板状体６を垂直してストツパー
８で支持し、あるいは反転して平坦部４の上方に板状体
６を浮遊させることもできる。なお空気３の流れ方向を
第３図矢印逆方向にしても全く同様に実施することがで
かきる。The flat portion 4 is brought close to the plate-like body 6 and the discharge pipe 1, the discharge holes 2, 2,
When the air 3 is discharged from 2, 2 and the discharged air 3 is sucked from the suction pipe 7, the plate-like body 6 does not contact the flat portion 4 and moves up and down in the air while maintaining a constant distance h with the flat portion 4. , The plate-like body rotates without being vibrated, and the relative position with respect to the flat portion 4 is stably held by the air flowing while swirling with the radial curved grooves 9, 9, 9 ... Then, the plate-like body can be conveyed together by moving the entire device, and the whole device is rotated by 90 ° together with the plate-like body 6 so that the flat portion 4 and the plate-like body 6 are vertically supported by the stopper 8. Alternatively, the plate-shaped body 6 may be floated above the flat portion 4 by reversing or reversing. The same operation can be performed even if the flow direction of the air 3 is the reverse direction of the arrow in FIG.
以上実施例１，２の吐出管１、吸込管７、平坦部４、ス
トツパー８の断面形状は何れも円形の場合について説明
したが、板状体の自転を阻害しない限り楕円形、多角形
その他任意の形状にしても全く同様に目的を達すること
ができる。Although the discharge pipe 1, the suction pipe 7, the flat portion 4, and the stopper 8 of Examples 1 and 2 have all been described as having a circular cross-sectional shape, an elliptical shape, a polygonal shape, or the like as long as the rotation of the plate-shaped body is not hindered. The objective can be achieved in the same manner with any shape.
発明の作用 第１図、第２図に示す装置において Ｗ 板状体６の重量 ２０ｇ Ｐｊ 吐出流体３のジエツト圧 １０g/cm2 Ｐｓ 吸込流体の吸込圧 −１０g/cm2 ＰＤ 平坦部４と板状体６と の間に生ずる負圧 −５０mmAq ＡＤ 開口部２の断面積 ２．８４cm2 Ａｐ 平坦部４の表面積 １７．６cm2 Ｎｃ 溝９の本数 ４０本 Ａｃ 溝９の断面積 ０．５mm2 の条件で板状体６を空中に懸垂浮遊させたところ板状体
６はその上面と平坦部４の底面との間隔を０．９ｍｍに
保つて上下振動することなく安定に懸垂浮遊した。Action of the Invention In the apparatus shown in FIGS. 1 and 2, W weight of the plate-like body 20 g Pj jet pressure of the discharge fluid 3 10 g / cm 2 Ps suction pressure of the suction fluid −10 g / cm 2 P D flat part 4 and negative pressure - 50 mmAq a D cross-sectional area of the number forty Ac groove 9 of the opening 2 of the cross-sectional area 2.84Cm 2 Ap surface area of the flat portions 4 17.6cm 2 Nc grooves 9 generated between the plate-like body 6 0. When the plate-like body 6 was suspended and floated in the air under the condition of 5 mm 2, the plate-like body 6 was stably suspended and suspended without vertically vibrating while keeping the distance between the upper surface and the bottom surface of the flat portion 4 at 0.9 mm. .
