SG11201604730PA - Magnetic sputtering target - Google Patents
Magnetic sputtering targetInfo
- Publication number
- SG11201604730PA SG11201604730PA SG11201604730PA SG11201604730PA SG11201604730PA SG 11201604730P A SG11201604730P A SG 11201604730PA SG 11201604730P A SG11201604730P A SG 11201604730PA SG 11201604730P A SG11201604730P A SG 11201604730PA SG 11201604730P A SG11201604730P A SG 11201604730PA
- Authority
- SG
- Singapore
- Prior art keywords
- sputtering target
- magnetic sputtering
- magnetic
- target
- sputtering
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/851—Coating a support with a magnetic layer by sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014055092 | 2014-03-18 | ||
PCT/JP2015/057428 WO2015141571A1 (en) | 2014-03-18 | 2015-03-13 | Magnetic sputtering target |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201604730PA true SG11201604730PA (en) | 2016-08-30 |
Family
ID=54144540
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201604730PA SG11201604730PA (en) | 2014-03-18 | 2015-03-13 | Magnetic sputtering target |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6030271B2 (en) |
CN (2) | CN114807874A (en) |
MY (1) | MY173140A (en) |
SG (1) | SG11201604730PA (en) |
WO (1) | WO2015141571A1 (en) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000169960A (en) * | 1998-12-04 | 2000-06-20 | Japan Energy Corp | Sputtering target for forming optical disk recording film |
JP4949259B2 (en) * | 2005-10-04 | 2012-06-06 | Jx日鉱日石金属株式会社 | Sputtering target |
US20080202916A1 (en) * | 2007-02-22 | 2008-08-28 | Heraeus Incorporated | Controlling magnetic leakage flux in sputtering targets containing magnetic and non-magnetic elements |
JP2009191359A (en) * | 2008-01-15 | 2009-08-27 | Hitachi Metals Ltd | Fe-Co-Zr BASED ALLOY TARGET MATERIAL |
SG172790A1 (en) * | 2009-03-27 | 2011-08-29 | Jx Nippon Mining & Metals Corp | Ferromagnetic-material sputtering target of nonmagnetic-material particle dispersion type |
CN103081009B (en) * | 2010-08-31 | 2016-05-18 | 吉坤日矿日石金属株式会社 | Fe-Pt type ferromagnetic material sputtering target |
JP4970633B1 (en) * | 2010-12-15 | 2012-07-11 | Jx日鉱日石金属株式会社 | Ferromagnetic material sputtering target and manufacturing method thereof |
CN103270554B (en) * | 2010-12-20 | 2016-09-28 | 吉坤日矿日石金属株式会社 | It is dispersed with the Fe-Pt type sputtering target of C particle |
US9683284B2 (en) * | 2011-03-30 | 2017-06-20 | Jx Nippon Mining & Metals Corporation | Sputtering target for magnetic recording film |
SG11201404067PA (en) * | 2012-06-18 | 2014-10-30 | Jx Nippon Mining & Metals Corp | Sputtering target for magnetic recording film |
-
2015
- 2015-03-13 CN CN202210309573.7A patent/CN114807874A/en active Pending
- 2015-03-13 CN CN201580008580.1A patent/CN106795620A/en active Pending
- 2015-03-13 WO PCT/JP2015/057428 patent/WO2015141571A1/en active Application Filing
- 2015-03-13 SG SG11201604730PA patent/SG11201604730PA/en unknown
- 2015-03-13 MY MYPI2016702439A patent/MY173140A/en unknown
- 2015-03-13 JP JP2016508691A patent/JP6030271B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP6030271B2 (en) | 2016-11-24 |
MY173140A (en) | 2019-12-31 |
WO2015141571A1 (en) | 2015-09-24 |
CN106795620A (en) | 2017-05-31 |
CN114807874A (en) | 2022-07-29 |
JPWO2015141571A1 (en) | 2017-04-06 |
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