SG11201809349SA - System and method for in-line monitoring of airborne contamination and process health - Google Patents

System and method for in-line monitoring of airborne contamination and process health

Info

Publication number
SG11201809349SA
SG11201809349SA SG11201809349SA SG11201809349SA SG11201809349SA SG 11201809349S A SG11201809349S A SG 11201809349SA SG 11201809349S A SG11201809349S A SG 11201809349SA SG 11201809349S A SG11201809349S A SG 11201809349SA SG 11201809349S A SG11201809349S A SG 11201809349SA
Authority
SG
Singapore
Prior art keywords
international
manifold
coupled
april
pct
Prior art date
Application number
SG11201809349SA
Inventor
Tsung- Kuan A Chou
Pei-Wen Chung
Li-Peng Wang
Original Assignee
TricornTech Taiwan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TricornTech Taiwan filed Critical TricornTech Taiwan
Publication of SG11201809349SA publication Critical patent/SG11201809349SA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0073—Control unit therefor
    • G01N33/0075—Control unit therefor for multiple spatially distributed sensors, e.g. for environmental monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0006—Calibrating gas analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0047—Organic compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0022—General constructional details of gas analysers, e.g. portable test equipment using a number of analysing channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0044—Sulphides, e.g. H2S
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0046—Investigating dispersion of solids in gas, e.g. smoke

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Dispersion Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Respiratory Apparatuses And Protective Means (AREA)

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 1#11101111011101010111110101111101110111110111101110111011111110111011# Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\" WO 2017/189747 Al 02 November 2017 (02.11.2017) W I PO I PCT (51) International Patent Classification: (72) Inventors; and G01N 33/00 (2006.01) (71) Applicants (for US only): CHOU, Tsung- Kuan A. (21) International Application Number: [US/US]; 4861 Montreal Drive, San Jose, California 95130 PCT/US2017/029674 (US). CHUNG, Pei-Wen; 3rd Floor, No.1-2, Aly.6, Lane 187, Yongji Road, Xinyi District, Taipei City, 110 (TW). (22) International Filing Date: WANG, Li-Peng [US/ ]; 3rd Floor, No. 40, Lane 83, Sec- 26 April 2017 (26.04.2017) tion 1, Chongqing North Road, Datong District, Taipei City, 103 (TW). (25) Filing Language: English (74) Agent: BECKER, Todd M. et al.; Blakely, Sokoloff, Tay- (26) Publication Language: English lor & Zafman, 1279 Oakmead Parkway, Sunnyvale, Cali- (30) Priority Data: fornia 94085 (US). 62/329,791 29 April 2016 (29.04.2016) US (81) Designated States (unless otherwise indicated, for every 15/496,931 25 April 2017 (25.04.2017) US kind of national protection available): AE, AG, AL, AM, (71) Applicant: TRICORNTECH TAIWAN; Building C, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, No.18, Siyuan Street, Zhongzheng District, Taipei City, 100 CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (TW). DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, = (54) Title: SYSTEM AND METHOD FOR IN-LINE MONITORING OF AIRBORNE CONTAMINATION AND PROCESS HEALTH = = = — z sr, Remo:e Data/Control Server 228 —232- 200 = = = — 206 . . or = 04 — .— ....— —, —___ _ = = — : TAMC 226 2..z4 22;c2 Nligh 6 _ N I i ll i lla bh... NIIW .— -- — Process Load Process Chamber 202 4 ---- Va 4 = = = = _ = 11 .4 IN ii- IN c:( (57) : The disclosure describes GO apparatus includes a manifold having a plurality 1-1 --.... the sampling tube bus comprising a plurality of individual sampling IN of the plurality of inlets. One or more analyzers C 1-1 fluid drawn into the manifold through one or more N coupled to the one or more analyzers. Other embodiments of 'IN are each fluidly embodiments 22 214 of an inlets and one of the plurality 222 ' are - N...- -- 222 N airborne molecular contamination (AMC) monitoring described and claimed. FOUP ® -=- ---' [cad Pod 204 or more of tubes, each coupled F Interface rct 208 2 - 0 outlets. to one of the one or individual sampling tubes. Lock Chamber 210 , O A sampling tube individual sampling tube being fluidly coupled to one 212 bus fluidly more outlets A control 16 2 Fig. 2 apparatus. The AMC is coupled to the manifold, of the manifold to analyze and communication system C [Continued on next page] WO 2017/189747 Al MIDEDIMOMOIDEIROIDEMOMMEIMOBEIMOVOIMIE PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))
SG11201809349SA 2016-04-29 2017-04-26 System and method for in-line monitoring of airborne contamination and process health SG11201809349SA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662329791P 2016-04-29 2016-04-29
US15/496,931 US10948470B2 (en) 2016-04-29 2017-04-25 System and method for in-line monitoring of airborne contamination and process health
PCT/US2017/029674 WO2017189747A1 (en) 2016-04-29 2017-04-26 System and method for in-line monitoring of airborne contamination and process health

Publications (1)

Publication Number Publication Date
SG11201809349SA true SG11201809349SA (en) 2018-11-29

Family

ID=60158228

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201809349SA SG11201809349SA (en) 2016-04-29 2017-04-26 System and method for in-line monitoring of airborne contamination and process health

Country Status (7)

Country Link
US (2) US10948470B2 (en)
JP (2) JP6926118B2 (en)
KR (3) KR102374684B1 (en)
CN (2) CN114047293B (en)
SG (1) SG11201809349SA (en)
TW (3) TWI789515B (en)
WO (1) WO2017189747A1 (en)

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Also Published As

Publication number Publication date
JP6926118B2 (en) 2021-08-25
TW201740092A (en) 2017-11-16
TW201932815A (en) 2019-08-16
US10948470B2 (en) 2021-03-16
US20170315107A1 (en) 2017-11-02
CN114047293A (en) 2022-02-15
KR102580880B1 (en) 2023-09-19
CN109073621B (en) 2021-11-16
KR20180131632A (en) 2018-12-10
TWI789515B (en) 2023-01-11
CN109073621A (en) 2018-12-21
KR20220035986A (en) 2022-03-22
TW202332894A (en) 2023-08-16
KR102374684B1 (en) 2022-03-14
WO2017189747A1 (en) 2017-11-02
KR20230136690A (en) 2023-09-26
JP2021183973A (en) 2021-12-02
US20210148876A1 (en) 2021-05-20
CN114047293B (en) 2024-04-02
TWI662267B (en) 2019-06-11
JP2019515287A (en) 2019-06-06

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