発明の効果 本発明は上述の如く吐出管または吸込管の開口部突端に
該吐出管または吸込管内の流体の流れ方向にほぼ垂直に
平坦部を連設して該平坦部の下面に放射状にかつ平坦部
４の半径方向に対し傾斜して溝を穿設し、該平坦部の周
縁に感情の流体吸込口または流体吐出口を設け、吐出管
より流体を流出させ、その流体を流体吸込口より吸込ま
せ、該平坦部に近接して板状体を定距離に懸垂浮遊させ
るようにしたので、平坦部下面に溝を穿設しない場合に
比し平坦部下面と板状体上面との間隙における流体の流
れが整流され減速流にも拘らず渦の発生もなく均等に流
れるので平坦部４下面と板状体６上面との間隙における
空気の静圧が変動することなく板状体の上下振動が完全
に防止され、更に溝９を平坦部４の下面にその半径方向
に対し傾斜して穿設したので平坦部下面と板状体上面と
の間隙における流体の旋回によつて浮遊状態にある板状
体が回転するためジヤイロ作用により板状体を安定に懸
垂浮遊させ搬送することができ、溝を平坦部の半径方向
に対し傾斜湾曲して設けた場合には更に板状体の安定度
が増大し、特にその表面における微小な傷または汚染の
発生が許されず素手あるいは把持具の接触ができないよ
うな、たとえば半導体ウエーフアー、磁気デイスク、鏡
面体等の板状体の製造工程、包装工程における搬送ある
いは取扱いに極めて有効な方法である。As described above, the present invention is such that a flat portion is connected to the opening end of the discharge pipe or the suction pipe substantially perpendicularly to the flow direction of the fluid in the discharge pipe or the suction pipe, and the flat surface is radially formed on the lower surface of the flat portion. A groove is formed so as to be inclined with respect to the radial direction of the flat portion 4, and an emotional fluid suction port or a fluid discharge port is provided on the periphery of the flat portion so that the fluid flows out from the discharge pipe, and the fluid is discharged from the fluid suction port. Since the plate-like body is suspended and floated at a constant distance in the vicinity of the flat portion by suction, the gap between the lower surface of the flat portion and the upper surface of the plate-like body is smaller than that in the case where no groove is formed in the lower surface of the flat portion. Since the flow of the fluid is rectified and flows uniformly without the generation of vortices despite the deceleration flow, the static pressure of air in the gap between the lower surface of the flat portion 4 and the upper surface of the plate member 6 does not fluctuate, and the plate member vertically vibrates. Is completely prevented, and the groove 9 is further formed on the lower surface of the flat portion 4 in the radial direction. Since the plate is tilted, the floating plate rotates due to the swirling of the fluid in the gap between the lower surface of the flat portion and the upper surface of the plate, and the plate is stably suspended and floated by the gyroscopic action for conveyance. When the groove is formed to be inclined and curved with respect to the radial direction of the flat portion, the stability of the plate-shaped body is further increased, and in particular, minute scratches or contamination on the surface are not allowed and bare hands or grip This is a very effective method for transporting or handling in a manufacturing process or a packaging process of a plate-like body such as a semiconductor wafer, a magnetic disk, a mirror surface body, or the like that cannot be contacted by tools.
他の実施態様 以上本発明の実施例においては流体３として空気を使用
し板状体を空気中に懸垂浮遊させ更に搬送する方法につ
いてのみ述べたが、空気以外の気体あるいは水のその他
の液体中においても流体３として周囲の流体の同一のも
のあるいは類似性状のものを使用することにより全く同
様に実施し得るものである。また流体３が周囲の流体と
同一でない場合でも、たとえば流体３として洗浄液を使
用して板状体を洗浄しその後流体３として常温の空気ま
たは加熱空気を使用し板状体を乾燥する等の応用例を実
施することができる。Other Embodiments In the embodiments of the present invention described above, only the method of using air as the fluid 3 and suspending and suspending the plate-like body in the air and further transporting it is described. Also in the above, the same can be done by using the same or similar one of the surrounding fluids as the fluid 3. Further, even when the fluid 3 is not the same as the surrounding fluid, for example, a washing liquid is used as the fluid 3 to wash the plate-like body, and thereafter, room temperature air or heated air is used as the fluid 3 to dry the plate-like body. An example can be implemented.
