SG11201508862UA - Vibrating device - Google Patents

Vibrating device

Info

Publication number
SG11201508862UA
SG11201508862UA SG11201508862UA SG11201508862UA SG11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA SG 11201508862U A SG11201508862U A SG 11201508862UA
Authority
SG
Singapore
Prior art keywords
vibrating device
vibrating
Prior art date
Application number
SG11201508862UA
Other languages
English (en)
Inventor
Toshio Nishimura
Keiichi Umeda
Takashi Hase
Keisuke Takeyama
Takehiko Kishi
Hiroshi Yamada
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Publication of SG11201508862UA publication Critical patent/SG11201508862UA/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2452—Free-free beam resonators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H2009/155—Constructional features of resonators consisting of piezoelectric or electrostrictive material using MEMS techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
SG11201508862UA 2013-05-13 2014-05-01 Vibrating device SG11201508862UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013101301 2013-05-13
PCT/JP2014/062078 WO2014185280A1 (ja) 2013-05-13 2014-05-01 振動装置

Publications (1)

Publication Number Publication Date
SG11201508862UA true SG11201508862UA (en) 2015-11-27

Family

ID=51898260

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201508862UA SG11201508862UA (en) 2013-05-13 2014-05-01 Vibrating device

Country Status (5)

Country Link
US (1) US9905748B2 (ja)
JP (1) JP6094671B2 (ja)
CN (1) CN105210294B (ja)
SG (1) SG11201508862UA (ja)
WO (1) WO2014185280A1 (ja)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014042020A2 (ja) * 2012-09-13 2014-03-20 株式会社村田製作所 振動装置及びその製造方法
CN107005223B (zh) * 2014-10-03 2021-06-04 芬兰国家技术研究中心股份公司 温度补偿梁谐振器
CN106797207B (zh) 2014-12-17 2021-04-20 株式会社村田制作所 压电振子以及压电振动装置
JP6395008B2 (ja) * 2014-12-26 2018-09-26 株式会社村田製作所 共振子の製造方法
US20160352307A1 (en) * 2015-05-27 2016-12-01 Murata Manufacturing Co., Ltd. Mems resonator with high quality factor
EP3311486B1 (en) * 2015-06-19 2020-12-02 SiTime Corporation Microelectromechanical resonator
JP6644355B2 (ja) * 2016-05-26 2020-02-12 株式会社村田製作所 共振子及び共振装置
FI127787B (en) * 2016-07-01 2019-02-28 Teknologian Tutkimuskeskus Vtt Oy Micromechanical resonator
FI127940B (en) * 2016-07-01 2019-05-31 Teknologian Tutkimuskeskus Vtt Oy Micromechanical resonator and method for trimming a micromechanical resonator
US10291203B2 (en) * 2016-07-12 2019-05-14 Murata Manufacturing Co., Ltd. Piezoelectric MEMS resonator with a high quality factor
US11305981B2 (en) * 2018-06-29 2022-04-19 Stathera Ip Holdings Inc. Dual-output microelectromechanical resonator and method of manufacture and operation thereof
US10958235B2 (en) * 2019-08-21 2021-03-23 Murata Manufacturing Co., Ltd. Thickness mode resonator

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07226648A (ja) * 1994-02-15 1995-08-22 Murata Mfg Co Ltd 共振周波数可変型共振子
JPH08186467A (ja) * 1994-12-29 1996-07-16 Murata Mfg Co Ltd 拡がり振動型圧電振動子およびその製造方法
JP2001168675A (ja) * 1999-12-08 2001-06-22 Mitsubishi Electric Corp 圧電共振子およびこれを用いた圧電発振器並びに圧電共振子の製造方法
JP2001188675A (ja) 1999-12-28 2001-07-10 Nec Eng Ltd データ転送装置
JP3703773B2 (ja) * 2002-03-28 2005-10-05 株式会社ヒューモラボラトリー 水晶振動子の製造方法
JP2004080468A (ja) * 2002-08-20 2004-03-11 Victor Co Of Japan Ltd 音響変換器
JP2006270360A (ja) * 2005-03-23 2006-10-05 Seiko Epson Corp 弾性表面波素子
CN101346879B (zh) * 2005-12-23 2012-12-05 Nxp股份有限公司 Mems谐振器、制造这种谐振器的方法以及mems振荡器
CN100570755C (zh) * 2006-04-26 2009-12-16 中国计量学院 一种低温度交叉灵敏度的微悬臂梁谐振器
JP4917396B2 (ja) * 2006-09-25 2012-04-18 太陽誘電株式会社 フィルタおよび分波器
CH700716B1 (fr) 2006-10-09 2010-10-15 Suisse Electronique Microtech Résonateur en silicium de type diapason.
JP5392258B2 (ja) * 2008-07-11 2014-01-22 パナソニック株式会社 板波素子と、これを用いた電子機器
US20110205259A1 (en) 2008-10-28 2011-08-25 Pixtronix, Inc. System and method for selecting display modes
FI126586B (fi) 2011-02-17 2017-02-28 Teknologian Tutkimuskeskus Vtt Oy Uudet mikromekaaniset laitteet
FI123933B (fi) * 2011-05-13 2013-12-31 Teknologian Tutkimuskeskus Vtt Mikromekaaninen laite ja menetelmä sen suunnittelemiseksi
US9590587B1 (en) * 2011-07-07 2017-03-07 Analog Devices, Inc. Compensation of second order temperature dependence of mechanical resonator frequency
US8593230B2 (en) * 2011-10-14 2013-11-26 Nxp, B.V. Circuit and method for correcting temperature dependence of frequency for piezoresistive oscillators

Also Published As

Publication number Publication date
WO2014185280A1 (ja) 2014-11-20
US20160064642A1 (en) 2016-03-03
JPWO2014185280A1 (ja) 2017-02-23
CN105210294B (zh) 2017-09-29
US9905748B2 (en) 2018-02-27
JP6094671B2 (ja) 2017-03-15
CN105210294A (zh) 2015-12-30

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