第１図は本発明の一実施例を示す要部の垂直断面図、第
２図は第１図のＢ−Ｂ線断面図、第３図は本発明の他の
実施例を示す要部の垂直断面図、第４図は第３図のＣ−
Ｃ線断面図、第５図は先願発明の実施例を示す要部の垂
直断面図、第６図は第５図のＡ−Ａ線断面図である。 図中１は吐出管、２は吐出管１の開口部、３は流体、４
は平坦部、６は板状体、７は吸込管、５は吸込管７の吸
込口、８はストツパー、９は溝を示す。FIG. 1 is a vertical sectional view of an essential part showing an embodiment of the present invention, FIG. 2 is a sectional view taken along the line BB of FIG. 1, and FIG. 3 is an essential part showing another embodiment of the present invention. A vertical sectional view, FIG. 4 is C- of FIG.
FIG. 5 is a sectional view taken along line C, FIG. 5 is a vertical sectional view of a main portion showing an embodiment of the prior invention, and FIG. 6 is a sectional view taken along line AA of FIG. In the figure, 1 is a discharge pipe, 2 is an opening of the discharge pipe 1, 3 is a fluid, 4
Is a flat portion, 6 is a plate-like body, 7 is a suction pipe, 5 is a suction port of the suction pipe 7, 8 is a stopper, and 9 is a groove.
Claims (4)
流れ方向にほぼ垂直に平坦部を連接して該平坦部の下面
に放射状にかつ平坦部の半径方向に対し傾斜して溝を穿
設し、該平坦部の周縁に環状の流体吸込口を設け、吐出
管より流体を流出させ、該流体を流体吸込口より吸込ま
せることにより周囲の流体を擾乱することなく該平坦部
に近接して板状体を定距離に安定して懸垂浮遊させるこ
とを特徴とする、流体によつて板状体を無接触状態で懸
垂浮遊搬送させる方法。1. A groove formed by connecting a flat portion to a tip of an opening of the discharge pipe substantially perpendicular to a flow direction of a fluid in the discharge pipe, and radiating to a lower surface of the flat portion and sloping with respect to a radial direction of the flat portion. And an annular fluid suction port is provided on the periphery of the flat portion, the fluid is discharged from the discharge pipe, and the fluid is sucked from the fluid suction port to the flat portion without disturbing the surrounding fluid. A method of suspending and floating a plate-shaped body in a non-contact state by a fluid, characterized in that the plate-shaped body is stably suspended and suspended at a constant distance in close proximity.
設けた特許請求の範囲第１項記載の流体によつて板状体
を無接触状態で懸垂浮遊搬送させる方法。2. A method of suspending and floatingly transporting a plate-like body in a non-contact state by a fluid according to claim 1, wherein the groove is provided so as to be inclined and curved with respect to the radial direction of the flat portion.
流れ方向にほぼ垂直に平坦部を連接して該平坦部の下面
に放射状にかつ平坦部の半径方向に対し傾斜して溝を穿
設し、該平坦部の周縁に環状の流体吐出口を設け、吐出
管より流体を流出させ、該流体を流体吸込口より吸込ま
せることにより周囲の流体を擾乱することなく該平坦部
に近接して板状体を定距離に安定して懸垂浮遊させるこ
とを特徴とする、流体によつて板状体を無接触状態で懸
垂浮遊搬送させる方法。3. A groove formed by connecting a flat portion to an opening end of the suction pipe substantially perpendicularly to the flow direction of the fluid in the suction pipe and radiating to the lower surface of the flat portion and sloping with respect to the radial direction of the flat portion. Is provided, an annular fluid discharge port is provided on the periphery of the flat portion, the fluid is caused to flow out from the discharge pipe, and the fluid is sucked through the fluid suction port to thereby cause the surrounding fluid to be disturbed to the flat portion. A method of suspending and floating a plate-shaped body in a non-contact state by a fluid, characterized in that the plate-shaped body is stably suspended and suspended at a constant distance in close proximity.
設けた特許請求の範囲第３項記載の流体によつて板状体
を無接触状態で懸垂浮遊搬送させる方法。4. A method for suspending and floatingly transporting a plate-like body in a non-contact state with a fluid according to claim 3, wherein the groove is provided so as to be inclined and curved with respect to the radial direction of the flat portion.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60156817A JPH0632916B2 (en) | 1985-07-15 | 1985-07-15 | A method of suspending and floating a plate-shaped body in a non-contact state with a fluid |
| EP86303061A EP0201240B1 (en) | 1985-05-04 | 1986-04-23 | Apparatus for supporting and/or conveying a plate with fluid without physical contact |
| DE8686303061T DE3686781D1 (en) | 1985-05-04 | 1986-04-23 | DEVICE FOR HOLDING AND / OR PROMOTING A PLATE BY MEANS OF A FLUID WITHOUT PERSONAL TOUCH. |
| US06/855,375 US4735449A (en) | 1985-05-04 | 1986-04-24 | Method of supporting and/or conveying a plate with fluid without physical contact |
| KR1019860003372A KR900009005B1 (en) | 1985-05-04 | 1986-04-30 | Method of supporting and/or conveying a plate with fluid without physical contact |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60156817A JPH0632916B2 (en) | 1985-07-15 | 1985-07-15 | A method of suspending and floating a plate-shaped body in a non-contact state with a fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6216945A JPS6216945A (en) | 1987-01-26 |
| JPH0632916B2 true JPH0632916B2 (en) | 1994-05-02 |
Family
ID=15635983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60156817A Expired - Lifetime JPH0632916B2 (en) | 1985-05-04 | 1985-07-15 | A method of suspending and floating a plate-shaped body in a non-contact state with a fluid |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0632916B2 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH081740B2 (en) * | 1987-10-02 | 1996-01-10 | 株式会社日立製作所 | Low dust generating disk built-in hand |
| JPH08264626A (en) * | 1994-04-28 | 1996-10-11 | Hitachi Ltd | Sample-and-hold method, method for treating fluid on sample surface, and devices for those methods |
| US6231999B1 (en) * | 1996-06-21 | 2001-05-15 | Cardinal Ig Company | Heat temperable transparent coated glass article |
| JP3445138B2 (en) * | 1998-03-06 | 2003-09-08 | 株式会社西部技研 | Non-contact transfer device |
| JP4437415B2 (en) * | 2004-03-03 | 2010-03-24 | リンク・パワー株式会社 | Non-contact holding device and non-contact holding and conveying device |
| JP4495552B2 (en) * | 2004-09-09 | 2010-07-07 | 萩原エンジニアリング株式会社 | Transport device |
| JP2009028862A (en) * | 2007-07-27 | 2009-02-12 | Ihi Corp | Non-contact carrier |
| JP2009032981A (en) * | 2007-07-27 | 2009-02-12 | Ihi Corp | Non-contact carrier |
| WO2010108462A1 (en) | 2009-03-26 | 2010-09-30 | Jonas & Redmann Automationstechnik Gmbh | Bernoulli gripper apparatus having at least one bernoulli gripper |
| KR101045029B1 (en) | 2009-08-21 | 2011-07-01 | 주식회사 포틱스 | Cell Wafer Picker |
| CN105981153A (en) * | 2013-12-03 | 2016-09-28 | 哈莫技术股份有限公司 | Holding device |
| JP6872382B2 (en) * | 2017-02-10 | 2021-05-19 | 株式会社ディスコ | How to carry out processing equipment and wafers |
| DE102017007900B3 (en) * | 2017-08-19 | 2018-11-29 | Sack & Kiesselbach Maschinenfabrik Gmbh | Apparatus and method for embossing coins or medals |
| JP7148105B2 (en) * | 2017-09-20 | 2022-10-05 | 株式会社ハーモテック | suction device |
| CN112388660A (en) * | 2019-08-19 | 2021-02-23 | 浙江大学 | Adsorption device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5525037A (en) * | 1978-08-09 | 1980-02-22 | Seiko Epson Corp | Liquid form material injecting of display body |
| JPS572477A (en) * | 1980-06-04 | 1982-01-07 | Hiroyuki Azuma | Gravitational differential gear |
-
1985
- 1985-07-15 JP JP60156817A patent/JPH0632916B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6216945A (en) | 1987-01-26 |
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